KR100971912B1 - The prosecuting attorney system of a large-sized glass - Google Patents

Abstract

The present invention relates to an inspection apparatus for large glass substrates to visually re-examine the large glass substrates selected as defective in the screening process of large glass substrates used in the field of flat panel display.

That is, the speed reducing motor 10m is provided at the center of the upper end of the frame 11, and the curved rail 13 is formed in a circular shape around the speed reduction motor 10m on the frame 11, and the direction switching plate 15 is formed thereon. Direction shift means (10) constituting the LM guide 21 and the ball screw 22 mounted in parallel on the direction change plate 15, the distance moving means 20 constituting the drive motor (20m), at the top of the moving plate 25, fixed to the angle control panel (35) forming a plurality of the reference block 31 and the mounting plate 34 to hoejeonbong 33 outer diameter, and angle adjustment is configured to adjust the angle motor (30m) The means 30 and the shank east means 40, which are mounted in parallel with the LM guide 41 and the ball screw 43 on the upper surface of the seating plate 34, constitute a drive motor 40m, and the shank east plate 45. Rotation means 50 seated in the center of the rotating motor 50m, and the suction means 60 configured to maintain a predetermined distance a plurality of vacuum pad device 70 on the upper surface of the rotating plate 51 It is a structure characterized in that each configured.

Visual inspection, sorting device, glass substrate, direction changing means, moving means, rotating means, vacuum

Description

Inspection equipment for large glass substrates {The prosecuting attorney system of a large-sized glass}

The present invention relates to an inspection apparatus for a large glass substrate, and more particularly, whether or not the large glass substrate selected as defective in the screening process of the large glass substrate used in the manufacturing field of a flat display is visually inspected. It relates to a large glass substrate inspection device to be sorted according to.

Typically, glass substrates used as flat panel displays such as thin film transistor-liquid crystal displays (TFT-LCDs), plasma display panels (PDPs), and electro luminescent (EL), are used to mold glass materials dissolved in glass melting furnaces. After the manufacturing process through the process and cutting process, and then the transportation process to form a flat panel display in the assembly process.

The glass substrate produced as described above may cause defects such as thickness, tailingness, flatness, transmittance, bubbles, foreign objects, scratches, irregularities, contamination, linearity, and size error due to various factors in the manufacturing process and transportation process. As a result, visual inspection and sampling inspection are used to find the defective state and judge whether it is used accordingly, so that only usable glass substrates are used in the assembling process of the flat panel display. After going through the molding process to dissolve again by glass melting.

However, as described above, the contamination caused by foreign matters during the production or transportation process is eliminated by removing only the contaminants, and the defects caused by bubbles and scratches on one side are excluded from the defective parts or divided into parts that are not defective. Even though the glass substrate can be recycled to the substrate of the glass, the glass substrate that is selected as defective is being disposed of.

In this situation, as the size of glass substrate grows from the 5th generation (650 x 550) to the 7th generation (1250 x 1100), the size and weight of the organic substrate are beyond the range that can be handled freely by workers. Due to frequent contamination by external pollutants (such as dust or finger prints), the glass substrate itself has to be disposed of due to a defect in the handling process, which increases production costs and rapidly increases the time required for regeneration. As a result, not only the production cost of the flat panel display due to the defect is increased, but also a large amount of waste of the glass substrate requires a separate disposal process and a device.

Accordingly, conventionally, inspection equipment for increasing the size of glass substrates is installed in the flat display work line to precisely and precisely select the defects of the glass substrates to prevent defects of the finished flat panel display itself. Since the expensive articulated robot must be used separately for the cause of the defect, the installation and maintenance cost required to install and use the expensive articulated robot is higher than the cost of sorting and recycling the glass substrate. Even though the glass substrate screened by the defective line is discarded because the screening process is not easy, the production line or related company cannot provide a proper solution or alternative.

Therefore, in the present invention, the glass substrate selected as defective in the first screening process is completely developed from the flat-panel display production line to separate all the problems as described above. Through the device, the large-size glass substrate that can be regenerated according to the cause of the defect is separately selected, and it can be used again as a good product in the flat-panel display production line only through the cleaning process to easily remove the cause of the defect through separate operations according to the cause of the defect. Or to remove and remove defective parts or to divide the good parts to be recycled to the glass substrate of a small size.

