KR102290680B1 - Mother panel transferring apparatus, display panel inspection apparatus and display panel inspection equipment - Google Patents

Abstract

The mother panel transfer device according to an embodiment of the present invention is a stage module for adsorbing and fixing the other surface of the mother panel in a normal state in which one surface of the mother panel faces upwards - One surface of the mother panel is for forming an organic light emitting layer at least one type of display panel on which an organic material layer is deposited is provided, and the stage module is rotated such that the mother panel is in an inverted state in which the one side faces downward from the normal state; After adsorbing the other surface of the mother panel whose state is changed from the normal state to the inverted state on the stage module, a first position for inspecting whether the display panel is defective while maintaining the inverted state of the mother panel a transfer module for moving to; a vacuum adsorption module for inspecting whether the display panel is defective by interaction with the probe unit on which the probe block is mounted; and the other surface of the mother panel moved to the first position by the transfer module is adsorbed, and then moved to the second position while maintaining the inverted state, so that the mother panel is moved to the inverted state by the vacuum adsorption module may include; a picker module for checking whether the display panel is defective due to the interaction by allowing the other surface to be adsorbed while maintaining the .

Description

Mother panel transferring apparatus, display panel inspection apparatus and display panel inspection equipment

The present invention relates to a ledger panel transfer device, a display panel inspection device, and a display panel inspection facility, and more specifically, to inspect whether display panels of various sizes included in a large ledger panel are defective in a face down method. It relates to a ledger panel transport device, a display panel inspection device, and a display panel inspection facility.

Organic light emitting diodes (OLEDs) used as flat panel display devices have a wide viewing angle, excellent contrast, and fast response speed.

In an organic light emitting diode (OLED), an organic material layer for forming an organic light emitting layer is deposited on a panel serving as a substrate, thereby realizing a pixel that emits light and color by an electrical signal.

Here, when an organic material layer is formed on a panel serving as a substrate by deposition to realize a pixel, an inspection should be performed on whether the pixel is defective before the encapsulation process.

In the related art, in order to prevent contamination from scattered particles during the inspection, the inspection was carried out in a face-down method, that is, in a state where the deposition part of the display panel requiring inspection is located on one side facing downward.

The display panel can be manufactured in various sizes according to the purpose of use, and is provided on the ledger panel during the manufacturing process, and the ledger panel is a single type or various sizes in which a plurality of display panels of the same size exist in order to increase the chamfering efficiency. The display panel may be of a mixed type formed by mixing.

Conventionally, in order to inspect whether the display panel is defective, it is disposed on a fishbone-type stage module with one side of the display panel having a deposition part on the ledger panel facing downward, and a fishbone-type stage module. is moved into the chamber for inspection after gripping the outer portion on which the deposition part is not formed among one surface where the deposition part is present in a state in which the deposition part faces downward.

After that, the other surface of the ledger panel without the deposition part was adsorbed by the vacuum plate, moved to the location where the probe block of the probe unit was located, and the contact pad of the display panel was brought into contact with the probe block. .

However, although the conventional inspection method is useful for inspecting a display panel on a relatively small ledger panel, there is a serious problem in inspecting whether a display panel on a large ledger panel is defective in a face down method. difficult situation.

In other words, in the case of a large ledger panel, if the deposition part is placed on the fishbone-type stage module with one side facing downward, the fishbone-type stage module is one of the surfaces on which the deposition part is present. The outer part where the deposition part is not formed is supported. In this case, the central part of the large led panel sags by its own weight, which makes accurate inspection impossible.

In addition, the conventional inspection method causes the following problems in addition to the problems described above.

The probe unit has no choice but to be equipped with a probe block for inspecting whether one type of display panel is defective. As a result, display panels of various sizes that require inspection exist on the ledger panel, so that the display panel to be inspected is different. In this case, it is inevitably necessary to replace it with a new probe unit suitable for it.

In general, the replacement operation of the probe unit is performed manually by an operator, and accordingly, the time required for the replacement operation is increased, and thus there is a problem in that the yield is reduced.

In addition, when replacing the probe unit, there is a problem in that the operator is often injured or electric shock.

Therefore, as a face down method to prevent contamination from scattering particles during inspection, research on the development of facilities to quickly and accurately inspect the defects of various types of display panels on a large ledger panel is urgent. the current situation.

An object of the present invention is a ledger panel transfer device, a display panel inspection device and It relates to a display panel inspection facility.

The mother panel transfer device according to an embodiment of the present invention is a stage module for adsorbing and fixing the other surface of the mother panel in a normal state in which one surface of the mother panel faces upwards - One surface of the mother panel is for forming an organic light emitting layer at least one type of display panel on which an organic material layer is deposited is provided, and the stage module is rotated such that the mother panel is in an inverted state in which the one side faces downward from the normal state; After adsorbing the other surface of the mother panel whose state is changed from the normal state to the inverted state on the stage module, a first position for inspecting whether the display panel is defective while maintaining the inverted state of the mother panel a transfer module for moving to; a vacuum adsorption module for inspecting whether the display panel is defective by interaction with the probe unit on which the probe block is mounted; and the other surface of the mother panel moved to the first position by the transfer module is adsorbed, and then moved to the second position while maintaining the inverted state, so that the mother panel is moved to the inverted state by the vacuum adsorption module may include; a picker module for checking whether the display panel is defective due to the interaction by allowing the other surface to be adsorbed while maintaining the .

The vacuum adsorption module of the mother panel transfer apparatus according to an embodiment of the present invention moves the position of the mother panel while maintaining the inverted state so that the electrode pad of the display panel and the probe block come into contact with each other, It may be characterized in that the inspection of whether the display panel is defective in the inverted state is carried out.

The transfer module of the mother panel transfer apparatus according to an embodiment of the present invention may be characterized in that, when the other surface is adsorbed by the picker module, the adsorption is released to be separated from the mother panel and then moved to the original position. have.

The second position of the mother panel transfer device according to an embodiment of the present invention may be a position raised to the vacuum adsorption module by the picker module based on the first position.

