KR101174860B1 - Display panel test device for aligning tested object with testing board - Google Patents

Abstract

PURPOSE: A panel inspecting device for a display on which a tested object and a test board are arranged and a control method thereof are provided to precisely make a glass parallel with a probe unit, thereby increasing a test speed. CONSTITUTION: A test module(140) is formed on a moving route of a glass stage module. A probe unit is formed in the test module. The probe unit contacts a cell of a glass mounted on the glass stage module. A test board is mounted on the test module. The test board tests the cell. The test module arranges the test board to arrange the probe unit with a cell of the glass.

Description

Display panel test device for alignment with test object and test board and control method thereof {Display Panel Test Device for Aligning Tested Object with Testing Board}

The present invention relates to an inspection apparatus, and more particularly, to an inspection apparatus in which an inspection object is aligned with an inspection object in contact with the inspection object when inspecting a substrate such as a flat panel display.

In recent years, as flat panel displays such as liquid crystal display (LCD) panels and organic light emitting diode (OLED) display panels are widely used, their production is also increasing.

The flat panel display panel as described above checks for defects in the manufacturing process and proceeds to a subsequent process. For example, the LCD panel performs a pattern array inspection process.

1 is a diagram schematically showing an apparatus used for a conventional pattern array inspection.

The inspection apparatus may include a glass stage module 20 and a test substrate mounting part 30.

The glass stage module 20 is a component on which the glass 10 having a plurality of cells in which a pattern array is formed is seated. The glass stage module 20 is provided with an X-axis driver, a Y-axis driver, and a turntable to move the X-axis, the Y-axis, and the horizontal state. A test frame including a probe board 42 having a probe unit 42 contacting each cell of the glass and inspecting a pattern array of each cell may be mounted on the test board mounting unit 30. It consists of 32.

Meanwhile, as shown in FIG. 2, a connection circuit pattern 14 for inputting and outputting signals is formed in the cell 12, and the test substrate 40 contacts the connection circuit pattern 14 of the cell. Probe unit 42 is provided for. By the way, the probe pin (not shown) of the probe unit 42 in contact with the connection circuit pattern 14 is precisely formed with a very fine width, so that the glass 10 needs to be aligned for accurate contact.

On the other hand, the glass 10 has a glass align mark 16 for aligning the glass 10 at each corner, the cell align mark for aligning at each corner of the cell 12 ( 18) is formed.

Therefore, the glass align mark 16 and the cell align mark 18 are sensed by means of a separate camera or the like not shown in the drawing to recognize the position, and the glass stage module 20 is moved to move the glass 10. Contact is attempted after aligning the position and angle with respect to the probe unit 42.

However, as shown in FIG. 3, the connection circuit pattern 14 and the probe pin are precisely formed to have a very fine width, due to an error in recognizing the alignment mark and an error in the glass stage module 20. (10) and the probe unit 42 may not be finely aligned in parallel, which may cause the alignment time should be repeated every time the contact is attempted in the same glass 10, thereby increasing the inspection time There was a problem that is lowered.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and provides an inspection apparatus in which an object to be inspected is aligned with a specimen, which can achieve a more precise parallelism between the glass and the probe unit, thereby improving the inspection speed. Shall be.

According to one embodiment of the present invention for solving the above problems, a glass stage module is provided on the main frame, the glass is provided on the main frame, one or more cells are formed, the glass stage module for moving the glass relative to the main frame, A probe unit is provided above the movement path of the glass stage module, and is provided with a probe unit contacting a cell of a glass seated on the glass stage module to mount a test substrate for inspecting the cell. Provided is a display panel inspection apparatus for displaying an object to be tested and a test substrate including a test module for aligning a position of the test substrate to be aligned with a cell.

The glass stage module may include a stage base on which the glass is seated, a one-axis drive unit which moves the stage base in one direction with respect to the main frame, and the other side orthogonal to the one direction with respect to the main frame. It may include a two-axis drive unit for moving in the direction, the lifting unit for elevating the stage base in the vertical direction, the rotating unit for rotating the stage base about an axis perpendicular to the ground.

