KR100822223B1 - Repair Apparatus For Flat Panel Display - Google Patents

Abstract

The present invention relates to a repair apparatus of a flat panel display substrate circuit,

A repair table, a stage on which a substrate to be inspected is seated, an X-axis moving means mounted at two spaces along the X-axis of the repair table, and connected to an upper surface of the X-axis moving means, two being spaced apart from each other in the Y-axis direction A Y-axis moving unit, an optical unit for inspecting a defect portion of the inspection target substrate, a laser unit for repairing the defect region, and a first inspection unit for inspecting the opening / shorting of the repaired substrate circuit. It is characterized in that it comprises a repair unit mounted on the Y-axis transport means.

In addition, the repair apparatus of the flat panel display substrate circuit according to the present invention is further characterized by further comprising a second inspection unit mounted to the Y-axis moving unit to which the repair unit is not mounted.

The repair apparatus of the flat panel display substrate circuit of the present invention further includes an inspection unit for inspecting the open / short status of the circuit, so that the repair / exchange of the repaired substrate circuit can be immediately determined after performing the repair process. .

Repair, inspection, open / short check.

Description

Repair App for Flat Display Board Circuits {Repair Apparatus For Flat Panel Display}

1 is a view showing a conventional repair apparatus,

2 is a view showing a repair apparatus of the present invention,

3 is an exploded view showing the components of the inspection unit of the present invention,

4 is a view showing an assembly state of the inspection unit of the present invention,

5 is an exploded view illustrating the multi-probe unit of the present invention.

<Representative symbols in the drawings>

10: repair device 100: inspection unit

110: camera unit 120: probe vertical movement means

130: probe horizontal movement means 140: probe movement means

150: multi probe section 160: single probe section

200: laser unit 300: optical unit

400: X axis moving means 500: Y axis moving means

600: repair table 700: stage

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a repair apparatus for a flat panel display substrate circuit, and more particularly, to a repair apparatus for a flat panel display substrate circuit configured to perform an open / short test of the circuit at the same time as the repair of the substrate circuit.

Flat panel displays are categorized into cathode ray tube (CRT) displays and liquid crystal displays (LCDs). Among them, LCDs have recently been in the spotlight due to their low power consumption and light weight. have.

A flat panel display such as an LCD is composed of an array substrate, an opposing substrate, a liquid crystal layer, etc. Among these, a plurality of pixel electrodes arranged in a matrix shape and a plurality of scan lines and columns arranged along rows of the plurality of pixel electrodes. A plurality of signal lines are formed along the line.

On the other hand, a defect may occur such that an electrical signal line is overlapped in the manufacturing process of the array substrate. If a defect occurs, a correct image cannot be formed. Therefore, the overlapping signal lines should be cut so as not to overlap each other. This process is called "repair".

1 shows a repair apparatus 1 used in a conventional flat panel display. As shown in FIG. 1, the conventional repair apparatus 1 includes a stage supporting a substrate to be repaired, and a laser scope 3 provided above the stage to enlarge an image of the substrate and repair a defective area by using a laser beam. And a moving means (not shown) for moving the light source 5 and the stage to the X-axis and the Y-axis to transmit light to the laser scope.

Looking at a method of repairing a substrate using the conventional repair apparatus 1, when a substrate is seated on a stage by a carrier robot (not shown) and defect region information is input by an external inspection device, The stage is moved by using moving means (not shown) so that the defective area can be located under the laser scope 3 according to the input information. At this time, the position of the stage is adjusted while monitoring the information of the defect area in the laser scope by the light transmitted from the light source 5. When the position of the substrate is determined by the movement of the stage, a portion of the defect area is cut by the laser beam projected by the laser scope 3 to repair the substrate. When the repair process is completed, the substrate is discharged by the carrier robot and an inspection process for inspecting the open / short circuit of the circuit is performed.

In the case of using such a conventional repair apparatus, when the coordinate system of the inspection apparatus and the coordinate system of the repair apparatus do not coincide, the repair apparatus may not recognize the defect information transmitted from the inspection apparatus and carry out the defective substrate.

In addition, when using the conventional repair apparatus as described above, there is a problem that the process time is long and the production rate is reduced because the repair process of the substrate and the inspection process of inspecting the opening / short circuit of the substrate circuit must be performed separately.

