CN112345525A - MASK visual inspection machine - Google Patents
MASK visual inspection machine Download PDFInfo
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- CN112345525A CN112345525A CN202011324027.8A CN202011324027A CN112345525A CN 112345525 A CN112345525 A CN 112345525A CN 202011324027 A CN202011324027 A CN 202011324027A CN 112345525 A CN112345525 A CN 112345525A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- Life Sciences & Earth Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The application discloses a MASK visual inspection machine, which is used for inspecting each production process of a MASK and butting with a plate taking and placing mechanical arm, and comprises an inspection machine main body, a rotating mechanism and a clamping platform capable of visually inspecting the front and back surfaces of the MASK at any angle, the clamping platform comprises a platform bottom frame, two transmission mechanisms symmetrically arranged at the left side and the right side of the bottom frame, and two clamping plates which are assembled together with the corresponding transmission mechanisms and can move left and right relative to the platform bottom frame, the MASK visual inspection machine realizes automatic operation in plate taking and placing, adjustment of different specifications and angle rotation, can clamp and adjust according to the size of MASK and is compatible with MASK with different specifications, the angle can automatically rotate and stop at any angle in the inspection process, the front and the back can be checked by clamping once and checked at different angles, seamless butt joint with the upper and lower plate manipulators is realized, the manual plate lifting process is omitted, and MASK workshop automation is realized.
Description
Technical Field
The application relates to the technical field of MASK equipment, in particular to a MASK visual inspection machine.
Background
The MASK production process comprises the processes of exposure, development, etching, cleaning, CD measurement, TP measurement, MURA stripe visual inspection, AOI, LCVD repair, film pasting and the like. MURA stripe visual inspection, the method in the industry at present is, lift the edition manually and put MASK on a fixed horizontal hollow brace table, then illuminate with the shot-light in the darkroom, workers visual inspection; when the other surface is inspected, workers are required to lift the MASK, the MASK is placed on the supporting table after being turned over, and then the MASK is irradiated by a spotlight in a darkroom to continue visual inspection; a MASK of a certain specification needs a corresponding hollow support platform, and different specifications need multiple hollow support platforms. The method is convenient for checking the small-size MASK, but is inconvenient for checking the large-size MASK of more than 8 generations. The weight of large-size MASK reaches dozens of kilograms, the manual twice plate lifting is relatively laborious, fingerprints are easily stained to pollute the film surface when the plate is lifted, and the MASK is easily damaged and scrapped if the plate is accidentally knocked; sometimes, MURA stripes are required to be checked from different visual angles, the fixed hollow support table cannot change the angle, workers can only bend the body to check at different angles, and the work of bending down for a long time is also relatively tired; because the position of the hollow support table of the MASK is not adjustable and the specification is not adjustable, the plate picking and placing mechanical arm in an automatic MASK workshop cannot be in butt joint.
What need urgently need one kind to get and put version, different specification adjustment, the equal automatic operation that realizes of angle rotation's operation, can carry out the MASK of clamping adjustment and compatible different specifications to the MASK size, but inspection process angle autogiration and arbitrary angle stop, can once the clamping inspection positive and negative and examine at different angles, realize seamless butt joint with last lower version manipulator, save the artifical process of lifting the version and realize the automatic MASK visual inspection machine in MASK workshop.
Disclosure of Invention
The invention aims to solve the technical problem of providing a MASK visual inspection machine which can realize automatic operation in the operations of plate taking and placing, adjustment in different specifications and angle rotation, can clamp and adjust the size of the MASK and is compatible with the MASK in different specifications, can automatically rotate at an angle and stop at any angle in the inspection process, can clamp and inspect the front and back surfaces at one time and inspect at different angles, can realize seamless butt joint with a manipulator for loading and unloading the plate, saves the process of manual plate lifting and realizes the automation of a MASK workshop.
In order to solve the technical problems, the invention provides a MASK visual inspection machine which is used for inspecting each production process of a MASK and is butted with a plate taking and placing mechanical arm, and comprises an inspection machine main body, a rotating mechanism arranged on the inspection machine main body, a clamping platform which is assembled with the rotating mechanism and can rotate freely relative to the rotating mechanism so as to ensure that the front and the back of the MASK can be visually inspected at any angle, wherein the clamping platform comprises a platform underframe, two transmission mechanisms which are symmetrically arranged at the left and the right sides of the underframe, two first driving structures which are symmetrically arranged at the left and the right sides of the platform underframe and can drive and control the transmission mechanisms, and two clamping plates which are assembled with the corresponding transmission mechanisms and can move left and right relative to the platform underframe, each first driving structure is assembled with the corresponding transmission mechanism, the two first driving mechanisms drive the clamping plates to clamp the MASK through the corresponding transmission mechanisms.
