200811980 九、發明說明： 【發明所屬之技術領域】 本發明係有關用於平面顯示器面板之修復設備，且尤 係有關用於平面顯示器面板之基材電路的修復設備，其能 修復基材電路及同時檢驗該電路是否電路斷路/短路。 【先前技術】 平面顯示器面板係分類為陰極射線管（CrT)、液晶顯 示器（LCD)等等。因為其消耗較少電力且其重量輕，故LCD 尤係具有優勢且吸引更多注意。 平面顯示器面板（例如L C D)係用一陣列基材、一基 材、及一液晶層構成。該陣列基材包括配置於矩陣形式中 之複數個像素電極，沿成列之複數像素電極配置的複數個 掃描線’及沿成行之複數像素電極配置的複數個信號線。 然而’該陣列基材在製造期間可能有缺陷。例如，電 氣信號線重疊（即短路）。當一陣列基材具有此一缺陷時， 影像無法適當地產生。因此，已重疊之信號線應加以切除， 以防止#號線中之重疊。此一製程係稱為「修復」。 第1圖顯示用於平面顯示器面板之習知修復設備1，包 括· 一平台，其係用於支撐一欲修復之基材；一置於該平 σ上之雷射顯微鏡3，其係用於取得基材之圖片及使用一雷 射束修復該基材之缺陷區；一光源5，其係用於將光供應給 雷射顯微鏡3 ;及一移動構件（未顯示），其係用於在X軸及 5 200811980 Y軸方向上移動該平台。 以下描述一種藉由使用習知修復設備〗 丨/设丞材的方 法。基材係藉由轉移機器臂（未顯示）置於 丁 σ上。當接收 由外部檢驗裝置輸入之缺陷區資訊時，移動構件（未顯示） 基於輸入資訊來移動平台，使得缺陷區 罝於雷射顯微鏡3 下。在此，在調整平台之位置的同時，當 ^田光尿5將光傳送至 缺陷區上時，該缺陷區透過雷射顯微鏡 見J皿現菇來監控。當 平台之位置在基材上決定時，缺陷區 匕 < 某一邹分係由一自 雷射顯微鏡3放射之雷射束切除， 以修设遠基材。在完成修 復製程後，轉移機器臂將基材轉稆絲^ τ 移離開平台。之後，係施 行一檢驗製程以檢驗基材之一電敗β 屯略疋否斷路/短路。 然而，習知修復設備具有以下缺點.200811980 IX. Description of the Invention: [Technical Field] The present invention relates to a repairing apparatus for a flat panel display panel, and more particularly to a repairing apparatus for a substrate circuit for a flat panel display panel, which is capable of repairing a substrate circuit and Also check if the circuit is open/short circuit. [Prior Art] A flat panel display panel is classified into a cathode ray tube (CrT), a liquid crystal display (LCD), and the like. Because it consumes less power and is lighter, LCDs are especially advantageous and attract more attention. A flat panel display panel (e.g., L C D) is constructed using an array of substrates, a substrate, and a liquid crystal layer. The array substrate includes a plurality of pixel electrodes disposed in a matrix form, a plurality of scan lines disposed along a plurality of pixel electrodes arranged in columns, and a plurality of signal lines disposed along a plurality of pixel electrodes in a row. However, the array substrate may be defective during manufacture. For example, the electrical signal lines overlap (ie, short). When an array of substrates has such a defect, the image cannot be properly produced. Therefore, the overlapping signal lines should be cut off to prevent overlap in the # line. This process is called "repair." Figure 1 shows a conventional repair device 1 for a flat panel display panel, comprising: a platform for supporting a substrate to be repaired; a laser microscope 3 placed on the flat σ, which is used for Obtaining a picture of the substrate and repairing a defect area of the substrate using a laser beam; a light source 5 for supplying light to the laser microscope 3; and a moving member (not shown) for X-axis and 5 200811980 The platform is moved in the Y-axis direction. A method of using a conventional repairing device to set up a coffin is described below. The substrate is placed on the sigma σ by a transfer robot arm (not shown). When receiving the defective area information input by the external inspection device, the moving member (not shown) moves the platform based on the input information so that the defective area falls under the laser microscope 3. Here, while adjusting the position of the platform, when the field light urine 5 transmits light to the defective area, the defective area is monitored by a