The glass stage module may further include a glass aligner provided in a plurality of edge portions of the stage base to align the glass placed on the stage base.

The glass stage module includes at least two glass stage modules at positions spaced apart from each other on a side facing the test module of the glass stage module, and senses a predetermined point of the probe unit, respectively, so that the stage base and the probe unit are parallel to each other. It may further comprise a probe pin camera to measure the.

A reference position recognition camera unit may be further provided between the glass stage module and the test module to sense an alignment mark of the glass seated on the glass stage module.

The test module may include a subframe provided at one side of the main frame, a fixing plate provided at an upper side of the subframe so as to form a space in which the glass stage module is moved, and a lower side of the fixing plate. It may include a substrate mounting stage to which a test substrate is fixed, a test substrate alignment unit for moving the substrate mounting stage relative to the fixing plate to align the cells of the glass seated on the glass stage module and the probe unit of the test substrate. have.

The test substrate alignment unit may include a cell alignment camera provided on the fixing plate and configured to sense a cell alignment mark formed on the glass seated on the glass stage module, and between the fixing plate and the substrate mounting stage. Substrate mounting stage aligner for moving or rotating the stage in one direction and the other direction with respect to the fixed plate, the transfer amount of the substrate mounting stage aligner according to the error amount of the cell alignment mark and the alignment point measured by the cell alignment camera The control unit may be configured to align the probe unit of the test substrate and the glass cell mounted on the glass stage module.

The substrate mounting stage aligner is provided at at least two or more points of the substrate mounting stage, respectively, and an upper side thereof is fixed to the fixing plate, and a lower side thereof is rotatably coupled to the substrate mounting stage and slidable to one side and the other side. The plurality of substrate mounting stage aligners may be configured to move or rotate the substrate mounting stage to one side and the other side according to an amount of sliding of the plurality of substrate mounting stage aligners to one side and the other side.

The test module may further include a contact camera that monitors a contact point of the cell of the glass and the probe unit.

Meanwhile, according to another aspect of the present invention, an importing step of bringing glass into a glass stage module, a glass alignment step of aligning the glass to a stage base, and a reference point below the test substrate on which the glass stage module is mounted on a test module A movement step to be moved to, a stage alignment step of aligning the parallel between the stage base and the test substrate, and a cell alignment mark formed on the glass seated on the glass stage module by sensing a parallel amount error between the cell of the glass and the test substrate A test substrate alignment step of measuring and moving the test substrate to adjust parallelism between the glass cell and the test substrate, wherein the stage base is raised so that the cells of the glass and the test substrate are contacted to electrically connect the cells of the glass and the test substrate. Contact step, inspection of the cell is performed Provided is a control method of a display panel inspecting apparatus in which an object to be inspected and a test substrate are aligned, including an inspecting step.

The glass aligning step may be a step in which an object to be tested and a test substrate are aligned, in which a glass aligner is operated to align the glass to the stage base.

In the moving step, the reference point is an object to be inspected, wherein the reference position recognition camera unit provided between the glass stage module and the test module senses an alignment mark of the glass seated on the glass stage module. The test substrate may be aligned.

In the stage alignment step, at least two probe pin cameras provided at positions spaced apart from each other on a side facing the test module of the glass stage module sense respective designated points of the probe unit to be parallel to the stage base and the probe unit. And a first parallel measurement step of measuring whether or not and an error, and a first parallel alignment step of rotating the stage base by the amount of the error measured in the first parallel measurement step to form a parallel between the stage base and the probe unit. .

The probe unit aligning step may include a second parallel measurement step in which a cell alignment camera senses a cell alignment mark formed on the glass seated on the glass stage module to measure a parallel amount error between the cell of the glass and the probe unit; And a second parallel alignment step of adjusting the transfer amount of the substrate mounting stage aligner by the error amount measured in the second parallel measurement step to parallel the cell of the glass seated on the glass stage module and the probe unit of the test substrate. Can be.

