WO2019147096A1

WO2019147096A1 - Glass substrate transfer device with horizontal and vertical direction switching and aligning function

Info

Publication number: WO2019147096A1
Application number: PCT/KR2019/001195
Authority: WO
Inventors: 박성환
Original assignee: 주식회사 테라젠테크
Priority date: 2018-01-29
Filing date: 2019-01-29
Publication date: 2019-08-01

Abstract

The present invention relates to a glass substrate transfer device with a horizontal and vertical direction switching and aligning function, comprising: an upper frame comprising a fixing part configured to fix a glass substrate disposed in a horizontal direction, and a first alignment module configured to adjust the position of the fixing part; a lower frame coupled to the upper frame and configured to move the upper frame; and a direction switching driving part for relatively rotating the upper and lower frames so as to arrange the glass substrate in a vertical direction. Thus, the glass substrate transfer device with a horizontal and vertical direction switching and aligning function according to the present invention comprises a plurality of features for alignment and switching direction so as to transfer the glass substrate, received in a horizontal direction, to a vertical direction, and a separate driving part for 6-axis adjustment, so as to use the unit in an optimized configuration that can be individually controlled, thereby improving accuracy and reducing costs.

Description

Glass substrate transfer device with horizontal and vertical direction switching and alignment function

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate transporting apparatus having horizontal and vertical direction switching and alignment functions, and more particularly, to a glass substrate transporting apparatus having horizontal and vertical direction switching and alignment functions for aligning and transporting a glass substrate.

In manufacturing a display device such as an LCD or an OLED, a glass substrate is used, and the glass substrate is subjected to a plurality of processes to finally produce a product.

The glass substrate is subjected to processes such as photography, diffusion, etching, and deposition, and can be configured to undergo an independent process in each of the process chambers. The glass substrate is transferred to a position where each process is performed using a transfer device or a robot arm, and can be converted into a required posture in each process and can be provided.

Korean Patent Registration No. 538279 related to a wafer transfer system of a diffusion process facility is disclosed with respect to an apparatus for transferring and aligning such a substrate.

However, conventionally, a precise robot arm is used for posture changing and alignment, which increases manufacturing cost, and an alignment apparatus optimized for alignment of glass substrates is required.

The present invention provides a glass substrate transfer apparatus having horizontal and vertical direction switching and alignment functions optimized for the function of aligning and transporting a glass substrate, solving the high cost problem of a glass substrate transfer apparatus having a horizontal and vertical direction switching and alignment function The purpose is to do.

As a means for solving the above problems, there is provided a fixing device comprising: a fixing part configured to fix a glass substrate mounted in a horizontal direction by vacuum suction; an upper frame connected to a lower side of the fixing part and configured to adjust a position and an attitude of the fixing part; A lower frame which is hingedly connected to a lower side of the frame and supports the upper frame and adjusts the position and posture of the upper frame, and a direction switching driver that relatively rotates the upper frame and the lower frame so as to vertically set the glass substrate A glass substrate transporting apparatus having horizontal and vertical direction switching and alignment functions can be provided.

Here, the upper frame may be connected to a position offset to one side of the fixing unit so that the upper switching frame may be positioned at a predetermined height when the direction switching driving unit is driven and the glass substrate is erected.

The fixed portion may be connected to the upper frame at a portion vertically offset from the vertical position so that the fixing portion can be set at a lower position than the height at which the glass substrate is seated.

The upper frame may further include a first alignment module configured to rotate the fixing unit with respect to the central axis of the upper frame.

The upper frame may include an upper rotating frame connected to the fixed portion and a first upper sub frame coaxially connected to the upper rotating frame so that the upper rotating frame can be rotated.

Further, the first alignment module is provided in the first upper sub-frame and can be configured to rotate the upper rotation frame.

The first alignment module includes a fixed unit connected to the first upper sub-frame, a first slider connected to an upper side of the fixed unit and configured to be slidable in a first direction, a slider slidable in a direction perpendicular to the first direction, A second slider connected to the upper side of the first slider, and a connecting pin fixed to the upper rotating frame and configured to be inserted into the upper side of the second slider and rotated.

