KR20200122222A - Mother panel transferring apparatus, display panel inspection apparatus and display panel inspection equipment - Google Patents

Abstract

According to an embodiment of the present invention, a display panel inspection facility comprises: an inspection process preparation facility in which, when the one side of a mother panel is adsorbed to a stage module in a normal state, in which the other side of the mother panel is facing upwards, wherein the other side of the mother panel includes at least one kind of display panel with an organic matter layer deposited for the formation of an organic light emitting layer, the stage module is rotated to change the mother panel from the normal state to a reverse state where the other side is facing downwards and then, a transfer module receives the mother panel in the reverse state to move the mother panel to a facility for the next process while maintaining the reverse state; and an inspection process conducting facility in which a picker module adsorbs the one side of the mother panel moved in by the transfer module and then, when a vacuum adsorption module adsorbs the mother panel in the reverse state through the position movement of the picker module, an electronic pad of the display panel comes in contact with a probe block of a probe unit through the position movement of the vacuum adsorption module, thereby inspecting whether the display panel is defective. Therefore, the display panel inspection facility is capable of maximizing the accuracy and quickness of a defect inspection.

Description

Ledger panel transferring apparatus, display panel inspection apparatus, and display panel inspection equipment TECHNICAL FIELD

The present invention relates to a ledger panel transport apparatus, a display panel inspection apparatus, and a display panel inspection facility, and more particularly, a face down method to inspect the defects of display panels of various sizes included in a large ledger panel. It relates to a ledger panel transfer device, a display panel inspection device, and a display panel inspection facility.

Organic light-emitting diodes (OLEDs) used as flat panel display devices have the advantage of having a wide viewing angle, excellent contrast, and fast response speed, and are thus widely used in smartphones and televisions.

In the organic light-emitting diode (OLED), an organic material layer for forming an organic light-emitting layer is deposited on a panel serving as a substrate, and thus, a pixel that emits light and color by an electrical signal is implemented.

Here, when an organic material layer is formed on a panel serving as a substrate by evaporation to implement a pixel, an inspection for a defective pixel must be performed before the encapsulation process.

Conventionally, in order to prevent contamination from particles scattering during inspection, the inspection was conducted in a face-down method, that is, with the one side of the deposition portion of the display panel requiring inspection facing downward.

The display panel can be manufactured in various sizes depending on the purpose of use, and is provided on the ledger panel during the manufacturing process. The ledger panel is a single type or various sized display panels in which a plurality of display panels of the same size exist to increase chamfering efficiency. It may be a mixed type formed by mixing display panels.

Conventionally, in order to inspect the display panel for defects, a fishbone-type stage module is disposed with one side of the display panel on the ledger panel facing the bottom, and a fishbone-type stage module Is moved into the chamber for inspection after gripping the outer portion where the deposition portion is not formed among the one surface where the deposition portion exists while the deposition portion faces downward.

After that, the other surface of the ledger panel without the evaporation part was adsorbed by the vacuum plate, moved to the place where the probe block of the probe unit was located, and then the contact pad of the display panel was brought into contact with the probe block. .

However, although the conventional inspection method is useful for inspecting a display panel on a relatively small ledger panel, a serious problem has occurred to inspect the display panel on a large ledger panel using a face down method. It is a difficult situation.

In other words, in the case of a large ledger panel, if a fishbone type stage module is placed with one side of the evaporation unit facing downward, the fishbone type stage module is The outer portion where the evaporation portion is not formed is supported. In this case, the central portion of the large ledger panel is drooped by its own weight, making it impossible to perform an accurate inspection.

In addition, the conventional inspection method further causes the following problems in addition to the above-described problems.

The probe unit has no choice but to be equipped with a probe block to check whether one type of display panel is defective, and as a result, display panels of various sizes that need to be inspected exist on the ledger panel, which makes the display panel subject to inspection different. If so, it is inevitably necessary to replace it with a new probe unit.

In general, the replacement work of the probe unit is performed manually by an operator, and accordingly, there is a problem that the time required for the replacement work is lengthened and the yield is lowered.

In addition, there is a problem that the operator is often injured or electric shocked when replacing the probe unit.

Therefore, research on the development of facilities to quickly and accurately inspect various types of display panels on large ledger panels is urgently needed as a face down method to prevent contamination from particles scattered during inspection. Actually.

An object of the present invention is a ledger panel transfer apparatus, a display panel inspection apparatus, and a display panel inspection apparatus, which enable it to proceed without replacement of a probe unit or a probe block whether or not there is a defect in a display panel of various sizes included in a large ledger panel in a face down method. It relates to a display panel inspection facility.

A display panel inspection facility according to an embodiment of the present invention includes a ledger panel-at least one type of display panel on which an organic material layer for forming an organic light-emitting layer is deposited is provided on one surface of the ledger panel-one side of the ledger panel is in a normal state When the other surface of the ledger panel is adsorbed to the stage module, the stage module is rotated so that the ledger panel is in a reversing state in which the one surface faces downward in the normal state, and then the transfer module is in the reversing state. An inspection process preparation facility for receiving the ledger panel and moving the ledger panel to a facility for the next process while maintaining the inversion state; And after the picker module adsorbs the other surface of the ledger panel entered by the transfer module, and the vacuum adsorption module adsorbs the ledger panel in the reverse state by moving the position of the picker module, the position of the vacuum adsorption module And a facility for performing an inspection process for inspecting whether the display panel is defective by allowing the electrode pad of the display panel to contact the probe block of the probe unit through movement.

In the apparatus for performing the inspection process of the display panel inspection facility according to an embodiment of the present invention, the electrode pad of the display panel and the probe block are in contact with each other to perform a first inspection for the defect of the display panel. A space part and a second space part in which a vision module for photographing the display panel is installed so as to be movable in order to check whether there is a spot or a scratch on the display panel, and the second space part includes the first It may be characterized in that it is located under the space part.

