KR20070118939A - Denting inspecting apparatus - Google Patents

Abstract

A denting inspecting apparatus is provided to extend the tracking range of auto-focusing and increase the inspection efficiency by performing inspection through real-time auto-focusing. An denting inspecting apparatus comprises a stage(20) fixed at a predetermined position, and a substrate(70) having a tap(75) at one side thereof. The substrate(70) is seated on the fixed stage(20). At least one camera(10) photographs a denting inspection area of the substrate(70). An optical system moving section is coupled with the camera(10) and moves the camera(10) relative to the stage(20) such that the denting inspection area of the substrate(70) can be photographed. The camera(10) is a line scan camera or an area camera, and the substrate(70) is for an LCD substrate, a PDP substrate or an OLED substrate.

Description

Indentation Inspecting Apparatus

1 is a schematic perspective view of an indentation tester according to a conventional embodiment.

2 is a schematic block diagram of an indentation tester according to a first embodiment of the present invention.

3 is a schematic perspective view of the indentation checker of FIG. 2.

4 is an enlarged perspective view of main parts of FIG. 3.

5 is a view for explaining the operation of the indentation tester of FIG.

6 is a schematic perspective view of an indentation tester according to a second embodiment of the present invention.

* Explanation of symbols for the main parts of the drawings

    1: indentation checker 10: line scan camera

   20: fixed stage 30: displacement sensor

   50: optical system moving unit 60: control unit

   70: LCD substrate 75: tab (TAB)

The present invention relates to an indentation tester, and more particularly, to an indentation tester capable of reducing the size and installation space of the apparatus and reducing the overall tact time of the indentation test.

In general, a flat panel display (FPD) is an image display device that is thinner and lighter than a cathode ray tube (CRT) mainly used as a display for a TV or a computer monitor. , Plasma Display Panel (PDP), Organic Light Emitting Diodes (OLED), and the like.

Such a flat panel display (FPD, FPD) is released as a product through a separate manufacturing process for each kind, but also through a similar type of manufacturing process.

In the process of assembling an article or the like to the FPD substrate in a similar process, the process of attaching a driver IC for driving the FPD to the FPD substrate is performed.

In order to perform this process, a technique of mounting a driver IC lead directly on an FPD substrate has been used. However, in recent years, a driver IC having a huge number of leads as the FPD product becomes higher resolution. Since TAB (Tape Automated Bonding) is used as a mounting technique because it is not easy to mount the FPD substrate.

TAB is a packaging technology that bonds to an FPD substrate using a tape in which a pattern is formed instead of a lead frame as a tape carrier package (TCP). Tapes containing driver ICs mounted by this tap technology are generally referred to as TAB ICs (hereinafter, 'taps').

Before attaching these tabs to the FPD substrate, an anisotropic conductive film (ACF) is first adhered to the FPD substrate.

Anisotropic conductive film (ACF) is a representative material used for mounting as it has a double-sided tape structure in which an adhesive cured by heat and fine conductive balls are mixed therein.

When the anisotropic conductive film is adhered to the FPD substrate, the tab is attached to the surface of the anisotropic conductive film, wherein the electrode pattern of the tab and the electrode pattern of the FPD substrate should be attached correctly and used to secure conductivity to the FPD substrate and the tab. The conductive ball to be positioned must also be correctly positioned.

On the other hand, when the anisotropic conductive film and the tab are attached to the FPD substrate, a high temperature pressure is applied so that the pads of the circuit patterns of the FPD substrate and the tab abut. At this time, while the conductive ball in the anisotropic conductive film of the contact portion is destroyed, both pads are energized, and the remaining adhesive is filled and cured on the uneven surface other than the pad portions, thereby completing the tab attachment process.

After the tab attaching process is completed, the FPD substrate is subjected to a denting test to check whether the electrode pattern of the tab and the electrode pattern of the FPD substrate are correctly attached, and thus the shape and position of the conductive ball. The indentation tester used for such an indentation test has been disclosed as follows.

1 is a schematic perspective view of an indentation tester according to a conventional embodiment.