The first alignment module may further include a servo motor fixed to the first upper sub-frame and connected to the first slider or the second slider to adjust a position of the first slider or the second slider Lt; / RTI >

Further, it may further comprise a sensor capable of measuring the driving amount of the servo motor.

The display device may further include a left / right direction adjusting unit configured to move the glass substrate in the left / right direction.

The upper frame further includes a second upper sub-frame, the first upper sub-frame is configured to be slidable on the second upper sub-frame, and the left and right direction adjusting unit is configured to be slidable on the second upper sub- Can be adjusted.

Furthermore, the left and right direction adjusting section may be configured to include a servo motor.

The lower frame includes a lower rotating frame hinged to the upper frame and a first lower sub-frame coaxially connected to the lower rotating frame and configured to be relatively rotatable, and is configured to rotate the lower rotating frame And a second alignment module.

The second alignment module includes a fixed unit connected to the first lower sub-frame, a first slider connected to an upper side of the fixed unit and configured to be slidable in a first direction, a slider in a direction perpendicular to the first direction, A second slider connected to the upper side of the first slider, and a connecting pin fixed to the lower rotating frame and configured to be inserted into the upper side of the second slider and rotated.

The second alignment module may further include a servo motor fixed to the first lower sub-frame and connected to the first slider or the second slider to adjust the position of the first slider or the second slider .

The first lower sub-frame may further include a second lower sub-frame connected to the first lower sub-frame so that the first lower sub-frame can be moved in the vertical direction.

The apparatus may further include a height adjuster configured to adjust a height of the first lower sub-frame in a vertical direction.

The image forming apparatus may further include an image reader configured to acquire an image of the placed glass substrate to determine a position error, and further includes a controller for controlling the first alignment module based on the position error obtained by the image reader, .

The apparatus may further include a base for supporting the lower frame, and the lower frame may be configured to reciprocate a predetermined distance from the base.

The apparatus may further include a lower frame driving unit configured to adjust a position of the lower frame on the base.

The fixing portion may include a plurality of vacuum holes so that the glass substrate can be attracted.

The glass substrate transfer apparatus having a horizontal and vertical direction switching and alignment function according to the present invention can be optimally used for aligning and transporting a glass substrate, thereby improving transferring, accuracy, and manufacturing cost.

1 is a perspective view of a glass substrate transfer apparatus having a horizontal and vertical direction switching and alignment function according to the present invention.

2 is an exploded perspective view of the upper frame.

3 is an exploded perspective view of the lower frame.

4 is a view showing a rotation center axis and a movement axis according to the operation of the glass substrate transfer apparatus having the horizontal and vertical direction switching and alignment function.

5A and 5B are perspective views of the alignment module.

6 is a view showing the concept of the operation of the rotation frame according to the operation of the alignment module.

7 and 8 are views showing the operation of the direction switching driver.

9 is a view showing an operation according to driving of the left and right direction adjusting unit.

10 is a view showing an operation according to the driving of the second alignment module.

11 is a view showing an operation according to the driving of the height adjusting portion.

12A, 12B and 12C are diagrams showing the posture of the glass substrate to be aligned and transferred.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a glass substrate transfer apparatus having a horizontal and vertical direction switching and alignment function according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the embodiments, the names of the respective components may be referred to as other names in the art. However, if there is a functional similarity and an equivalence thereof, the modified structure can be regarded as an equivalent structure. In addition, reference numerals added to respective components are described for convenience of explanation. However, the contents of the drawings in the drawings in which these symbols are described do not limit the respective components to the ranges within the drawings. Likewise, even if the embodiment in which the structure on the drawing is partially modified is employed, it can be regarded as an equivalent structure if there is functional similarity and uniformity. Further, in view of the level of ordinary skill in the art, if it is recognized as a component to be included, a description thereof will be omitted.