In the inspection process operation facility of the display panel inspection facility according to an embodiment of the present invention, the inspection for the defect is performed under a nitrogen atmosphere, and the first space portion includes an upper portion and an upper portion for circulation of nitrogen in the nitrogen atmosphere. It may be characterized in that it includes a first circulation duct module connecting the lower portion.

In the inspection process operation facility of the display panel inspection facility according to an embodiment of the present invention, the inspection for the defect is performed under a nitrogen atmosphere, and in the nitrogen atmosphere introduced from the first space part to the second space part The nitrogen of the second space is located on a second circulation duct module connecting the first space and the second space so that the nitrogen of the first space is circulated again. It may be characterized in that it comprises a forced suction module to be discharged to the first space after suction.

The transfer module of the display panel inspection facility according to an embodiment of the present invention, after adsorbing the other surface of the ledger panel whose state has changed from the normal state to the inverted state on the stage module, reverses the ledger panel. While maintaining the state, the display panel is moved to a first position in the inspection process progress facility for inspection of whether or not the display panel is defective, and the vacuum adsorption module is configured to interact with the probe unit on which the probe block is mounted. The display panel is inspected for defectiveness, and the picker module adsorbs the other surface of the ledger panel moved to the first position by the transfer module, and then maintains the reversed state while maintaining the second position. By moving to, the ledger panel maintains the inverted state and the other surface is adsorbed by the vacuum adsorption module, so that the display panel is inspected for defects due to the interaction.

The second position of the display panel inspection facility according to an embodiment of the present invention may be a position raised to the vacuum adsorption module by the picker module based on the first position.

The picker module of the display panel inspection facility according to an embodiment of the present invention is moved to the first position after passing through the vacuum adsorption module by descending, in a state located in the third position, by the transfer module. After adsorbing the other surface of the ledger panel moved to the first position, it is moved to the second position by ascending, so that the other surface of the ledger panel is adsorbed by the vacuum adsorption module. have.

The display panel of the display panel inspection facility according to an embodiment of the present invention includes a plurality of first electrode pads formed along a first side, a plurality of second electrode pads formed along a second side, and formed along a third side. A plurality of third electrode pads and a plurality of fourth electrode pads formed along a fourth side surface thereof are provided, wherein the probe unit includes: a first probe unit supporting a plurality of first probe blocks disposed in a horizontal direction, in a vertical direction. A second probe unit supporting a plurality of disposed second probe blocks, a third probe unit supporting the plurality of third probe blocks disposed in the transverse direction, and a plurality of fourth probe blocks disposed in the longitudinal direction are supported. And a fourth probe unit, wherein each of the plurality of first electrode pads, the plurality of second electrode pads, the plurality of third electrode pads, and the plurality of fourth electrode pads are among the plurality of first probe blocks. At least a portion, at least a portion of the plurality of second probe blocks, at least a portion of the plurality of third probe blocks, and at least a portion of the plurality of fourth probe blocks are contacted to perform an inspection for the defect of the display panel In order to be, at least one of the first probe unit, the second probe unit, the third probe unit, and the first probe unit may be moved toward at least one of the transverse direction, the longitudinal direction, and the diagonal direction. It can be characterized by what can be.

If some of the plurality of first probe blocks are to be in contact with the plurality of first electrode pads, the remaining probe blocks among the plurality of first probe blocks of the display panel inspection facility according to an embodiment of the present invention Is, when the part of the probe blocks of the plurality of first probe blocks are in contact, the position is moved to prevent contact with other display panels on the ledger panel other than the display panel on which the inspection for the defect is performed. It can be characterized.

The first probe block of the display panel inspection facility according to an embodiment of the present invention is mounted on the probe body so as to be movable in position toward an upper or lower portion and a probe body mounted on the first probe unit, and The probe variable portion is provided with a probe variable portion, wherein the probe variable portion is moved downward from the probe body portion to prevent contact with other display panels on the ledger panel when corresponding to the remaining probe blocks. I can.

According to the ledger panel transfer apparatus, display panel inspection apparatus, and display panel inspection facility according to the present invention, the display panel of various sizes included in the large ledger panel in a face down method is determined by the probe unit or probe block. By allowing it to proceed without replacement, it is possible to maximize the accuracy and speed of inspection for defects.

1 is a diagram illustrating a display panel inspected for defects by a display panel inspection facility according to the present invention.
2 is a view for explaining various embodiments of combinations of display panels included in a ledger panel that can be mounted on a stage module provided in a display panel inspection facility according to the present invention.
3 is a block diagram illustrating a display panel inspection facility according to the present invention.
4 is a view for explaining a display panel inspection facility according to the present invention.
5 and 6 are views for explaining the flow of air in the inspection process processing facility provided to the display panel inspection facility according to the present invention, and FIG. 5 is a schematic cross-sectional view taken along line AA of FIG. 4, and FIG. 6 is A schematic cross-sectional view taken along line BB in 4.
7 is a flowchart illustrating a process in which the ledger panel is adsorbed to the vacuum adsorption module by the ledger panel transfer device provided to the display panel inspection facility according to the present invention.
8 is a view for explaining a situation in which the ledger panel is seated in a normal state on the stage module provided in the ledger panel transfer apparatus according to the present invention.
9 and 10 are diagrams for explaining a situation in which a ledger panel in a normal state is changed to an inverted state due to rotation of a stage module in the situation shown in FIG. 8;
11 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention enters the stage module.
12 and 13 are views for explaining a situation in which a transfer module provided to the ledger panel transfer device according to the present invention adsorbs the ledger panel in a reversed state.
14 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention is moved to a first position.
15 and 16 are views for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is lowered to adsorb the ledger panel in a reversed state.
17 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention is returned to its original position.
18 is a view for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is raised to a second position.
19 is a view for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is raised to a third position.
20 is a view for explaining a display panel inspection apparatus provided in the display panel inspection facility according to the present invention.
21 to 27 show that the ledger panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is adsorbed to the vacuum adsorption module provided in the ledger panel transfer device according to the present invention, so that the inspection for defects proceeds If so, a diagram for explaining an inspection method for each display panel.
28 is a view for explaining a positional movement of an unused probe block when a display panel is inspected for defects by the display panel inspection apparatus according to the present invention.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings. However, the spirit of the present invention is not limited to the presented embodiments, and those skilled in the art who understand the spirit of the present invention can add, change, or delete other elements within the scope of the same idea. Other embodiments included within the scope of the inventive concept may be easily proposed, but this will also be said to be included within the scope of the inventive concept.