laser microscope to see the J dish. When the position of the platform is determined on the substrate, the defect area 匕 < a Zou sub-system is removed by a laser beam emitted from the laser microscope 3 to repair the far substrate. After the completion of the repair process, the transfer robot arm moves the substrate transfer wire ^ τ away from the platform. Thereafter, an inspection process is performed to verify that one of the substrates has a failure or a short circuit. However, conventional repair equipment has the following disadvantages.
當檢驗裝置之一座標系統未邀体作^ I 界修设設備匹配時，修復 設備可能無法自檢驗裝置讀取基材夕处μ次— 阿之缺陷資訊，從而將有 缺陷基材轉移至下一平台。 因為一基材修復製程及一檢驗基材電路之斷路/短路 的檢驗製程係個別地施行，故製程時間拉長並且降低生產 率。 【發明内容】 因此，本發明已針對以上問題進行，且本發明之一目 的係提供一種用於平面顯示器面板之基材電路的修復設 備，其能同時施行一缺陷偵測製程、一修復製程、及一檢 6 200811980 括 驗製程，該設備包含一修復單元， 因此縮短處理時間、減少缺陷率、 雷射、及一檢驗單元， 及減少設備體積。 依據本發明之一態樣，以上及其他目的可藉由提出 一種用於平面顯示器面板之修復設備而達到，該設備包 含：一修復台·，_平台，其上係置放一欲檢驗之基材；二 X軸移動構件’其係在該修復台之X軸方向上彼此相間隔； 二Y軸移動構件，各連接至各X軸移動構件之一上表面，其 係在Y軸方向上彼此相間隔；及一修復單元，其係安裝在 二Y轴移動構件其中之一處’該修復單元包括二用於偵測 ㈣陷區之光學單元用於修復該缺陷區 之：射’及-用於檢驗該已修復基材電路之斷路 一檢驗單元。 』乐 較佳的係，該第一檢驗單元包 田认认士 s •一相機單元，其係 ;檢一探針是否磨擦該基材；一單一 、 於檢驗問極塾或資料塾；及-多探針:采針單元’其係用 針以同時檢驗複數電極塾；及—探針：70’其具有複數探 在水千及垂直方向上移動多探針用於 較佳的# , 早一移動單元。 較佳的係，本發明之探針移動 動構件，俏爾认—^ 一探針垂直移 -係用於在垂直方向上 秒 一探針單元；及一探# ^ # μ夕捺針單元及該單 久才木針水平移動構 向上移動該多Μ /、係用於在水平方 保針早70及該單—探針單元。 較佳的係，該修復設備更包含 弟—檢驗單元，其係 7 200811980 安裝在未安裝該修復單元之另一γ輛移動構件處 【實施方式】 現將參考附圖詳述本發明之較佳具體實施例。 第2圖顯示根據本發明之平面顯示器面板的修復設備。 如第2圖中所示’修復設備10包括：一修復台6〇〇;— 平台700，其係置於修復台600上，且一 右人修使之基材係置 於其上；一修復單元，其包括一光學單元3〇〇，用於偵測— 可能形成在基材上之缺陷區，-用於藉由將雷射束放射於 基材上以修復其上之缺陷區的雷射2〇〇， 一 久 用於檢驗已修 復基材電路是否斷路/短路之第一檢驗單元1〇〇•一又車 " 構件400 ’其係用於在X轴方向上移動該修復單元；及f動 轴移動構件500 ’其係用於在Y軸方向上移動該修復單 修復台600較佳係配置成包括—振動控制構件（未顯° ° 示）’其係用於移除外部或内部產生之振動。χ軸移動構 400係安裝在600修復台的一上表面上之χ軸方向上。χ軸件 動構件400配置之方法係：χ軸支撐件41〇彼此隔開地安由移 在修復台600之X轴方向上；及一 χ軸軌42〇，其係安裝/ 軸支撐件410之一上表面上，以使γ軸支撐件在χ軸方向When one coordinate system of the inspection device is not invited to match the device, the repair device may not be able to read the defect information from the inspection device at the moment of the substrate, thereby transferring the defective substrate to the lower part. A platform. Since a substrate repair process and an inspection process for detecting the open/short circuit of the substrate circuit are performed individually, the process time is elongated and the productivity is lowered. SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a repairing apparatus for a substrate circuit of a flat display panel, which can simultaneously perform a defect detecting process, a repair process, And a test 6 200811980 inspection process, the device contains a repair unit, thus reducing processing time, reducing defect rate, laser, and a test unit, and reducing equipment size. According to one aspect of the present invention, the above and other objects can be attained by providing a repairing apparatus for a flat display panel, the apparatus comprising: a repairing station, a platform, on which a base to be tested is placed Two X-axis moving members 'which are spaced apart from each other in the X-axis direction of the repair table; and two Y-axis moving members each connected to an upper surface of each of the X-axis moving members, which are in the Y-axis direction And a repairing