TWI460431B - Pogo probe unit and repair apparatus for flat panel display by the same - Google Patents

Description

Probe unit with pogo pin (POGO PIN) and substrate repairing device using same Technical field

The present invention relates to a probe unit provided with a pogo pin and a substrate repairing device using the same, and more particularly, to a transparent block that can support a spring pin, and can visually judge whether the contact is or not. The probe unit improves the reliability of the connection determination, and the probe is connected to the spring pin and the conductive pin by the conductive plate, thereby removing the cable, thereby improving the process efficiency and the probe unit having the pogo pin and using the same Substrate repair device.

The present invention relates to a repair device for a substrate circuit of a flat panel display, and more particularly to a substrate circuit repair for a flat panel display configured to perform open/short detection of a circuit simultaneously with substrate circuit repair. Device.

Background technique

Flat panel displays can be classified into cathode ray tubes (CRT) displays and liquid crystal displays (LCDs). Among them, LCD has recently attracted attention because it has the advantages of low power consumption and light weight.

The LCD is composed of an array substrate, a counter substrate, a liquid crystal layer, and the like. In the array substrate, a plurality of pixel electrodes arranged in a matrix, a plurality of scanning lines arranged along a row of the plurality of pixel electrodes, and a plurality of signal lines arranged along the row of the pixel electrodes are formed. In the manufacturing process of the array substrate, there are defects such as overlapping of electrical signal lines. When a defect occurs in the array substrate, a positive cannot be formed. True image. Therefore, it is necessary to cut off the overlapping signal lines so as not to overlap each other, and this process is called "repair".

In the repair process, after the LCD panel is manufactured, in order to use the probe unit to confirm the signal transmission problem of each signal line, it is necessary to perform electrical property inspection. This is because it is checked whether the LCD is manufactured to meet a specific benchmark.

Recently, with the development of high-integration of signal terminals of semiconductor elements and LCDs, in order to check the electrical characteristics of LCDs, probe units provided with probes have been widely used.

The first figure shows the structure of the conventional probe unit 100. As shown, the probe unit 100 includes a plurality of probes 130, a plurality of grooves for inserting the translucent blocks 110 of the probes 130, and a tester 160 for measuring whether or not a signal can be transmitted to the object 140 to be inspected. When the block 110 is appropriately moved relative to the object to be inspected 140, one end of the probe 130 contacts the signal transmission terminal of the object to be inspected 140, and the other end of the probe 130 is connected to the tester 160 via the cable 150, and it can be confirmed that The signal of the inspection body 140 is poorly conveyed or not.

However, in the conventional probe unit 100, the probe 130 cannot be visually confirmed during contact between the subject 140, for example, the LCD and the probe 130. Therefore, it is difficult to clearly grasp the above-mentioned contact state, and there is a problem that a defective connection occurs. Furthermore, even if the control is poor, it is impossible to confirm that the defect is a defect of the subject itself, a probe defect, or a miss align. Therefore, since the operator needs to confirm these one by one, there is a problem that it is difficult to automate.

In order to solve the aforementioned poor contact, a probe for judging contact or not is attached. When the sensor is used, it is still difficult to clearly improve the reliability, and there is a problem that the step of the inspection is increased and the tact time is increased.

Invention

The present invention has been made to solve the above problems, and an object of the present invention is to provide a transparent block that supports a pogo pin by a probe unit that inspects an electrical signal characteristic of a flat panel display, and can visually determine whether or not the contact is made, and conducts electricity. The probe board is provided with a spring pin and a conductive pin to remove the cable, thereby improving the process efficiency of the probe unit provided with the pogo pin and the substrate repairing device using the same.

The probe unit of the present invention for achieving the above object includes a plurality of pogo pins electrically contacting the object to be inspected, and is made of a transparent material, so as to support the support portion of the plurality of pogo pins, and transmit the plurality of pogo pins through the plurality of pogo pins. A conductive pin for reading the data and a conductive plate electrically connecting the plurality of pogo pins and the conductive pins.

Here, the conductive plate is preferably made of a conductive thin plate.

Further, the conductive plate is preferably formed of beryllium copper (BeCu).

Preferably, the probe unit further includes a camera unit for confirming whether or not the pogo pin is in contact with the object to be inspected, and a probe moving mechanism for moving the probe unit in a vertical horizontal direction.

Preferably, the camera unit further includes a camera for confirming whether the pogo pin is in contact with the object to be inspected, and a photo for moving the camera in a horizontal direction. Camera transfer mechanism.

