KR20050102596A - The naked eye inspection apparatus for photo mask - Google Patents

Abstract

The present invention relates to a photomask visual inspection apparatus.

The device has a base 100; The LM guide 112, the ball screw 113, the first drive motor 114 for rotating the ball screw 113, and the movable block is screwed to the ball screw 113 and installed on both sides facing each other. Left and right interval adjusting unit 110 having a 111; A driving unit 120 including a second driving motor 122 and a reduction gear 123; A rotating body 131 whose center is pivotally fixed to the second driving motor shaft 124 of the driving unit 120 and a third driving motor 134 installed inside the rotating body 131, and driving A pulley 135, a driven pulley 137, a belt 136, a ball screw 132, an LM guide 133, and a rotating part 130 of the movable body 138 which is connected and moved here; And a gripper 140 fixed to the movable body 138 of the pivot 130 to temporarily support four corners of the photomask.

As a result, the automated method is implemented in inspecting the surface of the photomask to securely fix and inspect the mask according to the automatic input method from the small size mask to the large size mask, thereby reducing damage to the photomask, ensuring operator safety, and producing efficiency. Was raised.

Description

The naked eye inspection apparatus for photo mask}

The present invention relates to a visual inspection apparatus for a photomask, and more particularly, to a visual inspection apparatus capable of simultaneously supporting the front and back surfaces while being supported without damaging the porter mask.

Background Art Various conventionally known visual inspection apparatuses such as display glasses have been known. Among them, the visual inspection apparatus that made the inspection object rotatable was known as Registration Utility Model No. 20-0271686.

This device consists of a slide device equipped with a shock absorber on both sides of a plurality of longitudinal ends arranged at a predetermined interval so that the LM guide crosses vertically and doublely, and constitutes a rotating device in the center between the fixed plate and the rotating plate, and a driven gear) Bearings are mounted on both sides of the driven shaft, and fixtures are mounted on both sides of the driven shaft, and the drive gear mounted on the gear motor is fastened to the driven gear, and the angular driving device, the tension spring, and the compression showbar are connected between the auxiliary plate and the rotating plate. , A visual inspection apparatus for a liquid crystal display glass formed by forming an auxiliary plate and a seating plate so as to cross each other.

However, this visual inspection device had some problems as follows.

That is, there was a problem in that a hole for support without a grip device for supporting an object to be inspected, such as a photomask or display glass,

In addition, the supporting plate of the first layer and the rotating device of the second layer, in which the inspection apparatus supported the inspected object, are superimposed, and the inclination adjusting device for positioning the inspection position on the bottom side thereof is provided through the center of the bottom surface. The structure for providing the inclined state at an appropriate angle from the above is complicated, in particular, there is a disadvantage that the other side of the inspection can not be inspected because the inspection plate is plated / fixed to the support plate.

The present invention has been made in view of the problems of the conventional visual inspection apparatus, and the object of the present invention is to provide a visual inspection apparatus that can be inspected by rotating both sides of the inspection object freely.

The present invention is a photomask visual inspection device to fix the mask size by manual in the manual method in order to inspect the surface of the photomask, and solve the problem that the risk is increased as the weight is weighted through the operation screen It is an object of the present invention to provide an inspection apparatus for safely fixing and inspecting a mask according to an automatic button from a small size mask to a large size mask through an automatic method of automatically inputting a mask by a motor when a mask size is input.

In addition, by improving the support state of the inspected object, it reduces photomask damage, responds to various sizes of the inspected object, and automatically makes it easy to inspect the particles, and reduces the particle generation. The ultimate goal is to provide an improved photomask visual inspection device.