unit mounted at one of the two Y-axis moving members. The repairing unit includes two optical units for detecting the (four) trapping area for repairing the defective area: shooting 'and-using An inspection unit for inspecting the circuit of the repaired substrate circuit. The preferred unit is the first inspection unit, the acknowledgment s • a camera unit, the system; the detection of whether the probe rubs the substrate; a single, the inspection question or data 塾; and - Multi-probe: the needle unit 'uses the needle to simultaneously test the complex electrode 塾; and — the probe: 70' has a complex probe in the water and the vertical direction to move the multi-probe for better #, one Mobile unit. Preferably, the probe moving the moving member of the present invention, the vertical movement of the probe is used for the second probe unit in the vertical direction; and a probe #^#μ μ捺 unit and The single-time wooden needle moves horizontally to move the multi-turn/, and is used to protect the needle 70 in the horizontal position and the single-probe unit. Preferably, the repairing device further comprises a discriminating unit, which is installed at another γ-moving member in which the repairing unit is not installed. [Embodiment] A preferred embodiment of the present invention will now be described in detail with reference to the accompanying drawings. Specific embodiment. Figure 2 shows a repair apparatus for a flat panel display panel in accordance with the present invention. As shown in Fig. 2, 'repair device 10 includes: a repair station 6;; platform 700, which is placed on the repair table 600, and a substrate repaired by a right person; a unit comprising an optical unit 3〇〇 for detecting a defective area that may be formed on a substrate, and a laser for repairing a defective area thereon by emitting a laser beam onto the substrate 2〇〇, the first inspection unit 1 for checking whether the repaired substrate circuit is open/short, and the member 400' is used to move the repair unit in the X-axis direction; The moving shaft moving member 500' is used for moving in the Y-axis direction. The repair sheet repairing station 600 is preferably configured to include a vibration control member (not shown) for removing external or internal generation. Vibration. The x-axis moving structure 400 is mounted on the upper surface of the 600 repair table in the direction of the x-axis. The boring member moving member 400 is configured in such a manner that the cymbal support members 41 are spaced apart from each other by the X-axis direction of the repairing table 600; and a cymbal rail 42 〇 is attached/shaft support 410 On one of the upper surfaces, so that the γ-axis support is in the direction of the y-axis