A feature of the present invention for achieving the above object is a large glass substrate with a large size and weight to move the adsorption means for adsorbing one side with a plurality of vacuum pads to the front and rear and left and right angles to rotate back and forth It consists of a multi-stage adjusting means and a rotating means that can rotate left and right, so that the adsorption means adsorbs and transports a large glass substrate that maintains a certain direction and angle. A large glass substrate sorted by the primary failure is placed on the upper part of the inspection device that absorbs one side with the vacuum pad of the adsorption means, so that the inspector can inspect it closely with the naked eye for recycling and disposal according to the cause of the defect. Large, separated and segregated on separate seating boards for safe seating By constructing a test device of the re-substrate in the inspection system comprising a handling means for large glass substrate.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

The deceleration motor 10m is fixed to the fixed piece 12 provided at the center of the upper end of the frame 11 which maintains a predetermined area composed of a plurality of seating portions 11b and a plurality of connecting rods 11a, and a curved rail 13 A plurality of rail blocks formed in a circular shape around the reduction motor (10m) in the upper part of the frame (11) and fastened to the lower end of the direction switching plate (15) to be connected to the drive shaft (14) of the reduction motor (10m). Turning means (10) configured to be seated and connected to the curved rail (13);

A plurality of LM guides 21 for maintaining a predetermined distance on the upper surface of the direction switching plate 15 is fixed in the longitudinal direction, respectively, and an auxiliary guide 26 for maintaining a predetermined height at the bottom, respectively, the LM guide 21 Both ends are mounted on the turning plate 15 above the fixing plate 23 so as to keep the ball screw 22 in parallel, but the driving motor 20m at one end of the ball screw 22 is connected to the connector 28. The screw nut 27 provided at the outer diameter of the ball screw 22 at the lower end of the movable plate 25 to connect and fix the plurality of guide blocks 24 provided at the lower end thereof to the LM guide 21. A distance moving means 20 constituting;

On the upper end of one side in the longitudinal direction of the movable plate 25, a plurality of reference blocks 31 having a bearing 32 at the center thereof are fixed to be symmetrical in the width direction, but the bearings 32 inside the reference block 31. It is equipped with a rotary rod 33 is mounted on both ends, so that the other lower end side of the angle adjustment plate 35 having a seating plate 34 on one side of the upper end is fixed to the outer diameter of the rotary rod 33, An angle adjusting means 30 configured to connect the driving part 37 of the angle adjusting motor 30m fixed to the outside of the reference block 31 to one side of the rotating rod 33;

A plurality of LM guides 41 for maintaining a predetermined distance on the top surface of the seating plate 34 is fixed in the longitudinal direction, respectively, and an auxiliary guide 42 for maintaining a predetermined height at the bottom is formed, respectively, and the LM guides 41 are formed. Both ends are mounted on the seating plate 34 with fasteners 44 so as to keep the ball screws 43 in between, but the drive motor 40m is connected to one end of the ball screw 43 with the connector 48. It is configured to fix the screw nut 47 provided on the outer diameter of the ball screw 43 on the lower end of the Shanghai copper plate 45 to secure the plurality of guide blocks 46 connected to the LM guide 41 at the bottom Shanghai East means 40 and;

Rotating means that forms a fixing groove 53 in the center of the Shanghai copper plate 45 to seat and fix the rotating motor (50m), and comprises a rotating plate 51 protruding a plurality of fixing pins 52 on the upper end of the rotating motor (50m). 50;

On the upper surface of the rotating plate 51, a plurality of fixing plates 62 fastening a plurality of vacuum pad device 70 to one side by maintaining a certain distance on the upper surface of the reference body 61 to maintain a certain length to fix the center. ) Is configured to each of the adsorption means (60) is fixed by binding so as to cross the reference body 61 while maintaining a certain distance.

At this time, the vacuum pad device 70 formed in the fixed plate 62 is a dual cylinder 71 in which the rod 72 is exposed to one side of one side of the fixed plate 62 and the vacuum shaft 73 reciprocates inward. Each of the guide block 74 is mounted, but the lower end of the rod 72 and the vacuum shaft 73 is connected to the fixing block 75, and the pad 76 is provided with a pad 76 on the upper surface of the vacuum shaft 73. Is characterized in that the dual cylinder 71 to reciprocate relative to the guide block 74.

