KR101919808B1 - Multi testing apparatus for flatpanel display having themovision unit - Google Patents

Abstract

A multiple inspection apparatus for a display panel equipped with a thermal image sensing unit of the present invention comprises a base and a base, and the glass stage is provided on an upper part of the base, the object to be inspected is seated and the object to be inspected is transported horizontally, A first gantry unit provided above the movement path of the glass stage unit and including a probe detection unit for detecting a defective line of the object to be inspected through an electrical signal and a cross frame arranged across the movement path of the glass stage unit, And a thermal image sensing unit which is provided movably along the cross frame and contacts the cell of the object to be inspected to apply a current and moves along the defective line of the object to be inspected and detects the temperature to detect the point where the defect occurs .

Description

TECHNICAL FIELD [0001] The present invention relates to a multi-testing apparatus for a display panel having a thermal image sensing unit,

The present invention relates to a multiple inspection apparatus for obtaining accurate positional coordinates of a defective pixel in a display panel, and more particularly, to a multi-inspection apparatus for detecting a defective line by inspection using an electrical signal, And the position coordinates of the defective pixel are obtained by measuring the temperature of the defective pixel.

Generally, a display panel, which is a device for visually displaying data, emits light in units of pixels formed by being finely divided in the horizontal and vertical directions.

The light emission phenomenon of each pixel collects and transmits the specific type of data to the observer, so that the display data is inputted by touching the displayed data beyond the simple data display along with the development of various display devices.

There is a common point that the display panels for the purpose of displaying specific data or the change of electrostatic capacitance and converting them into electrical signals to receive input values are basically composed of a number of pixels.

Since a large number of pixels are combined and each one is organically operated to display specific data as an image or to receive an external electrical signal, defects generated in a specific pixel degrade the merchantability of the entire display panel, In some cases, the entire display panel may have to be discarded only by a defect.

In order to check the defects of lines or pixels that may exist in such a display panel, conventionally, a method has been widely practiced to apply an electrical signal to a cell of a display panel to check whether a defect occurs in a specific line or a pixel within a specific range .

However, it is time-consuming to check all the pixels one by one by converting a portion to which an electrical signal is applied on the display panel, and it is possible to recognize that there are defective pixels within a specific line or a specific area range in some cases, Frequent occurrence of defective point was not possible.

The accurate positional information of the defective pixels can not be obtained, and the display panel which can be classified as a good product through simple repair is classified as a defective product, which is discarded.

Therefore, a method for solving such problems is required.

SUMMARY OF THE INVENTION The present invention has been conceived to solve the above problems of the prior art, and it is an object of the present invention to provide a liquid crystal display device, The present invention provides a multiple inspection apparatus which can acquire accurate positional information of defective pixels within a short period of time through a second inspection.

The problems of the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.

In order to accomplish the above object, a multiple inspection apparatus for a display panel provided with a thermal image sensing unit of the present invention is provided at an upper portion of a base and a base, in which an object to be inspected is seated, A probe detection unit provided above the movement path of the glass stage unit for detecting a defective line of the object to be inspected through an electrical signal, a cross frame arranged across the upper part of the movement path of the glass stage unit, The first gantry unit and the cross frame are provided to be movable along the first direction. The first gantry unit moves in contact with a cell of the object to be inspected and applies a current, moves along a defective line of the object to be inspected, detects a temperature, And a thermal image sensing unit.

Alternatively, the glass stage unit includes a seating plate on which an object to be inspected is seated on an upper surface thereof, and an alignment driver provided on the base and supporting the seating plate, and capable of adjusting the movement of the seating plate,

The mounting plate includes a guide member protruding from the upper surface and provided with a plurality of mounting plates for fixing the side surface of the inspection object.

Alternatively, the probe detection unit may include a probe plate disposed on the base, a probe pin contacting the cell of the object to be inspected and detecting a defective line through an electrical signal, and a probe pin coupled to the probe plate, And a probe stage.

The probe stage is provided at a position adjacent to the probe pin. The probe stage is moved together with the probe pin. The first alignment camera senses the position of the object to be inspected. The first alignment camera detects the position of the object to be inspected. And a control unit for controlling the movement of the motor.

Alternatively, the probe stage is provided so as to be able to adjust the tilt of the probe pin and move it up and down.