滑動，其將解釋於後。 D 同時，Υ軸移動構件500係在乂軸支撐件41〇之垂直方。 上（即Υ轴方向上）’置於χ軸支撐件41〇之一上表面上。向 個Υ轴移動構件500包括：一 γ軸支撐件51〇，其二端連| X轴軌420以沿χ軸軌42〇滑動；_γ軸軌52〇,其係在 200811980 向上形成在Y軸支撐件5 1 0之一側面上；及一 γ軸軌塊5 3 〇， 其係安裝在Υ軸軌5 2 0上以沿Υ轴軌5 2 〇滑動，且其上安裝該 修復單元。 用於支撐該基材之平π? 700係置於修復台6〇〇之一内側 表面，其覆蓋X軸移動構件400及γ軸移動構件5〇〇二者。 光學單元3 00係用於憤測一可能在平面顯示器面板之 基材上形成的缺陷區。光學單元3〇〇包括：一光源31〇、一 透鏡3 2 0、及一感測器（未顯示）。當光源3丨〇玫射光至基材 上時，光係從該基材反射。從基材反射之光係透過透鏡3 2〇 轉移至感測裔。感測器接者藉由讀取反射光量中之差異檢 驗缺陷的存在。 藉由使用本發明之光學單元3 00,可確定基材上是否已 產生任何缺陷，無須直接磨擦基材。因此，可保護基材防 止可能由磨擦產生的損害。同樣地，可藉由移除由於一檢 驗裝置及修復設備間之座標系統的不一致產生之誤差，因 而明顯地減少缺陷率。 雷射200係用於移除在平面顯示器面板之基材上的缺 陷。雷射200包括一用於產生雷射束之雷射振盪器2：[〇, 一 /用於匯聚雷射束之匯聚器透鏡22〇，及一用於提供雷射束路 徑之雷射頭230。自雷射振盪器21〇產生之雷射束切除重疊 的信號線以修復有缺陷之基材。 第檢驗單元10〇a係用於檢驗已修復基材之一電路是 否斷路/短路。第一檢驗單元1〇〇&包括：一相機單元，其係 用於檢查探針是否磨擦基材；一單一探針單元，其係用於 9 200811980 檢驗閘極墊或資料墊；-多探針單元，其係配置以同時檢 驗右干電極墊；及一探針移動構件，其係在垂直及水平方 向上移動多探針單元及單一探針單元。本發明第之一檢驗 單元100a的組件係顯示在第3及4圖中。第一檢驗單元i〇〇a 的構造將詳述於下。 如第2圖中顯示，光學單元3〇〇、雷射2〇〇及第一檢驗單 π 100a組裝成一修復單元。該修復單元之配置方法係將其 女裝在Y軸支撐件510之γ軸軌塊53〇上（位於該平台之一 側），以沿Y軸軌520移動。 在此’本發明之修復設備較佳係可配置成包括一第二 檢驗單元丨〇〇b，其係安裝在未安裝該修復單元之一 γ軸移 動構件5 0 〇處。 第二檢驗單元l〇〇b可安裝在未安裝—修復單元之Υ軸 支撐件510的丫軸軌塊53 0處，因此如同以上描述之修復單 元的運動，係在X軸及Y軸方向上移動。在此，第二檢驗單 元i〇〇b之構造係與安襞在修復單元處的第_檢驗單元丨〇〇a 類似。在此情況下，基材之檢驗係如下：第—檢驗單元i〇〇a 之多探針單元磨擦對應於已修復部分的像素電極；第二檢 驗單元l〇〇b之單一探針單元磨擦一閘極墊或資料塾；I電 阻值係由二探針測量，因而檢驗基材電路之斷路/短路。因 此，當提供使用二檢驗單元100d100b之修復設備時，檢 驗基材可更有效地施行。 第3圖係顯示根據本發明之檢驗單元的組件之分解 圖’且第4圖係顯示本發明之檢驗單元的級裝狀態的透視 10 200811980 圖。 本發明之檢驗單元100包括··— 於檢查探針是否磨擦基材；_單—/目機。早7011 〇，其係用 檢驗閘極墊或資料墊；一多探 钛針早70160，其係用於 針早元150,其具有 檢驗若干電極墊之複數探針；一 、 ；同時 田认产令古S U τ —探針移動構件1 40，苴從 用於在垂直及水平方向上移動多 ％ 、係 單元160。 衣針早元150及單一探針 相機單元m係用於檢查探針 發明的相機單元i 10包括：一 磨“狀i。本 針單元職多探針單元150上機用112’其係、定位在單一探 磨…，及一相機轉移構件，其係用於在水平之 動相機112，以致相機112可拍攝探 一移 相機轉移構件較佳係包 ^及160一者。 連接請，其-側連接至相 移執116，以沿相機轉移軌丨16滑動2且另-側連接至相機轉 探針移動構件1 4 0俦逯垃s々 係連接至多探針單元150及單一探# 早兀160二者，以在水平及 铋針 ㈣。探針移動構件14G較㈣;^上移動探針單元150及 12。，其在垂直方向上：:探:探針垂直移動構件 平移動構件u。，其在水平方：早心及16〇;及-探斜水 你&十方向上移動探針。 本發明之探針垂亩& 驅動裝置。 |移動構件12。可實施為一滚珠標椁 本發明之探針水平移動構件130可配置成包括一 軌132及一水平執塊134。 十 11 200811980 此，铋針移動構件140(立可 使本發明之修復設 ^ 7 +地移動探針） 同時，„。備月4確檢驗基材上所欲的部分。 -欠虹 早一探針單元160係裝設單一探斜 貝料墊或閘極墊以檢 ，其磨檫 明之i 核驗基材電路的斷路/短路。較俨仫+ 月之早1針單元160可更包括單一探針 ^係本發 一探針162連接s押力 知針杧木164，其將單 接至板針移動構件1 4 0。 f5圖顯示多探針單元15G之詳細構造。 多探針單元150係用於同時測 複數像素電極塾的Μ 置在基材上之 152，·1斜Λ 值。多探針單元150包括：複數探針 私針組件丨5 1，其係 偶而要求4 ρ 八係在电態中谷納複數探針！52及當 :求時使探針152突出；一軸啟動器153，其 汲件151之一上表面處， 杏 八 衣 出·男β、 用於田偶而要求時使探針1 52突 S測器155 ’其係用於檢查探針是否磨擦基材。 -方面，本發明之多探針單元15〇較佳係更包括一多 動構二木157,其使以上組件彼此連接，且係附接至探針移 =件⑷，以允許多探針單W在水平及垂直方向上 的方I文中將描述-種使用本發明之修復設備修復一基材 首先’當將基材置於平台上時’一光學單元開始運轉 ，兀接著移動以檢驗基材上是否發生任何缺陷。在其 上安裝修復單元之Υ軸軌塊係沿γ軸軌移動，且具有γ軸軌 之Υ轴支揮件係沿X軸軌移動，因此致能檢驗基材上之每一 12 200811980 當光學單元之光源將光玫射 之光透過透鏡入射至感測器上。=基材上時，從基材反射 量中之差異檢驗缺陷的存在。奋“感測益藉甴讀取反射光 材被轉移至下一平台。 未偵’則到任何缺陷時，基 然而’當偵測到任何缺 射用於缺陷區上施行修復。％移動修復早元以定位雷 除重疊的信號線，從而施行节雷射束在其上放射以切 〜碭修復。 在完成修復製程後，第— 已修復部分的像素電極塾，ι第早…探針單元磨擦 一 第~檢驗單元之單一禊 疋磨檫一閘極墊或資料墊。由-h 休針早 —抵針單元測量之雷 用來檢驗該基材電路是否斷路/ 值係 相機來檢查探針是否磨擦基材。：二’：：感測器及 來調整相…，直至其位於目機轉移構件 %、要檢驗的部分。使用探 針移動構件可精密地移動探針單亓。山 雷女各 此，可針對一確切 而衣部分施行檢驗。 若未曾從該檢驗福測出任何缺陷，則基材被轉 —平台。 卜 ^如以上描述，本發明包括一修復單元，其具有一光學 早疋、-雷射、及-檢驗單元，w同時施行—缺陷偵測製 程，-修復製程，及-檢驗製程。因此可縮短產品製造時 間’減少設備安裝空間及產品缺陷率，且增加生產力。 同樣地，本發明包括一移動構件，其允許該設備在χ 軸及Υ軸方向上移動，從而允許該設備檢驗在其任何部分 處之基材。 刀 13 200811980 此外》本韻^日日 月係配置以在_檢驗輩元中句 單元及-單一探… * 4议驗早兀中包括一多探針 # # # ^他 早兀，以使基材電路之斷珞/短路；^ ^ & 快速％仃，使其可 峪檢驗旎 旁托社 呀施订一個別電路之檢驗及鄰拼你主 電極墊的檢驗。 久4近像素 再者’本發明俜 ^ ^ 置成包括一移動構件，复係m ^ # 動該修復單元；一 、係用於移 才衣針移動構件，其係用於在垂 方向上移動探針；及一 直及水平 施行修復及檢驗。 而衣位置 雖然本發明之較佳具體實施例已揭示用於示“ 但熟習此項技術人士將會瞭解在不脫離隨附申請專利範圍 中揭示之本發明範疇及精神下，各種修改、増加及替二 屬可行。 、二 【圖式簡單說明】 本發明之以上及其他目的、特徵及其他優 又"、心，將可自 以上結合附圖之說明中更清楚地瞭解，其中： 第1圖係顯示習知修復設備之示意圖； 第2圖係顯示根據本發明之修復設備的透視圖； 第3圖係顯示根據本發明之檢驗單元的分解透視固. 第4圖係顯示根據本發明之檢驗單元的透視 ◎ »及 第5圖係顯示根據本發明之多探針單元的八& 平几的分解透视圖。 