According to the display panel inspection device and the control method for the alignment of the test object and the test substrate of the present invention, the position and angle of the test substrate as well as the glass seated on the stage for parallel alignment of the glass and the test substrate can be also aligned Therefore, there is no possibility of contact failure due to excellent alignment, and the reordering frequency is also significantly reduced, which greatly reduces the time required for inspecting the display panel.

1 is a perspective view showing a conventional inspection device;
2 is an enlarged view of a cell of glass;
3 is a view showing a state in which the glass is misaligned with the test substrate;
4 is a perspective view illustrating a display panel inspecting apparatus in which an object to be inspected and a test substrate are aligned according to an exemplary embodiment of the present invention;
5 is a perspective view showing a cross section of the glass stage module of FIG. 4;
FIG. 6 is an enlarged perspective view of the glass aligner of FIG. 5; FIG.
7 is an exploded perspective view illustrating an exploded view of the test module of FIG. 4;
8 is a perspective view illustrating a state in which the test module of FIG. 7 is mounted;
9 is a bottom perspective view showing the glass stage module and the test module viewed from the bottom;
10 is a flowchart illustrating a method of controlling a display panel inspecting apparatus in which an object to be inspected and a test substrate are aligned according to another embodiment of the present invention; And,
11 is a view showing a state in which the position is corrected so that the test substrate is in parallel with the glass in accordance with the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In describing the present embodiment, the same designations and the same reference numerals are used for the same components, and further description thereof will be omitted.

In the description of this embodiment, the object under test will be described with an example as a cell in which a pattern array used for an LCD panel is formed. However, in the present invention, the inspected object is not limited to the cell and is referred to as a meaning including a broad flat panel display.

The display panel inspection apparatus (hereinafter, referred to as an "inspection apparatus" for convenience of description) in which an object to be inspected and a test substrate is aligned according to the present embodiment is illustrated in FIG. 4, the main frame 110. And a glass stage module 120 and a test module 140.

The main frame 110 is a component for supporting the components included in the inspection apparatus 100 such as the glass stage module 120 and the test module 140 while being placed on the installation surface of the inspection apparatus.

The glass stage module 120 is a component to which the imported glass 10 is seated, and moves the glass 10 with respect to the main frame 110.

Meanwhile, the glass 10 will be described in more detail. As shown in FIG. 2, a plurality of cells 12 having a pattern array are formed, and one side of the cell 12 will be described later for input / output of a signal. The connection circuit pattern 14 in contact with the probe unit 164 is formed. In addition, a glass align mark 16 for aligning the glass is formed at each corner of the glass 10, and a cell align mark 18 for aligning the edge of the cell 12. Is formed.

As shown in FIGS. 4 and 5, the glass stage module 120 includes a stage base 130, a single axis driver 122, a two axis driver 124, a lifting unit 126, and a rotating unit 128. It can be made, including.

The stage base 130 is a component on which the glass 10 is to be seated, and a flat surface is formed on an upper surface of the glass 10 on which the glass 10 is placed, and may be configured to suck and fix the glass 10.

The one axis driver 122 is a component that moves the stage base 130 in one direction with respect to the main frame 110. In this embodiment, the one-axis drive unit 122 will be described by taking an example that is formed to move the stage base 130 in the y-axis. The y-axis refers to one side direction parallel to the ground.

The two-axis drive unit 124 is a component for moving the stage base 130 in the other direction perpendicular to the one direction with respect to the main frame 110. In the present embodiment, the other side means the x-axis direction.

In addition, the lifting unit 126 may be configured to raise and lower the stage base 130 in the vertical direction (z-axis direction). In the present exemplary embodiment, the lifting unit 126 may include a lower part in which the lifting part is coupled to the two-axis driving part, an upper part that is divided from the lower part, and supports the stage base 130. Motor and the like.

In addition, the rotating unit 128 may be configured to rotate the stage base 130 in a direction perpendicular to the ground (ie, in a direction horizontal to the ground).

The one-axis drive unit 122, the two-axis drive unit 124 and the lifting unit 126 and the rotating unit 128 has a number of known structures, so those skilled in the art will be able to know the structure thereof will not be described in detail. do.

In addition, a glass aligner 135 may be further provided at an edge of the stage base 130.