Hereinafter, the construction of a glass substrate transfer apparatus having a horizontal and vertical direction switching and alignment function according to the present invention will be described in detail with reference to FIGS. 1 to 5B.

FIG. 1 is a perspective view of a glass substrate transfer apparatus having a horizontal and vertical direction switching and alignment function according to the present invention, FIG. 2 is an exploded perspective view of the upper frame 200, and FIG. 3 is an exploded perspective view of the lower frame 400.

As shown in the drawing, the glass substrate transfer apparatus having a horizontal and vertical direction switching and alignment function according to the present invention includes a fixing unit 100, an upper frame 200, a direction switching driving unit 300, a lower frame 400, a base 500 And an image reading unit 700. [0033]

The fixing unit 100 is configured to fix the glass substrate s when the glass substrate s is received. The fixing unit 100 may be provided with a suction surface formed on one side thereof in correspondence with the area of the glass substrate s. A plurality of suction modules may be provided on the suction surface, and a plurality of vacuum holes (101) may be formed in each suction module, thereby fixing the glass substrate (s) by vacuum suction. A vacuum channel (not shown) may be provided on the inner side of the fixing part 100 to transmit sound pressure generated from the outside. When the glass substrate s is erected in the vertical direction, the fixing unit 100 is connected to the upper frame 200 at one side so as to be positioned at a predetermined height from the height when the glass substrate s is seated in the horizontal direction. Specifically, the base 500 is connected to a portion shifted toward the extended direction on the basis of the configuration shown in FIG. Therefore, when the upper frame 200 to be described later rotates in the? Direction, the height of the central portion of the glass substrate s can be adjusted to a predetermined height. The predetermined height may be adjusted to the height at which the glass substrate s is taken over by the apparatus for taking over the glass substrate, for example, the substrate carrier holding the glass substrate s to enter an external process chamber.

When the upper frame rotates 90 degrees by the operation of the direction switching driver 300, which will be described later, when the upper and lower edges of the glass substrate s are raised, The edge farthest from the connecting portion of the upper frame 200 has the greatest turning radius and is positioned at the highest position at the position where the glass substrate is erected. Conversely, the edge adjacent to the connecting portion of the fixing portion 100 and the upper frame 200 is positioned at the lowest position.

On the other hand, when the glass substrate (s) is raised by the direction switching driver 300 to be described later, the fixing portion 100 is provided with the appropriate number and size of the vacuum holes 101 so as to ensure the adsorption of the glass substrate And the specific configuration of the fixing part 100 can be applied to various configurations capable of fixing and fixing the glass substrate s, so that detailed description will be omitted.

As shown in FIG. 2, the upper frame 200 is configured to adjust the position and posture of the fixing part 100. The upper side of the upper frame 200 is connected to the fixing part 100 and the lower side of the upper frame 200 is connected to the upper side of the lower frame 400, which will be described later. The upper frame 200 is configured to be rotated at a predetermined angle with the lower frame 400. The upper frame 200 includes a fixing part 100, an upper rotation frame 210, a first upper sub-frame 220, a second upper sub-frame 230, a first alignment module 240, 250). The upper frame 200 may have an area slightly smaller than that of the fixed portion 100, and the moment of inertia may be lowered. As a result, the load can be reduced during the rotation and posture control to enable quick operation.

The upper rotating frame 210 is configured to rotate relative to the first upper sub-frame 220 and the second upper sub-frame 230, which will be described later. The upper rotating frame 210 is connected to the upper side at a position offset to one side of the fixing part 100. Therefore, when the upper rotating frame 210 is rotated, the rotation center of the? Direction is located at one side of the glass substrate s, so that the radius of rotation of the end of the glass substrate s becomes larger, So that the alignment time can be shortened. A first upper sub-frame 220 is connected to the lower portion of the upper rotation frame 210 and a center portion of the first upper sub-frame 220 is coupled to the first upper sub-frame 220 with the same rotation axis. The rotation center axis may be provided with a bearing so that rotation can be smoothly performed. The rotation center axis of the upper rotation frame 210 is formed in a direction perpendicular to the center of the upper frame 200. Since the upper frame 200 rotates in the y direction by driving the direction switching drive unit 300, Is also rotated in the? Direction.