【主要元件符號說明】 1 習知修復設備 3 雷射顯微鏡 14 200811980 5 光源 10 修復設備 100 檢驗單元 100a 第一檢驗單元 100b 第二檢驗單元 110 相機單元 112 相機 114 相機連接塊 116 相機轉移執 120 探針垂直移動構件 130 探針水平移動構件 132 水平執 134 水平執塊 140 探針移動構件 150 多探針單元 15 1 探針組件 152 複數探針 153 軸啟動器 155 感測器 157 探針框架 160 單一探針單元 162 單一探針 164 單一探針框架 200 雷射 210 雷射振盪器 220 匯聚器透鏡 230 雷射頭 300 光學單元 3 10 光源 320 透鏡 400 X軸移動構件 410 X軸支撐件 420 X軸軌 500 Y軸移動構件 5 10 Y軸支撐件 520 Y軸執 530 Y軸執塊 600 修復台 700 平台 15Sliding, which will be explained later. D At the same time, the cymbal moving member 500 is attached to the vertical side of the cymbal support member 41. The upper (i.e., in the direction of the x-axis) is placed on the upper surface of one of the x-axis support members 41. The y-axis moving member 500 includes a γ-axis support member 51 〇 at its two ends | the X-axis rail 420 is slid along the χ-axis rail 42 ;; the _γ-axis rail 52 〇 is formed on the Y-axis upward in 200811980 On one side of the support member 510; and a gamma shaft rail block 5 3 〇, which is mounted on the stern axle rail 520 to slide along the stern rail 5 2 ,, and the repair unit is mounted thereon. The flat π? 700 for supporting the substrate is placed on one of the inner side surfaces of the repair table 6 ,, which covers both the X-axis moving member 400 and the γ-axis moving member 5 。. Optical unit 3 00 is used to insult a defective area that may be formed on a substrate of a flat panel display panel. The optical unit 3A includes a light source 31A, a lens 320, and a sensor (not shown). When the light source 3 is irradiated onto the substrate, the light system is reflected from the substrate. Light reflected from the substrate is transferred through the lens 3 2〇 to the sensory. The sensor picker detects the presence of a defect by reading the difference in the amount of reflected light. By using the optical unit 300 of the present invention, it is possible to determine whether any defects have been generated on the substrate without directly rubbing the substrate. Therefore, the substrate can be protected from damage that may be caused by friction. Similarly, the defect rate can be significantly reduced by removing errors due to inconsistencies in the coordinate system between the inspection device and the repairing device. The Laser 200 is used to remove defects on the substrate of the flat panel display panel. The laser 200 includes a laser oscillator 2 for generating a laser beam: [〇, a/concentrator lens 22 for converging the laser beam, and a laser head 230 for providing a laser beam path . The laser beam generated from the laser oscillator 21 切除 removes the overlapping signal lines to repair the defective substrate. The first inspection unit 10A is used to verify whether the circuit of one of the repaired substrates is open/short. The first inspection unit 1 〇〇 & includes: a camera unit for checking whether the probe rubs the substrate; a single probe unit for the 9 200811980 inspection gate pad or data pad; a needle unit configured to simultaneously test a right dry electrode pad; and a probe moving member that moves the multi-probe unit and the single probe unit in a vertical and horizontal direction. The components of the first test unit 100a of the present invention are shown in Figures 3 and 4. The construction of the first test unit i〇〇a will be described in detail below. As