In addition, components having the same function within the scope of the same idea shown in the drawings of each embodiment will be described with the same reference numerals.

1. Display panel and ledger panel

1 is a diagram illustrating a display panel inspected for defects by a display panel inspection facility according to the present invention, and FIG. 2 is a ledger that can be mounted on a stage module provided in a display panel inspection facility according to the present invention. A diagram for describing various embodiments of a combination of display panels included in the panel.

Referring to FIG. 1, in the display panel DP, a pixel is implemented by depositing an organic material layer for forming an organic light emitting layer on a panel serving as a substrate, and before the encapsulation process, the display panel inspection facility 1000 according to the present invention (FIG. 3). And (see FIG. 4), an inspection may be performed for defects.

The display panel DP includes a first electrode pad EP1 formed along a first corner region, which is one of the corner regions of the upper surface, and a second electrode pad EP1 formed along the first corner region of the upper surface, to inspect whether a pixel is defective. The second electrode pad EP2 formed along the edge area, the third electrode pad EP3 formed along the third edge area, which is another one of the edge areas of the upper surface, and another one of the edge area of the upper surface, A fourth electrode pad EP4 formed along the fourth edge area may be provided.

However, in the display panel DP, the position and number of electrode pads formed may vary according to the characteristics of the panel, but hereinafter, the display panel DP shown in FIG. I will explain.

After a plurality of display panels DP are formed on the ledger panel MP whose size is determined depending on the size of the stage module 110 (see FIGS. 3 and 4) during the manufacturing process, it will be manufactured through a process such as cutting. In addition, the ledger panel MP may be a glass substrate that is a basis for production of the display panel DP.

The ledger panel MP is a single type or various sized display panel in which a plurality of display panels DP of the same size are present in order to increase the efficiency of defect inspection by minimizing empty space, that is, to increase chamfering efficiency. It may be a mixed type formed by mixing (DP).

For example, the ledger panel MP is a mixed type of two 98-inch display panels as shown in Fig. 2(a), and three 65-inch display panels and a 32-inch display panel as shown in Fig. 2(b). 6 mixed types, 18 single types of 31.5 inch display panels as shown in FIG. 2(c), 2 mixed types of 49 inch display panels and 2 75 inch display panels as shown in FIG. 2(d) and As shown in 2(e), a mixed type of three 65-inch display panels and two 55-inch display panels may be used, but the present invention is not limited thereto, and a mixed type of display panels of various sizes may be applied.

The display panel inspection facility 1000 according to the present invention may inspect whether all display panels included in the mixed-type ledger panel MP of various combinations described above are defective. Hereinafter, the ledger panel is 65 The case of a mixed type in which three inch display panels and two 55 inch display panels are formed will be described as a representative example.

2. Display panel inspection equipment

3 is a block diagram illustrating a display panel inspection facility according to the present invention, and FIG. 4 is a view illustrating a display panel inspection facility according to the present invention.

3 and 4, the display panel inspection facility 1000 according to the present invention includes a display panel DP of various sizes included in the ledger panel MP in a rear adsorption method, that is, a face down method. ) Is an inspection facility capable of maximizing the accuracy and speed of inspection for defects by allowing the failure of the probe unit (see PU, see Fig. 20) or the probe block (BP) to be performed without replacement. 1100) and inspection process progress equipment 1200 may be included.

In the inspection process preparation facility 1100, the ledger panel (the ledger panel()) is in a normal state with the one surface facing the top of the ledger panel (MP) provided with at least one kind of display panel (DP) on which an organic material layer for forming an organic light emitting layer is deposited on one surface. When the other side of MP) is adsorbed to the stage module 110, the stage module 110 is rotated so that the ledger panel MP is in a reversed state in which the one side faces downward in the normal state, and then transferred. The module 120 may be a facility for moving the ledger panel MP to a facility for a next process while maintaining the inversion state by receiving the ledger panel MP in the inverted state.

After the picker module 130 adsorbs the other surface of the ledger panel MP entered by the transfer module 120, the inspection process progress facility 1200 is vacuum-adsorbed by moving the position of the picker module 130. When the module 140 adsorbs the ledger panel MP in the reversed state, the electrode pad of the display panel DP becomes a probe of the display panel inspection apparatus 200 by moving the position of the vacuum adsorption module 140. It may be a facility for inspecting whether or not the display panel DP is defective by contacting the probe block PB of the unit PU.

Meanwhile, in the display panel inspection facility 1000 according to the present invention, the ledger panel MP is seated on the stage module 110, and the ledger panel MP is mediated by the picker module 130 by the transfer module 120. As a result, the component until adsorbed to the vacuum adsorption module 140 can be defined as the ledger panel transfer device 100, and the display adsorbed to the vacuum adsorption module 140 by the ledger panel transfer device 100 A process in which the panel DP is inspected for defects by the display panel inspection apparatus 200 will be described in detail with reference to FIGS. 7 to 28.