The first upper sub-frame 220 is connected to the upper rotation frame 210 with the upper side as described above and the first upper sub-frame 220 is configured to rotate relative to the upper rotation frame 210. The first upper sub-frame 220 may be connected to the second upper sub-frame 230 in a downward direction, and may be configured to be linearly movable relative to the second upper sub-frame 230. The lower portion of the first upper sub-frame 220 may be configured to include a linear guide 600 so as to be slidable on the second upper sub-frame 230.

The second upper sub-frame 230 may be connected to the first upper sub-frame 220 at the upper side and may be connected to the lower frame 400 at the lower side. The lower side of the second upper sub-frame 230 may be connected to the lower frame 400 by a hinge having a rotation center axis in the x-axis direction.

The first alignment module 240 provides a driving force such that relative rotation between the upper rotating frame 210 and the first upper sub-frame 220 is possible. The first alignment module 240 is provided on the upper side of the first upper sub-frame 220 and is configured to determine the rotation amount of the upper rotation frame 210 according to the driving amount. The first alignment module 240 may be installed at a predetermined distance from the rotation center axis of the upper rotation frame 210 and the first upper sub-frame 220. When the upper rotating frame 210 rotates at a predetermined angle according to the driving of the first aligning module 240, the fixing part 100 fixedly connected to the upper rotating frame 210 is also adjusted in angle with respect to the upper rotating frame 210, The deposited glass substrate s can be aligned. The alignment direction and the configuration of the first alignment module 240 will be described in detail later.

The left and right direction adjusting unit 250 provides a driving force to relatively move linearly between the first upper sub-frame 220 and the second upper sub-frame 230. The left and right direction adjusting unit 250 is configured to adjust the first upper sub-frame 220 in the width direction, i.e., the x-axis direction, of the glass substrate transfer apparatus having the horizontal and vertical direction switching and alignment function. The left and right direction adjusting unit 250 may include a servo motor 245 and a screw-nut structure. The left and right direction adjusting unit 250 may be fixedly connected to the first upper sub-frame 220 or the second upper sub-frame 230. For example, the servo motor 245 may be connected to the second upper sub- And the nut (NUT) may be fixed to the first upper sub-frame 220. [ The adjusted amount of the horizontal direction can be adjusted between the first upper sub-frame 220 and the second upper sub-frame 230 by adjusting the position of the nut according to the rotation of the servo motor 245. However, the left and right direction adjuster 250 may be applied to a linear actuator that provides a linear driving force between the first upper sub-frame 220 and the second upper sub- On the other hand, although not shown, a position sensor for servo control is provided to perform position control.

3 shows a detailed configuration of the lower frame 400. As shown in FIG. The lower frame 400 includes a lower rotating frame 410, a first lower sub-frame 420, a second lower sub-frame 430, a second aligning module 440 and a height adjusting unit 450 And the like.

The lower rotating frame 410 is connected to the upper frame 200 and is configured to rotate relative to the rest of the lower frame 400. The lower rotating frame 410 is hinged to the upper side of the second upper sub-frame 230 and is configured to rotate the upper frame 200. The lower rotating frame 410 is rotatably connected to the first lower sub-frame 420 in a coaxial manner, and the rotating center axis thereof is a z-axis direction located at a central portion of the lower frame 200.

The first lower sub-frame 420 may be configured so as to be rotatable coaxially with the lower rotating frame 410, and may be connected to the height adjuster 450 on the lower side.

The second lower sub-frame 430 may be connected to the base 500 in a downward direction and configured to be linearly movable on the base 500. The second lower sub-frame 430 may include a height adjusting unit 450.