Preferably, the inspection machine body comprises a main body underframe and platform locking cylinders which are arranged on the left and right support posts of the main body underframe and can lock the rotation angle of the clamping platform when the upper and lower plates of the MASK are clamped and prevent the rotation angle of the clamping platform from changing when the upper and lower plates are connected with the manipulator.
Preferably, rotary mechanism include two set up in supporting seat on the main part chassis left and right sides pillar, two set up in with speed reducer on the supporting seat, two with correspond speed reducer assembly second drive structure together, two with correspond speed reducer assembly shaft coupling together, two with correspond the shaft coupling assembly connecting axle together, the clamping platform left and right sides both ends respectively with correspond deviating from of connecting axle the one end assembly of shaft coupling together.
Preferably, rotary mechanism still include a plurality of set up in be used for detecting on the supporting seat the clamping platform the first inductive switch of locating the position, wherein, the clamping platform is located the position and is included material loading level, material unloading level, front detection position and anti-detection position.
Preferably, the first inductive switches are respectively arranged at a positive limit position, a negative limit position and an origin position of the clamping platform relative to the rotation angle of the inspection machine body.
Preferably, the clamping plate locking cylinders for locking the clamping plate are respectively arranged at the front end and the rear end of the clamping plate along the direction perpendicular to the moving direction of the clamping plate.
Preferably, each transmission mechanism comprises two guide rails which are arranged on the front end and the rear end of the platform chassis along the moving direction of the clamping plate and assembled with the corresponding clamping plate, and a second inductive switch for detecting the origin and the limit position of the clamping plate is arranged on the platform chassis along the moving direction of the clamping plate.
Preferably, the opposite surfaces of the two clamping plates along the moving direction of the guide rail are provided with back pads for clamping the MASK.
Preferably, each be provided with the clamping inductive switch that is used for detecting whether MASK clamping is good on the clamping board respectively, first drive structure drives through drive mechanism the cushion of clamping board presss from both sides tight MASK, the position of both sides clamping board about first drive structure control, the left and right sides clamping board can the clamping from the MASK of three generations to ten generations's various specification and size.
Preferably, the rotating mechanism can rotatably drive the clamping platform to rotate 180 degrees relative to the inspection machine body, so that the MASK can be subjected to front inspection and back inspection through the MASK visual inspection machine.
The MASK visual inspection machine disclosed by the invention realizes automatic operation in the operations of plate picking and placing, adjustment in different specifications and angle rotation, can clamp and adjust aiming at the size of the MASK and is compatible with MASKs in different specifications, the angle in the inspection process can automatically rotate and stop at any angle, the front and back surfaces can be clamped and inspected at different angles at one time, seamless butt joint with the mechanical arms for loading and unloading the plate can be realized, the process of manually lifting the plate is omitted, and automation of a MASK workshop is realized.
Drawings
FIG. 1 is an overall block diagram of a MASK visual inspection machine according to the present invention;
FIG. 2 is a schematic diagram of the inspection machine body and the transmission mechanism of the MASK visual inspection machine according to the present invention;
FIG. 3 is a front view of the MASK visual inspection machine of the present invention;
FIG. 4 is a block diagram of a clamping platform of the MASK visual inspection machine of the present invention;
FIG. 5 is a diagram illustrating a configuration of a clamping platform of the MASK visual inspection machine according to an embodiment of the present invention;
FIG. 6 is a block diagram of another embodiment of the MASK visual inspection machine of the present invention in operation;
FIG. 7 is a flow chart of the MASK visual inspection machine operation of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example one
Referring to fig. 1, fig. 3 and fig. 4, fig. 1 is a general structure diagram of the MASK visual inspection machine of the present invention, fig. 1 is a front view of the MASK visual inspection machine of the present invention; FIG. 4 is a block diagram of a clamping platform of the MASK visual inspection machine of the present invention; in this embodiment, a MASK visual inspection machine comprises an inspection machine body 13, a rotating mechanism 12 arranged on the inspection machine body 13, a clamping platform 11 assembled with the rotating mechanism 12 and capable of freely rotating relative to the rotating mechanism 12 so as to ensure that the front and back sides of the MASK can be visually inspected at any angle, wherein the clamping platform 11 comprises a platform chassis 111, the clamping device comprises two transmission mechanisms 113 symmetrically arranged on the left side and the right side of the bottom frame, two first driving structures 112 symmetrically arranged on the left side and the right side of the platform bottom frame 111 and used for driving and controlling the transmission mechanisms 113, and two clamping plates 116 assembled with the corresponding transmission mechanisms 113 and capable of moving left and right relative to the platform bottom frame 111, wherein the two first driving mechanisms 112 drive the clamping plates 116 to clamp the MASK through the corresponding transmission mechanisms 113, and each first driving structure 112 is assembled with the corresponding transmission mechanism 113.