The stage module of the mother panel transfer apparatus according to an embodiment of the present invention includes a plurality of stage units for adsorbing the other surface of the mother panel in the normal state, and the stage units are arranged to be spaced apart from each other. It may be characterized in that a first space is formed therebetween.

The transfer module of the mother panel transfer apparatus according to an embodiment of the present invention is inserted into the first space when the stage module is rotated to change the state of the mother panel from the normal state to the inverted state. It may be characterized in that it comprises a plurality of transfer units for adsorbing the other surface of the mother panel is arranged as.

The picker module of the ledger panel transfer device according to an embodiment of the present invention is moved to the first position after passing through the vacuum adsorption module by descending in a state of being positioned at the third position, and is moved to the first position by the transfer module After adsorbing the other surface of the mother panel that has moved to the first position, it is moved to the second position by rising so that the other surface of the mother panel is adsorbed by the vacuum adsorption module. .

The picker module of the ledger panel transport apparatus according to an embodiment of the present invention may include a plurality of picker units spaced apart from each other so as to uniformly adsorb the other surface of the ledger.

When the other surface of the mother panel moved to the second position is adsorbed by the vacuum adsorption module, the picker module of the mother panel transfer device according to an embodiment of the present invention releases the adsorption and is separated from the mother panel After being done, it may be characterized in that it is returned to the third position.

According to the ledger panel transfer device, the display panel inspection device, and the display panel inspection facility according to the present invention, it is possible to determine whether the display panel of various sizes included in the large ledger panel is defective in a face down method of the probe unit or the probe block. By making it possible to proceed without replacement, the accuracy and speed of inspection for defects can be maximized.

1 is a view for explaining a display panel inspected for defects by the display panel inspection facility according to the present invention.
FIG. 2 is a view for explaining various embodiments of a combination of display panels included in a ledger panel that can be seated on a stage module provided in a display panel inspection facility according to the present invention; FIG.
3 is a block diagram illustrating a display panel inspection facility according to the present invention.
4 is a view for explaining a display panel inspection facility according to the present invention.
5 and 6 are views for explaining the flow of air in the inspection process proceeding equipment provided to the display panel inspection equipment according to the present invention, Figure 5 is a schematic cross-sectional view taken along line AA of Figure 4, Figure 6 is A schematic cross-sectional view taken along line BB in Fig.
7 is a flowchart for explaining a process in which a ledger panel is adsorbed to a vacuum adsorption module by a director panel transfer device provided in a display panel inspection facility according to the present invention;
8 is a view for explaining a situation in which the mother panel is seated in a normal state on the stage module provided in the mother panel transfer device according to the present invention;
9 and 10 are views for explaining a situation in which the ledger panel in a normal state is changed to an inverted state by the rotation of the stage module in the situation shown in FIG. 8;
11 is a view for explaining a situation in which the transfer module provided in the ledger panel transfer apparatus according to the present invention enters the stage module;
12 and 13 are views for explaining a situation in which the transfer module provided in the mother panel transfer apparatus according to the present invention adsorbs the led panel in an inverted state.
14 is a view for explaining a situation in which the transfer module provided in the mother panel transfer apparatus according to the present invention is moved to the first position;
15 and 16 are views for explaining a situation in which the picker module provided in the mother panel transfer apparatus according to the present invention is lowered to adsorb the mother panel in an inverted state.
17 is a view for explaining a situation in which the transfer module provided in the mother panel transfer apparatus according to the present invention is returned to its original position;
18 is a view for explaining a situation in which the picker module provided in the mother panel transfer device according to the present invention is raised to a second position.
19 is a view for explaining a situation in which the picker module provided in the mother panel transfer device according to the present invention is raised to a third position;
20 is a view for explaining a display panel inspection apparatus provided in the display panel inspection facility according to the present invention.
21 to 27 show that the inspection target ledger panel, which is a combination of a 65-inch display panel and a 55-inch display panel, is adsorbed to the vacuum adsorption module provided in the ledger panel transfer device according to the present invention, and the inspection is performed If applicable, a drawing for explaining an inspection method for each display panel.
28 is a view for explaining the movement of a position of an unused probe block when the display panel is inspected for defects by the display panel inspection apparatus according to the present invention;

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings. However, the spirit of the present invention is not limited to the embodiments presented, and those skilled in the art who understand the spirit of the present invention may add, change, delete, etc. other components within the scope of the same spirit, through addition, change, deletion, etc. Other embodiments included within the scope of the invention may be easily proposed, but this will also be included within the scope of the invention.

In addition, components having the same function within the scope of the same idea shown in the drawings of each embodiment will be described using the same reference numerals.

1. Display panel and ledger panel

1 is a view for explaining a display panel that is inspected for defects by the display panel inspection facility according to the present invention, Figure 2 is a ledger that can be seated on a stage module provided in the display panel inspection facility according to the present invention It is a diagram for explaining various embodiments of a combination of display panels included in the panel.

Referring to FIG. 1 , the display panel DP is a display panel inspection facility 1000 according to the present invention, in which an organic material layer for forming an organic light emitting layer is deposited on a panel serving as a substrate to implement a pixel, and prior to the encapsulation process, the display panel inspection facility 1000 ( FIG. 3 ). and see FIG. 4 ) may be used to check whether there is a defect.

The display panel DP includes a first electrode pad EP1 formed along a first corner area which is one of the corner areas of the upper surface, and a second electrode pad EP1 which is the other one of the corner areas of the upper surface to inspect whether a pixel is defective. Another one of the second electrode pad EP2 formed along the corner region, the third electrode pad EP3 formed along the third corner region that is another one of the corner regions of the upper surface, and the corner region of the upper surface. A fourth electrode pad EP4 formed along the fourth corner region may be provided.

However, in the display panel DP, the formation position and number of electrode pads may vary depending on the characteristics of the panel. Hereinafter, the process of inspecting for defects will be described using the display panel DP shown in FIG. 1 as an example. to explain

The display panel DP is to be manufactured through a process such as cutting after a plurality of the display panel DP is formed on the ledger panel MP whose size is determined depending on the size of the stage module 110 (refer to FIGS. 3 and 4) in the manufacturing process. In addition, the ledger panel MP may be a glass substrate that is the basis for the production of the display panel DP.