The present invention photomask visual inspection apparatus for achieving the above object,

A base comprising a support plate, a caster movably installed on the bottom of the support plate, a support arm extending from the support plate to fix the stationary state, and a position fixing member installed on the support arm; An LM guide installed in two rows on the support plate, a ball screw installed in the center of the LM guide, a first driving motor for rotating the ball screw, and screwed to the ball screw and connected to the LM guide. Left and right spacing control unit having a moving block facing each other; A drive unit including a pair of left and right supports vertically installed on the moving blocks at a predetermined height, a second driving motor installed above the support, and a reducer; The rotating body is pivotally fixed to the second driving motor shaft of the driving unit, the third driving motor installed inside the rotating body, the driving pulley and the driven pulley connected by belt, and the driven pulley A ball screw connected to both sides of the ball screw, the LM guide is installed in parallel with the ball screw, and is moved according to the LM guide and the ball screw, and a rotating part made of a movable body for temporarily supporting a photomask; And a gripper fixed to the movable body of the pivoting part to temporarily support four corners of the photomask.

The gripper of the photomask visual inspection apparatus of the present invention for achieving the above object,

A cylinder having a frame bolted / fixed on a movable body movably installed at both end portions of the pair of pivoting bodies to support four corners of the photomask, and a right angled jaw in which the photomask corner is placed on the inside of the frame; It is preferable that it consists of a housing, the cylinder supported by the said cylinder housing, and the rotational arm provided on the cylinder shaft. The material of the pivotal arm and the right jaw is Peek.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is an overall perspective view of the photomask visual inspection apparatus of the present invention.

As shown in this figure, the present invention provides a support plate 101, a caster 102 installed to be movable on the bottom of the support plate 101, and a support arm extending from the support plate 101 to fix a stationary state. A base 100 composed of a 103, a position fixing member 104 provided on the support arm 103, a LM guide 112 and a movable block 111 provided on the base 100. The right gap adjusting unit 110 and the driving unit 120 vertically installed on the support block 121 on the moving block 111 and a cover member 105 covering the right side are installed between the driving unit 120. An inspection object such as a mask is fixed through a gripper and is fixed to the driving unit 120 to rotate forward and backward as well as to maintain a predetermined inclination angle, and both ends of the rotation unit 130. The gripper 140 is installed on each.

2 is a perspective view of the left and right interval adjusting portion of the photomask visual inspection apparatus of the present invention, and FIGS. 3A and 3B are plan views schematically and cross-sectional views of the left and right interval adjusting portions of the photomask visual inspection apparatus of the present invention.

The left and right spacing adjusting unit 110 according to the drawings has an LM guide 112 installed side by side in two rows on the base plate 101, a ball screw 113 installed in the center of the LM guide 112, The first drive motor 114 for rotating the ball screw 113, and the moving block 111, which is screwed to the ball screw 113 and connected to the LM guide 112 and installed from both sides facing each other Become equipped.

4 is an enlarged view illustrating main parts of the driving unit of the photomask visual inspection apparatus of the present invention.

The drive unit 120 illustrated in this drawing includes a pair of left and right support bars 121 vertically installed on the moving blocks 111 at a predetermined height, and a second drive motor 122 installed above the support blocks 121. And the reducer 123.

5 is a perspective view of a rotating part of the photomask visual inspection apparatus of the present invention, and FIG. 6A is a front view of an extracting part of the rotating part of the photomask visual inspection apparatus of the present invention, and FIG. 6B is a naked eye of the photomask of the present invention. The plane of the rotating part of the inspection device is outlined.

The rotating part 130 of the present invention according to this drawing is a rotating body 131, the center of which is pivotally fixed to the second driving motor shaft 124 of the driving part 120, the inside of the rotating body 131 The third driving motor 134 is installed, the driving pulley 135 and the driven pulley 137 to be connected by the belt 136, and the ball screw 132 to both sides of the driven pulley 137, The ball screw 132 is installed in parallel with the LM guide 133, and is moved in accordance with the LM guide 133 and the screw bar 132, the movable body 138 for temporarily supporting the photomask (A) Is made of.

Fig. 7 is a schematic perspective view showing a state of supporting an inspected object of the visual inspection apparatus of the photomask of the present invention, and Fig. 8 is an excerpt perspective view of a gripper only of the visual inspection apparatus of the photomask of the present invention, and Figs. 9A and 9B. Are front views each showing the action of the visual inspection device gripper of the photomask of the present invention.