5 and 6 are views for explaining the flow of air in the inspection process processing facility provided to the display panel inspection facility according to the present invention, and FIG. 5 is a schematic cross-sectional view taken along line AA of FIG. 4, and FIG. 6 is It is a schematic cross-sectional view taken along line BB in 4.

Referring to FIGS. 5 and 6 along with FIGS. 3 and 4, the inspection process processing facility 1200 contacts the electrode pad of the display panel DP with the probe block PB, and thus the defect of the display panel DP. The first space unit 300 to be inspected for the presence of the defect and the display panel DP to be inspected for the defect are photographed to determine whether there are spots or scratches on the display panel DP. The vision module 410 for checking may include a second space part 400 installed so as to be movable, and the second space part 400 may be located below the first space part 300. I can.

Here, the vision module 410 may include, for example, four camera units, and the camera unit has a working distance (WD) that varies depending on the size of the display panel DP to be photographed, The position may be movable toward the top or bottom.

In addition, since the four camera units must photograph the entire area of the display panel DP corresponding to the size of the display panel DP to be photographed, each of the four camera units is 1/4 of the display panel DP to be photographed. It should be located in the center of the area, and for this it can be moved forward or backward, left or right. In addition, if necessary, it may be rotated forward or reverse to correspond to the rotation of the display panel DP to be photographed.

Meanwhile, the inspection of whether the display panel DP is defective in the inspection process preparation facility 1100 and the inspection process progress facility 1200 may be performed under a nitrogen atmosphere.

In particular, in the case of the inspection process facility 1200, the nitrogen in the nitrogen atmosphere in the first space part 300 and the second space part 400 must be circulated stably without stagnation.

To this end, the inspection process processing facility 1200 includes a forced circulation module 310 located at an upper portion of the first space part 300, and an upper part for circulation of the nitrogen in the first space part 300. A first circulation duct module 320 connecting the lower portion and a second circulation duct module 420 connecting the first space part 300 and the second space part 400 may be included.

The second circulation duct module 420 allows the nitrogen flowing from the first space part 300 to the second space part 400 to flow back into the first space part 300 to be circulated. In addition, a forced suction module 430 may be positioned on the second circulation duct module 420.

Here, the forced circulation module 310 and the forced suction module 420 are a kind of suction fan, and the forced suction module 420 is located on the second circulation duct module 410 so that the first space ( The nitrogen introduced into the second space part 400 from 300 may be sucked and then discharged to the first space part 300.

Accordingly, the inspection process processing facility 1200 performs the inspection process of the display panel under a uniform nitrogen atmosphere.

Meanwhile, the inspection process preparation facility 1100 and the inspection process progress facility 1200 require a worker to enter the interior during maintenance, so that the conversion to a clean dry air (CDA) atmosphere can be achieved.

3. Ledger panel transfer device

7 is a flowchart illustrating a process in which the ledger panel is adsorbed to the vacuum adsorption module by the ledger panel transfer device provided in the display panel inspection facility according to the present invention.

First, referring to FIGS. 3 and 4, the ledger panel transfer device 100 may include a stage module 110, a transfer module 120, a picker module 130, a vacuum adsorption module 140, and the like.

The stage module 110 is a component for adsorbing and fixing the other surface of the ledger panel MP in a normal state with one surface of the ledger panel MP facing upward, and one surface of the ledger panel MP is an organic emission layer. At least one type of display panel DP on which an organic material layer for formation is deposited may be provided.

Here, the other surface of the ledger panel MP may be a non-deposited part as a whole.

The stage module 110 may be rotated so that the display panel is inspected in a face-down manner, and thus, the ledger panel (MP) disposed in the normal state and adsorbed by the stage module 110 ) May be a reversed state in which the one side faces downward.

The transfer module 120 adsorbs the other surface of the ledger panel MP whose state has changed from the normal state to the inverted state on the stage module 110, and then moves the ledger panel MP to the inverted state. While maintaining, it may be a component for moving to the first position for inspection for defects.

The picker module 130 adsorbs the other surface of the ledger panel MP moved to the first position by the transfer module 120, and then rises based on the first position while maintaining the reversing state. As a constituent element for moving to the second position, which is the position that has been changed, a plate-shaped vacuum adsorption module 140, which will be described later, may adsorb the ledger panel MP in the reversed state.

When the ledger panel MP in the reverse state is moved to the second position by the transfer module 120, the vacuum adsorption module 140 adsorbs the ledger panel MP while maintaining the smoothness in the reversed state. After that, the display panel inspection apparatus 200 may be a component for inspecting whether the display panel is defective by interacting with the probe block PB of the probe unit PU.

When the ledger panel is adsorbed in the reversed state by the vacuum adsorption module 140, the vacuum adsorption module 140 moves the ledger panel MP in the reversed state and moves the display panel. The electrode pad of the DP and the probe block PB are brought into contact with each other, so that the inspection for the defect of the display panel DP is performed in the reversed state.

Here, the reason why the ledger panel must be finally adsorbed to the vacuum adsorption module 140 while maintaining the inverted state is the precise position control of the display panel DP and the display panel DP to inspect whether the display panel is defective. In order to maintain the smoothness, if the ledger panel (MP) is moved to the display panel inspection device 200 while the ledger panel (MP) is adsorbed by other components rather than the vacuum adsorption module 140, a problem occurs in smoothness, etc. This is because the inspection for defects is not guaranteed.

Hereinafter, a process in which the ledger panel MP is adsorbed to the vacuum adsorption module 140 by the ledger panel transfer device 100 according to the present invention will be described.