shown in Fig. 2, the optical unit 3, the laser 2, and the first check π 100a are assembled into a repair unit. The repairing unit is configured to be worn on the y-axis rail block 53 of the Y-axis support member 510 (on one side of the platform) to move along the Y-axis rail 520. Here, the repairing apparatus of the present invention is preferably configured to include a second inspection unit 丨〇〇b installed at a γ-axis moving member 50 〇 where one of the repairing units is not mounted. The second inspection unit 10b can be mounted on the yoke rail block 530 of the yoke support 510 of the unmounted-repair unit, so that the movement of the repair unit as described above is in the X-axis and Y-axis directions. mobile. Here, the construction of the second inspection unit i〇〇b is similar to the _ inspection unit 丨〇〇a of the ampoule at the repair unit. In this case, the inspection of the substrate is as follows: the multi-probe unit of the first inspection unit i〇〇a rubs the pixel electrode corresponding to the repaired portion; the single probe unit of the second inspection unit l〇〇b rubs one The gate pad or data 塾; I resistance value is measured by two probes, thus checking the open/short circuit of the substrate circuit. Therefore, when a repairing apparatus using the second inspection unit 100d100b is provided, the test substrate can be more efficiently performed. Fig. 3 is an exploded view showing the components of the inspection unit according to the present invention, and Fig. 4 is a perspective view showing the staged state of the inspection unit of the present invention 10 200811980. The inspection unit 100 of the present invention includes: - checking whether the probe rubs the substrate; - single - / eye machine. Early 7011 〇, the system uses the test gate pad or data pad; a multi-detection titanium needle is 70,160, which is used for the needle early 150, which has multiple probes for testing several electrode pads; Let Gu SU τ — probe moving member 1 40 , from the unit for moving in the vertical and horizontal directions, the system unit 160. The needle early element 150 and the single probe camera unit m are used to inspect the probe unit of the invention. The camera unit i 10 includes: a grinding "shape i. the needle unit multi-probe unit 150 on the machine 112" system, positioning In a single inspection, and a camera transfer member, which is used to move the camera 112 horizontally, so that the camera 112 can take a picture of the camera transfer member, preferably one of the package and the connector. Connected to the phase shifting 116 to slide 2 along the camera transfer trajectory 16 and the other side connected to the camera to the probe moving member 1 俦逯 々 连接 连接 连接 连接 连接 连接 连接 及 及 及 及 及 及 及 及 及Both, in the horizontal direction and the 铋 needle (4), the probe moving member 14G moves the probe units 150 and 12 more than (4); in the vertical direction:: probe: the probe vertically moves the member to move the member u. It is horizontal: early heart and 16 〇; and - slanting water you & moving the probe in ten directions. The probe of the present invention swells & driving device. | moving member 12. can be implemented as a ball standard The probe horizontal moving member 130 of the present invention can be configured to include a rail 132 and a horizontal block 134. 