The glass aligner 135 is a component for aligning the glass 10 placed on the stage base 130. As shown in FIGS. 5 and 6, the glass aligner 135 may include an alignment pin 136, a slider 137, and a rail 138.

In addition, a plurality of grooves 132 through which the alignment pin 136 of the glass aligner 135 may move may be formed at a position where the glass aligner 135 of the edge of the stage base 130 is provided. have.

That is, as a driving source such as a motor or a solenoid (not shown), the alignment pin 136 is moved to the inside of the stage base 130 as the slider 137 slides the rail 138, and the glass 10 To align on the stage base 130.

The glass 10 may be fixed to the stage base 130 after being aligned.

Meanwhile, as illustrated in FIGS. 4 and 7 to 8, the test module 140 is provided on the movement path of the glass stage module 120 and is seated on the glass stage module 120. A probe unit 164 is provided to contact the cell 12 of the glass 10 to mount the test substrate 160 to inspect the cell 12, and the probe unit 164 is mounted on the glass 10. ) Is a component that aligns the position of the test substrate 160 to be aligned with the cell 12 of.

As illustrated in FIG. 7, the test board 160 is provided on a board 162 on which circuits or equipment are mounted, and on the front side of the board 162, and contacts the cells 12 of the glass 10. And a probe unit 164 making electrical contact. Although not shown in the drawings, a probe pin (not shown) contacting the connection circuit pattern 14 of the cell 12 may be formed on a surface of the probe unit 164 that contacts the glass 10. .

The test substrate 160 as described above may be mounted in various forms depending on the type of the glass 10 to be inspected, the size of the cell 12, the number of the formed cells, and the type of inspection.

Meanwhile, as illustrated in FIG. 7, the test module 140 may include a subframe 142, a fixing plate 144, a substrate mounting stage 146, and a test substrate alignment unit.

The subframe 142 is provided at one side of the mainframe 110. That is, the glass stage module 120 may be provided on the side to be transferred in the y-axis direction, and the glass stage module 120 on which the glass 10 is mounted may be secured to secure a space in which the glass stage module 120 may be moved below. The stage module 120 may be formed to rise above the transfer path.

The fixing plate 144 may be fixed to an upper side of the subframe 142 to form a space in which the glass stage module 120 moves. In addition, the fixing plate 144 may form an opening 145 therein.

The substrate mounting stage 146 is provided below the fixing plate 144, and the test substrate 160 is coupled to and fixed to the test substrate 160. The substrate mounting stage 146 may also have an opening 147 communicating with the opening 145 of the fixing plate 144.

The test substrate aligning unit moves the substrate mounting stage 146 with respect to the fixing plate 144 and the cell 12 of the glass 10 mounted on the glass stage module 120 and the test substrate. As a component for aligning the probe unit 164 of the 160, the cell alignment camera 149, the substrate mounting stage aligner 150, and a controller (not shown) may be formed.

The cell alignment camera 149 is provided in the fixing plate 144, and the glass stage module 120 is provided through openings 145 and 147 formed in the fixing plate 144 and the substrate mounting stage 146, respectively. The cell align mark 18 formed on the glass 10 seated on the element is sensed. Each of the openings 145 and 147 is large enough to allow the cell alignment camera 149 to sense the cell alignment marks 18 formed on the glass 10 positioned below the test substrate 160. It can be formed in size.

In addition, the substrate mounting stage aligner 150 may be provided between the fixing plate 144 and the substrate mounting stage 146 to provide the substrate mounting stage 146 with respect to the fixing plate 144. To move or rotate in a direction.

The control unit controls the transfer amount of the substrate mounting stage aligner 150 according to the error amount of the cell alignment mark 18 and the alignment point measured by the cell alignment camera 149 to perform the glass stage module. The cell 12 of the glass 10 seated on the 120 is made to align the probe unit 164 of the test substrate 160.