As shown in the drawing, the conventional indentation inspector 100 includes an area camera 110 that photographs an indentation inspection region largely, and an FPD substrate 170 having tabs 175a and 175b attached to short and long sides, respectively. ) Has a stage 120 seated thereon. Here, the stage 120 has a structure that can move to move the FPD substrate 170 according to the general structure of the inspector for moving an object, and moves during an actual inspection to move the indentation inspection area of the FPD substrate 170 into an area camera. (110, Area Camera) to be in the shooting position. This will be described later.

Meanwhile, the area camera 110 photographs the indentation inspection area of the FPD substrate 170 fixed to the camera fixing die 150 in the indentation inspector 100 and to which the tabs 175a and 175b are attached. The area camera 110 has its own auto focusing function, and the auto focusing is performed every time the stage 120 is moved at intervals of the taps 175a and 175b. Can be inspected. To this end, the area camera 110 may vertically raise and lower the plate surface direction of the FPD substrate 170 as shown by the arrow Z direction.

The stage 120 is provided on the upper portion of the area camera 110, and the FPD substrate 170 of the indentation inspection target is mounted on the upper surface thereof. The stage 120 on which the FPD substrate 170 is seated is moved to the front, rear, left, and right (X, Y) in the direction of the arrow by a separate driving unit (not shown), and the FPD substrate 170 is positioned above the fixed area camera 110. Locate it.

In this configuration, the indentation tester 100 performs an indentation test on the FPD substrate 170 of the indentation test target. In general, the indentation test is performed in order of first inspecting the region of the tab 175a attached to the short side of the FPD substrate 170 and then inspecting the region of the tab 175b attached to the long side.

 First, in order to inspect the tab 175a region attached to the short side, the stage 120 linearly moves in the direction of the arrow X and photographs the indentation inspection region in order. After the inspection of the region of the tab 175a attached to the short side is finished, the inspection surface of the region of the tab 175b attached to the long side is subsequently inspected. In this case, the stage 120 is rotated in the direction of the arrow θ so that the area camera 110 can photograph the indentation inspection area.

As described above, the stage 120 repeatedly moves and stops while the area camera 110 completes photographing areas of the tabs 175a and 175b of the FPD substrate 170 to be indented.

In this process, the area camera 110 also repeatedly performs autofocusing to focus on the FPD substrate 170 to acquire an image of the indentation inspection area.

By the way, in the conventional indentation checker 100, the area camera 110 is fixed to the camera fixing die 150, the equipment size and installation space is increased due to the complicated operation of the large stage 120 is moved, In addition, since the camera 110 should be installed to be suitable for the movement of the stage 120, the camera 110 has a problem that there is a limit in reducing the tact time because it is difficult to install only two at the same time.

Therefore, an object of the present invention is that the indentation that can reduce the overall tact time of the indentation inspection because the equipment size and installation space is smaller than before, and also has a structure that can install a camera for each side of the substrate To provide a validator.

The above object is, according to the present invention, a stationary stage on which the substrate of the indentation inspection target for indentation inspection on the tab (TAB) region attached to one side is seated, and fixedly installed at a predetermined position; At least one camera for photographing an indentation inspection area of the substrate; And an optical system moving unit coupled to the camera and moving the camera relative to the fixed stage.

The camera may be any one of a line scan camera and an area camera, and the at least one camera may be a plurality of cameras.

The substrate may be any one of an LCD substrate, a PDP substrate, and an OLED substrate.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention and the contents described in the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference numerals in the drawings denote like elements.

The substrate to be described below may be any one of a liquid crystal display (LCD), a plasma display panel (PDP), and organic light emitting diodes (OLED) as the FPD substrate.

2 is a schematic block diagram of an indentation tester according to a first embodiment of the present invention, Figure 3 is a schematic perspective view of the indentation tester of Figure 2, Figure 4 is an enlarged perspective view of the main portion of Figure 3, Figure 5 is a view It is a figure for demonstrating operation | movement of the indentation tester of 3. These drawings will be described with reference to FIG. 1 together.

As shown in these drawings, the indentation tester 1 according to the first embodiment of the present invention, the fixed stage 20, the FPD substrate 70 is seated and supported, and the FPD substrate with the tab 75 The line scan camera 10 for photographing the indentation inspection area of the 70, the displacement sensor 30 provided in front of the line scan camera 10, and the line scan camera 10 are fixed to the stage 20. And an optical system moving unit 50 for moving to the side), and a control unit 60 for controlling the movement of the line scan camera 10 to enable real-time autofocusing. In the present embodiment, the line scan camera 10 is applied, but the scope of the present invention is not limited thereto, and an area camera may be applied.