The thermal image sensing unit includes a current applying member which contacts the cell of the object to be inspected and applies a current to the defective line of the object to be inspected, an imaging unit and a current applying member which are moved along the defective line of the object to be inspected, And a transverse conveying part provided so as to be able to be traversed along the cross frame.

Alternatively, the horizontal transfer part includes a second alignment camera for sensing the position of the cell and the current application member of the inspection object, and a control unit for controlling the transfer of the horizontal transfer part through the position information sensed through the second alignment camera.

The thermal image sensing unit includes an aligning part provided so that the imaging part is finely aligned on the horizontal transfer part and a line transfer part provided so that the imaging part can be moved in a direction orthogonal to the transfer direction of the horizontal transfer part.

Alternatively, the position of the alignment part and the line conveying part may be adjusted so that the imaging part can be moved in the vertical direction along the defective line of the inspection object through the position information sensed by the second origin camera and the second origin camera, And a control unit for controlling the transfer.

The base includes a second gantry unit disposed at an upper portion of the object to be inspected and including an observation camera provided to detect physical defects of the object to be inspected.

In order to solve the above-described problems, a multiple inspection apparatus of a display panel equipped with a thermal image sensing unit of the present invention performs inspection through an electrical signal on a display panel, which is an inspection object, to obtain information on a specific line including defective pixels And accurate positional information of a defective pixel can be obtained through temperature sensing for a specific line obtained.

Since the measurement is performed by measuring the temperature of the specified line through the inspection signal through the electric signal and the thermal imaging camera, a faster inspection can be performed and a high reliability can be expected even in a quick inspection.

Obtaining the accurate position information of the defective pixels can eliminate defects of the display panel through the repair, thereby also improving the productivity.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims.

1 is a perspective view of a multiple inspection apparatus of a display panel provided with a thermal image sensing unit according to an embodiment of the present invention.
2 is a front view of a multiple inspection apparatus of a display panel provided with a thermal image sensing unit according to an embodiment of the present invention.
3 is a perspective view illustrating a probe detection unit of a multiple inspection apparatus for a display panel having a thermal image sensing unit according to an embodiment of the present invention.
FIG. 4 is a schematic view showing a state in which a probe stage of a multiple inspection apparatus of a display panel having a thermal image sensing unit according to an embodiment of the present invention is aligned with a placement plate.
5 is a state diagram showing a state in which a defective line is detected by a multiple inspection apparatus of a display panel equipped with a thermal image sensing unit according to an embodiment of the present invention.
6 is a perspective view illustrating a thermal image sensing unit in a multiple inspection apparatus for a display panel having a thermal image sensing unit according to an embodiment of the present invention.
FIG. 7 is a state diagram illustrating a state in which a line transfer part of a thermal image sensing unit is moved in a multiple inspection apparatus of a display panel equipped with an thermal image sensing unit according to an embodiment of the present invention.
8 is a state diagram illustrating a process of determining a position of a defective pixel by checking a specified line of an inspection object through a multiple inspection apparatus of a display panel equipped with a thermal image sensing unit according to an embodiment of the present invention.
FIG. 9 is a flowchart illustrating a process of inspecting a display panel with a thermal image sensing unit according to an exemplary embodiment of the present invention. Referring to FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In describing the present embodiment, the same designations and the same reference numerals are used for the same components, and further description thereof will be omitted.

The multiple inspection apparatus of the display panel equipped with the thermal image sensing unit according to the present invention can be implemented as follows.

FIG. 1 is a perspective view of a multiple inspection apparatus of a display panel provided with a thermal image sensing unit according to an embodiment of the present invention, FIG. 2 is a cross- FIG.

As shown in FIGS. 1 and 2, a multiple inspection apparatus for a display panel provided with a thermal image sensing unit according to an embodiment of the present invention includes a base 100, A glass stage unit 200 provided on the glass stage unit 200 so that the inspection stage P can be transported in a horizontal plane on the horizontal plane, A first gantry unit 500 provided with a cross frame 520 disposed across the upper part of the movement path of the glass stage unit 200, And moves along the frame 520 to contact the cell C of the examination subject P to apply a current and moves along the defective line of the examination subject P and detects the temperature to detect the point Thermal image detection Unit 400 may be included.

Each of the above-described configurations will be described in detail below.