The ledger panel MP is a display panel of a single type or of various sizes in which a plurality of display panels DP of the same size exist in order to increase the efficiency of the defect inspection by minimizing the empty space, that is, to increase the chamfering efficiency. (DP) may be a mixed type formed by mixing.

For example, the ledger panel MP is a mixed type of two 98-inch display panels as shown in FIG. 2(a), and three 65-inch display panels and a 32-inch display panel as shown in FIG. 6 mixed types, 18 single types of 31.5 inch display panels as shown in Fig. 2(c), 2 49 inch display panels and 2 mixed types of 75 inch display panels as shown in Fig. 2(d), and Fig. As shown in 2(e), it may be a mixed type of three 65-inch display panels and two 55-inch display panels, but is not limited thereto, and may be a panel to which a mixed type of display panels of various sizes is applied.

The display panel inspection facility 1000 according to the present invention may inspect whether each of all the display panels included in the mixed-type ledger panel MP of the various combinations described above is defective. Hereinafter, the ledger panel is 65 A case of a mixed type in which three inch display panels and two 55 inch display panels are formed will be described as a representative example.

2. Display panel inspection equipment

3 is a block diagram for explaining a display panel inspection facility according to the present invention, and FIG. 4 is a diagram for explaining a display panel inspection facility according to the present invention.

3 and 4, the display panel inspection facility 1000 according to the present invention is a display panel (DP) of various sizes included in the mother panel (MP) in a back adsorption method, that is, a face down method. ) is an inspection equipment that can maximize the accuracy and speed of inspection for defects by allowing the probe unit (PU, see FIG. 20) or probe block (BP) to be processed without replacement. 1100 ) and an inspection process progress facility 1200 .

Inspection process preparation facility 1100 is provided with at least one type of display panel DP having an organic material layer deposited on one surface for forming an organic light emitting layer on one surface of the mother panel MP in a normal state with the one surface facing upward. When the other surface of the MP) is adsorbed to the stage module 110 , the stage module 110 is rotated so that the ledger panel MP is in an inverted state in which the one surface faces downward from the normal state, and then transferred The module 120 may be a facility for receiving the ledger panel MP in the inverted state and moving the ledger panel MP to a facility for the next process while maintaining the inverted state.

In the inspection process progress facility 1200 , the picker module 130 adsorbs the other surface of the ledger panel MP entered by the transfer module 120 , and then vacuums the picker module 130 through position movement. When the module 140 adsorbs the led panel MP in the inverted state, the electrode pad of the display panel DP is moved to the probe of the display panel inspection apparatus 200 through the position movement of the vacuum adsorption module 140 . It may be a facility for inspecting whether the display panel DP is defective by making it come into contact with the probe block PB of the unit PU.

On the other hand, in the display panel inspection facility 1000 according to the present invention, the ledger panel MP is seated on the stage module 110 , and the ledger panel MP is mediated by the picker module 130 by the transfer module 120 . As a result, the components until adsorbed to the vacuum adsorption module 140 can be defined as the ledger panel transfer device 100, and the display adsorbed to the vacuum adsorption module 140 by the ledger panel transfer device 100 A process of inspecting whether the panel DP is defective by the display panel inspection apparatus 200 will be described in detail with reference to FIGS. 7 to 28 .

5 and 6 are views for explaining the flow of air in the inspection process proceeding equipment provided to the display panel inspection equipment according to the present invention, Figure 5 is a schematic cross-sectional view taken along line AA of Figure 4, Figure 6 is It is a schematic cross-sectional view taken along line BB in Fig.

Referring to FIGS. 5 and 6 together with FIGS. 3 and 4 , in the inspection process progress facility 1200 , the electrode pad of the display panel DP and the probe block PB are in contact with the display panel DP to cause the defect. By photographing the first space part 300 for the inspection of whether or not, and the display panel DP, which is the object of the inspection for the defect, it is determined whether there is a stain or scratch on the display panel DP. The vision module 410 for confirming may include a second space portion 400 installed to be movably positioned, and the second space portion 400 may be located below the first space portion 300 . can

Here, the vision module 410 may include, for example, four camera units, and the working distance (WD) of the camera unit varies according to the size of the display panel DP to be photographed, The position may be movable toward the top or bottom.

In addition, since the four camera units must photograph the entire area of the display panel DP corresponding to the size of the display panel DP to be photographed, it is 1/4 of the display panel DP to be photographed, respectively. It must be located in the center of the area, and for this purpose it can be moved forward or backward, left or right. Also, if necessary, the display panel DP may be rotated forward or reversed to correspond to the rotation of the display panel DP to be photographed.

Meanwhile, the inspection on whether the display panel DP is defective in the inspection process preparation facility 1100 and the inspection process progress facility 1200 may be performed under a nitrogen atmosphere.

In particular, in the case of the inspection process proceeding facility 1200 , the nitrogen air must be circulated stably without stagnation in the first space 300 and the second space 400 .

To this end, the inspection process proceeding facility 1200 is a forced circulation module 310 located above the first space 300 , for circulation of the nitrogen air in the first space 300 . It may include a first circulation duct module 320 connecting the upper portion and the lower portion, and a second circulation duct module 420 connecting the first space portion 300 and the second space portion 400 .

The second circulation duct module 420 is configured so that the nitrogen air introduced into the second space 400 from the first space 300 is introduced back into the first space 300 and circulated. It can be, and the forced suction module 430 may be located on the second circulation duct module 420 .

Here, the forced circulation module 310 and the forced suction module 420 are a kind of suction fan, and the forced suction module 420 is located on the second circulation duct module 410 and the first space part ( The nitrogen air introduced into the second space 400 from 300 ) may be sucked and then discharged into the first space 300 .

Accordingly, the inspection process progress facility 1200 performs the inspection process of the display panel under a uniform nitrogen atmosphere.