In order to solve the above problems, the present invention provides a flat panel display repair apparatus including a repair unit having an optical unit, a laser unit, and an inspection unit to perform a defect inspection process, a repair process, and an inspection process all at once. The aim is to shorten the process time, lower the defect rate, and reduce the device volume.

In order to achieve the above object, the present invention provides a repair table, a stage on which the substrate to be inspected is seated, two X-axis moving means mounted on the repair table to be spaced apart along the X-axis, and connected to an upper surface of the X-axis moving means. And Y-axis moving means which are spaced apart from each other in the Y-axis direction, an optical unit for inspecting a defect site of the test target board, a laser unit for performing repair of the defect site, and opening of the repaired substrate circuit. The first inspection unit for inspecting the short circuit is characterized in that it comprises a repair unit mounted to one of the Y-axis transport means.

In addition, the first inspection unit of the present invention, the camera unit for checking whether the probe and the substrate contact, the multi-probe unit, the probe moving means for moving the single probe unit in the vertical and horizontal directions, the gate pad or A single probe unit configured to read a data pad and a multi-probe unit including a plurality of probes to simultaneously read a plurality of electrode pads are characterized by being made.

In addition, the probe moving device of the present invention is characterized in that it comprises a horizontal moving device for moving the probe unit forward, backward, and a vertical moving device for moving up and down.

 In addition, the repair apparatus of the present invention is characterized in that it further comprises a second inspection unit mounted to the Y-axis moving means that the repair unit is not mounted.

Hereinafter, specific components of the present invention will be described with reference to the drawings.

2 is a view showing a repair apparatus of the present invention. As shown in FIG. 2, the flat panel display repair apparatus 10 of the present invention includes a repair table 600, a stage 700 provided on the repair table, and a substrate 700 on which the repair target is to be seated. An optical unit 300 for inspecting a defective defect area, a laser unit 200 for projecting a laser beam to repair a defective region of the substrate, and a first inspection unit 100 for inspecting an open / short circuit of the repaired substrate circuit. And a repair unit consisting of X, X-axis moving means 400 and Y-axis moving means 500 for moving the repair unit to the X-axis and the Y-axis.

Although not shown, the repair table 600 may include vibration damping means for removing vibrations that may occur from outside and inside. The X-axis moving means 400 is mounted on the upper surface of the repair table 600 along the X-axis direction, and the X-axis moving means is disposed and mounted to be spaced apart from each other in the X-axis direction of the repair table ( 410 and an X-axis rail 420 provided on an upper surface of the X-axis support and sliding the Y-axis support to be described later in the X-axis direction.

On the other hand, the upper surface of the X-axis support 410 is provided with a Y-axis moving means 500 in a direction perpendicular to the X-axis support. The Y-axis moving unit 500 is connected to the X-axis rails at both ends thereof, the Y-axis support 510 configured to slide along the X-axis rail, and the Y-axis formed on the side of the Y-axis support in the Y-axis direction. A rail 520 and a Y-axis rail block 530 attached to the Y-axis rail and slid along the Y-axis rail and to which the repair unit is mounted.

A stage 700 for supporting a substrate is provided on an inner side surface of the repair table that is enclosed by the X-axis moving means 400 and the Y-axis moving means 500.

The optical unit 300 is for inspecting a defect area that may be formed on a flat panel display substrate, and is composed of a light source 310, a lens 320, and a sensor (not shown). When light is irradiated onto the substrate from the light source 310, the light is reflected on the substrate, and the light reflected from the substrate passes through the lens 320 and is transmitted to the sensor. The sensor checks for defects using the difference in the amount of light reflected from the substrate.

When using the optical unit 300 of the present invention, since there is no direct contact with the substrate to determine whether there is a defect, there is little fear of damage to the substrate, the error that can occur because the coordinate system of the inspection apparatus and the coordinate system of the repair apparatus does not match By removing, the defective rate can be significantly reduced.

The laser unit 200 is for removing defects on a flat panel display substrate, and includes a laser oscillator 210 for generating a laser beam, a condenser lens 220 for condensing the laser beam, and a laser head for providing a movement path of the laser beam. 230. The laser beam generated from the laser oscillator 210 cuts the overlapping signal line and repairs a defect of the substrate.