As shown in FIG. 2, in the indentation tester 1 according to the present embodiment, the displacement sensor 30 is previously flat with respect to the FPD substrate 70 to be indented, which is seated on the fixed stage 20 fixed to a predetermined area. The controller 60 controls the movement of the line scan camera 10 to enable real-time autofocusing of the line scan camera 10 based on the information of the displacement sensor 30.

In such a configuration, the line scan camera 10 mounted on the optical system moving unit 50 may perform the indentation inspection while continuously moving in the indentation inspection region. That is, since the fixed stage 20 is fixed at a predetermined position and the optical system moving unit 50 moves, the size and installation space of the fixed stage 20 can be reduced, as well as the line scan camera 10 can be connected to the FPD substrate 70. Since it is possible to inspect at the same time by installing on all four surfaces, due to the structure that the stage 120 is moved, only two cameras can be installed substantially, so that the indentation of the conventional indentation of the number of FPD substrates 70 that can be inspected at the same time is limited. The tact time may be reduced than the tester 100.

In addition, with respect to the tact time, as in the present embodiment, the displacement sensor 30 provided in front of the front part of the line scan camera 10 presets the interval between the tab 75 and the line scan camera 10. Measure and provide the information to the control unit 60 before or during the movement of the line scan camera 10 so that the line scan camera 10 can move up and down before arriving at the inspection point. This shortens the overall tact time even further.

In addition, if you can move up and down before arriving at the inspection point, you can expand the tracking range of autofocusing, so you can perform efficient inspection even when the flatness of the substrate is not constant due to the sag caused by the enlargement of the substrate. There is an advantage to this.

Meanwhile, the tab 75 of the FPD substrate 70 may be attached to various sides of the substrate in various forms, but for convenience of description, the FPD substrate having the tab 75 attached to only one side (short side) is provided in this embodiment. First, 70 will be described.

The indentation tester 1 is a device for inspecting indentation generated in an anisotropic conductive film (not shown) in the process of attaching the tab 75 to the FPD substrate 70. Accordingly, the indentation inspector 10 extracts an image of the indentation inspection region to which the tab 75 is attached, and performs an repeated process of inspecting the extracted indentation image.

The stationary stage 20 of such an indentation tester 1 is a place where the FPD board | substrate 70 of the indentation test target with the tab 75 attached to one side is seated. In the present embodiment, the fixed stage 70 is provided smaller than the size of the FPD substrate 70 as shown, and the bottom surface of the FPD substrate 70 is seated on the top surface of the fixed stage 20. In this case, the FPD substrate 70 may be seated on the upper surface of the fixed stage 20, but the exposed portion of the tab 75 may be exposed to the outside of the fixed stage 20. More specifically, the carrier robot (not shown) draws the FPD substrate 70 from the outside in a state in which the lift pin (not shown) provided in the fixed stage 20 is raised. At this time, when the lift pin supporting the inserted FPD substrate 70 is lowered again, the FPD substrate 70 is seated in a state in which the tab 75 region is exposed to the fixed stage 20.

Therefore, the FPD substrate 70 seated on the fixed stage 20 so that the tab 75 region is exposed is placed in a position where the line scan camera 10 can easily perform the inspection.

Since the fixed stage 20 is a portion supporting the FPD substrate 70 to be inspected, it is not necessary to necessarily have the above-described shape. Therefore, the fixed stage 20 is manufactured in the form of a cylinder or a square column or a square plate, and seats the FPD substrate 70 to expose the region of the tab 75 of the FPD substrate 70 seated on the fixed stage 20. May be configured to As such, if the line scan camera 10 can inspect the FPD substrate 70, the shape of the fixed stage 20 may be different.

Meanwhile, as described above, the fixed stage 20 is provided to be fixed at a predetermined position in the present embodiment.

The fixed stage 20 fixed at the predetermined position is a movable fixed stage 120 (see FIG. 1 below) in which a conventional indentation tester 100 (see FIG. 1 hereinafter) enables front, rear, left and right (X, Y) and rotation (θ). It can improve various problems caused by).