Meanwhile, the inspection process preparation facility 1100 and the inspection process progress facility 1200 require a worker to enter the inside during maintenance, so that the conversion to a clean dry air (CDA) atmosphere can be made.

3. Ledger panel transfer device

7 is a flowchart illustrating a process in which a mother panel is adsorbed to a vacuum adsorption module by a mother panel transfer device provided to a display panel inspection facility according to the present invention.

First, referring to FIGS. 3 and 4 , the ledger panel transfer apparatus 100 may include a stage module 110 , a transfer module 120 , a picker module 130 , and a vacuum adsorption module 140 .

The stage module 110 is a component for adsorbing and fixing the other surface of the mother panel MP in a normal state in which one surface of the mother panel MP faces upward, and one surface of the mother panel MP has an organic light emitting layer. At least one type of display panel DP on which an organic material layer for formation is deposited may be provided.

Here, the other surface of the mother panel MP may be a non-deposition part as a whole.

The stage module 110 may be rotated so that the display panel is inspected in a face-down manner, whereby the mother panel MP is disposed and adsorbed to the stage module 110 in the normal state. ) may be an inverted state in which the one surface faces downward.

The transfer module 120 adsorbs the other surface of the mother panel MP whose state is changed from the normal state to the inverted state on the stage module 110, and then transfers the mother panel MP to the inverted state. It may be a component for moving it to the first position for inspection for defects while maintaining it.

The picker module 130 adsorbs the other surface of the ledger panel MP moved to the first position by the transfer module 120 and then rises based on the first position while maintaining the inverted state. As a component for moving to the second position, which is the current position, a plate-shaped vacuum adsorption module 140 to be described later may adsorb the mother panel MP in the inverted state.

When the led panel MP in the inverted state is moved to the second position by the transfer module 120 by the transfer module 120, the vacuum adsorption module 140 adsorbs the ledger panel MP while maintaining smoothness in the inverted state. Afterwards, the display panel inspection apparatus 200 may be a component for inspecting whether the display panel is defective by interaction with the probe block PB of the probe unit PU.

When the ledger panel is adsorbed in the inverted state by the vacuum adsorption module 140, the vacuum adsorption module 140 moves the position while maintaining the mother panel MP in the inverted state, and the display panel By making the electrode pad of DP and the probe block PB come into contact, the inspection is performed on whether the display panel DP is defective in the reversed state.

Here, the reason that the ledger panel must be finally adsorbed to the vacuum adsorption module 140 while maintaining the inverted state is the precise position control of the display panel DP for inspection of the display panel defect and the control of the display panel DP. In order to maintain smoothness, if the mother panel MP is moved to the display panel inspection apparatus 200 in a state in which the mother panel MP is adsorbed by other components instead of the vacuum adsorption module 140, a problem occurs in smoothness, etc. This is because inspection for defects is not guaranteed.

Hereinafter, a process in which the mother panel MP is adsorbed to the vacuum adsorption module 140 by the mother panel transfer device 100 according to the present invention will be described.

Referring to FIG. 7 , the step of adsorbing the ledger panel to the vacuum adsorption module by the ledger panel transfer device 100 according to the present invention is the first step in which the ledger panel MP is disposed on the stage module 110 in a normal state. Step 1 (S10), the second step (S20) in which the stage module 110 is rotated, the third step (S30) in which the transfer module 120 enters and adsorbs the ledger panel MP (S30), the transfer module ( A fourth step (S40) in which the 120) moves to the first position, a fifth step (S50) in which the picker module 130 is lowered to absorb the ledger panel MP (S50), a fourth step in which the transfer module 120 returns Step 6 (S60), a seventh step (S70) in which the picker module 130 is raised to a second position, an eighth step (S80) in which the display panel DP is adsorbed by the vacuum adsorption module 140, A ninth step (S90) in which the picker module 130 is raised and moved to a third position may be included.

Hereinafter, each of the above-described steps will be described in detail with reference to FIGS. 8 to 19 .

8 is a view for explaining a situation in which the mother panel is normally seated on the stage module provided in the mother panel transfer device according to the present invention.

Referring to FIG. 8 , the mother panel MP may be adsorbed after being disposed ( S10 ) on the stage module 110 in a normal state.

Here, it should be noted that, for convenience of explanation, one surface on which at least one display panel DP is provided is expressed in shades of the mother panel MP.

On the other hand, the method of disposing the mother panel MP on the stage module 110 is not particularly determined, and may be various such as an automatic method by a robot device or a manual method by an operator under a nitrogen atmosphere.

The stage module 110 may include a plurality of stage units 112 for adsorbing the other surface SF2 of the mother panel MP in the normal state, and the stage units 112 are spaced apart from each other. It can be arranged so that a first space (S1) is formed therebetween.

For example, the stage unit 112 may be formed of nine as shown in FIG. 8 , but is not necessarily limited thereto, and the mother panel MP to be supported does not have a central portion sagging due to its own weight. The number may be changed as long as it can be stably supported.

Each of the stage units 112 may include adsorption means 114 such as a suction pad for adsorbing the mother panel MP, and the number of the adsorption means 114 is not limited.

9 and 10 are diagrams for explaining a situation in which the ledger panel in a normal state is changed to an inverted state by the rotation of the stage module in the situation shown in FIG. 8 .

9 and 10 , the stage module 110 may be rotated (R, S20) while adsorbing the mother panel MP in a normal state, and the rotation direction is not limited.

A driving method for rotation of the stage module 110 is not particularly determined, and may be rotated using, for example, a known motor.

When the stage module 110 is rotated, the state of the mother panel MP, which has been adsorbed in a normal state, is changed to an inverted state in which the one surface SF1 on which the deposition part is located faces downward.

The ledger panel MP continuously maintains an inverted state while the inspection for defects is in progress, so that the display panel DP can proceed with the inspection for defects in a face down method. do.

11 is a view for explaining a situation in which the transfer module provided in the ledger panel transfer apparatus according to the present invention enters the stage module, and FIGS. 12 and 13 are the transfer modules provided in the ledger panel transfer apparatus according to the present invention. It is a diagram to explain the situation in which the ledger panel in the inverted state is adsorbed.