Referring to fig. 2 and fig. 3, fig. 2 is a structural diagram of the inspection machine main body and the transmission mechanism of the MASK visual inspection machine according to the present invention, and fig. 3 is a front view of the MASK visual inspection machine according to the present invention; the inspection machine main body 13 comprises a main body bottom frame 132, a platform locking cylinder 135 which is arranged on the left and right main body bottom frames and can lock the rotation angle of the clamping platform when the plates are lifted and lowered by a MASK and prevent the rotation angle change of the clamping platform when the plates are lifted and lowered by a manipulator, and the bottom of the main body bottom frame 132 is provided with an anti-static caster 133 which can enable the inspection machine to move freely and a jacking device 131 which can enable the inspection machine to fix.
The rotating mechanism 12 comprises two supporting seats 123 arranged on the supporting columns on the left side and the right side of the main body underframe, two speed reducers 125 arranged on the supporting seats, two second driving structures 126 assembled with the corresponding speed reducers 125, two couplers 124 assembled with the corresponding speed reducers 125, and two connecting shafts 126 assembled with the corresponding couplers 124, wherein the left end and the right end of the clamping platform 11 are respectively assembled with one ends, deviating from the couplers 124, of the corresponding connecting shafts 126.
The rotating mechanism 12 further comprises a plurality of first inductive switches 122 arranged on the supporting seat and used for detecting the positions of the clamping platform, wherein the position of the clamping platform 11 comprises a feeding position, a discharging position, a front detection position and a reverse detection position.
The first inductive switches 122 are respectively disposed at positive limit, negative limit and origin positions of the clamping platform 11 relative to the rotation angle of the inspection machine body.
And clamping plate locking cylinders 117 for locking the clamping plate when the MASK is clamped in place are respectively arranged at the front end and the rear end of the clamping plate 116 along the direction perpendicular to the moving direction of the clamping plate 116.
Each transmission mechanism 113 includes two guide rails disposed on the front and rear ends of the platform chassis 111 along the moving direction of the clamping plate 116 and assembled with the corresponding clamping plate 116, and a second inductive switch 114 for detecting the origin and the limit position of the clamping plate 116 is disposed on the platform chassis 111 along the moving direction of the clamping plate 116.
The two clamping plates 116 are provided with pads 117 on opposite sides in the direction of movement of the guide rail for clamping the MASK.
Clamping inductive switches 118 used for detecting whether MASK is clamped or not are arranged on the clamping plates 116 respectively, the first driving structure 112 drives the back cushion of the clamping plates 116 to clamp the MASK through a transmission mechanism, the first driving structure 112 controls the positions of the left and right clamping plates 116, and the left and right clamping plates 116 can clamp MASK of various specifications from third generation to tenth generation.
The rotating mechanism 12 can rotatably drive the clamping platform 11 to rotate 180 degrees relative to the inspection machine main body 13, so that the MASK can be subjected to front inspection and back inspection through the MASK visual inspection machine.
Example two
Referring to fig. 5, fig. 6 and fig. 7, fig. 5 is a structural diagram of a clamping platform of a MASK visual inspection machine according to an embodiment of the present invention in a working state; FIG. 6 is a block diagram of another embodiment of the MASK visual inspection machine of the present invention in operation; FIG. 7 is a flow chart of the MASK visual inspection machine operation of the present invention.