That is, since the conventional fixed stage 120 moves back and forth (X, Y) and rotation (θ) within the indentation tester 100, the equipment scale and installation space according to the movement of the fixed stage 120 are large. On the other hand, in the present embodiment, since the fixed stage 20 is fixed, as the conventional fixed stage 120 moves, the equipment scale and installation space can be reduced.

In addition, since the FPD substrate 70 is seated and fixed to the fixed stage 20, it is possible to reduce the facilities and power loss of moving the conventional fixed stage 120, which may occur when the relatively large FPD substrate 70 is moved. Particle contamination or physical impact applied to the FPD substrate 70 can be prevented in advance, thereby contributing to yield improvement.

Meanwhile, as described above, the camera may apply both the line scan camera 10 and the area camera 110 (see FIG. 1). In the present embodiment, the line scan camera 10 will be described.

The line scan camera 10 is generally a camera mainly used for photographing and scanning a local area. In this embodiment, the line scan camera 10 is provided to be positioned under the fixed stage 20 on which the FPD substrate 70 with the tab 75 is seated to photograph the indentation inspection area.

As described above, the conventional indentation tester 100 has no choice but to apply the area camera 110 for autofocusing as the fixed stage 120 repeatedly moves and stops. Since the line scan camera 10 may be moved by the eastern part 50, the line scan camera 10 may be applied.

Meanwhile, the displacement sensor 30 is coupled to the front side of the line scan camera 10 as described above.

The displacement sensor 30 measures the displacement of the FPD board | substrate 70, or the displacement of the line scan camera 10, and the FPD board | substrate 70 of an indentation test object. Although not shown in detail, the displacement sensor 30 is coupled to one side of the front portion of the line scan camera 10 so as to move substantially integrally with respect to the moving direction of the line scan camera 10.

As shown in FIGS. 4 and 5, the displacement sensor 30 moves without stopping the line scan camera 10 without stopping at a distance in advance of the flatness of the FPD substrate 70 to be indented to be examined by Δt. The distance between the FPD board 70 and the line scan camera 10 or the displacement of the FPD board 70 is measured in advance so as to enable auto focusing in real time.

While the conventional area camera 110 performs autofocusing after the fixed stage 120 arrives at the indentation inspection area, in the present embodiment, the line scan camera 10 can perform real-time autofocusing while continuously moving. have.

This is because the displacement sensor 30 provided in the front part of the line scan camera 10 is coupled to the front of the line scan camera 10 so that the degree of flatness of the FPD substrate 70 is measured in advance, and the information is sent to the controller 60. This is because the movement of the line scan camera 10 is controlled to enable real-time autofocusing of the subject line scan camera 10.

In addition, in the case where the deflection of the conventional FPD substrate 170 exceeds the autofocusing tracking range of the area camera 110, the search function should be used, thus increasing the tact time. In the present embodiment, the tracking range of the actual autofocusing can be considered to be enlarged by controlling the movement of the line scan camera 10 based on the displacement sensor 30 in advance.

Therefore, even if the deflection is severe due to the large size of the FPD substrate 70 can be carried out during the real-time autofocusing without the need for a separate search (Search) within the appropriate limit to reduce the tact time (Tact Time).

That is, since the line scan camera 10 enables real-time autofocusing through the displacement sensor 30, the indentation inspection is performed faster and continuously than the method of the indentation inspector 100 which performs the inspection after autofocusing by repeating the conventional movement and stop. As a result, the tact time can be reduced, and the sagging problem of the product due to the enlargement of the product can be coped with, and the indentation inspection efficiency can be improved.

The line scan camera 10 to which the displacement sensor 30 is coupled may move substantially due to being mounted on the optical system moving unit 50.

Although not shown in detail, the optical system moving part 50 is provided below the fixed stage 20 in the present embodiment, and the indentation inspection area of the FPD substrate 70 having the tab 75 attached thereto to enable linear motion. It is provided in parallel directions. Therefore, the line scan camera 10 may perform the indentation inspection while continuously moving the indentation inspection region of the FPD substrate 70 to which the tab 75 is attached by the optical system moving unit 50.

In addition, the optical system moving unit 50 allows the line scan camera 10 to move up and down vertically, as shown by the arrow Z in FIGS. 3 to 5. Therefore, the line scan camera 10 may move while moving vertically up and down in parallel to a position where autofocusing can be performed based on the information of the displacement sensor 30.