As described above, the inspection apparatus of the large-size glass substrate of the present invention constitutes an inspection apparatus for transporting the large-size and heavy-weight large glass substrates by vacuum suction in any direction and angle. The large glass substrate sorted by the primary defects erected at an angle is placed on the top of the inspection device that adsorbs one side with the vacuum pad of the adsorption means, allowing the inspector to inspect the details in detail with the naked eye. It is possible to reduce the production cost of flat panel display by recycling the large and expensive glass substrates as much as possible by selecting them on separate seating boards and safely seating them separately. Visual screening and screening work in the sorting device of the present invention possible At the same time, it is easy to proceed at the same time, so that high-efficiency work at low cost is very useful.

As shown in FIG. 2, a reduction motor (10m) is provided on a fixing piece (12) provided at the center of the upper end of the frame (11) that maintains a predetermined area composed of a plurality of seating portions (11b) and a plurality of connecting tables (11a). The auxiliary rails 17 and the curved rails 13 are fixed to the frame 11 in a circular shape sequentially on the basis of the reduction motor 10m, and fixed to the drive shaft 14 of the reduction motor 10m. As the plurality of rail blocks 16 fastened and fixed to the lower end of the direction switching plate 15 constitute the direction switching means 10 configured to be seated and connected to the curved rail 13, the reduction motor 10m is operated according to the operation direction. Since the turning plate 15 is rotated while being guided by the curved rails 13, all means configured on the turning plate 15 are rotated left and right when viewed based on a plane, in particular, angle adjustment. For easily setting the direction of the angle adjusting plate 35 of the means 30 The.

In addition, as shown in Figure 4 and 5 fixed a plurality of LM guides 21 to maintain a predetermined distance to the upper surface of the direction switching plate 15 of the direction switching means 10 in the longitudinal direction, but the predetermined height at the bottom Each of the auxiliary guides 26 to be maintained is mounted, and both ends of the LM guides 21 are mounted on the direction changing plate 15 with fasteners 23 so as to keep the ball screws 22 in parallel. 22 is connected to the drive motor (20m) at one end with a connector 28, the lower end of the movable plate 25 for connecting and fixing a plurality of guide blocks 24 provided at the bottom connected to the LM guide 21 By constructing the distance moving means 20 which fixes and sets the screw nut 27 provided in the outer diameter of the ball screw 22, when driving the drive motor 20m and rotating the ball screw 22, the ball screw 22 is carried out. As the screw nut 27 provided at the outer diameter of the ball screw 2 is fixed to the lower end of the moving plate 25, The moving plate 25 is moved by the rotation distance of 2).

At this time, due to the LM guide 21 configured between the turning plate 15 and the moving plate 25, the moving plate 25 performs the rotational movement of the ball screw 22 based on the turning plate 15. By changing the linear movement of the guide 21 is to move and stable while precisely moving and fixing.

In addition, as shown in FIG. 6, a plurality of reference blocks 31 having a bearing 32 at the center of the moving plate 25 are fixed to be symmetrical in the width direction at the upper end of the longitudinal direction of the moving plate 25, but the reference block 31 is fixed. 2) the lower end side of the angle adjuster plate 35 having a seating plate 34 formed on one side of the upper end thereof with a rotating rod 33 having both ends mounted on the bearing 32. The angle adjusting means 30 to be connected to one side of the rotating rod 33 to be fixed to the drive shaft 37 of the angle adjusting motor 30m fixed to the seating hole 36 on the outside of one reference block 31. By configuring, as shown in Figure 7 by driving the angle adjustment motor (30m) to rotate the rotary bar 33 relative to the reference block 31, the angle adjustment plate 35 fixed to the outer diameter of the rotary rod 33 is The seating plate 34 moves by being inclined from one side by an angle at which the rotating rod 33 rotates. To achieve the inclination angle on the basis of (25).

At this time, the mounting of the shoba (S) on both sides of the angle adjusting plate 35 and the reference pins 37 on both sides of the upper end of the moving plate 25 so that the angle adjusting plate 35 is rotated, and the seating plate 34 is movable plate. The mounting plate 34 is mounted on the movable plate 25 by mounting the Shobar S in contact with the reference pin 37 and the Shobar S protruding from one upper end of the movable plate 25 at the time when the parallel plate 25 is parallel. The side of the angle control plate 35 is in contact with the show bar (S) at a point perpendicular to the), so that the show bar (S) is safe when the seating plate 34 is parallel or perpendicular to the moving plate 25. And to precisely stop the angle adjustment plate 35 to prevent the overload occurs in the angle adjustment motor (30m) to increase the life of the angle adjustment motor (30m) as well as to minimize the capacity It would be desirable.