The base 100 is a plate-shaped member formed to be in contact with the bottom surface, and is provided so that the glass stage unit 200, the probe sensing unit 300, and the gantry unit 500 can be coupled to the upper portion.

The base 100 is not limited to a plate-like member, but may be embodied as a frame so as to be firmly supported on a floor, and may be embodied in various forms according to an embodiment to which the present invention is applied.

The upper surface of the base 100 may be provided with rails in one direction and in a direction orthogonal thereto.

The glass stage unit 200 includes a seating plate 210 provided horizontally and horizontally along the rails formed on the upper surface of the base 100 and equipped with a display panel P, And an alignment drive unit 220 coupled at the top of the mounting plate 100 and supporting the seating plate 210 at the bottom.

The seating plate 210 has a flat upper surface, and a bottom surface of at least one of the inspection objects P can be seated on the upper surface.

At least one guide member 212 may be mounted on the upper surface of the mounting plate 210 so that the guide member 212 may protrude upward from the upper surface of the seating plate 210.

The guide member 212 can be selectively inserted into the seating plate 210 according to the size and the number of the inspection object P and the groove g formed on the side surface of the inspection object P can be inserted into the guide member 212 so as to be arranged at a specified position.

The alignment driving unit 220 interconnects the seating plate 210 and the base 9100 and is provided so that the seating plate 210 can be supported by the seating plate 210. The seating plate 210 has a horizontal surface Forward, backward, and leftward and rightward movement based on the reference.

The seating plate 210 can be driven to raise or lower a part of the seating plate 210 so that the seating plate 210 can be held horizontally and the seating plate 210 can be raised or lowered while keeping the seating plate 210 horizontal .

The operation of the alignment drive unit 220 may be implemented by driving a plurality of motors, or may be implemented through operation of a cylinder through hydraulic pressure, which may be accomplished by a combination of various driving means according to an embodiment to which the present invention is applied .

FIG. 3 is a perspective view illustrating a probe detection unit of a multiple inspection apparatus of a display panel provided with a thermal image sensing unit according to an embodiment of the present invention, and FIG. 4 is a perspective view of the thermal image sensing unit according to an embodiment of the present invention. FIG. 5 is a schematic view illustrating a state in which a probe stage of a multiple inspection apparatus of a display panel is aligned with a placement plate. FIG. As shown in Fig.

The probe detection unit 300 is disposed on the upper portion of the base as shown in FIGS. 1 to 3 and includes a probe plate 310 so that a space through which the glass stage unit 200 to be transferred can be formed is formed do.

A probe stage 320 is coupled to the probe plate 310 and a probe pin 330 and a first alignment camera 340 are provided below the probe stage 320.

3 and 4, the probe stage 320 includes a probe pin 330 and a first alignment camera 340. The probe pin 330 and the first alignment camera 340 are inclined so that the probe pin 330 and the first alignment camera 340 can maintain a horizontal state, In addition, the probe pin 330 and the first alignment camera 340 are operated so as to be able to move forward, backward, and leftward and rightward on the horizontal plane at the same interval.

The probe pin 330 is provided to contact the cell C formed at the edge of the display panel P as shown in FIG. 5 to apply an electric signal to the cell C, An authorized electrical signal can be used to measure whether a particular line or a specific range is defective.

The number of the probe pins 330 may be determined according to the embodiment to which the present invention is applied and may be implemented in an appropriate number and size depending on the size and shape of the display panel P,

The first alignment camera 340 is disposed adjacent to the probe pin 330 and moves together with the probe pin 330 to sense the position of the cell C of the display panel to be contacted with the probe pin 330 .

The position information of the cell C sensed through the first alignment camera 340 is transmitted to a control unit (not shown), and a control unit (not shown) And / or the alignment driver 220 so that the probe stage 320 and / or the alignment driver 220 can be placed at the correct position.

As described above, the probe pin 330 is moved in a position to contact with the cell C of the display panel P, which is the inspection object P, or a method in which the plurality of probe pins 330 are in contact with the plurality of cells C 6, when a line including a defect is detected, information of the detected defective line is input to a control unit (not shown).

In addition, although not shown, the first origin camera may further include a first origin camera (not shown) adjacent to the probe pin 330, and the first origin camera may be provided so that the probe pin 330 and the cell C of the display panel So that each position is detected.