A substrate repairing apparatus for a flat panel display according to another aspect of the present invention is for repairing a defect of a substrate, comprising: a repairing unit having: a repairing table having a platform on which an object to be repaired is placed; An optical portion of a defect region of the substrate to be repaired; a laser portion for projecting a laser to repair a defective region of the substrate; and an inspection portion for detecting an open circuit and a short circuit of the repaired substrate circuit; and moving The mechanism is configured to move the repairing unit on the X-axis and the Y-axis; the inspection unit has a probe unit, the probe unit has a plurality of spring pins, which are in electrical contact with the object to be inspected, and a transparent material support portion. a structure supporting the plurality of pogo pins; a conductive pin for transmitting data read by the plurality of pogo pins; and a conductive plate electrically connecting the plurality of pogo pins and the conductive pins.

Here, the probe unit preferably has a conductive plate electrically connecting the spring pin to the conductive pin, a camera portion for confirming whether the spring pin is in contact with the test object, and the probe unit can be used. A probe moving mechanism that moves vertically in the horizontal direction.

Preferably, the camera has a camera for confirming whether or not the pogo pin is in contact with the object to be inspected, and a camera transfer mechanism for moving the camera in the horizontal direction.

According to the invention of claim 1, in the double structure of the upper and lower plates of the support portion of the conventional support probe, the support portion is constituted by one plate made of a transparent material, and the contact of the pogo pin can be visually confirmed. Thereby, the reliability of the inspection work can be improved, and at the same time, by using the conductive plate due to the energization, Can improve the efficiency of manufacturing.

Further, according to the invention of claim 2, the entire size of the probe unit device can be made thinner.

According to the invention of claim 3, the efficiency of the inspection work can be improved.

According to the invention of claim 4 of the patent application, the efficiency of the inspection work can be improved.

According to the invention of claim 5, since the support of the transparent material can be automated, the confirmation of contact or failure can be automated, so that the correctness can be improved.

According to the invention of the sixth to eighth aspects of the patent application, the probe unit of the present invention having improved visibility can realize efficient inspection work, so that repair can be performed, reliability of inspection can be improved, and work steps can be improved. Efficiency.

The best form for implementing the invention

Hereinafter, the structure and function of the present invention will be described in detail with reference to the accompanying drawings.

Referring to Fig. 2, the probe unit 1 of the present invention has a plurality of pogo pins 10 connected to the object to be inspected, a support spring pin 10, a support portion 20 made of a block of transparent material, and a conductivity disposed under the support portion 20. The plate 40 penetrates the conductive plate 40 and contacts the disposed conductive pins 30. The conductive pin 30 is configured to be in electrical contact with the pogo pin 10 by the conductive plate 40.

The pogo pin 10 is provided with a predetermined elastic body inside, and generally can elastically protect the object to be inspected when the probe is in contact with the object to be inspected, and at the same time, precise contact can be achieved.

The support portion 20 is different from the conventional structure in which the upper and lower plates are divided to support the probe, and the lower plate is removed, and only the upper plate is formed, and at the same time, it is formed of a transparent material, and is configured to be visually contacted with the pogo pin 10. Whether or not or the status of the job. At this time, it is preferable that the support portion 20 is formed of a block of a transparent material.

The structure of the present invention can directly visually confirm the use of the conventional opaque block, the defect caused by the problem of the accuracy and reliability of the probe generated by the general structure of the support probe, and can be inspected, and the inspection operation can be improved. The advantage of efficiency. Furthermore, since it is not necessary to use a conventional opaque block, the sensor for distinguishing the necessary contact is also advantageous in that the processing time in the process can be shortened and the manufacturing cost can be reduced.

In order to electrically energize the inspected body and the contacted pogo pin 10, the conductive plate 40 is constructed of a plate having a more precise function instead of the general structure of the connecting cable. For example, a thin conductive thin plate made of an alloy of beryllium copper (BeCu) can be used to form a plate, and the entire structure can be simplified. In particular, in the structure in which the pogo pins 10 are electrically in contact with the conductive pins 30, the ends of the pogo pins 10 and the conductive pins 30 are connected by a contact finger structure that penetrates the shape of the end of the conductive plate 40. Electrically energized, the electric current can be smoothly supplied when the electrical properties of the test object are tested.

Specifically, the following process is performed, that is, the pogo pin 10 is in contact with the object to be inspected and the thinner portion is the gate/data line of the LCD, and the defect of the electrical signal is detected, and whether the information related thereto is confirmed via the conductive plate 40 contact It means that it is conveyed along the conductive pin 30.

Next, the structure and operation of the substrate repairing apparatus of the flat panel display equipped with the probe unit of the present invention will be described with reference to Fig. 3.