1 200811980 Thus, the needle moving member 140 (which allows the repair of the present invention to move the probe) simultaneously. The fourth month of the test is to verify the desired part of the substrate. -Under the rainbow Early probe unit 160 is equipped with a single probe bead pad or gate pad for inspection, and it is used to verify the open/short circuit of the substrate circuit. The needle unit 160 may further include a single probe than the first month of the month + the first probe. The probe 162 is connected to the ejector pin 164, which is spliced to the plate needle moving member 140. The f5 diagram shows the detailed construction of the multi-probe unit 15G. The multi-probe unit 150 is used to simultaneously measure the 152,·1 Λ value of the 像素 pixel electrode Μ on the substrate. The multi-probe unit 150 includes: a plurality of probes, a private needle assembly 丨5 1, and a genus that requires 4 ρ octads in the electrical state of the glutinous complex probe! 52 and when: the probe 152 protrudes; the one-axis starter 153, the upper surface of one of the jaws 151, the apricot clothing, male beta, for the field and the probe 1 52 sudden S detector 155 'It is used to check if the probe rubs the substrate. In one aspect, the multi-probe unit 15A of the present invention preferably further includes a multi-roofing 157, which connects the above components to each other and is attached to the probe shifting member (4) to allow multi-probe singles. W will be described in the horizontal and vertical directions. A repair device using the present invention will be used to repair a substrate. First, when the substrate is placed on the platform, an optical unit starts to operate, and then moves to inspect the substrate. Whether any defects have occurred on it. The x-axis rail block on which the repair unit is mounted moves along the gamma axis rail, and the x-axis rail member having the gamma-axis rail moves along the X-axis rail, thus enabling inspection of each of the substrates on the 12 200811980 when optical The light source of the unit directs the light of the light to the sensor through the lens. = On the substrate, the difference in the amount of reflection from the substrate is checked for the presence of defects. Fen "feeling the benefits of reading the reflected light material is transferred to the next platform. Undetected" to any defects, but the base 'when any defect is detected for the defect area to perform repair. % mobile repair early The element is positioned to remove the overlapping signal lines, so that the thunder beam is radiated on it to cut and repair. After the repair process is completed, the pixel electrode of the repaired portion is ι, early... the probe unit rubs A single honing gate or a data pad of the first to the inspection unit. The lightning measured by the -h needle early-of-needle unit is used to check whether the substrate circuit is open/valued to check whether the probe is Rub the substrate.: Two ':: sensor and adjust the phase... until it is located in the part of the transfer