11 to 13 , when the ledger panel MP is in an inverted state due to the rotation of the stage module 110 , the transfer module 120 enters the stage module 110 , and then the ledger panel (MP) is adsorbed (S30).

The transfer module 120 is inserted into the first space S1 provided by the stage unit 112 and a plurality of transfer units for adsorbing the other surface SF2 of the ledger panel MP arranged in an inverted state. (122).

The transfer unit 122 may be disposed to be spaced apart from each other similarly to the stage unit 112 .

For example, the transfer unit 122 may be formed of eight as shown in the drawing, but is not necessarily limited thereto.

The transfer unit 122 may adsorb the other surface SF2 of the mother panel MP after entering the first space S1 provided by the mother panel MP and the stage unit 112 , , if necessary for adsorption of the mother panel MP, the position may be moved in the vertical direction.

Each of the transfer units 122 may include adsorption means 124 such as an adsorption pad for adsorbing the mother panel MP, and the number of the adsorption means 124 is not limited.

When the mother panel MP is adsorbed by the transfer unit 122 as described above, the adsorption of the mother panel MP by the stage unit 112 is released, thereby causing the mother panel MP to be absorbed. is interlocked with the movement of the transfer unit 122 .

14 is a view for explaining a situation in which the transfer module provided in the mother panel transfer apparatus according to the present invention is moved to the first position.

Referring to FIG. 14 , the transfer module 120 may be moved (S40) to a first position for inspection for defects while maintaining the inverted state while adsorbing the ledger panel MP in an inverted state. .

Here, the first position may mean a position on the lower part of the ledger panel MP in the inverted state with respect to the position where the vacuum adsorption module 140 and the picker module 130 are disposed, and in a later step, the picker The module 130 may stably adsorb the ledger panel MP in the inverted state while maintaining the inverted state.

15 and 16 are diagrams for explaining a situation in which the picker module provided in the ledger panel transfer device according to the present invention is lowered and adsorbs the led panel in an inverted state. It is a view for explaining a situation in which the provided transfer module is returned to its original position.

15 and 16 , the picker module 130 can move to the first position after passing through the vacuum adsorption module 140 by descending from the third position, and by the transfer module 120 . The led panel MP in an inverted state moved to the first position may be adsorbed (S50).

The picker module 130 may include a plurality of picker units 132 spaced apart from each other to prevent sagging by uniformly adsorbing the other surface SF2 of the mother panel MP.

When the ledger panel MP is adsorbed by the picker module 130, the transfer module 120 releases adsorption as shown in FIG. S60).

The transfer module 120 moved to its original position can operate to inspect another display panel provided in another ledger panel.

18 is a view for explaining a situation in which the picker module provided in the mother panel transfer device according to the present invention is raised to a second position.

Referring to FIG. 18 , the picker module 130 may adsorb the ledger panel MP in an inverted state and then move to the second position by rising ( S70 ). The ledger panel MP can be adsorbed (S80).

Here, the second position may be a position raised to the vacuum adsorption module 140 by the picker module 130 based on the first position, and the vacuum adsorption module 140 is the picker module 130 . Thus, it is possible to stably adsorb the ledger panel MP in an inverted state.

The vacuum adsorption module 140 may include a plurality of adsorption means such as a suction pad for adsorbing the mother panel MP.

19 is a view for explaining a situation in which the picker module provided in the mother panel transfer device according to the present invention is raised to a third position.

Referring to FIG. 19 , when the other surface SF2 of the ledger panel MP moved to the second position is adsorbed by the vacuum adsorption module 140 , the picker module 130 releases the adsorption to the ledger panel After being separated from (MP), it may be raised and returned to the third position (S990).

Thereafter, the vacuum adsorption module 140 and the probe block PB may be inspected for defects by interaction with the display panel inspection apparatus 200 including the mounted probe unit PU.

Here, in the interaction, the vacuum adsorption module 140 is moved to realize contact between the electrode pad of the display panel DP provided in the mother panel MP and the probe block PB of the probe unit PU, It may mean that an inspection is performed on whether the display panel DP is defective.

Hereinafter, a process of inspecting whether the display panel DP is defective by the display panel inspection apparatus 200 will be described in detail.

4. Display panel inspection device

20 is a view for explaining a display panel inspection apparatus provided in a display panel inspection facility according to the present invention.

Referring to FIG. 20 , the display panel inspection apparatus 200 may include a probe unit PU supporting the probe block PB and a support unit 210 on which the probe unit PU is movably mounted. can

The support unit 210 may be a frame formed in a kind of plate shape, and the probe unit PU is a first probe unit PU1 supporting a plurality of first probe blocks PB1 disposed in a transverse direction. , a second probe unit PU2 supporting the plurality of second probe blocks PB2 disposed in the longitudinal direction, and a third probe unit PU3 supporting the plurality of third probe blocks PB3 disposed in the transverse direction. ) and a fourth probe unit PU4 supporting the plurality of fourth probe blocks PB4 disposed in the longitudinal direction.

Here, the first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and the fourth probe unit PU4 move in the transverse direction D1 on the support unit 210 , D2) or it can be moved in the longitudinal direction (D3, D4) have.

Here, the lateral directions D1 and D2 and the longitudinal directions D3 and D4 may be directions for forming a quadrangle corresponding to the shape of the display panel DP.

In addition, the first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and the fourth probe unit PU4 are disposed on the support unit 210 in a diagonal direction D5 . may be moved directly to

Meanwhile, the plurality of first probe blocks PB1 , the plurality of second probe blocks PB2 , the plurality of third probe blocks PB3 , and the plurality of fourth probe blocks PB4 are the first probe blocks PB4 , respectively. The probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and the fourth probe unit PU4 may be movably mounted on each other.