The first gantry unit 500 includes a support frame 510 fixed to both sides of the base 100 and extending upward and a cross frame 520 connecting upper ends of the support frames 510.

The cross frame 520 is disposed to cross the upper portion of the base 100 and a space is formed so that the glass stage unit 200 can be moved to the lower portion of the cross frame 520, And is arranged at a position higher than the seating plate 210.

1 and 2 and includes a support frame 510 fixed to the base 100 and a support frame 510 coupled to the upper end of the support frame 510, A frame 520 is provided and a space in which the glass stage unit 200 can move forward, backward, leftward and rightward is formed below the cross frame 520.

FIG. 6 is a perspective view showing a thermal image sensing unit in a multiple inspection apparatus for a display panel provided with a thermal image sensing unit according to an embodiment of the present invention, and FIG. 7 is a perspective view showing a thermal image sensing unit according to an embodiment of the present invention. FIG. 5 is a state view showing a state where a line transfer part of a thermal image sensing unit is moved in a multiple inspection apparatus of a display panel.

6 and 7, the thermal image sensing unit 400 included in the multiple inspection apparatus of the display panel provided with the thermal image sensing unit according to an embodiment of the present invention includes a cross frame 520, And a transverse conveying part 410 provided to be conveyable.

The alignment part 420 and the alignment part 420, which are coupled to the horizontal transfer part 410 and are movable in the same direction as the transfer direction of the horizontal transfer part 410 on the horizontal transfer part 410, And is coupled to the line conveying part 430 and the line conveying part 430 provided to be movable in the direction orthogonal to the conveying direction of the alignment part 410 and the horizontal conveying part 410, An image pickup unit 432 may be included.

The transverse transfer part 410 is provided with a current applying member 412 at a lower portion thereof and the current applying member 412 is brought into contact with the cell C of the inspection reference object P to detect a specific line or a specific range of the inspection object P As shown in FIG.

In one embodiment of the present invention, the current application member 412 is moved so that power is applied to the defective line detected through the probe detection unit 300.

At least one second alignment camera 414 is disposed at a position adjacent to the current applying member 412 and the second alignment camera 414 is disposed between the cell C of the inspection object P and the current application member 412 The control unit (not shown) inputs the information of the defective line detected through the probe detection unit 300 and the information of the defective line detected through the second alignment camera 414 The cell C connected to the defective line of the inspection object P and the current applying member 412 can be brought into contact with each other at an accurate position by controlling the transverse transfer part 410 and / .

The alignment part 420 is coupled to the transverse conveying part 410 so as to be movable in the conveying direction of the transverse conveying part 410, that is, in the longitudinal direction of the cross frame 520.

The alignment part 420 may be coupled to the line transfer part 430 and the line transfer part 430 may be coupled to the imaging part 432 and the second origin camera 434.

Thus the line transfer part 430 is moved subject to movement of the alignment part 420 and the imaging part 432 and the second origin camera 434 coupled to the line transfer part 430 are also moved to the line transfer part And the line conveying part 430 moves in a direction orthogonal to the longitudinal direction of the cross frame 520 with respect to the alignment part 420 as a reciprocating movement of a certain section as shown in FIG. And can be moved.

Movement of alignment part 420 and line transfer part 430 is also controlled by a control (not shown).

In detail, when the current application member 412 comes into contact with the cell C of the inspection subject P and the power is applied to the defective line of the inspection subject P, the defective Position information collected through the second origin camera 434 is input to a control unit (not shown) so that the image pickup unit 432 is disposed on the vertical upper portion of the line, and a controller (not shown) 420 are micro-aligned.

At this time, it is not limited to the fine alignment of the alignment part 420 that the imaging part 432 is arranged to be disposed above the defective line vertical part of the inspection object P through the control part (not shown) But may also be implemented by driving the alignment driver 220 according to the embodiment.

If the imaging unit 432 is disposed at the vertically upper portion of the defective line through the alignment process as described above, the control unit (not shown) operates the imaging unit 432 and drives the line transfer unit 430, The image sensing unit 432 is moved along the defective line to which the power of the image sensing unit P is applied so that the inspection can be performed.