The rotating mechanism 12 rotates the MASK to a first visual inspection position through the clamping platform 11, and the front side of the MASK is manually visually inspected;
after the front inspection is finished, the rotating mechanism 12 drives the clamping platform 11 to continuously rotate, and the clamping platform can stay at any angle and continuously perform visual inspection;
the rotating mechanism 12 rotates the MASK to a second visual inspection position through the clamping platform 11, and the reverse side of the MASK is manually visually inspected;
In this embodiment, the second driving structure of the rotating mechanism of the MASK visual inspection machine of the present invention is a servo motor, the speed reducer is a worm speed reducer, the rotating mechanism drives the clamping platform to rotate freely and stop at any angle, after one-time clamping inspection, the front and back sides of the MASK can be viewed and inspected at different angles, in other embodiments, other types of structures can be selected for the second driving structure and the speed reducer.
The first driving structure drives the back cushion of the clamping plate to clamp the MASK through the transmission mechanism, the first driving structure controls the positions of the clamping plates on the left side and the right side, and the clamping plates on the left side and the right side can clamp MASKs of various specifications from the third generation to the tenth generation.
MASK visual inspection machine can be used to automatic MASK workshop, through with the butt joint of last lower edition manipulator, gets by the manipulator and puts MASK to visual inspection machine, saves the artifical process of lifting the edition, leads to the risk of MASK accidental collision when reducing the manual work and lifting the edition.
After the rotating mechanism drives the clamping platform to rotate to the positions of the upper plate and the lower plate of the manipulator, the platform locking cylinder on the main body underframe locks the angle of the clamping platform again, so that the phenomenon that the rotating angle changes due to sudden power failure when the clamping platform is connected with the manipulator is prevented, the MASK rotates unexpectedly to cause collision, and a double-insurance effect is achieved.
Platform locking cylinders are arranged on two sides of the clamping plate, the clamping plate is driven by the first driving structure to clamp the MASK tightly, and the cylinders on two sides lock the clamping plate again, so that the MASK is prevented from falling off when the motor is powered off or damaged accidentally.
Be equipped with the clamping sensor that whether the detection MASK was clamped on the clamping platform, prevent that MASK from rotating when not pressing from both sides tightly, unexpected dropping leads to MASK to damage.
The cushion material that contacts with MASK that this implementation clamping board set up is antistatic POM and polyurethane, prevents to produce static, damages MASK.
The bottom of the main body underframe of the inspection machine main body is provided with trundles and a jacking device which can freely move and be fixed in a dust-free room, and all the trundles are anti-static trundles.
The MASK visual inspection machine disclosed by the invention realizes automatic operation in the operations of plate picking and placing, adjustment in different specifications and angle rotation, can clamp and adjust aiming at the size of the MASK and is compatible with MASKs in different specifications, the angle in the inspection process can automatically rotate and stop at any angle, the front and back surfaces can be clamped and inspected at different angles at one time, seamless butt joint with the mechanical arms for loading and unloading the plate can be realized, the process of manually lifting the plate is omitted, and automation of a MASK workshop is realized.
It should be understood that the above is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent structures or equivalent flow transformations made by the present specification and drawings, or applied directly or indirectly to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A MASK visual inspection machine is used for inspecting each production process of a MASK and is butted with a plate taking and placing mechanical arm, it is characterized by comprising an inspection machine main body, a rotating mechanism arranged on the inspection machine main body, a clamping platform which is assembled with the rotating mechanism and can freely rotate relative to the rotating mechanism so as to ensure that the front and the back of the MASK can be visually detected at any angle, the clamping platform comprises a platform bottom frame, two transmission mechanisms symmetrically arranged on the left side and the right side of the bottom frame, two first driving structures symmetrically arranged on the left side and the right side of the platform bottom frame and used for driving and controlling the transmission mechanisms, two clamping plates assembled with the corresponding transmission mechanisms and capable of moving left and right relative to the platform bottom frame, each first driving structure is assembled with the corresponding transmission mechanism, and the two first driving structures drive the clamping plates to clamp the MASK through the corresponding transmission mechanisms.
2. The MASK visual inspection machine of claim 1, wherein the inspection machine body comprises a main body underframe and platform locking cylinders which are arranged on the left and right support columns of the main body underframe and can lock the rotation angle of the clamping platform when the MASK is used for loading and unloading the plates and prevent the rotation angle of the clamping platform from changing when the loading and unloading plates are connected with the manipulator.
3. The MASK visual inspection machine according to claim 2, wherein the rotating mechanism comprises two supporting seats disposed on the left and right supporting columns of the main body chassis, two speed reducers disposed on the supporting seats, two second driving structures assembled with the corresponding speed reducers, two couplers assembled with the corresponding speed reducers, and two connecting shafts assembled with the corresponding couplers, wherein the left and right ends of the clamping platform are respectively assembled with one end of the corresponding connecting shaft, which is away from the couplers.