Referring to FIG. 7, in the step of adsorbing the ledger panel to the vacuum adsorption module by the ledger panel transfer device 100 according to the present invention, the ledger panel MP is disposed on the stage module 110 in a normal state. Step 1 (S10), a second step (S20) in which the stage module 110 is rotated, a third step (S30) in which the transfer module 120 enters and adsorbs the ledger panel (MP), the transfer module ( 120) the fourth step of moving to the first position (S40), the fifth step of adsorbing the ledger panel MP by lowering the picker module 130 (S50), the first step of the transfer module 120 returning Step 6 (S60), a seventh step in which the picker module 130 is raised to a second position (S70), an eighth step in which the display panel DP is adsorbed by the vacuum adsorption module 140 (S80), A ninth step (S90) in which the picker module 130 is raised and moved to a third position may be included.

Hereinafter, each step described above will be described in detail with reference to FIGS. 8 to 19.

8 is a view for explaining a situation in which a ledger panel is seated in a normal state on a stage module provided in the ledger panel transfer apparatus according to the present invention.

Referring to FIG. 8, after the ledger panel MP is disposed on the stage module 110 in a normal state (S10), it may be adsorbed.

Here, it is revealed that the ledger panel MP represents one surface on which at least one display panel DP is provided in a shade for convenience of description.

On the other hand, the method of disposing the ledger panel MP on the stage module 110 is not specifically determined, and may be various, such as an automatic method by a robot device or a manual method by an operator in a nitrogen atmosphere.

The stage module 110 may include a plurality of stage units 112 for adsorbing the other surface SF2 of the ledger panel MP in the normal state, and the stage units 112 are separated from each other. So that the first space S1 is formed therebetween.

For example, the stage unit 112 may be formed into nine as shown in FIG. 8, but is not limited thereto, and the ledger panel MP to be supported is not sagged by its own weight. The number can be changed as long as it can be supported stably.

Each of the stage units 112 may include adsorption means 114 such as adsorption pads for adsorbing the ledger panel MP, and the number of adsorption means 114 is not limited.

9 and 10 are views for explaining a situation in which a ledger panel in a normal state is changed to a reverse state by rotation of a stage module in the situation shown in FIG. 8.

9 and 10, the stage module 110 may be rotated (R, S20) while adsorbing the ledger panel MP in a normal state, and the rotation direction is not limited.

A driving method for rotation of the stage module 110 is not specifically determined, and may be rotated using, for example, a known motor.

When the stage module 110 is rotated, the state of the ledger panel MP, which has been adsorbed in a normal state, is changed to an inverted state in which the one surface SF1 on which the deposition part is located is facing downward.

The ledger panel MP is continuously maintained in an inverted state while the inspection for defects is in progress, so that the display panel DP can perform an inspection for defects in a face down method. do.

11 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention enters the stage module, and FIGS. 12 and 13 are a transfer module provided to the ledger panel transfer device according to the present invention. It is a diagram for explaining a situation in which the ledger panel in a reversed state is adsorbed.

11 to 13, when the ledger panel MP is in an inverted state by rotation of the stage module 110, after the transfer module 120 enters the stage module 110, the ledger panel (MP) is adsorbed (S30).

The transfer module 120 is a plurality of transfer units for adsorbing the other surface SF2 of the ledger panel MP that is inserted into the first space S1 provided by the stage unit 112 and disposed in a reversed state. (122) may be included.

Like the stage unit 112, the transfer units 122 may be disposed to be spaced apart from each other.

For example, the transfer unit 122 may be formed in eight as shown in the drawing, but is not limited thereto.

The transfer unit 122 may adsorb the other surface SF2 of the ledger panel MP after entering the first space S1 provided by the ledger panel MP and the stage unit 112, and , If necessary for adsorption of the ledger panel MP, the position may be moved in the vertical direction.

Each of the transfer units 122 may be provided with adsorption means 124 such as adsorption pads for adsorbing the ledger panel MP, and the number of adsorption means 124 is not limited.

When the ledger panel MP is adsorbed by the transfer unit 122 as described above, the adsorption of the ledger panel MP by the stage unit 112 is released, whereby the ledger panel MP Is interlocked with the movement of the transfer unit 122.

14 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention has been moved to a first position.

Referring to FIG. 14, the transfer module 120 may be moved to a first position for inspection for defects while maintaining the reversed state while adsorbing the ledger panel MP in a reversed state (S40). .

Here, the first position may mean a position on the lower side of the ledger panel MP in the reverse state based on a position at which the vacuum adsorption module 140 and the picker module 130 are disposed, and the picker The module 130 may stably adsorb the ledger panel MP in the inverted state while maintaining the inverted state.

15 and 16 are views for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is lowered to adsorb the ledger panel in a reversed state, and FIG. 17 is a view showing a ledger panel transfer device according to the present invention. It is a diagram for explaining a situation in which the provided transfer module is returned to its original position.

15 and 16, the picker module 130 may move to the first position after passing through the vacuum adsorption module 140 by descending from the position in the third position, and by the transfer module 120 The ledger panel MP in the reversed state moved to the first position may be adsorbed (S50).

The picker module 130 may include a plurality of picker units 132 spaced apart from each other to prevent sagging by uniformly adsorbing the other surface SF2 of the ledger panel MP.

When the ledger panel MP is adsorbed by the picker module 130, the transfer module 120 releases the adsorption as shown in FIG. 17 to be separated from the ledger panel MP and moved to its original position ( S60) can be.

The transfer module 120, which has been moved to its original position, can operate to inspect other display panels provided in other ledger panels.

18 is a view for explaining a situation in which the picker module provided to the ledger panel transport apparatus according to the present invention is raised to a second position.

Referring to FIG. 18, after the picker module 130 adsorbs the ledger panel MP in a reversed state, it may be moved to a second position (S70) by ascending, whereby the vacuum adsorption module 140 is The ledger panel MP can be adsorbed (S80).