The image pickup section 432 is a thermal image sensing device such as an infrared camera which can visually identify the temperature by expressing different colors according to the temperature of the image sensing object or infrared devices capable of measuring temperature by shooting an infrared ray image Function camera.

FIG. 8 is a state diagram showing a process of inspecting a specified line of the inspection object P and deriving a position of a defective pixel through a multiple inspection apparatus of a display panel equipped with a thermal image sensing unit according to an embodiment of the present invention .

As shown in FIG. 8, the display panel P includes a plurality of pixels arranged in the horizontal and vertical directions on a plane, a cell C capable of applying an electrical signal to each of the horizontal and vertical lines, Is formed on the edge.

In addition, a groove (g) is provided on the edge side and can be fixed by being aligned with the guide member (212) of the above-mentioned seating plate (210).

The defective line is moved through the line transfer part 434 as shown in FIG. 8, and the image sensing part 432 senses the temperature. As indicated by the graph, the abnormal temperature area is shifted to the position of the defective pixel Can be confirmed.

Obtaining such location information of a defective pixel allows the repairing of the pixel at the location where the defect occurs to be performed more quickly and accurately.

In addition to the above-described configuration, the second gantry unit 600 may be additionally included.

The second gantry unit 600 may be provided with an observation camera 610. The observation camera 610 may be fixed to a specific position or may be provided to be able to be transported in a specific direction, To detect a physical defect in the inspection object P.

The operation of the multiple inspection apparatus of the display panel equipped with the thermal image sensing unit according to the embodiment of the present invention will be described based on the above configuration.

FIG. 9 is a flowchart illustrating a process of inspecting a display panel with a thermal image sensing unit according to an exemplary embodiment of the present invention. Referring to FIG.

First, in inspecting the defects of the display panel which is the inspection object P, in one embodiment of the present invention, it is largely divided into a step of detecting a defective line and a step of detecting a defective pixel on the detected defective line, Is performed through the probe detection unit 300, and detection of defective pixels is performed through the thermal image sensing unit 400. [

An example of the process is as follows.

The glass stage unit 200 and the probe stage alignment step S10 are performed in such a manner that the glass stage unit 200 is moved to the lower portion of the probe plate 310 in a state in which the inspection object P is seated on the seating plate 210 of the glass stage unit 200 And the alignment driving unit 220 and the probe stage 320 are moved to be mutually adjusted through position information sensed through the first alignment camera 340 and the second origin camera 350. [

If the cell C of the inspection object P and the probe pin 330 are aligned to facilitate mutual contact through the glass stage unit and the probe stage alignment step S10, the probe contact and inspection step S20 And it is determined whether a defect has occurred in units of lines through an electrical signal applied from the probe pin 330 to the cell C. [

If a defective line is detected, the inspection of the defective line is performed through the glass stage unit and the lateral transfer part transfer step S30. At this time, according to the position information of the probe pin 330 input to the control unit (not shown) The part 410 can be moved in advance and the alignment time can be shortened.

Alignment is performed so that the glass stage unit 200 is transferred to the lower portion of the first gantry unit 500 and the cell C connected to the defective line of the current application member 412 and the inspection object P faces up and down The second alignment camera 414 detects the position of each other, and is positioned at the correct position through the control unit (not shown).

In the defective line current application step S40, the cell C connected to the defective line of the inspection object P is brought into contact with the current application member 412 so that the current is applied.

When a current is applied to the defective line and a temperature change occurs, imaging for sensing the temperature of the imaging unit 432 proceeds through the alignment line alignment and imaging step S50. At this time, the second origin camera 434 The position of the detected inspection object P is used so that the imaging section 432 is accurately conveyed in the longitudinal direction at the vertical upper portion of the defective line and the temperature can be measured.

In the defective position acquiring step (S60), a point representing a sudden temperature change or an abnormal temperature is converted into position coordinates and input to the controller (not shown), and the point is used as position information of the defective pixel.

And then post-processing such as posting the positional information of the defective pixel to the repair process or the like and repairing only the pixel where the defect has occurred correctly can be taken.

As another example, in the case where a defective line is not detected through the probe contact and inspection step S20, any line or a specific range of the glass stage unit 200, which is transported to the lower portion of the thermal image sensing unit 400, The double sensing may be performed by sensing the temperature through the sensing part 432.