The first inspection unit 100a is for inspecting an open / short circuit of the repaired circuit board, and the first inspection unit 100a includes a camera unit for checking whether the probe is in contact with the substrate, and a multi-probe unit. And a probe moving unit capable of moving the single probe unit vertically and horizontally, a single probe unit configured to read a gate pad or a data pad, and a plurality of probes capable of simultaneously reading a plurality of electrode pads. It consists of a probe part. Components constituting the inspection unit of the present invention are shown in FIGS. 3 and 4. The detailed configuration of the inspection unit will be described later.

Meanwhile, the optical unit 300, the laser unit 200, and the first inspection unit 100a form one repair unit as shown in FIG. 2. The repair unit is mounted on the Y-axis rail block 530 of the Y-axis support 510 on one side, and configured to move along the Y-axis rail 520.

On the other hand, the repair apparatus of the present invention preferably further comprises a second inspection unit (100b) is mounted to the Y-axis moving means that the repair unit is not mounted.

The second inspection unit 100b is mounted on the Y-axis rail block of the Y-axis support, on which the repair unit is not mounted, so that the second inspection unit 100b can move in the X-axis and Y-axis directions similar to the repair unit. In addition, the configuration of the second inspection unit 100b is the same as that of the first inspection unit attached to the repair unit. In this case, the multi-probe of the first inspection unit contacts the pixel electrode pad of the repaired portion, the single probe of the second inspection unit contacts the gate pad or the data pad, and measures the resistance values measured by the two probes. Open / short is checked. If two inspection units are provided in this way, the inspection can be performed more efficiently.

Figure 3 is an exploded view illustrating the components of the inspection unit of the present invention, Figure 4 is a view showing the assembled state of the inspection unit of the present invention.

The inspection unit 100 of the present invention may move the camera unit 110, the multi probe unit 150, and the single probe unit 160 in the vertical and horizontal directions to check whether the probe is in contact with the substrate. Probe movement means 140, a single probe unit 160 configured to read a gate pad or a data pad and a multi-probe unit 150 having a plurality of probes to simultaneously read a plurality of electrode pads It is.

The camera unit 110 is for checking the contact state between the probe and the substrate. The camera unit 110 of the present invention is positioned above the probe units 150 and 160, and checks a contact state between the probe and the substrate, and the camera 112 is multiplied with the single probe unit 160. It is composed of a camera transfer means for moving the camera in the horizontal direction so that all of the probe unit 150 can be photographed.

The camera transfer means is a camera transfer rail 116, one side thereof is connected to the camera, the other side is composed of a camera connection block 114 is connected to the camera transfer rail, sliding along the camera transfer rail. desirable.

Probe movement means 140 is connected to the multi-probe portion and a single probe portion, for vertically and horizontally moving the probe portion, the probe transfer means of the present invention vertical movement to move the probe portion up and down It is preferably composed of the means 120 and the horizontal movement means 130 to move back and forth.

Vertical movement means 120 of the present invention may be configured as a ball screw drive.

The horizontal movement means 130 of the present invention may be composed of a horizontal rail 132 and a horizontal rail block 134.

By providing probe moving means capable of moving the probe vertically and horizontally, the repair apparatus of the present invention can accurately inspect a desired point on the substrate.

On the other hand, the single probe unit 160 is composed of a single probe 162 in contact with the data pad or the gate pad for the open / short inspection of the substrate circuit. The single probe unit of the present invention preferably further includes a single probe basket 164 connecting the single probe 162 and the probe movement means 140.

A detailed configuration of the multi probe unit 150 is illustrated in FIG. 5.

The multi-probe unit 150 is for enabling simultaneous measurement of resistance of a plurality of pixel electrode pads regularly arranged on a substrate. The multi-probe unit 150 accommodates a plurality of probes 152 and the plurality of probes, A probe assembly 151 configured to protrude the probes if necessary, an axial drive 153 positioned on the probe assembly to allow the probes to protrude if necessary, and whether the probe is in contact with the substrate It consists of a sensor 155 for checking.

Meanwhile, the multi-probe unit 150 of the present invention further includes a multi-probe basket 157 which connects the components and is attached to the probe moving unit 140 to allow the multi-probe unit to move in the vertical and horizontal directions. It is preferable.

Hereinafter, a method of repairing a substrate using the repair apparatus of the present invention will be described.