The second alignment module 440 provides a driving force so that relative rotation between the lower rotating frame 410 and the first lower sub-frame 420 can be achieved. The second alignment module 440 may have the same configuration as the first alignment module 240. The servo motor 245 of the second alignment module 440 is fixedly mounted to the first lower sub-frame 420 and a screw-nut structure may be provided on the extended shaft of the servo motor 245, The rotation amount of the lower rotating frame 410 can be adjusted according to the driving amount of the servo motor 245 by being connected to the slider of the module.

The height adjuster 450 may be configured to adjust the height of the first sub-frame 420 and the first sub-frame 420 connected to each other. The height adjuster 450 may include a servo motor 245, and the extended shaft of the servo motor may have a screw-nut structure. When the height adjusting part 450 includes a screw-nut structure, the servo motor 245 is fixed to the second lower sub-frame 430 to rotate the screw, and one side of the nut is connected to the first lower sub- And the height of the first lower sub-frame 420 can be adjusted according to the amount of rotation of the servo motor.

The direction switching driver 300 is configured to rotate the upper frame 200. The direction switching driver 300 is configured to be provided by regulating the glass substrate s that is laid down and transported to a posture set in the next process. The direction switching driver 300 may be set so that the driving range is adjacent to 90 degrees. Therefore, the connection portion between the upper frame 200 and the lower frame 400 may include a limiter 260 to prevent the direction from being changed at an angle exceeding 90 degrees. The direction switching driver 300 may include a servo motor 245, and a sensor (not shown) for measuring a rotation angle may be provided at one side of the controller to perform feedback control.

The base 500 supports a glass substrate transfer apparatus having a horizontal and vertical direction switching and alignment function, and can be configured so that the lower frame 400 can be connected and moved. The base 500 may include a lower frame driving unit 510 and a linear guide 600.

The base 500 may be formed extending to a delivery position for delivering the glass substrate s from the acceptance position. The length of the base 500 can be set to a length for transporting the glass substrate s between any one of the process chambers and the other process chamber. The base 500 is configured such that one side of the lower frame 400 is supported and movable and a plurality of linear guides 600 may be provided to guide the moving direction of the lower frame 400.

The base 500 may include a lower frame driving unit 510 to move the lower frame 400. When the lower frame 400 is moved, the upper frame 200 and the fixing unit 100 connected to the lower frame 400 move together and the glass substrate s adsorbed by the fixing unit 100 is finally moved do. The lower frame driving unit 510 may be a linear actuator, for example, and may be configured to be moved to a desired position by feedback control. However, since the configuration and the shape of the base 500 are applicable to various configurations in which the lower frame 400 can be moved, detailed description thereof will be omitted.

The image reading unit 700 is configured to detect the posture of the placed glass substrate s. The image reading unit 700 is configured to be able to detect a corner portion of a seated glass substrate s or a position of an alignment marker (not shown) to provide data that can be utilized in alignment. The first alignment module 240, the second alignment module 440, the left / right direction adjustment unit 250, the direction switching driver 300, and the height adjustment unit 450 Can be controlled. 1 is a top view of a glass substrate s for determining an error when the glass substrate s is placed thereon. However, this is merely an example, and can be applied to a configuration for acquiring an image at a position where the substrate is set up And can be applied to various positions where the position of the glass substrate s can be recognized.

4 is a view showing a rotation center axis and a movement axis according to the operation of the glass substrate transfer apparatus having the horizontal and vertical direction switching and alignment function. As shown in the figure, the driving shaft of the glass substrate transfer apparatus having the horizontal and vertical direction switching and alignment function according to the present invention may include six directions in total.