In addition, as shown in Figure 8, the auxiliary guide 42 for fixing a plurality of LM guides 41 to maintain a predetermined distance in the longitudinal direction on the top surface of the seating plate 34 to maintain a predetermined height at the bottom, respectively And the two end portions are mounted on the seating plate 34 with fasteners 44 so as to keep the ball screws 43 in parallel between the LM guides 41, and the driving motor 40m at one end of the ball screws 43. ) Is connected to the connector 48, and is provided on the outer diameter of the ball screw 43 at the bottom of the Shanghai copper plate 45 to secure the plurality of guide blocks 46 connected to the LM guide 41 at the bottom By fixing the screw nut 47 to constitute the shanghai hydraulic stage 40, the same configuration as the above-described distance moving means 20, so as to drive the drive motor 40m as shown in FIG. When the 43 is rotated, the screw nut 47 provided at the outer diameter of the ball screw 43 is provided. ) Is fixed to the bottom of the Shanghai copper plate 45 to move the Shanghai copper plate 45 by the rotational distance of the ball screw 43, which is an LM configured between the seating plate 34 and Shanghai copper plate 45 Due to the guide 41, the Shanghai copper plate 45 changes the rotational movement of the ball screw 22 with respect to the seating plate 34 to the linear movement of the LM guide 41 so as to move stably and precisely operate and fix it. It is.

In addition, as shown in FIG. 8, a fixing groove 53 is formed in the center of the Shanghai copper plate 45 to seat and fix the rotating motor 50m, and protrude a plurality of fixing pins 52 at the upper end of the rotating motor 50m. as by having a having the spindle (51) constituting the rotation means 50 on the basis of Shanghai copper plate 45, rotating plate 51 by allowing because of the rotation motor (50m) can freely rotate in both the forward and reverse, at any time without the constituent Adsorption means 60 constituting the top of the rotary plate 51 is to be able to easily change the direction.

10 and 11, a plurality of vacuum pad devices 70 are disposed on the upper surface of the rotating plate 51 on the upper surface of the reference body 61 which maintains a predetermined length to fix the center portion. Hold a plurality of fixing plates 62 fastened to one side to cross each other while maintaining a certain distance to the reference body 61, and provided with a fixing piece 62 at one end of the fixing plate 62, each fixing plate ( According to the configuration of the adsorption means 60 connected and fixed 63, a plurality of vacuum pad devices 70 are arranged regularly so that the pad 76 can adsorb the wide glass substrate 2 evenly and thus the glass more stably. The substrate 2 can be fixed by suction.

At this time, the vacuum pad device 70 formed in the fixing plate 62 is a dual cylinder 71 in which the rod 72 is exposed to one side of one side of the fixing plate 62 and the vacuum shaft therein. Mounting the guide block 74 for the reciprocating motion (73), respectively, but connecting the lower end of the rod 72 and the vacuum shaft (73) with a fixed block (75), the pad 76 on the upper surface of the vacuum shaft (73) As the pad 76 has a dual cylinder 71 to reciprocate relative to the guide block 74, the pad 76 is moved forward and backward in accordance with the operation of the dual cylinder 71, Each of the means described above operates to allow the plurality of pads 76 to adhere or separate the glass substrate 2 at the same time, while allowing the operation of each vacuum pad device 70 to be actuated individually, thereby providing one or two pads ( Even if 76 is not able to perform vacuum adsorption, the remaining free vacuum pad device 70 (2) it can be seen that safe and configured to allow exactly fixed adsorption.

As described above, as the means constituted by each other act in combination with each other, the inspection apparatus for the large-scale glass substrate of the present invention allows the organic substrate 2 to be easily selected.

That is, as shown in FIG. 14, a plurality of glass substrates 2 selected as primary defects are seated on the reference seating board 3, and are provided on the rear side of the sorting apparatus 1 to reproduce the inspection results on one side. 2) It is preferable to use a reclining seating stand (4) to be seated thereon and to provide a symmetrical to the regeneration seating stand (4) to be disposed of the waste restraint stand (5) for mounting the glass substrate (2) that can not be reproduced as a result of the inspection something to do.