The substrate mounting stage aligner 150 as described above is provided with a Y-axis rail 152 provided to be transported in one direction (Y-axis direction) and an X-axis rail 154 provided to be transported in the other direction (X-axis direction). And a hinge portion 156 provided below the X-axis rail 152 and the Y-axis rail 154 and rotatably coupled to the substrate mounting stage 146. In addition, although not shown, a movable part (not shown) for moving the X-axis rail 154 and the Y-axis rail 152 may be included. The movable part (not shown) may include a motor, a rack, and a pinion gear. In addition, the X-axis rail 154 or the Y-axis rail 152 as described above may be fixed to the substrate mounting stage 146, the hinge portion of the substrate mounting stage 146, the hinge portion 156 A groove 148 inserted and fixed may be formed.

In the present exemplary embodiment, the substrate mounting stage aligner 150 is mounted on each corner of the fixing plate 144 and the substrate mounting stage 146, but the present invention is not limited thereto. As long as the degree of freedom of the mounting stage 146 is not limited, two or more may be mounted.

That is, as shown in Figure 8, if all of the substrate mounting stage aligner 150 as described above is transferred in the same direction in the X-axis or Y-axis, the substrate mounting stage 146 is also transferred by the corresponding amount in the corresponding direction If the substrate mounting stage aligner 150 does not have the same displacement amount in the X-axis or the Y-axis, the substrate mounting stage 146 rotates by the difference. Accordingly, the controller may correct the position of the substrate mounting stage 146 by individually controlling the plurality of substrate mounting stage aligners 150.

The substrate mounting stage aligner as described above does not have to be large in nature, and it is preferable that the micro displacement can be precisely moved instead. In the present embodiment, the substrate mounting stage aligner is described as having a UVW driving method as an example, but the present invention is not necessarily limited thereto and may be implemented in other driving methods.

In addition, the control unit may be a component that controls not only the substrate mounting stage aligner 150 but also the overall operation of the inspection apparatus of the present embodiment, such as the glass stage module 120 and the test module 140. In addition, the mainframe 110 may be integrally provided or may be configured as an external computer provided separately.

4, the reference position recognition camera unit 170 may be further provided at the point where the glass stage module 120 of the test module 140 is transferred. The reference position recognition camera unit 170 is a component for recognizing the glass alignment mark 16 of the glass 10 seated on the glass stage module 120, and the glass 10 and the test substrate 160. The glass stage module 120 recognizes the reference position when the glass stage module 120 is transferred before the contact, and is a component for aligning the position between the glass 10 and the test module 140.

The reference position recognition camera unit 170 as described above is provided with a glass formed on the glass 10 while sliding on the column 172 and the column 172 provided to cross in the X-axis direction of the main frame 110. And a reference position recognition camera 174 that recognizes the alignment mark 16.

In addition, the glass stage module 120 may further include a probe pin camera 129 as shown in FIG. 9.

At least two probe pin cameras 129 are provided at positions spaced apart from each other on the side of the glass stage module 120 facing the test module 140, and each of the probe pin cameras 129 senses a designated point of the test substrate 160. In order to measure parallelism between the stage base 130 of the glass stage module 120 and the test substrate 160.

In the present exemplary embodiment, the probe pin camera 129 may be an outer side surface of each of the plurality of probe units 164 provided at the front end of the test substrate 160, that is, the left surface of the probe unit 164 provided at the leftmost side. And, it may be provided to recognize the right side of the probe unit 164 provided on the right side.

Alternatively, the probe pin camera 129 is provided on one side of the glass stage module 120 facing the test module 140, while the two-axis drive unit 124 of the glass stage module moves in the X-axis direction, The one probe pin camera 129 has a left side of each outer point of the plurality of probe units 164, that is, a left side of the probe unit 164 provided on the leftmost side, and a right side of the probe unit 164 provided on the rightmost side. It may be provided to recognize.

As shown in FIG. 7, the probe unit 164 and the cell (top) of the fixing plate 144 through the openings 145 and 147 of the fixing plate 144 and the substrate mounting stage 146. 12 may further include a contact camera 180 to monitor the contact area.

The contact camera 180 may be installed on a rail provided on the fixing plate to be slidable in the width direction (X-axis direction) of the test substrate 160 to monitor contact points of the plurality of probe units 164. It may be provided to.