If the movement for adjusting the position of the glass substrate s in the linear direction is described with reference to the orthogonal coordinates of x, y, and z, the alignment in the x-axis direction may be performed by driving the left and right direction adjusting unit 250. The alignment in the y-axis direction can be configured to move the lower frame 400 on the base 500 as the lower frame driving unit 510 is driven, and to transfer the glass substrate s. Alignment in the z-axis direction can be performed by driving the height adjusting portion 450. [

Describing the movement of rotating the glass substrate s to change the attitude and position, the rotation in the? Direction can be performed by driving the second alignment module 440 around the z axis. The rotation in the gamma direction can be performed through the rotation driving of the direction switching driver 300 about the x axis. The rotation in the beta direction may be performed by driving the first alignment module 240 while rotating the glass substrate s in the plane direction. the rotation of the fixing unit 100 is connected to the upper frame 200 so that the rotation center axis does not rotate with respect to the center of the glass substrate s and the rotation center axis is formed at a position biased toward the upper frame 200 side. Here, the upper frame 200 rotates about 90 degrees in the y direction on the drawing with reference to the x-axis in accordance with the driving of the direction switching driver 300, so that the driving of the first alignment module 240 in the rotated state is performed in the y- The rotation in the? Direction is generated. Finally, each alignment of the glass substrate s with respect to the six axes is performed independently, so that the position and posture can be aligned.

FIGS. 5A and 5B are perspective views of the alignment module, and FIG. 6 is a conceptual view of the operation of the rotation frame 210, 310 according to the operation of the alignment module. The first sorting module 240 and the second sorting module 440 may be configured in the same manner as the first sorting module 240, and only the configuration of the first sorting module 240 will be described in order to avoid redundant description. As shown in FIG. 5A, the first alignment module 240 is configured to perform two-directional linear motion and one-axis rotation so as to rotate the upper rotation frame 210.

5B, the first alignment module 240 includes a fixed unit 241, a first slider 242, a second slider 243, and a connection pin 244 ). &Lt; / RTI > The fixed unit 241 is configured to be fixed on the upper side of the first upper sub-frame 220. A first slider 242 is provided on the upper side of the fixed unit 241. The fixed unit 241 and the first slider 242 are connected to each other by the linear guide 600 to be linearly movable in the first direction D1. . The second slider 243 may be provided on the upper side of the first slider 242 and may be linearly moved in a second direction D2 perpendicular to the first direction D1. . The connection pin 244 is provided on the upper side of the second slider 243 and is fixed on the upper side of the second slider 243 on one side and fixed on the lower side of the upper rotation frame 210, . The connecting pin 244 may be a cross roller bearing, for example.

Since the upper connection pin 244 of the first alignment module 240 is fixed to the upper rotation frame 210 and the first slider 242 is fixed to the nut of the screw-nut structure of the servo motor, the second slider 243 And the rotational movement of the connecting pin 244 are made freely.

Hereinafter, alignment along each alignment direction will be described with reference to FIGS. 6 to 11. FIG.

Referring to FIG. 6, when the swivel 245 of the first alignment module 240 is driven, the first slider 242 moves in the first direction D1, that is, H First, it is adjusted. The distance L between the rotation center of the upper rotating frame 210 and the connection pin 244 of the first alignment module 240 is structurally determined to be the same so that L and H are determined and in the second direction D2 And compensates for the distance difference that varies with linear motion as it moves freely. As a result, the upper rotating frame 210 can be rotated by the linear motion of the nut. However, since the angle at which the glass substrate s is aligned does not deviate from a large range, it is shown as an example of fine adjustment in the drawing.

FIGS. 7 and 8 are views showing the operation of the direction switching driver 300. FIG. As described above, the direction switching driver 300 is configured to relatively rotate the upper frame 200 relative to the lower frame 400, and the glass substrate s placed in the horizontal direction is switched in the vertical direction . As shown in FIG. 8, the glass substrate s is oriented in the vertical direction, and then the posture is aligned, and the glass substrate s is led to a processing apparatus in which the next process is performed.

9 is a diagram illustrating an operation of the left and right direction adjusting unit 250 according to the driving of the left and right direction adjusting unit 250. As shown in FIG. As shown in the figure, the left and right direction adjuster 250 is configured to adjust the glass substrate s in a linear movement in the x-axis direction shown in FIG. 4, that is, in the left and right directions. The first upper sub-frame 220 of the upper frame 200 can be moved to the left with respect to the center axis of the lower frame 400 by driving the left and right direction adjusting unit 250. [

10 is a view illustrating an operation of the second alignment module 440 according to the driving of the second alignment module 440. Referring to FIG. As shown in the figure, the rotation operation around the z-axis shown in FIG. 4 is made possible. Here, the second alignment module 440 is driven to relatively rotate the structure connected to the upper side of the lower rotation frame 410.