Positions of the first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and/or the fourth probe unit PU4 on the support unit 210 as described above movement and position movement of the plurality of first probe blocks PB1 on the first probe unit PU1, movement of the plurality of second probe blocks PB2 on the second probe unit PU2; Through positional movement of the plurality of third probe blocks PB3 on the third probe unit PU3 and movement of the plurality of fourth probe blocks PB4 on the fourth probe unit PU4, Without replacement of the probe unit, it is possible to check whether each of the display panels DP of various sizes included in the ledger panel MP is defective, and also display panels of various sizes included in the ledger panel MP. Regardless of the arrangement state of (DP), that is, whether the long side is arranged in the transverse direction (D1, D2) or the longitudinal direction (D3, D4), it is possible to proceed with the inspection by appropriately responding accordingly.

21 to 27 show that the inspection target ledger panel, which is a combination of a 65-inch display panel and a 55-inch display panel, is adsorbed to the vacuum adsorption module provided for the ledger panel transfer device according to the present invention, and the inspection is performed In this case, it is a diagram for explaining an inspection method for each display panel.

First, the ledger panel MP adsorbed in an inverted state by the vacuum adsorption module 140 has a display panel DP with three 65-inch display panels DP1, DP2, DP3 and 55-inch display panels DP4, DP5 2 It will be described as an example of a dog-formed mixed type.

In addition, each display panel includes a plurality of first electrode pads formed along a first corner region that is one of the corner regions of the upper surface, and a plurality of second electrode pads formed along a second corner region that is the other one of the corner regions of the upper surface. , a plurality of third electrode pads formed along a third corner region that is another one of the corner regions of the upper surface and a plurality of fourth electrode pads formed along a fourth corner region that is another one of the corner regions of the upper surface; do.

In addition, a case in which each of the 65-inch display panels DP1, DP2, and DP3 is inspected first, and then, when the inspection is completed, the remaining 55-inch display panels DP4 and DP5 are inspected will be described as an example.

Referring to FIG. 21 , the first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and the first probe unit PU1 are the ledgers adsorbed on the vacuum adsorption module 140 . In order to check whether the 65-inch display panels DP1, DP2, and DP3 included in the panel MP are defective, the position may be moved on the support unit 210 .

In other words, each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the 65-inch display panels DP1, DP2, and DP3 is a plurality of first probes of the first probe unit PU1. At least a portion of the block PB1, at least a portion of the plurality of second probe blocks PB2 of the second probe unit PU2, at least a portion of the plurality of third probe blocks PB3 of the third probe unit PU3, and In order to contact at least some of the plurality of fourth probe blocks PB4 of the fourth probe unit PU4 , the first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 and At least one of the first probe units PU1 may be moved on the support unit 210 .

At least one of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 is directly moved in the diagonal direction D5, or As shown in , it may be moved in the diagonal direction D5 through movement in the lateral directions D1 and D2 and the longitudinal directions D3 and D4.

Here, the first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and the fourth probe unit PU4 each move on the support unit 210 , It may be implemented using various components such as a linear motion guide, a motor, a ball screw, and a ball nut, but this is only an example and may be implemented by applying various known movement methods.

The first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and the first probe unit PU1 include the plurality of first electrode pads and the plurality of second probe units. A probe block to be in contact with each of the electrode pad, the plurality of third electrode pads, and the plurality of fourth electrode pads is a part of the plurality of first probe blocks PB1 and among the plurality of second probe blocks PB2 . When a part, a part of the plurality of third probe blocks PB3, and a part of the plurality of fourth probe blocks PB4 are directly moved in the diagonal direction D5, or in the lateral directions D1 and D2 and the longitudinal direction It may be moved in the diagonal direction D5 through the movement in (D3, D4).

In this case, the first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and the first probe unit PU1 may have a pinwheel shape.

Meanwhile, the first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and the first probe unit PU1 include the plurality of first electrode pads and the plurality of probe units. All of the plurality of first probe blocks PB1 and the plurality of second probe blocks PB2 include a second electrode pad, a plurality of third electrode pads, and a probe block to be in contact with each of the plurality of fourth electrode pads. ), all of the plurality of third probe blocks PB3 and all of the plurality of fourth probe blocks PB4, depending on circumstances, may be directly moved in the diagonal direction D5 or the lateral direction D1, D2) and through movement in the longitudinal directions D3 and D4, it may be moved in the diagonal direction D5.

The first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4 are the first probe unit PU1 and the second probe, respectively. The unit PU2, the third probe unit PU3, and the fourth probe unit PU4 may be moved, and there is no particular limitation on the movement method.

As described above, the display panel inspection apparatus 200 according to the present invention has a 65-inch display panel DP1 formed on the mother panel MP by the position movement of the probe unit PU and/or the probe block PB. , DP2, DP3) and 55-inch display panels DP4 and DP5 can all be inspected for defects without replacing the probe unit and/or the probe block, which will be described in detail below.

The display panel inspection apparatus 200 according to the present invention includes three 65-inch display panels (DP1, DP2, DP3) and 55-inch display panels (DP4, DP5) 2 on the vacuum adsorption module 140 by a sensing unit (not shown). It is detected that the ledger panel MP in which the dog is formed has been adsorbed.

The sensing unit may include an imaging unit and/or various sensor units using a camera, etc., in a state where the led panel is adsorbed to the vacuum adsorption module 140 to the position where the probe unit PU is disposed. The size of the display panel DP constituting the ledger panel MP is sensed before or during the movement.

When the size and/or type of the display panels DP1, DP2, DP3, DP4, DP5 constituting the ledger panel MP is detected by the sensing unit, what kind of display panel DP1, DP2 is detected by the control unit , DP3, DP4, DP5) is determined first, and in the following, as described above, the 65-inch display panel (DP1, DP2, DP3) is preferentially determined as the inspection target than the 55-inch display panel (DP4, DP5) will be described as an example.

The size and/or type of the display panels DP1, DP2, DP3, DP4, DP5 formed on the ledger panel MP are detected by the control unit, and the 65-inch display panels DP1, DP2, DP3 among the detected display panels ), the control unit determines that the probe block PB is in contact with the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad provided in the 65-inch display panel DP. Thus, the probe unit PU and the probe block PB may be moved so that electrical connection is possible.