Hereinafter, a method of controlling the display panel inspecting apparatus in which the inspected object and the test substrate are aligned according to the present invention will be described.

As shown in FIG. 10, a control method of a display panel inspecting device in which an object to be inspected and a test substrate are aligned according to the present exemplary embodiment is carried out in a loading step S110, a glass alignment step S120, a moving step S130, and the like. A stage alignment step S140, a test substrate alignment step S150, a contact step S160, and an inspection performing step S170 may be performed.

The importing step (S110) is a step of bringing the glass 10, in which the cell 12 is formed, into a picker or a robot not shown in the glass stage module 120. That is, in this step, the glass 10 is placed on the top surface of the stage base 130 of the glass stage module 120.

The glass aligning step (S120) is a step of aligning the glass 10 placed on the stage base 130 to be placed in the correct position of the stage base 130. That is, the glass aligner 135 illustrated in FIGS. 4 and 5 may be operated to align the glass 10 to be positioned on the stage base 130.

In the moving step S130, the glass stage module 120 in which the glass 10 is aligned is moved to a reference point in order to contact the test substrate 160. Since the test substrate 160 is positioned above the glass stage module 120, the glass stage module 120 may be positioned below the test module 140 at the reference position.

In this case, the reference point is a glass alignment mark 16 in which the reference position recognition camera unit 170 provided between the glass stage module 120 and the test module 140 is seated on the glass stage module 120. ) May be a location for sensing.

That is, the reference position recognition camera 174 provided at the fixed position in the Y-axis direction on the main frame 110 as described above recognizes the glass alignment mark 16, so that the glass 10 is the main frame It can be aligned to be located at the reference point in the Y-axis direction on the (110).

The stage alignment step (S140) is a step of aligning the parallel between the stage base 130 and the test substrate 160. The stage alignment step S140 may include a first parallel measurement step S142 and a first parallel alignment step S144.

In the first parallel measurement step S142, the probe pin camera 129 illustrated in FIG. 9 senses respective designated points of the test substrate 160 to determine the stage base 130 and the test substrate 160. It is a step of measuring the parallelism and the error.

That is, as the plurality of probe pin cameras 129 sense a plurality of points of the test substrate 160, the parallel error amount between the glass stage module 120 and the test substrate 160 may be measured, and Accordingly, as the amount of rotation of the stage base 130 input to the controller, the parallelism between the stage base 130 and the test substrate 160 and an error amount may also be calculated.

In the first parallel alignment step S144, the stage base 130 and the test substrate 160 are rotated by the control unit by rotating the stage base 130 by the amount of error measured in the first parallel measurement step S142. This step is parallel.

On the other hand, despite the parallel alignment between the stage base 130 and the test substrate 160 in the stage alignment step (S140), the error of the glass stage module 120 itself and the glass 10 is the stage base 130 ), The glass 10 and the test substrate 160 may not be correctly aligned due to an error in the position of the glass.

Therefore, in the present exemplary embodiment, a test substrate alignment step (S150) for aligning the cell 12 of the glass 10 and the test substrate 160 by correcting the position of the test substrate 160 may be performed. .

The test substrate alignment step S150 may include a second parallel measurement step S152 and a second parallel alignment step S154.

In the second parallel measurement step (S152), the cell alignment camera 149 provided on the fixing plate 144 of the test module 140 illustrated in FIG. 7 is seated on the glass stage module 120 and tested. The cell alignment mark 18 formed on the glass 10 transferred to the lower side of the module 140 is sensed to measure the parallel amount error between the cell 12 of the glass 10 and the test substrate 160. .

Since the cell alignment camera 149 is provided on both left and right sides of the fixing plate 144, the cell alignment marks 18 of the plurality of points spaced apart from each other formed on the glass 10 are sensed. In addition, the parallel between the glass 10 and the fixing plate 144 and the amount of parallel errors can be measured.

On the other hand, the control unit stores the position of the fixing plate 144 of the substrate mounting stage 146 to which the test substrate 160 is coupled, so that the glass 10 in the second parallel measurement step (S152). And the parallel with the test substrate 160 and the amount of parallel error can be calculated.