Here, the second position may be a position raised to the vacuum adsorption module 140 by the picker module 130 based on the first position, and the vacuum adsorption module 140 is the picker module 130 As a result, it is possible to stably adsorb the ledger panel MP in a reversed state.

The vacuum adsorption module 140 may include a plurality of adsorption means such as adsorption pads for adsorbing the ledger panel MP.

19 is a view for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is raised to a third position.

Referring to FIG. 19, when the other surface SF2 of the ledger panel MP moved to the second position is adsorbed by the vacuum adsorption module 140, the picker module 130 releases the adsorption to release the ledger panel. After being separated from (MP), it may be raised and returned to the third position (S990).

Thereafter, a defect may be inspected by interaction with the display panel inspection apparatus 200 including the vacuum adsorption module 140 and the probe unit PU on which the probe block PB is mounted.

Here, in the interaction, the vacuum adsorption module 140 is moved to implement contact between the electrode pads of the display panel DP provided on the ledger panel MP and the probe block PB of the probe unit PU, This may mean that an inspection is performed on whether the display panel DP is defective.

Hereinafter, a process of inspecting whether the display panel DP is defective by the display panel inspection apparatus 200 will be described in detail.

4. Display panel inspection device

20 is a view for explaining a display panel inspection apparatus provided in a display panel inspection facility according to the present invention.

Referring to FIG. 20, the display panel inspection apparatus 200 includes a probe unit PU for supporting a probe block PB and a support unit 210 on which the probe unit PU is mounted so that the position is movable. I can.

The support unit 210 may be a frame formed in the shape of a plate, and the probe unit PU is a first probe unit PU1 supporting a plurality of first probe blocks PB1 disposed in a horizontal direction. , A second probe unit PU2 supporting a plurality of second probe blocks PB2 disposed in a longitudinal direction, and a third probe unit PU3 supporting a plurality of third probe blocks PB3 disposed in the transverse direction. ) And a fourth probe unit PU4 supporting the plurality of fourth probe blocks PB4 disposed in the longitudinal direction.

Here, the first probe unit (PU1), the second probe unit (PU2), the third probe unit (PU3) and the fourth probe unit (PU4) are on the support unit 210 in the transverse direction (D1, D2) or the longitudinal direction (D3, D4), the transverse direction (D1, D2) and the longitudinal direction (D3, D4) by moving in the diagonal direction (D5) can be obtained. have.

Here, the horizontal directions D1 and D2 and the vertical directions D3 and D4 may be directions for forming a square corresponding to the shape of the display panel DP.

In addition, the first probe unit (PU1), the second probe unit (PU2), the third probe unit (PU3) and the fourth probe unit (PU4) are in a diagonal direction (D5) on the support unit 210 You can also go directly to.

Meanwhile, the plurality of first probe blocks PB1, the plurality of second probe blocks PB2, the plurality of third probe blocks PB3, and the plurality of fourth probe blocks PB4 are respectively The probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 may be mounted so as to be movable in position.

Positions of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and/or the fourth probe unit PU4 on the support unit 210 as described above Movement and position movement of the plurality of first probe blocks PB1 on the first probe unit PU1, position movement of the plurality of second probe blocks PB2 on the second probe unit PU2, Through position movement of the plurality of third probe blocks PB3 on the third probe unit PU3 and position movement of the plurality of fourth probe blocks PB4 on the fourth probe unit PU4, It is possible to inspect each display panel DP of various sizes included in the ledger panel MP for defects without replacing the probe unit, and also display panels of various sizes included in the ledger panel MP. Whether the (DP) is arranged, that is, the long sides are arranged in the transverse directions (D1, D2) or the longitudinal directions (D3, D4), it is possible to appropriately respond and conduct the inspection.

21 to 27 show that the ledger panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, is adsorbed to the vacuum adsorption module provided in the ledger panel transfer device according to the present invention, so that the inspection for defects proceeds If yes, this is a diagram for explaining an inspection method for each display panel.

First, the ledger panel (MP) adsorbed in the reversed state by the vacuum adsorption module 140 has three 65-inch display panels (DP1, DP2, DP3) and 2 55-inch display panels (DP4, DP5). An example of a mixed type with dogs will be described.

In addition, each display panel includes a plurality of first electrode pads formed along a first corner region, which is one of the corner regions of the upper surface, and a plurality of second electrode pads formed along a second corner region, which is the other of the upper surface. And a plurality of third electrode pads formed along a third corner region, which is another one of the corner regions of the upper surface, and a plurality of fourth electrode pads formed along a fourth corner region, which is another one of the corner regions of the upper surface. do.

In addition, a case in which the 65-inch display panels DP1, DP2, and DP3 are inspected first, and then the remaining 55-inch display panels DP4 and DP5 are inspected when the inspection is completed.

Referring to FIG. 21, a first probe unit PU1, a second probe unit PU2, a third probe unit PU3, and a first probe unit PU1 are ledgers adsorbed on the vacuum adsorption module 140. In order to check whether the 65-inch display panels DP1, DP2, and DP3 included in the panel MP are defective, the position may be moved on the support unit 210.

In other words, each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the 65-inch display panels DP1, DP2, and DP3 is a plurality of first probes of the first probe unit PU1. At least a part of the block PB1, at least a part of the plurality of second probe blocks PB2 of the second probe unit PU2, at least a part of the plurality of third probe blocks PB3 of the third probe unit PU3, and In order to contact at least a part of the plurality of fourth probe blocks PB4 of the fourth probe unit PU4, the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and At least one of the first probe units PU1 may be positioned on the support unit 210.

At least one of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 is directly moved in the diagonal direction D5, or As shown in FIG. 2, it may be moved in the diagonal direction D5 through movement in the transverse directions D1 and D2 and the longitudinal directions D3 and D4.