As shown in FIG. 3, the substrate repairing apparatus of the flat panel display of the present invention comprises a repairing station 600, a platform 700 disposed on the repairing station 600 for placing a substrate as a repair target, and an optical portion for inspecting a defective area generated in the substrate circuit. 300. A repair unit configured to inspect the open/short circuit inspection unit 100a of the repaired substrate circuit, and an X-axis moving mechanism 400 and a Y-axis moving mechanism 500 for moving the repair unit on the X-axis and the Y-axis.

The repairing table 600 has a vibration removing mechanism that does not show the vibration generated outside and inside, and the X-axis moving mechanism 400 is mounted on the upper surface of the repairing table 600 in the X-axis direction. The X-axis moving mechanism 400 is disposed by being disposed in the X-axis direction of the repairing table 600, and is provided with an X-axis supporting table 410, an X-axis rail provided on the X-axis supporting table 410, and the Y-axis supporting table 510 sliding in the X-axis direction. 420 constitutes.

On the other hand, a Y-axis moving mechanism 500 disposed in a direction perpendicular to the X-axis support table 410 is provided on the X-axis support table 410. The Y-axis moving mechanism 500 is coupled to the X-axis rail 420 at both ends, and is configured to be a Y-axis support table 510 slidable along the X-axis rail 420, a Y-axis rail 520 disposed on the side of the Y-axis support table 510 in the Y-axis direction, and attached. The Y-axis rail 520 is slid along the Y-axis rail 520, and the Y-axis rail block 530 of the repair unit is mounted. A platform 700 for supporting the substrate is disposed on an inner side surface of the repairing station 600 surrounded by the X-axis moving mechanism 400 and the Y-axis moving mechanism 500.

The optical unit 300 is used to inspect a defect area formed on a substrate of the flat panel display, and is composed of a light source 310, a lens 320, and a sensor (not shown). Composition. When light is emitted from the light source 310 onto the substrate, the irradiated light is reflected to the substrate, and the light reflected by the substrate passes through the lens 320 and is transmitted to the sensor. The sensor uses the difference in the amount of light reflected by the substrate to check for defects.

When the optical portion 300 of the present invention is used, even if the substrate is not directly contacted, it is possible to determine whether or not there is a defect, so that there is little problem of damage to the substrate, and the error caused by the inconsistency between the coordinate system of the inspection device and the coordinate system of the repair device is removed. , can clearly show the reduction of the non-performing rate.

The laser portion 200 removes defects on the substrate of the flat panel display, and is composed of a laser oscillator 210 that generates a laser beam, a collecting lens 220 that collects the laser beam, and a laser head 230 that provides a moving path of the laser beam. . The defect of the substrate can be repaired by cutting off the overlapping signal lines and the like by the laser beam generated by the laser oscillator 210.

The inspection unit 100a is for checking the open/short circuit of the repaired substrate circuit, and the inspection unit 100a is provided with a probe, a camera unit (not shown) for confirming contact of the substrate, and a probe unit 1. The probe moving mechanism (not shown) in which the needle unit 1 moves is constituted.

As described above, the repairing device in which the probe unit of the present invention is mounted forms a pogo pin supporting portion having a transparent material, whereby the visibility can be improved, and the probe can be visually confirmed. In order to achieve this in a more automated system, it is advisable to install a camera unit that allows for more precise visual confirmation of contact. This camera portion is preferably located on the upper side of the pogo pin.

Further, in the present invention, the camera portion is an adjustable position, and it is more preferable to have a camera transfer mechanism that can move the camera. The camera transfer mechanism should be transferred from the camera to the track, one side to the camera, and the other side to the link. The camera is configured to transfer the track and slide the camera link along the camera transfer track.

In the present invention, by having a camera transfer mechanism, the movement error of the pogo pin can be corrected, whereby the pogo pin can correctly align the object to be inspected, in other words, the terminal or pad of the object to be inspected, and the spring. The damage of the body itself or the failure of contact or the like can also be confirmed by the transparent material support unit.

The probe moving mechanism functions to vertically and horizontally move the probe unit, and is preferably constituted by a vertical moving mechanism that moves the probe unit up and down and a horizontal moving mechanism that moves the probe unit back and forth. Here, the vertical movement mechanism may be constituted by a ball screw driving device, and the horizontal movement mechanism may be constituted by a horizontal rail and a horizontal rail block.

Hereinafter, a method of repairing a substrate of a flat panel display will be described using the repairing apparatus of the present invention.

First, when the substrate is placed on the stage, the optical portion is driven to check whether the substrate is defective while moving the repair unit. The Y-axis track block with the repair unit is moved along the Y-axis track, and the Y-axis support table including the Y-axis track moves along the X-axis track, so that all locations of the substrate can be inspected.