The gripper 140 fixed to the movable body 138 of the pivoting unit 130 temporarily supports four corners of the photomask, and moves to both end portions of the pair of rotating bodies to support the four corners of the photomask A. A cylinder housing 142 having a frame 141 which is bolted / fixed on a movable body 138, a right angled jaw portion 146 on which the photomask corner is placed on the frame 141, and the cylinder It consists of the cylinder 143 supported by the housing 146, and the rotation arm 145 provided on the cylinder shaft 144.

Referring to the operation of the present invention made as described above through the drawings as follows.

First, in order to adjust the left and right intervals of the photomask A, the distance between the two moving blocks 111 facing on the support plate 101 is adjusted.

That is, as shown in FIG. 3A of the accompanying drawings, when the ball screw 113 is rotated forward and backward as the first driving motor 114, the moving block 111 faces and moves on the LM guide 112. The left and right intervals of the photomask A are determined while narrowing or widening the intervals.

As described above, when the left and right spacing of the photomask is determined, the top and bottom spacing of the photomask should be determined.

This is done by adjusting the gap between the grippers 140 of both side rotating parts 130.

That is, when the third driving motor 134 of the rotating body 131 is pivotally fixed to the second driving motor shaft 124 of the driving unit 120, the driving pulley 135 is a belt ( The driven pulley 137 is rotated through the 136, and the driven pulley 137 rotates the screw bars 132 on both sides again, so that the movable body 138 moved in accordance with the LM guide 133 and the ball screw 132 is moved. You can widen or narrow them to face each other. Of course, it is assumed that the gripper 140 is bolted / fixed on the movable body 138.

When the lengths of the upper, lower, left, and right sides of the photomask (A) to be inspected are determined as described above, the photomask (A) is placed on the gripper 140 of the rotating body 131 and the ends of the both rotating bodies 131. The gripper 140 is bolted / fixed onto the movable body 138 that is movably installed at the side.

That is, when the four corners of the photomask A are placed on the inner right jaw portion 146 of the frame 141 of the gripper 140 and the cylinder 143 installed in the cylinder housing 142 is driven, FIGS. 9A and FIG. As shown in 9b, the pivot arm 145 on the cylinder shaft 144 rotates to lock the four corners of the photomask A. FIG.

Subsequently, when the photomask A is supported, the inspection angle should be set by rotating the photomask A, which is placed and locked between both rotating parts 130, forward and backward.

At this time, it becomes possible by driving the second driving motor 122 of the drive unit 120, the driving direction or the driving angle is possible by the control means of the drive motor 122, specifically the photomask at the angle desired by the inspector In order to position (A), the detailed angle and rotation direction can be sufficiently adjusted by known control circuits and programs, and thus a detailed description of the control method will be omitted.

As such, when the front inclination angle of the photomask is determined, the inspector visually checks the particle or abnormality in front of the photomask. In the same way, the photomask is placed in the completely opposite direction so that the state of the backside can also be inspected.

After the inspection is completed, the cylinder 143 of the gripper 140 may be driven to release the four corner locking state of the photomask and then separated.

The photomask visual inspection apparatus of the present invention is not limited to the photomask, but may be applied to all the visual inspection objects for the front and back surfaces such as display glasses.

On the other hand, the movement and installation of the inspection apparatus of the present invention is moved as a caster 102 that is movable on the bottom of the support plate 101, and in order to fix the stationary state after moving the support arm (foldable / extendable from the support plate 101 ( The position fixing member 104 of the 103 is firmly supported after the movement.

As described above, the photomask visual inspection apparatus of the present invention conventionally fixes the mask size by manual method in order to inspect the surface of the photomask, and solves the problem that the risk is increased as the weight is increased. By entering the mask size through the screen, the motor automatically catches the mask and securely fixes and inspects the mask according to the automatic button from the small size mask to the large size mask, thereby reducing damage to the photomask and ensuring operator safety. In addition, by reducing the generation of particles in the work process has the effect of increasing the efficiency in photomask production.