And, in the second parallel alignment step (S154), the control unit adjusts the transfer amount of the substrate mounting stage aligner 150 by the error amount measured in the second parallel measurement step (S152) to the glass stage module ( The cell 12 of the glass 10 seated on the 120 and the probe unit 164 of the test substrate 160 may be aligned.

That is, as shown in FIG. 11, the substrate mounting stage aligner 150 finely corrects the substrate mounting stage 146 to which the test substrate 160 is coupled, and thus, the test substrate 160 and the glass 10. ) Is parallel.

In the test substrate alignment step S150, when the alignment of the substrate and the test substrate 160 is completed, the contact step S160 is performed. In the contact step (S160), the lifting unit 126 of the glass stage module 120 operates to raise the stage base 130, whereby the cell 12 of the glass 10 placed on the stage base 130 is placed. ) And each probe unit 164 of the test substrate 160 are contacted to electrically connect the cell 12 of the glass 10 to the test substrate 160.

After the contact step (S160) as described above, the test performing step (S170) in which the test of the cell 12 is performed by the test substrate 160 is performed.

When the inspection of the cell 12 contacted to the test substrate 160 is completed in the inspection performing step S170, the stage base 130 is lowered, and then the cell 12 of the inspection section is moved to the probe unit. After the stage base 130 is moved in parallel so as to move to the lower side of the 164, the glass base 10 is moved up and the cell 12 of the corresponding test section contacts the probe unit 164. Inspection of all the cells 12 formed on the glass 10 may be repeated by repeating the entire cells 12 formed on the glass 10.

In addition, the contact camera 180 relays the contact status to a worker through a monitor (not shown) separately provided by continuously monitoring the contact points of the probe unit 164 and the cell 12 of the test substrate 160. can do.

It will be apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit or scope of the invention as defined in the appended claims. It is obvious to them. Therefore, the above-described embodiments should be regarded as illustrative rather than restrictive, and thus, the present invention is not limited to the above description and may be modified within the scope of the appended claims and their equivalents.

10: glass 12: cell
14: Connection circuit pattern 16: Glass alignment mark
18: cell alignment mark
100: display panel inspection device for alignment of the test object and the test substrate
110: main frame 120: glass stage module
122: 1-axis feed section 124: 2-axis feed section
126: lifting unit 128: rotating unit
129: probe pin camera 130: stage base
135: glass aligner 140: test module
142: sub-frame 144: fixed plate
146: substrate mounting stage 148: groove
149: cell alignment camera 150: substrate mounting stage aligner
152: Y-axis rail 154: X-axis rail
156: hinge portion 160: test substrate
162: board 164: probe unit
170: reference position recognition camera unit 172: column
174: reference position recognition camera

Claims (15)