That is, the first probe unit PU1 moves in the downward direction D4 among the longitudinal directions D3 and D4, which is the direction toward the third probe unit PU3 regardless of the order, and the horizontal directions D1 and D2) Through the position movement in the right direction D1, the position may eventually be moved in the diagonal direction D5, but is not limited thereto, and may be directly moved in the diagonal direction D5.

At this time, the probe block required for inspection among the plurality of first probe blocks PB1 may be moved on the first probe unit PU1 in the left direction D2 among the lateral directions D1 and D2, but Depending on the arrangement state of the electrode pads, there may be no change in position as shown in the drawings.

In addition, the second probe unit PU2 moves in the left direction D2 among the lateral directions D1 and D2, which is a direction toward the fourth probe unit PU4 irrespective of the order, and the longitudinal directions D3 and D4. Through the position movement in the lower direction D4, the position is eventually moved in the diagonal direction D5, but is not necessarily limited thereto, and may be directly moved in the diagonal direction D5.

In this case, the probe block required for inspection among the plurality of second probe blocks PB2 may be moved in the upper direction D3 among the longitudinal directions D3 and D4 on the second probe unit PU2, but the electrode of the display panel Depending on the arrangement of the pads, there may be no change in position as shown in the drawings.

In addition, the third probe unit PU3 moves in the upper direction D3 among the longitudinal directions D3 and D4 that are directions toward the first probe unit PU1 regardless of the order and moves in the lateral directions D1 and D2. Through the position movement in the left direction D2, the position may eventually be moved in the diagonal direction D5, but is not limited thereto, and may be directly moved in the diagonal direction D5.

In this case, the probe block required for inspection among the plurality of third probe blocks PB3 may be moved in the right direction D1 among the lateral directions D1 and D2 on the third probe unit PU3 , but the electrode of the display panel Depending on the arrangement of the pads, there may be no change in position as shown in the drawings.

In addition, the fourth probe unit PU4 moves in the right direction D1 among the lateral directions D1 and D2, which are directions toward the second probe unit PU2 regardless of the order, and the longitudinal directions D3 and D4. Through the position movement in the upper direction D3, the position may eventually be moved in the diagonal direction D5, but is not limited thereto, and may be directly moved in the diagonal direction D5.

In this case, the probe block required for inspection among the plurality of fourth probe blocks PB4 may be moved in the lower direction D4 among the longitudinal directions D3 and D4 on the fourth probe unit PU4, but the electrode of the display panel Depending on the arrangement of the pads, there may be no change in position as shown in the drawings.

As a result, the first probe unit 110 , the second probe unit 120 , the third probe unit 130 , and the fourth probe unit 140 may be moved to have a pinwheel shape.

In addition, the first probe block PB1 and the third probe block PB3 required for inspection are respectively the first probe unit PU1 and the third probe unit PU3 according to the arrangement of electrode pads of the display panel. ), the second probe block (PB2) and the fourth probe block (PB4) required for inspection are each of the second probe unit ( PU2) and the fourth probe unit PU4 may be moved in opposite directions.

Of course, as described above, the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4 according to the arrangement state of the electrode pads of the display panel. ) may have no change in position.

Some of the plurality of first probe blocks PB1, some of the plurality of second probe blocks PB2, and a plurality of third A portion of the probe block PB3 and a portion of the plurality of fourth probe blocks PB4 are respectively a first electrode pad, a second electrode pad, a third electrode pad, and a fourth of the 65-inch display panels DP1, DP2, and DP3. It is precisely disposed at a position corresponding to the electrode pad.

When the position movement of the probe unit PU and the probe block PB is completed, the vacuum adsorption module 140 is a first electrode pad of the first 65-inch display panel DP1 constituting the mother panel MP. , the second electrode pad, the third electrode pad, and the fourth electrode pad are respectively the first probe block PB1 , the second probe block PB2 , the third probe block PB3 , and the fourth probe block PB4 . ) to be located above the

Here, the positional movement of the vacuum adsorption module 140 may include linear movement and/or rotational movement, and in addition, various types of movement methods may be applied.

Due to this, various arrangement states of the display panel DP1 that need to be inspected may be implemented.

Each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the first 65-inch display panel DP1 includes a first probe block PB1, the second probe block PB2, When positioned above the third probe block PB3 and the fourth probe block PB4, as shown in FIG. 22, the vacuum adsorption module 140 moves through the position of the first 65-inch display Each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the panel DP1 is a first probe block PB1 , the second probe block PB2 , and the third probe block PB3 . ) and the fourth probe block PB4 to realize electrical connection, so that the first 65-inch display panel DP1 is inspected for defects.

On the other hand, when the inspection of whether the first 65-inch display panel DP1 is defective is completed, the first electrode pad of the first 65-inch display panel DP1 is moved through the position movement of the vacuum adsorption module 140 . , the second electrode pad, the third electrode pad, and the fourth electrode pad, respectively, and the first probe block PB1 , the second probe block PB2 , the third probe block PB3 , and the fourth probe block PB3 . ) will be disconnected.

Thereafter, as shown in FIG. 23 , the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode of the second 65-inch display panel DP2 are moved through the position movement of the vacuum adsorption module 140 . Each of the pads is brought into contact with the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4, so that the second 65 inches An inspection of whether the display panel DP2 is defective is performed.

When the inspection on whether the second 65-inch display panel DP2 is defective is completed, the first electrode pad of the second 65-inch display panel DP2 is Each of the second electrode pad, the third electrode pad, and the fourth electrode pad, and the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4 contact is broken.

Thereafter, as shown in FIG. 24 , the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode of the third 65-inch display panel DP3 are moved through the position movement of the vacuum adsorption module 140 . Each of the pads is brought into contact with the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4, so that the third 65 inches An inspection of whether the display panel DP3 is defective is performed.

When the inspection on whether the third 65-inch display panel DP3 is defective is completed, the first electrode pad of the third 65-inch display panel DP3 is moved through the position movement of the vacuum adsorption module 140; Each of the second electrode pad, the third electrode pad, and the fourth electrode pad, and the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4 contact is broken.