1 is an overall perspective view of a photomask visual inspection apparatus of the present invention;

Figure 2 is a perspective view of the left and right interval adjusting portion of the photomask visual inspection apparatus of the present invention,

Figure 3a, 3b is a schematic top view, cross-sectional view of the left, right interval adjusting portion of the photomask visual inspection apparatus of the present invention,

4 is an enlarged view illustrating main parts of the driving unit of the photomask visual inspection apparatus according to the present invention;

5 is a perspective view of a rotating part of the photomask visual inspection apparatus of the present invention;

Figure 6a is a front view of a state extracting the rotating part of the photomask visual inspection apparatus of the present invention,

Figure 6b is a schematic plan view of the rotating part of the visual inspection device of the photomask of the present invention,

7 is a schematic perspective view showing a state of supporting an inspected object of the visual inspection apparatus of the photomask of the present invention;

Figure 8 is an excerpt perspective view of the gripper only of the visual inspection apparatus of the photomask of the present invention,

9A and 9B are front views showing the action of the visual inspection device gripper of the photomask of the present invention, respectively.

※ Explanation of codes for main parts of drawing

100: expectation, 101: support plate, 102: caster, 103: support arm, 104: position fixing member,

110: left and right interval control unit, 111: moving block, 112: LM guide, 113: ball screw,

114: first drive motor, 120: drive unit, 121: support, 122: second drive motor,

123: reducer, 124: second drive motor shaft, 130: rotating part, 131: rotating body, 132: ball screw,

133: LM guide, 134: third drive motor, 135: drive pulley, 136: belt, 137: driven pulley,

138: moving body, 140: gripper, 141: frame, 142: cylinder housing, 143: cylinder,

144: cylinder shaft, 145: rotating arm, 146: right jaw,

Claims (4)

In the photomask visual inspection apparatus, A drive unit 120 including a pair of left and right supporters 121 vertically installed at a predetermined height, a second driving motor 122 installed above the supporter 121, and a reducer 123; A rotating body 131 whose center is pivotally fixed to the second driving motor shaft 124 of the driving unit 120, a third driving motor 134 installed inside the rotating body 131, and driving The driving pulley 135 and the driven pulley 137 are connected by a belt 136, and the ball screw 132 is connected to both sides of the driven pulley 137, but the LM guide is parallel to the ball screw 132. A rotating part 130 provided with a moving body 138 installed at the LM guide 133 and the ball screw 132 to temporarily support the photomask A; And The photomask visual inspection apparatus including a gripper 140 fixed to the movable body 138 of the pivoting unit 130 to temporarily support four corners of the photomask. The method of claim 1, An LM guide 102 installed in two rows, a ball screw 113 installed in the center of the LM guide 112, a first driving motor 114 for rotating the ball screw 113, and the ball. Photomask visual inspection device, characterized in that it further comprises a left and right interval adjusting unit 110 is fitted with a screw 113 and at the same time connected to the LM guide 112 and provided with moving blocks 111 facing each other. . The method according to claim 1 or 2, A support plate 101, a caster 102 movably installed on the bottom of the support plate 101, a support arm 103 extending from the support plate 101 to fix a stationary state, and the support arm 103 Photomask visual inspection apparatus, characterized in that it further comprises a base (100) made of a position fixing member 104 installed on the). The method of claim 3, wherein the gripper 140, A frame 141 bolted / fixed onto a movable body 138 movably mounted on both end portions of the pair of pivoting bodies to support four corners of the photomask A, and the photo inwardly on the frame 141. A cylinder housing 142 having a rectangular jaw portion 146 on which a mask corner is placed, a cylinder 143 supported by the cylinder housing 146, and a pivoting arm 145 provided on the cylinder shaft 144. Photomask visual inspection device, characterized in that made.