Looking at the embodiment and the relationship between the operation of each means constituting the inspection apparatus of the large-size glass substrate of the present invention configured as described above through the embodiment as follows.

First, as shown in FIG. 15, first, the angle adjusting means 30 is provided on the rear side of the sorting device 1 as a reference seating plate 3 having a plurality of glass substrates 2 sorted as defective in the first inspection. The pad 76 of the adsorption means 60 is inclined by the inclined angle of the glass substrate 2, and then the distance moving means 20 is operated so that the pad 76 is in close contact with the glass substrate 2. Then, the vacuum adsorption device 70 is operated to become a vacuum, so that the plurality of pads 76 adsorb the glass substrate 2, and then the distance moving means 20 and the angle adjusting means 30 are operated again. After (2) is separated from the reference seating board (3), the glass substrate (2) to maintain the horizontal, and then, if necessary, by operating the rotating means 50 to allow the glass substrate (2) to rotate to a certain position The operator can visually inspect the surface of the glass substrate 2 under the same conditions. To finer and easier to check the glass substrate 2.

Operate the direction switching means 10 according to the reuse by visual inspection carried out as described above to rotate in the direction of the regeneration seat (4) or waste seating table (5) and then operate the angle adjusting means (30) glass substrate (2) is inclined by the inclination of the regeneration seat (4) or the waste restraint (5), and the distance moving means 20 is operated so that the suction means as much as the position of the regeneration seat (4) or the waste rest table (5). Move the 60 to position the glass substrate 2 on the regeneration seat 4 or the waste rest 5, and then release the vacuum of the vacuum adsorption device 70 to release the glass substrate 2 from the pad 76. The glass substrate 2 is seated on the regeneration seat 4 or the waste seating table 5 so as to be separated, and the sorting device 1 returns to its original position by operating the distance moving means 20 and the angle adjusting means 30. It is to repeat the sorting operation to make it possible.

At this time, as described above, when a large number of visual inspections and screening operations are performed, the pads 76 may be formed of glass substrates according to varying quantities of the glass substrates 2 seated on the respective seats 3, 4, and 5. Since the close contact with 2) is slightly different, the distance play is preferably such that the position of the pad 76 adhered to the glass substrate 2 is operated by operating the above-described shank means 40.

As described above, the inspection apparatus of the large-size glass substrate of the present invention configured and operated is performed in each device continuously running in each means. In and out of the air for the vacuum to be automatically and continuously through the electrical / electronic control system to the electric valve, which is equipped with a separate control device by applying a control method that can be commonly used in automation systems, etc. The detailed description will be omitted. (Not shown)

1 is a perspective view of the overall configuration showing a preferred embodiment of the present invention.

Figure 2 (a) (b) is a block diagram showing a preferred direction switching means of the present invention.

Figure 3 is a perspective view of the main portion showing a preferred embodiment of the present invention.

Figure 4 (a) (b) is a block diagram showing a preferred distance moving means of the present invention.

Figure 5 (a) (b) is an operating state configuration of the distance transport means showing the cross-ga line cross-sectional view of FIG.

Figure 6 (a) (b) is a block diagram showing a preferred angle adjusting means of the present invention.

Figure 7 (a) (b) is a configuration diagram showing the operating state of the preferred angle adjustment means of the present invention.

Figure 8 (a) (b) is a block diagram showing a preferred shandong movement means and rotation means of the present invention.

Figure 9 (a) (b) is an operating state configuration diagram of the Shanghai East means showing the cross-section of the multi-line of FIG.

Figure 10 is a perspective view showing the configuration of the preferred adsorption means of the present invention.

11 is a partial cross-sectional view showing the configuration of a preferred adsorption means of the present invention.

12 is a perspective view showing a configuration of a preferred vacuum pad device of the present invention.

Figure 13 (a) (b) is a cross-sectional view showing the operating state of the preferred vacuum pad device of the present invention.

Figure 14 is a perspective view of the use state showing an embodiment of the present invention.

Figure 15 (a) (b) (c) is a state diagram showing a preferred embodiment of the present invention.