The control unit 60 is provided to control the movement of the line scan camera 10 so that the line scan camera 10 can be moved by the optical system moving unit 50.

The control unit 60 controls the movement of the line scan camera 10 based on the information of the displacement sensor 30. That is, the controller 60 obtains the flatness information of the indentation inspection region of the FPD substrate 70 from the displacement sensor 30 before the line scan camera 10 reaches the indentation inspection region of the FPD substrate 70. It serves to control the movement of the line scan camera 10.

Accordingly, the movement of the line scan camera 10 may be controlled by the controller 60 to enable real-time autofocusing of the line scan camera 10 with respect to the indentation inspection area of the FPD substrate 70. In addition, the controller 60 may continuously move the line scan camera 10 to acquire an image of the entire area on the movement path of the line scan camera 10 when the line scan camera 10 is photographed.

As described above, the line scan camera 10 may be linearly moved by the controller 60 to the area of the tab 75 to be indented, as in the direction of the arrow X of FIGS. 3 and 4. At this time, the line scan camera 10 by the control unit 60 can move in advance to the inspection position while moving up and down as shown by the arrow (Z) in accordance with the advance information of the displacement sensor 30 to enable real-time autofocusing do.

Therefore, the line scan camera 10 of the present embodiment can perform indentation inspection while continuously moving in real time while performing real-time autofocusing, so that the tact time can be further reduced than the conventional method of repeatedly inspecting stop and movement and inspection efficiency. To increase.

Referring to the operation of the indentation tester having such a configuration as follows.

Hereinafter, reference will be made to FIGS. 2 to 5, with reference to FIG. 5.

First, the FPD substrate 70 to be indented is placed on the fixed stage 20 of the indentation inspector 1. At this time, the FPD substrate 70 allows the area where the tab 75 is attached to face upward, thereby indenting the indentation image of the indented tab 75 when the line scan camera 10 is positioned below the fixed stage 20. Can be extracted and photographed.

In the present invention, when the FPD substrate 70 is seated on the fixed stage 20 and fixed, the size and installation space of the FPD substrate 70 may be reduced compared to the indentation tester 100 having the conventional mobile fixed stage 120. As described above, the physical impact applied to the FPD substrate 70 can be prevented in advance, so that the yield can be improved.

When the FPD substrate 70 is seated on the fixed stage 20 as described above, the line scan camera 10 moves to photograph the tab 75 region of the FPD substrate 70 to be indented. In other words, the line scan camera 10 is positioned and moved under the fixed stage 20 on which the FPD substrate 70 with the tab 75 of the indentation inspection area is attached by the optical system moving unit 50.

The line scan camera 10 placed in the area of the first inspection target tab 75 photographs and scans the first indentation image while performing autofocusing in real time while moving to the indentation inspection region based on the information of the displacement sensor 30. At the same time, the displacement sensor 30 coupled to one side of the front portion of the line scan camera 10 measures the displacement between the line scan camera 10 and the FPD substrate 70 to be inspected in advance at a position advanced by Δt. . That is, the displacement sensor 30 measures the flatness of the FPD substrate 70 to be indented in advance, and performs accurate autofocusing before the line scan camera 10 reaches the indentation inspection area.

In general, the FPD substrate 70 having a small size is flat as indicated by a dotted line as shown in FIG. 5, but when large, the FPD substrate 70 is partially sag like a FPD substrate 70S indicated by a solid line even when it is seated on the fixed stage 20. Phenomenon occurs.

When the flatness of the FPD substrate 70 is not constant due to the deflection due to the enlargement of the FPD substrate 70, the conventional indentation tester 100 exceeds the tracking limit of autofocusing to search. There is a problem in that the use of the function is required, thereby increasing the tact time.

Therefore, in this embodiment, even if the indentation tester 1 is enlarged and the FPD substrate 70S sag, the displacement sensor 30 measures the flatness information of the FPD substrate 70S in advance and sends the information to the controller 60. As a result, by moving the line scan camera 10 in advance, the tracking limit of autofocusing can be substantially increased, and indentation images can be taken and inspected while real-time autofocusing is performed while the line scan camera 10 is moving. Can be.