Here, the positional movement of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 on the support unit 210 respectively Although it may be implemented using various components such as a linear motion guide, a motor, a ball screw, and a ball nut, this is only an example and may be implemented by applying various known movement methods.

The first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the first probe unit PU1 may include the plurality of first electrode pads and the plurality of second probes. An electrode pad, a probe block to be in contact with each of the plurality of third electrode pads and the plurality of fourth electrode pads is partially among the plurality of first probe blocks PB1 and of the plurality of second probe blocks PB2 In some cases, some of the plurality of third probe blocks PB3 and some of the plurality of fourth probe blocks PB4 are directly moved in the diagonal direction D5 or the transverse directions D1 and D2 and the longitudinal direction It can be moved in the diagonal direction D5 through movement in (D3, D4).

In this case, the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the first probe unit PU1 may have a pinwheel shape.

On the other hand, the first probe unit (PU1), the second probe unit (PU2), the third probe unit (PU3) and the first probe unit (PU1), the plurality of first electrode pads, the plurality of All of the second electrode pads, the plurality of third electrode pads, and the probe blocks to be in contact with each of the plurality of fourth electrode pads are all of the plurality of first probe blocks PB1, and the plurality of second probe blocks PB2 ), all of the plurality of third probe blocks PB3, and all of the plurality of fourth probe blocks PB4 are directly moved in the diagonal direction D5 or the transverse direction D1, depending on the situation. D2) and may be moved in the diagonal direction D5 through movement in the longitudinal directions D3 and D4.

The first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4 are respectively the first probe unit PU1 and the second probe. The position may be moved on the unit PU2, the third probe unit PU3, and the fourth probe unit PU4, and there is no particular limitation on a movement method.

As described above, the display panel inspection apparatus 200 according to the present invention includes a 65-inch display panel DP1 formed on the ledger panel MP by moving the position of the probe unit PU and/or the probe block PB. , DP2, DP3) and 55-inch display panels DP4, DP5 can be inspected for defects without replacing the probe unit and/or the probe block, which will be described in detail below.

The display panel inspection apparatus 200 according to the present invention includes three 65-inch display panels DP1, DP2, and DP3 and two 55-inch display panels DP4 and DP5 on the vacuum adsorption module 140 by a sensing unit not shown. It is sensed that the ledger panel MP with dogs is adsorbed.

The sensing unit may include an imaging unit and/or various sensor units using a camera, etc., and the ledger panel is adsorbed to the vacuum adsorption module 140 to a position where the probe unit (PU) is disposed. Before or during movement, the size of the display panel DP constituting the ledger panel MP is sensed.

When the size and/or type of the display panels DP1, DP2, DP3, DP4, and DP5 constituting the ledger panel MP are detected by the detection unit, a certain type of display panel DP1, DP2 is detected by the control unit. , DP3, DP4, DP5) will be determined first, and as described above, 65-inch display panels (DP1, DP2, DP3) are determined to be inspected with priority over 55-inch display panels (DP4, DP5). It will be described with an example.

The size and/or type of the display panels (DP1, DP2, DP3, DP4, DP5) formed on the ledger panel (MP) are detected by the control unit, and among the detected display panels, 65-inch display panels (DP1, DP2, DP3) are detected. ), the control unit contacts the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad provided on the 65-inch display panel DP with the probe block PB As a result, the probe unit PU and the probe block PB may be moved in position to enable electrical connection.

That is, the first probe unit PU1 is moved in the downward direction (D4) among the vertical directions (D3, D4) toward the third probe unit PU3 in any order and the horizontal direction (D1, D2). In the end, the position may be moved in the diagonal direction D5 through the movement in the right direction D1, but is not limited thereto, and may be directly moved in the diagonal direction D5.

At this time, the probe blocks required for inspection among the plurality of first probe blocks PB1 may be moved from the first probe unit PU1 toward the left direction D2 among the transverse directions D1 and D2. Depending on the arrangement of the electrode pads, there may be no position change as shown in the drawing.

In addition, the second probe unit PU2 moves its position in the left direction D2 among the transverse directions D1 and D2, which are directions toward the fourth probe unit PU4 in any order, and the longitudinal directions D3 and D4. Through the movement of the position in the lower direction D4, the position is eventually moved in the diagonal direction D5, but is not limited thereto, and may be directly moved in the diagonal direction D5.

At this time, the probe block required for inspection among the plurality of second probe blocks PB2 may be moved in the upper direction D3 of the longitudinal directions D3 and D4 on the second probe unit PU2, but the electrode of the display panel Depending on the arrangement of the pads, there may be no change in position as shown in the drawings.

In addition, the third probe unit PU3 moves its position in the upward direction D3 among the vertical directions D3 and D4, which are directions toward the first probe unit PU1 regardless of the order, and the transverse directions D1 and D2. Through the position movement in the left direction D2, the position may eventually be moved in the diagonal direction D5, but is not limited thereto, and may be moved directly in the diagonal direction D5.

At this time, the probe block required for inspection among the plurality of third probe blocks PB3 may be moved in the right direction D1 among the transverse directions D1 and D2 on the third probe unit PU3, but the electrode of the display panel Depending on the arrangement of the pads, there may be no change in position as shown in the drawings.

In addition, the fourth probe unit PU4 moves its position in the right direction D1 among the transverse directions D1 and D2, which are directions toward the second probe unit PU2 regardless of the order, and the longitudinal directions D3 and D4. The position may be moved in the diagonal direction D5 through the movement in the upward direction D3, but is not limited thereto, and may be directly moved in the diagonal direction D5.

At this time, the probe block required for inspection among the plurality of fourth probe blocks PB4 may be moved in a downward direction D4 among the longitudinal directions D3 and D4 on the fourth probe unit PU4, but the electrode of the display panel Depending on the arrangement of the pads, there may be no change in position as shown in the drawings.