Mainframe;
A glass stage module provided on the main frame and having a glass on which at least one cell is formed, and moving the glass with respect to the main frame;
A probe unit is provided above the movement path of the glass stage module, and is provided with a probe unit that contacts a cell of a glass seated on the glass stage module. A test module for aligning a position of the test substrate to align with a cell;
, ≪ / RTI >
The test module,
A sub frame provided at one side of the main frame;
A fixing plate provided on an upper side of the subframe to form a space in which the glass stage module is moved;
A substrate mounting stage provided below the fixing plate and to which the test substrate is fixed; And
A test substrate aligning unit which moves the substrate mounting stage with respect to the fixing plate to align the cells of the glass seated on the glass stage module with the probe units of the test substrate;
Display panel inspection apparatus for alignment of the test object and the test substrate comprising a. The method of claim 1,
The glass stage module,
A stage base on which the glass is mounted;
A one-axis drive unit which moves the stage base in one direction with respect to the main frame;
A two-axis drive unit which moves the stage base in the other direction perpendicular to the one direction with respect to the main frame;
An elevating unit for elevating the stage base in a vertical direction;
A rotating part rotating the stage base about an axis perpendicular to the ground;
Display panel inspection apparatus for alignment of the test object and the test substrate comprising a. The method of claim 2,
The glass stage module,
And a plurality of glass aligners which are provided in a plurality of edge portions of the stage base to align the glass placed on the stage base. The method of claim 2,
The glass stage module,
A test pin provided on a side of the glass stage module facing the test module, the probe pin camera configured to sense at least two designated points of the test substrate and measure parallelism between the stage base and the test substrate Display panel inspection device for alignment with the test substrate. The method of claim 2,
The glass stage module,
Probe pin camera which is provided with at least two at a position spaced apart from each other on the side facing the test module of the glass stage module, each sensing a specified point of the test substrate, to measure the parallel between the stage base and the test substrate Display panel inspection apparatus for alignment of the test object and the test substrate made further comprising. The method of claim 1,
The panel inspection for the display, which is provided between the glass stage module and the test module, and further includes a reference position recognition camera unit configured to sense an alignment mark of the glass seated on the glass stage module. Device. delete The method of claim 1,
The test substrate alignment unit,
A cell alignment camera provided on the fixing plate and configured to sense a cell alignment mark formed on the glass seated on the glass stage module;
A substrate mounting stage aligner provided between the fixing plate and the substrate mounting stage to move or rotate the substrate mounting stage in one side and the other direction with respect to the fixing plate;
By adjusting the transfer amount of the substrate mounting stage aligner according to the error amount of the cell alignment mark and the alignment point measured by the cell alignment camera to align the cells of the glass seated on the glass stage module with the probe unit of the test substrate. Control unit;
Display panel inspection apparatus for alignment of the test object and the test substrate comprising a. The method of claim 8,
The substrate mounting stage aligner,
Are provided at at least two or more points of the substrate mounting stage, respectively,
The upper side is fixed to the fixing plate, the lower side is rotatably coupled to the substrate mounting stage and provided to be slidable to one side and the other side,
And an object to be tested and a test substrate arranged to move or rotate the substrate mounting stage to one side and the other side according to the amount of sliding of the plurality of substrate mounting stage aligners to one side and the other side. The method of claim 1,
The test module,
And a contact camera for monitoring a contact point of the cell of the glass and the probe unit. Importing the glass into the glass stage module;
A glass alignment step of aligning the glass to a stage base;
A movement step in which the glass stage module is moved to a reference point below the test substrate mounted on the test module;
A stage alignment step of aligning parallel of the stage base and a test substrate;
Test substrate alignment to sense the parallelism error between the cell of the glass and the test substrate by sensing the cell alignment mark formed on the glass seated on the glass stage module and to adjust the parallel between the glass cell and the test substrate by moving the test substrate step;
A contact step in which the stage base is raised to contact the cells of the glass and the test substrate to electrically connect the cells of the glass and the test substrate;
An inspection performing step of inspecting the cell;
And,
The test substrate alignment step,
A second parallel measuring step of measuring, by a cell alignment camera, a cell alignment mark formed on the glass seated on the glass stage module to measure a parallel amount error between the cell of the glass and the test substrate;
A second parallel alignment step of adjusting the transfer amount of the substrate mounting stage aligner by the error amount measured in the second parallel measurement step to parallel the cell of the glass seated on the glass stage module with the test substrate;
Control method of the panel inspection apparatus for a display is made, including the test object and the test substrate made of a. The method of claim 11,
The glass alignment step,
And a glass aligner operating to align the glass to the stage base, wherein the test object and the test substrate are aligned. The method of claim 11,
In the moving step,
The reference point is,
The reference panel for detecting the reference position camera unit provided between the glass stage module and the test module is a position for sensing the alignment mark of the glass seated on the glass stage module, the display panel is aligned with the test object Control method of inspection device. The method of claim 11,
The stage alignment step,
At least two probe pin cameras provided at positions spaced apart from each other on the side facing the test module of the glass stage module sense respective designated points of the test substrate to measure whether the stage base and the test substrate are parallel or error. A first parallel measurement step;
A first parallel alignment step of correcting the position of the stage base by the amount of error measured in the first parallel measurement step to make the stage base parallel to the test substrate;
Control method of the panel inspection apparatus for a display is made, including the test object and the test substrate made of a. delete

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