11 is a view illustrating an operation of the height adjusting unit 450 according to the driving of the height adjusting unit 450. As shown in FIG. As shown, the first lower sub-frame 420 is separated from the second lower sub-frame 430, and the glass substrate s is linearly moved in the vertical direction, that is, the z-axis direction. A linear guide 600 may be provided between the first lower sub-frame 420 and the second lower sub-frame 430 so that height adjustment in the z-axis direction can be independently performed.

The first aligning module 240, the second aligning module 440, the left and right direction adjusting unit 250, the direction switching driving unit 300, the height adjusting unit 450, and the lower frame driving unit 510, And a sensor unit configured to measure a driving amount of each driving unit. The sensor unit may be constituted by an encoder, for example, and may be configured to generate a signal in accordance with the amount of rotation or the amount of movement of the current motor.

The driving of the first aligning module 240, the second aligning module 440, the left and right direction adjusting unit 250, the direction switching driving unit 300, the height adjusting unit 450 and the lower frame driving unit 510 Amount of the image can be determined on the basis of the position obtained by analyzing the image obtained by the image reading unit 700. [ Meanwhile, a separate control unit may be provided for this purpose. In addition, the control unit may be configured to receive signals from the sensor unit so as to perform feedback control of the respective driving amounts, and to independently control the respective driving units.

12A, 12B and 12C are diagrams showing the posture of the glass substrate s to be aligned and fed. In this drawing, only the glass substrate s is shown for the sake of alignment, and the structure of the glass substrate transporting apparatus having the horizontal and vertical direction switching and alignment function is omitted.

As shown in the drawing, when a glass substrate transfer apparatus having horizontal and vertical direction switching and alignment functions according to the present invention is used, the glass substrates s can be aligned in various orders.

Here, since each of the driving units responsible for the alignment of six axes can be independently driven, the order of alignment is not limited to any certain order.

When the glass substrate s is placed on the fixing unit 100, the glass substrate transfer apparatus having the horizontal and vertical direction switching and alignment functions determines the driving amounts of the respective driving units required for alignment in each direction through the image reading unit 700 do. 12A, when the glass substrate s is mounted in the horizontal direction, alignment is performed by rotating in the? Direction, alignment is performed in the x-axis linear direction, and the glass substrate s is rotated in the? And the alignment is performed by rotating in the? Direction. In this case, the β direction, which is performed first, is finally rotated about the y axis as the substrate is rotated in the γ direction. Alignment of the substrate in the z direction is further performed, and the substrate is linearly moved in the y direction from the transported position to the delivery position to complete the alignment and transport.

12B and 12C show another example of the driving sequence of the glass substrate transporting apparatus having the horizontal and vertical direction switching and alignment function. FIG. 12B shows a state in which the glass substrate s is transported in the y- Are simultaneously performed. 12C shows a step of carrying out alignment by moving the glass substrate s in the y-axis direction and then rotating in the x, z-axis and rotating by?,?,?. 12A, 12B, and 12C illustrate the order of alignment and movement, but the present invention is not limited thereto, and the multi-axis alignment can be performed at the same time, and can be controlled to be selectively performed.

As described above, the glass substrate transfer apparatus having the horizontal and vertical direction switching and alignment function according to the present invention has a plurality of structures for switching alignment and direction so that the glass substrate taken in the horizontal direction can be transferred in the vertical direction And a separate driving unit for six-axis adjustment is provided, so that it is possible to improve the accuracy and reduce the cost when using the unit as an optimized configuration that can be individually controlled.