unit of the camera, the part to be inspected. The probe moving member can be used to precisely move the probe unit. Thus, an inspection can be performed on an exact garment portion. If no defects have been detected from the inspection, the substrate is transferred to the platform. As described above, the present invention includes a repair unit having an optical early warning. ,-laser, and - check The inspection unit, w simultaneously performs the defect detection process, the repair process, and the inspection process. Therefore, the product manufacturing time can be shortened, the equipment installation space and the product defect rate are reduced, and the productivity is increased. Similarly, the present invention includes a moving member. , which allows the device to move in the direction of the x-axis and the x-axis, allowing the device to inspect the substrate at any part thereof. Knife 13 200811980 In addition, this rhyme ^ day and month is configured in the _ test generation Unit and - single probe... * 4 trials include a multi-probe in the early morning # # # ^He early, to make the substrate circuit break / short circuit; ^ ^ & fast %仃, make it detectable旎 托 社 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , First, it is used to move the needle moving member, which is used to move the probe in the vertical direction; and to perform repair and inspection all the time and horizontally. Although the preferred position of the present invention has been disclosed for Show "but familiar with this technique It will be appreciated by those skilled in the art that various modifications, additions and substitutions are possible without departing from the scope and spirit of the invention as disclosed in the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features and other advantages of the present invention will be more clearly understood from the description of BRIEF DESCRIPTION OF THE DRAWINGS FIG. 2 is a perspective view showing a repairing apparatus according to the present invention; FIG. 3 is an exploded perspective view showing the inspection unit according to the present invention. FIG. 4 is a perspective view showing the inspection unit according to the present invention. » and Fig. 5 are exploded perspective views showing an eight & a plurality of probe units according to the present invention. [Main component symbol description] 1 Conventional repair device 3 Laser microscope 14 200811980 5 Light source 10 Repair device 100 Inspection unit 100a First inspection unit 100b Second inspection unit 110 Camera unit 112 Camera 114 Camera connection block 116 Camera transfer 120 Needle vertical moving member 130 probe horizontal moving member 132 horizontal 134 horizontal holding block 140 probe moving member 150 multi-probe unit 15 1 probe assembly 152 complex probe 153 shaft starter 155 sensor 157 probe frame 160 single Probe unit 162 Single probe 164 Single probe frame 200 Laser 210 Laser oscillator 220 Converger lens 230 Laser head 300 Optical unit 3 10 Light source 320 Lens 400 X-axis moving member 410 X-axis support 420 X-axis rail 500 Y-axis moving member 5 10 Y-axis support 520 Y-axis 530 Y-axis block 600 Repair station 700 Platform 15