It will be apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit or scope of the invention as defined in the appended claims. It is obvious to them. Therefore, the above-described embodiments are to be considered as illustrative rather than restrictive, and the present invention is not limited to the above description, but may be modified within the scope of the appended claims and equivalents thereof.

P: Inspection object C: Cell
g: Home
100: Base
200: glass stage unit 210: seat plate
212: Guide member 220: Aligning driver
300: probe detection unit 310: probe plate
320: probe stage 330: probe pin
340: First alignment camera
400 thermal image sensing unit 410 horizontal transfer part
412: current applying member 414: second alignment camera
420: alignment part 430: line transfer part
432: imaging section 434: second origin camera
500: first gantry unit 510: support frame
520: Cross frame
600: second gantry unit 610: observation camera

Claims (11)

Base;
A glass stage unit provided at an upper portion of the base, on which an object to be inspected is placed, and the object to be inspected is transported in a horizontal plane on a front, rear, left, and right sides;
A probe detection unit provided above the movement path of the glass stage unit and detecting a defective line of the inspection object through an electric signal;
A first gantry unit having a cross frame arranged across an upper part of the movement path of the glass stage unit; And
And a controller for detecting a temperature of the defective line and detecting a defective line when the defective line is detected through the probe detection unit, A thermal image sensing unit which detects a position of a defective pixel generated and moves along an arbitrarily selected line of the inspection object when the defective line is not detected through the probe detection unit and senses a temperature;
And a thermal image sensing unit including the thermal image sensing unit.
The method according to claim 1,
Wherein the glass stage unit comprises:
A seating plate on which the object to be inspected is seated; And
An aligning driving unit provided on the base and supporting the seating plate and capable of adjusting the movement of the seating plate in the front,
And a thermal image sensing unit including the thermal image sensing unit.
3. The method of claim 2,
Wherein the seating plate comprises:
A guide member protruding from the upper surface and provided with a plurality of teeth to fix the side surface of the inspection object;
And a thermal image sensing unit including the thermal image sensing unit.
The method according to claim 1,
The probe detection unit includes:
A probe plate provided on the base;
A probe pin contacting the cell of the object to be inspected and detecting a defective line through an electric signal; And
A probe stage coupled to the probe plate to move the probe pin in a horizontal direction;
And a thermal image sensing unit including the thermal image sensing unit.
5. The method of claim 4,
Wherein the probe stage comprises:
A first alignment camera disposed at a position adjacent to the probe pin and moved together with the probe pin to sense a position of the object to be inspected; And
A control unit for controlling movement of the probe pin through position information of an inspection object sensed through the first alignment camera;
And a thermal image sensing unit including the thermal image sensing unit.
5. The method of claim 4,
Wherein the probe stage comprises:
And a thermal image sensing unit provided for the tilt adjustment and elevation movement of the probe pin.
The method according to claim 1,
The thermal image sensing unit includes:
A current applying member contacting the cell of the object to be inspected and applying a current to the defective line of the object to be inspected;
An imaging unit that moves along a defective line of the inspection object and measures a temperature; And
A lateral transfer part provided so that the current applying member and the image pickup part can be transported along the cross frame;
And a thermal image sensing unit including the thermal image sensing unit.
8. The method of claim 7,
The horizontal transfer part
A second alignment camera for sensing a position of the cell of the inspection object and the current applying member; And
A control unit for controlling the transfer of the transverse transfer part through position information sensed by the second alignment camera;
And a thermal image sensing unit including the thermal image sensing unit.
8. The method of claim 7,
The thermal image sensing unit includes:
An aligning part provided on the image pick-up part so as to be fine-aligned on the transverse conveying part; And
A line conveying part provided so that the image pickup part can be moved in a direction orthogonal to a conveying direction of the transverse conveying part;
And a thermal image sensing unit including the thermal image sensing unit.
10. The method of claim 9,
A second origin camera for detecting a defective line of the inspection object; And
A control unit for controlling the transfer of the alignment part and the line transfer part so that the imaging unit can be moved vertically along the defective line of the inspection object through the position information sensed by the second origin camera;
And a thermal image sensing unit including the thermal image sensing unit.
The method according to claim 1,
The base includes:
A second gantry unit disposed above the inspection object and including an observation camera provided to detect physical defects of the inspection object;
And a thermal image sensing unit including the thermal image sensing unit.

Images