Thereafter, the control unit controls the probe blocks PB1, PB2, PB3 as shown in FIG. , PB4 are in contact with the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad provided in the 55-inch display panels DP4 and DP5 to enable electrical connection. , PU3, PU4) and the probe blocks PB1, PB2, PB3, and PB4 may be moved.

The first probe block PB1, the second probe block PB2, and the Each of the third probe block PB3 and the fourth probe block PB4 accurately corresponds to the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the 55-inch display panels DP4 and DP5. will be moved to the

When the position movement of the probe units (PU1, PU2, PU3, PU4) and the probe blocks (PB1, PB2, PB3, PB4) is completed, the vacuum adsorption module 140 is the first Each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the 55-inch display panel DP4 is a first probe block PB1, the second probe block PB2, and the third probe. The position is moved so as to be positioned above the block PB3 and the fourth probe block PB4.

Here, the positional movement of the vacuum adsorption module 140 may include linear movement and/or rotational movement, and in addition, various types of movement methods may be applied.

Each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the first 55-inch display panel DP4 includes a first probe block PB1, the second probe block PB2, When positioned above the third probe block PB3 and the fourth probe block PB4, the first 55-inch display panel is moved through the position of the vacuum adsorption module 140 as shown in FIG. 26 . Each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of DP4 is a first probe block PB1 , the second probe block PB2 , and the third probe block PB3 , respectively. and the fourth probe block PB4 to be electrically connected, so that the first 55-inch display panel DP4 is inspected for defects.

On the other hand, when the inspection on whether the first 55-inch display panel DP4 is defective is completed, the first electrode pad of the first 55-inch display panel DP4 is moved through the position movement of the vacuum adsorption module 140 . , the second electrode pad, the third electrode pad, and the fourth electrode pad, respectively, and the first probe block PB1 , the second probe block PB2 , the third probe block PB3 , and the fourth probe block PB4 . ) will be disconnected.

Thereafter, as shown in FIG. 27 , the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode of the second 55-inch display panel DP5 are moved through the position movement of the vacuum adsorption module 140 . Each of the pads is brought into contact with the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4, so that the second 55 inches An inspection of whether the display panel DP5 is defective is performed.

When the inspection for whether the second 55-inch display panel DP5 is defective is completed, the first electrode pad of the second 55-inch display panel DP5 through the position movement of the vacuum adsorption module 140, the second Each of the second electrode pad, the third electrode pad, and the fourth electrode pad, and the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4 The contact is released, and the inspection for defects on each of the display panels DP1, DP2, DP3, DP4, and DP5 included in the ledger panel is completed.

As described above, when the inspection for defects of all the display panels DP1, DP2, DP3, DP4, DP5 formed on one ledger panel is completed, the ledger panel MP proceeds to the next process (eg, encapsulation process, etc.). ), and the inspection process for other ledger panels is repeated.

28 is a view for explaining the movement of a position of an unused probe block when the display panel is inspected for defects by the display panel inspection apparatus according to the present invention.

Referring to FIG. 28 , when an inspection is performed on whether the display panel is defective, some of a plurality of probe blocks on an arbitrary probe unit may not be used for the inspection.

Hereinafter, a case in which only the outermost probe block (PBX) among a plurality of probe blocks on an arbitrary probe unit is not used for testing will be described. make it clear that it is possible

When inspecting a display panel of a specific size, when a part of a probe block to be in contact with a plurality of electrode pads among a plurality of probe blocks on an arbitrary probe unit is a part, the remaining probe blocks PBX among the plurality of probe blocks The position may be moved so that some of the probe blocks among the probe blocks of the . .

Specifically, the probe block PBX includes a probe body portion PBX1 mounted on the probe unit PU, and a variable probe mounted on the probe body PBX1 to be movable upward or downward and including a probe. A portion PBX2 may be provided, and when the probe variable portion PBX2 corresponds to the remaining probe block, it is moved downward from the probe body portion PBX1 to communicate with other display panels on the mother panel. Contact can be prevented.

Here, as a method of moving the position of the probe variable part PBX2 on the probe body part PBX1, a driving method such as an actuator may be applied, but it is not necessarily limited thereto, and all known driving methods may be applied.

In the above, the configuration and features of the present invention have been described based on the embodiments according to the present invention, but the present invention is not limited thereto, and it is understood that various changes or modifications can be made within the spirit and scope of the present invention. It is intended that such changes or modifications will be apparent to those skilled in the art, and therefore fall within the scope of the appended claims.

100: ledger panel transfer device
110: stage module
120: transfer module
130: picker module
140: vacuum adsorption module
200: display panel inspection device
300: first space part
400: second space part
1000: display panel inspection equipment
1100: Inspection process preparation equipment
1200: inspection process progress equipment

Claims (2)

A stage module for adsorbing and fixing the other surface of the mother panel in a normal state with one surface of the mother panel facing upwards - At least one type of display panel on which an organic material layer for forming an organic light emitting layer is deposited on one surface of the mother panel is provided - ; and
a transfer module for adsorbing the other surface of the mother panel adsorbed to the stage module, and then moving the adsorbed mother panel to a first position for checking whether the display panel is defective;
The stage module is
and a plurality of stage units for adsorbing the other surface of the mother panel in the normal state, and preventing the central portion of the mother panel from sagging due to its own weight,
The plurality of stage units,
They are respectively spaced apart from each other to form a first space therebetween,
The transfer module is
When the stage module is rotated to change the state of the mother panel from the normal state to an inverted state in which the one surface faces downward, it is inserted into the first space and adsorbed the other surface of the mother panel disposed in the reversed state However, the mother panel transfer device comprising a plurality of transfer units for preventing the central portion of the mother panel from sagging due to its own weight.
According to claim 1,
The transfer module is
After the mother panel is changed from the normal state to the inverted state by the rotation of the stage module, the second surface of the mother panel whose state is changed to the inverted state is adsorbed to maintain the mother panel in the inverted state. Ledger panel transport device, characterized in that it moves to position 1.

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