Claims

A fixing unit configured to be able to fix a glass substrate placed in a horizontal direction by vacuum suction;

An upper frame connected to a lower side of the fixing part and configured to adjust the position and posture of the fixing part;

A lower frame hinged to a lower side of the upper frame to support the upper frame and adjust the position and posture of the upper frame; And

And a direction switching driver for relatively rotating the upper frame and the lower frame so that the glass substrate can be set up in a vertical direction.
The method according to claim 1,

Wherein the upper frame comprises:

Wherein the glass substrate is connected to a position offset to one side of the fixing unit so that the glass substrate can be positioned at a predetermined height when the direction switching driver is driven and the glass substrate is erected.
3. The method of claim 2,

Wherein the upper frame further comprises a first alignment module configured to rotate the fixing unit with respect to a center axis of the upper frame.
The method of claim 3,

Wherein the upper frame comprises:

And an upper rotating frame connected to the fixing part and a first upper sub frame coaxially connected to the upper rotating frame so that the upper rotating frame can be rotated. Glass substrate transfer device.
5. The method of claim 4,

Wherein the first alignment module comprises:

A first sub-frame,

And the upper rotating frame is rotated by the rotation of the upper rotating frame.
6. The method of claim 5,

Wherein the first alignment module comprises:

A fixed unit connected to the first upper sub-frame;

A first slider connected to an upper side of the fixed unit and configured to be slidable in a first direction;

A second slider slidable in a direction orthogonal to the first direction and connected to an upper side of the first slider; And

And a connection pin fixed to the upper rotating frame and configured to be inserted and rotated on the upper side of the second slider.
The method according to claim 6,

One side of the first sorting module,

And a servo motor fixed to the first upper sub-frame and connected to the first slider or the second slider to adjust a position of the first slider or the second slider Wherein the glass substrate transfer device has a horizontal and vertical direction switching and alignment function.
8. The method of claim 7,

Further comprising a sensor capable of measuring a driving amount of the servo motor.
5. The method of claim 4,

Further comprising a left / right direction adjusting unit configured to move the glass substrate in the left / right direction.
10. The method of claim 9,

The upper frame further includes a second upper sub-frame,

Wherein the first upper sub-frame is configured to be slidable on the second upper sub-frame,

Wherein the horizontal direction adjuster is configured to adjust the position of the first upper sub-frame on the second upper sub-frame.
11. The method of claim 10,

Wherein the horizontal direction adjuster includes a servo motor configured to adjust a position of the first upper sub-frame.
The method of claim 3,

The lower frame includes a lower rotating frame hinged to the upper frame; And

And a first lower sub-frame which is coaxially connected to the lower rotating frame and relatively rotatable,

Further comprising: a second alignment module configured to rotate the lower rotating frame.
13. The method of claim 12,

Wherein the second alignment module comprises:

A fixed unit connected to the first lower sub-frame;

A first slider connected to an upper side of the fixed unit and configured to be slidable in a first direction;

A second slider slidable in a direction orthogonal to the first direction and connected to an upper side of the first slider;

And a connection pin fixed to the lower rotating frame and configured to be inserted and rotated on the upper side of the second slider.
14. The method of claim 13,

Wherein the second alignment module comprises:

And a servo motor fixed to the first lower sub-frame and connected to the first slider or the second slider to adjust a position of the first slider or the second slider Wherein the glass substrate transfer device has a horizontal and vertical direction switching and alignment function.
15. The method of claim 14,

Further comprising a sensor capable of measuring a driving amount of the servo motor.
13. The method of claim 12,

And a second lower sub-frame connected to the first lower frame so that the first lower sub-frame can be moved in the vertical direction. .
17. The method of claim 16,

Further comprising a height adjusting unit configured to adjust a height of the first lower sub-frame in a vertical direction.
The method of claim 3,

And an image reading unit configured to acquire an image of the placed glass substrate to determine a position error,

Further comprising a control unit for controlling the first alignment module based on the position error obtained by the image reading unit.
17. The method of claim 16,

And a base for supporting the lower frame,

Wherein the lower frame is configured to reciprocate a predetermined distance from the base.
20. The method of claim 19,

And a lower frame driving unit configured to adjust a position of the lower frame on the base.