Explanation of the main symbols used in the main part of the drawing

1: sorting device 2: glass substrate

3: reference seating 4: recycled seating

5: disposal seat 10: direction change means

10m: Reduction Motor 11: Frame

12: fixed piece 13: curved rail

14: drive shaft 15: direction switching plate

16: rail block 20: distance moving means

20m, 40m: Drive motors 21, 41: LM guide

22, 43: Ball screw 23, 44: Fixture

24, 46: guide block 25: moving plate

26, 42: auxiliary guide 27, 47: screw nut

28, 48: connector 30: angle adjustment means

30m: Angle regulating motor 31: Reference block

32: bearing 33: rotating rod

34: seating plate 35: angle adjustment plate

36: seating hole 37: drive unit

40: Shanghai East Sudan 45: Shanghai East Plate

50: rotation means 50m: rotation motor

51: rotating plate 52: fixed pin

53: fixing groove 60: adsorption means

61: reference body 62: fixed plate

70: vacuum pad device 71: dual cylinder

72: rod 73: vacuum shaft

74: guide block 75: fixed block

76: pad

Claims (2)

The reduction motor (10m) is fixed to the fixing piece (12) provided at the center of the upper end of the frame (11) that maintains a constant area, and the curved rail (13) is rounded around the reduction motor (10m) on the frame (11). the formation and slow down the motor (10m), number of the rail block 16, the switching direction is configured to be mounted connected to a curved rail 13 is fixed secured to the lower end of the drive shaft direction changing plate 15 for fixed connection to the layer 14 of Means (10); A plurality of LM guides 21 for maintaining a predetermined distance on the upper surface of the direction switching plate 15 is fixed in the longitudinal direction, respectively, and an auxiliary guide 26 for maintaining a predetermined height at the bottom, respectively, the LM guide 21 Both ends are mounted on the turning plate 15 above the fixing plate 23 so as to keep the ball screw 22 in parallel, but the driving motor 20m at one end of the ball screw 22 is connected to the connector 28. The screw nut 27 provided at the outer diameter of the ball screw 22 at the lower end of the movable plate 25 to connect and fix the plurality of guide blocks 24 provided at the lower end thereof to the LM guide 21. A distance moving means 20 constituting; On the upper end of one side in the longitudinal direction of the movable plate 25, a plurality of reference blocks 31 having a bearing 32 at the center thereof are fixed to be symmetrical in the width direction, but inside the reference block 31 to the bearing 32. The rotating rod 33 having both ends mounted thereon, so that the other lower end side of the angle adjusting plate 35 having the seating plate 34 formed on one side of the upper end is fixed to the outer diameter of the rotating rod 33, one reference An angle adjusting means 30 configured to connect the driving part 37 of the angle adjustment motor 30m fixed to the outside of the block 31 to one side of the rotating rod 33; A plurality of LM guides 41 for maintaining a predetermined distance on the top surface of the seating plate 34 is fixed in the longitudinal direction, respectively, and an auxiliary guide 42 for maintaining a predetermined height at the bottom is formed, respectively, and the LM guides 41 are formed. Both ends are mounted on the seating plate 34 with fasteners 44 so as to keep the ball screws 43 in between, but the drive motor 40m is connected to one end of the ball screw 43 with the connector 48. It is configured to fix the screw nut 47 provided on the outer diameter of the ball screw 43 on the lower end of the Shanghai copper plate 45 to secure the plurality of guide blocks 46 connected to the LM guide 41 at the bottom Shanghai East means 40 and; Rotating means that forms a fixing groove 53 in the center of the Shanghai copper plate 45 to seat and fix the rotating motor (50m), and comprises a rotating plate 51 protruding a plurality of fixing pins 52 on the upper end of the rotating motor (50m). 50; On the upper surface of the rotating plate 51, a plurality of fixing plates 62 fastening a plurality of vacuum pad device 70 to one side by maintaining a certain distance on the upper surface of the reference body 61 to maintain a certain length to fix the center. ), The apparatus for inspecting a large glass substrate, characterized in that each of the adsorption means (60) is fixed by binding each other so as to intersect while maintaining a predetermined distance to the reference body (61). The method of claim 1; The vacuum pad device 70 formed on the fixed plate 62 has a dual cylinder 71 in which a rod 72 is exposed to one side of one side of the fixed plate 62 and guides the vacuum shaft 73 to reciprocate therein. Each of the blocks 74 is mounted, but the rod 72 and the lower end of the vacuum shaft 73 are connected to the fixing block 75. The pad 76 is provided on the upper surface of the vacuum shaft 73. Inspection device for a large glass substrate, characterized in that to reciprocate relative to the guide block 74 by the dual cylinder (71).

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