First, when the substrate is seated on the stage, the optical unit is driven and the substrate is inspected for defects while moving the repair unit. The Y-rail block with the repair unit moves along the Y-axis rail, and the Y-axis support including the Y-axis rail moves along the X-axis rail, allowing inspection of all points on the board.

The light source of the optical unit irradiates light onto the substrate, and the light reflected from the substrate passes through the lens unit and is transmitted to the sensor. The sensor checks for defects using the difference in the amount of light reflected from the substrate. If there is no defect as a result of the inspection, the substrate is taken out.

However, if a defect is found, the repair is performed by moving the repair unit so that the laser unit to be repaired is located above the defect area, and then cutting the overlapped signal line by projecting the laser beam.

After the repair process is completed, the multi-probe of the first inspection unit contacts the pixel electrode pad of the repaired portion, and the single probe of the second inspection unit contacts the gate pad or the data pad, thereby measuring the resistance values measured by the two probes. The board circuit is opened or shorted out. At this time, the sensor and the camera can check whether the probe is in contact with the substrate. The position of the camera may be adjusted according to the position to be observed by using the camera transfer means, and the probe may be precisely moved by using the probe moving device to inspect the desired position accurately.

If no abnormality is found, the substrate should be taken out.

The present invention includes a repair unit composed of an optical unit, a laser unit, and an inspection unit, so that a defect inspection process, a repair process, and an inspection process, which have been conventionally performed separately, can be solved in one device, thereby shortening the production time of a product. The installation space of the device can be greatly reduced, and the product failure rate and productivity can be improved.

In addition, the present invention is provided with a moving means for moving the device in the X-axis and Y-axis directions, so that inspection can be performed at any position on the substrate.

In addition, the present invention includes a multi-probe and a single probe in the inspection unit so that the open / short test of the circuit can be quickly performed, and the adjacent pixel electrode pads can be simultaneously inspected as well as the individual circuit test.

In addition, the present invention includes a moving means for moving the repair unit, a probe moving device capable of moving the probe in a vertical and horizontal direction, and a camera moving means to perform repair and inspection at a precisely desired position.

Claims (8)

Repair table; A stage on which a substrate to be inspected is mounted; X-axis moving means is mounted to the two spaced apart along the X-axis of the repair table; Y-axis moving means connected to the upper surface of the X-axis moving means, the two are spaced apart in the Y-axis direction; And And an optical unit for inspecting a defective portion of the inspected substrate, a laser unit for repairing the defective portion, and a first inspection unit for inspecting opening / shorting of the repaired substrate circuit. A repair unit mounted to the means; It is configured to include more The first inspection unit camera unit for checking whether the probe and the substrate in contact; Probe moving means capable of moving the multi probe portion and the single probe portion in the vertical and horizontal directions; A single probe unit configured to read a gate pad or a data pad; A multi-probe unit having a plurality of probes for simultaneously reading a plurality of electrode pads; Flat panel display substrate repair apparatus comprising a. The method of claim 1, And a second inspection part mounted on the Y-axis moving means which is not mounted with the repair unit. The method of claim 1, The X-axis moving means is an X-axis supporter spaced apart from each other in the X-axis direction of the repair table, A flat panel display substrate repair apparatus comprising an X axis rail portion provided on an upper surface of the X axis support. The method of claim 1, The Y-axis moving means, the Y-axis support is configured so that both ends thereof are connected to the X-axis rail, and slide along the X-axis rail, Y-axis rail formed in the Y-axis direction on the side of the Y-axis support, And a Y-axis rail block attached to the Y-axis rail and slid along the Y-axis rail, to which the repair unit is mounted. delete The method of claim 1, wherein the camera unit And a camera for checking a contact state between the probe and the substrate, and a camera transfer means for moving the camera in a horizontal direction. The method of claim 1, wherein the probe moving means, Vertical moving means for moving the multi-probe unit, the single probe unit up and down,  And the horizontal probe means for moving the multi-probe portion and the single probe portion back and forth. The method of claim 1, wherein the multi probe unit, A probe assembly configured to protrude or receive the plurality of probes; An axial drive body positioned on an upper surface of the probe assembly to allow the probes to protrude; The flat panel display substrate repair apparatus further comprises a sensor for checking whether a plurality of probes in contact with the substrate.

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