4. The MASK visual inspection machine of claim 1, wherein the rotating mechanism further comprises a plurality of first inductive switches disposed on the supporting base for detecting the position of the clamping platform, wherein the position of the clamping platform comprises a loading position, a unloading position, a front detection position and a reverse detection position.
5. The MASK visual inspection machine of claim 4, wherein the first inductive switches are respectively arranged at a positive limit position, a negative limit position and an origin position of the clamping platform relative to the rotation angle of the inspection machine body.
6. The MASK visual inspection machine of claim 4, wherein the clamping plate locking cylinders for locking the clamping plate are respectively arranged on the clamping plate along the front end and the rear end perpendicular to the moving direction of the clamping plate.
7. The MASK visual inspection machine of claim 4, wherein each of the transmission mechanisms includes two guide rails disposed on the front and rear ends of the platform chassis along the clamp plate moving direction and assembled with the corresponding clamp plate, and a second inductive switch for detecting the origin and the limit position of the clamp plate is disposed on the platform chassis along the clamp plate moving direction.
8. The MASK visual inspection machine of claim 4, wherein the two clamping plates are provided with a cushion for clamping the MASK on the opposite surfaces along the moving direction of the guide rail.
9. The MASK visual inspection machine according to claim 8, wherein each clamping plate is provided with a clamping inductive switch for detecting whether the MASK is clamped, the first driving structure drives the cushion of the clamping plate to clamp the MASK through a transmission mechanism, the first driving structure controls the positions of the clamping plates on the left side and the right side, and the clamping plates on the left side and the right side can clamp MASKs with various specifications from three generations to ten generations.
10. The MASK visual inspection machine according to claim 4, wherein the rotating mechanism rotatably drives the clamping platform to rotate 180 degrees relative to the inspection machine body, so that the MASK can be subjected to front and back inspection by the MASK visual inspection machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011324027.8A CN112345525A (en) | 2020-11-23 | 2020-11-23 | MASK visual inspection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011324027.8A CN112345525A (en) | 2020-11-23 | 2020-11-23 | MASK visual inspection machine |
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| Publication Number | Publication Date |
|---|---|
| CN112345525A true CN112345525A (en) | 2021-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011324027.8A Pending CN112345525A (en) | 2020-11-23 | 2020-11-23 | MASK visual inspection machine |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050102596A (en) * | 2005-09-05 | 2005-10-26 | 코리아테크노(주) | The naked eye inspection apparatus for photo mask |
| CN204547269U (en) * | 2015-01-12 | 2015-08-12 | 深圳清溢光电股份有限公司 | Flanging assembly and there is the laminator of this flanging assembly |
| CN204621873U (en) * | 2015-01-12 | 2015-09-09 | 深圳清溢光电股份有限公司 | Clamp assembly and there is the laminator of this clamp assembly |
| US20150330891A1 (en) * | 2014-05-15 | 2015-11-19 | Boe Technology Group Co., Ltd. | Inspection device and inspection system for display substrate |
| CN208775766U (en) * | 2018-08-20 | 2019-04-23 | 东莞职业技术学院 | A kind of turnover mechanism of miniature detection machine |
| CN209118053U (en) * | 2018-12-26 | 2019-07-16 | 成都路维光电有限公司 | A kind of mask plate striped inspection auxiliary clamp |
-
2020
- 2020-11-23 CN CN202011324027.8A patent/CN112345525A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050102596A (en) * | 2005-09-05 | 2005-10-26 | 코리아테크노(주) | The naked eye inspection apparatus for photo mask |
| US20150330891A1 (en) * | 2014-05-15 | 2015-11-19 | Boe Technology Group Co., Ltd. | Inspection device and inspection system for display substrate |
| CN204547269U (en) * | 2015-01-12 | 2015-08-12 | 深圳清溢光电股份有限公司 | Flanging assembly and there is the laminator of this flanging assembly |
| CN204621873U (en) * | 2015-01-12 | 2015-09-09 | 深圳清溢光电股份有限公司 | Clamp assembly and there is the laminator of this clamp assembly |
| CN208775766U (en) * | 2018-08-20 | 2019-04-23 | 东莞职业技术学院 | A kind of turnover mechanism of miniature detection machine |
| CN209118053U (en) * | 2018-12-26 | 2019-07-16 | 成都路维光电有限公司 | A kind of mask plate striped inspection auxiliary clamp |
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