In more detail, the line scan camera 10 of FIG. 5A receives the flatness information of the substrate at a position advanced by Δt from the displacement sensor 30 and is autofocused at the reference position of the optical system moving part 50. It is a state. The line scan camera 10 in (B) receives the information in which the state of the FPD substrate 70S at the position advanced by Δt from the displacement sensor 30 is raised in advance, and the optical system moving unit 50 is raised to autofocus. The line scan camera 10 in (C) shows that the optical system moving unit 50 descends and autofocussing when the state of the FPD substrate 70S at the position advanced by Δt is convex downward.

As such, the displacement sensor 30 coupled to one side of the front portion of the line scan camera 10 is located ahead of the traveling direction of the line scan camera 10 to previously check the flatness information of the FPD substrates 70 and 70S. By sending the information to the controller 60, the line scan camera 10 can perform real-time autofocusing at the same time as the movement.

As described above, according to the indentation inspection apparatus 1 of the present embodiment, the indentation inspection can be performed on the region of the tab 75 of the FPD substrate 70 while the line scan camera 10 is moved, so that the fixed stage 20 is moved. And since there is no complicated operation to rotate, it is possible to reduce the equipment size and installation space than the conventional, and also has a structure that can be installed camera to inspect all four sides of the FPD substrate 70, so the overall tact time (Tact Time can also be reduced.

In addition, when the flatness information of the FPD substrate 70 is obtained from the displacement sensor 30 in advance, the line scan camera 10 can be photographed while moving in order to enable real-time autofocusing. In addition to reducing the Tact time, the tracking range of autofocusing can be substantially extended, and even when the flatness of the substrate is not constant due to the sag caused by the enlargement of the FPD substrate 70, Inspection can be performed by real-time autofocusing without the need of search function, and the overall inspection efficiency can be improved.

6 is a schematic perspective view of an indentation tester according to a second embodiment of the present invention.

In the present embodiment, only portions different from those in the first embodiment will be described, and the same portions as those in the first embodiment will be denoted by the same reference numerals, and other portions will be described with the addition of "a".

As shown therein, the indentation tester 1a according to the second embodiment of the present invention includes an optical system moving unit (not shown) and an optical system moving unit (not shown) configured to be linear motion in a direction crossing each other. Two line scan cameras (10, 10a) and two displacement sensors (30, 30a) are respectively moved along the (X, Y). Here again, the fixed stage 20 is fixedly installed at a predetermined position.

In the first embodiment, unlike the indentation inspector 1 which can inspect the FPD substrate 70 having one inspection surface (short side), in the indentation inspector 2a of the present embodiment, both sides (short side, long side) are examined. The FPD substrate 70a having the tabs 75 and 75a attached thereto may be seated on the fixed stage 20 and inspected.

With this configuration, the FPD substrate 70a having the tabs 75 and 75a attached to both side surfaces (short side and long side) can be inspected by being seated on the fixed stage 20.

Also, by providing two line scan cameras 10 and 10a and two displacement sensors 30 and 30a, both the tab 75 region attached to the short side and the tab 75a region attached to the long side can be inspected at the same time. .

Therefore, in the case of adopting a structure for fixing the fixed stage and moving the camera, two inspection surfaces, and three and four inspection surfaces can be inspected at the same time as in this embodiment, so that inspection speed can be further improved. Tact time can also be reduced.

Although the present invention has been described in detail with reference to the drawings, the present invention is not limited thereto.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

As described above, according to the present invention, since the equipment size and installation space are smaller than before, and the camera may be installed on each side of the substrate, the overall tact time of the indentation inspection can be reduced. Can be.

Claims (3)

 A fixed stage on which a substrate of an indentation inspection target for indentation inspection for a tab (TAB) region attached to one side is seated and fixedly installed at a predetermined position; At least one camera for photographing an indentation inspection area of the substrate; And And an optical system moving unit coupled to the camera to move the camera relative to the fixed stage so as to photograph the indentation inspection area of the substrate on the fixed stage. The method of claim 1, The camera is any one of a line scan camera and an area camera, And said at least one camera is a plurality of cameras. The method of claim 1, The substrate is an indentation tester, characterized in that any one of the LCD substrate, PDP substrate, OLED substrate.

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