Light is irradiated onto the substrate from the light source of the optical portion, and the light reflected from the substrate passes through the lens portion and is transmitted to the sensor. The sensor uses the difference in the amount of light reflected from the substrate to check for defects. At this time, if there is no defect, the substrate is carried out, and when a defect is found, the repair unit is moved so that the laser portion to be repaired is located at the upper portion of the defect region, the laser beam is projected, and the overlapping signal lines are cut off. With this, repair is done.

When the repair process is finished, the spring pin of the probe unit of the inspection unit contacts the object to be inspected, and the open/short circuit of the substrate circuit is checked by measuring the resistance value. At this time, whether or not the substrate is in contact with the substrate can be visually confirmed through the transparent material supporting portion, so that no other sensor is required. With the camera moving mechanism, the position of the camera is adjusted in accordance with the position to be observed, and the probe moving mechanism is used to finely move the probe unit, whereby the inspection of the desired position can be performed accurately.

Industrial availability

According to the present invention, the support portion including the transparent block supporting the spring pin has an effect of improving the reliability of the determination of the contact of the inspection substrate via the probe unit.

Further, the conductive pin is used to connect the pogo pin to the conductive contact to remove the cable, which has an effect of improving the efficiency of the process.

On the other hand, the present invention is described in the preferred embodiments of the present invention, and various modifications may be made without departing from the scope and spirit of the invention as disclosed in the appended claims. And amendments.

1‧‧‧ probe unit

10‧‧ ‧ spring needle

20‧‧‧Support

30‧‧‧Electrical pins

40‧‧‧Electrical plate

100a‧‧‧Inspection Department

200‧‧‧Ray Department

210‧‧‧Laser oscillator

220‧‧‧ collecting lens

230‧‧ ‧ laser head

300‧‧‧Optical Department

310‧‧‧Light source

320‧‧‧ lens

400‧‧‧X-axis moving mechanism

410‧‧‧X-axis support table

420‧‧‧X-axis orbit

500‧‧‧Y-axis moving mechanism

510‧‧‧Y-axis support table

520‧‧‧Y-axis track

530‧‧‧Y-axis track block

600‧‧‧Repair station

700‧‧‧ platform

Figure 1 is a cross-sectional view showing a probe unit of the prior art.

Figure 2 is a cross-sectional view showing the main part of the probe unit of the present invention.

Fig. 3 is a perspective view showing the substrate repairing apparatus of the present invention.

1‧‧‧ probe unit

10‧‧ ‧ spring needle

20‧‧‧Support

30‧‧‧Electrical pins

40‧‧‧Electrical plate

Claims (8)

A probe unit includes: a plurality of pogo pins that are in electrical contact with an object to be inspected; and a support portion that is made of a transparent material to support the plurality of spring pins; and the conductive pins are conveyed via And the conductive plate is electrically connected to the plurality of pogo pins and the conductive pins. The probe unit of claim 1, wherein the conductive plate is made of a conductive thin plate. The probe unit of claim 2, wherein the conductive plate is formed of beryllium copper (BeCu). A probe unit according to claim 3, wherein the probe unit has a camera unit for confirming whether or not the pogo pin is in contact with the object to be inspected, and a probe moving mechanism that can move the probe unit in a vertical horizontal direction. The probe unit of claim 4, wherein the camera unit has a camera for confirming whether or not the pogo pin is in contact with the object to be inspected, and a camera transfer mechanism for moving the camera in a horizontal direction. A substrate repairing device for a flat panel display, which is for repairing a defect of a substrate, comprising: a repairing unit having: a repairing platform having a platform on which an object to be repaired is placed; and the inspection is formed in the object to be repaired An optical portion of the defect region of the substrate; a laser portion for projecting a laser to repair the defective region of the substrate; and an inspection portion for detecting an open circuit and a short circuit of the repaired substrate circuit; and a moving mechanism The repairing unit is moved on the X-axis and the Y-axis; the inspection unit has a probe unit, the probe unit has a plurality of spring pins that are in electrical contact with the object to be inspected, and a transparent material support portion that supports the plurality of springs. The structure of the needle; the conductive pin transmits the material read by the plurality of pogo pins; and the conductive plate electrically connects the plurality of pogo pins and the conductive pin. The substrate repairing device of the flat panel display of claim 6, wherein the probe unit further comprises: a camera unit for confirming whether the spring pin is in contact with the object to be inspected; and a probe moving mechanism The aforementioned probe unit is moved in the vertical horizontal direction. The substrate repairing apparatus for a flat panel display according to claim 7, wherein the camera unit includes a camera for confirming whether or not the pogo pin is in contact with the object to be inspected, and a camera transfer mechanism for moving the camera in a horizontal direction.