As a result, the first probe unit 110, the second probe unit 120, the third probe unit 130, and the fourth probe unit 140 may be moved to have a pinwheel shape.

In addition, the first probe block PB1 and the third probe block PB3 required for inspection are respectively the first probe unit PU1 and the third probe unit PU3 according to the arrangement state of the electrode pads of the display panel. ) May be moved in opposite directions, and the second probe block PB2 and the fourth probe block PB4 required for inspection are each of the second probe units according to the arrangement state of the electrode pads of the display panel. Positions may be moved in opposite directions on PU2) and the fourth probe unit PU4.

Of course, as described above, the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4 according to the arrangement state of the electrode pads of the display panel. ) May have no position change.

Some of the plurality of first probe blocks PB1, some of the plurality of second probe blocks PB2, and the plurality of third probe blocks PB1 by the position movement of the probe unit PU and the position movement of the probe block PB as described above. A portion of the probe block PB3 and a portion of the plurality of fourth probe blocks PB4 are each of a first electrode pad, a second electrode pad, a third electrode pad, and a fourth electrode pad of the 65-inch display panels DP1, DP2, and DP3. It is accurately disposed at a position corresponding to the electrode pad.

When the position movement of the probe unit PU and the probe block PB is completed, the vacuum adsorption module 140 is a first electrode pad of the first 65-inch display panel DP1 constituting the ledger panel MP. , A second electrode pad, a third electrode pad, and a fourth electrode pad, respectively, a first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4. ) Is moved to be located on the top.

Here, the positional movement of the vacuum adsorption module 140 may include linear movement and/or rotational movement, and various types of movement methods may be applied.

Accordingly, various arrangement states of the display panel DP1 requiring inspection can be implemented.

Each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the first 65-inch display panel DP1 is a first probe block PB1, the second probe block PB2, When positioned above the third probe block PB3 and the fourth probe block PB4, the first 65-inch display by moving the position of the vacuum adsorption module 140 as shown in FIG. 22 Each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the panel DP1 is a first probe block PB1, the second probe block PB2, and the third probe block PB3. ) And the fourth probe block PB4 to implement electrical connection, so that the first 65-inch display panel DP1 is inspected for defects.

On the other hand, when the first 65-inch display panel DP1 is inspected for defects, the first electrode pad of the first 65-inch display panel DP1 is moved through the position of the vacuum adsorption module 140. , Each of the second electrode pad, the third electrode pad, and the fourth electrode pad, the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB3. ) Will be released.

Thereafter, as shown in FIG. 23, the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode of the second 65-inch display panel DP2 are moved by moving the position of the vacuum adsorption module 140. Each of the pads and the first probe block (PB1), the second probe block (PB2), the third probe block (PB3) and the fourth probe block (PB4) contact each other, the second 65 inches An inspection is performed on whether the display panel DP2 is defective.

When the second 65-inch display panel DP2 is inspected for defects, the first electrode pad of the second 65-inch display panel DP2 and the first electrode pad of the second 65-inch display panel DP2 are moved through the movement of the vacuum adsorption module 140. Each of the second electrode pad, the third electrode pad, and the fourth electrode pad, and the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4. Contact is released.

Thereafter, as shown in FIG. 24, the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode of the third 65-inch display panel DP3 are moved by moving the position of the vacuum adsorption module 140. Each pad and the first probe block (PB1), the second probe block (PB2), the third probe block (PB3) and the fourth probe block (PB4) contact with each other is implemented, the third 65 inches An inspection is performed on whether the display panel DP3 is defective.

When the inspection for the defect of the third 65-inch display panel DP3 is completed, the first electrode pad of the third 65-inch display panel DP3 and the first electrode pad of the third 65-inch display panel DP3 are moved by moving the position of the vacuum absorption module 140. Each of the second electrode pad, the third electrode pad, and the fourth electrode pad, and the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4. Contact is released.

Thereafter, the control unit includes probe blocks PB1, PB2 and PB3 as shown in FIG. 25 so that the 55-inch display panels DP4 and DP5 are inspected for defects by the display panel inspection apparatus 200 according to the present invention. , PB4) is in contact with the first electrode pad, the second electrode pad, the third electrode pad and the fourth electrode pad provided on the 55-inch display panels (DP4, DP5) to enable electrical connection to the probe units (PU1, PU2) , PU3, PU4) and probe blocks PB1, PB2, PB3, PB4 can be moved.

The first probe block PB1, the second probe block PB2, the first probe block PB1, the second probe block PB2, the position of the probe unit PU1, PU2, PU3, PU4 and the probe block PB1, PB2, PB3, PB4. Each of the third probe block PB3 and the fourth probe block PB4 accurately corresponds to the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the 55-inch display panels DP4 and DP5. Will be moved to the location that is.

When the position of the probe units (PU1, PU2, PU3, PU4) and the probe blocks (PB1, PB2, PB3, PB4) is completed, the vacuum adsorption module 140 is the first unit constituting the ledger panel (MP). Each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the 55-inch display panel DP4 is a first probe block PB1, the second probe block PB2, and the third probe. The position is moved to be positioned above the block PB3 and the fourth probe block PB4.

Here, the positional movement of the vacuum adsorption module 140 may include linear movement and/or rotational movement, and various types of movement methods may be applied.

Each of the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode pad of the first 55-inch display panel DP4 is a first probe block PB1, the second probe block PB2, When positioned above the third probe block PB3 and the fourth probe block PB4, the first 55-inch display panel is moved by moving the position of the vacuum adsorption module 140 as shown in FIG. 26. Each of the first electrode pad, the second electrode pad, the third electrode pad and the fourth electrode pad of the DP4 is a first probe block PB1, the second probe block PB2, and the third probe block PB3. And electrical connection is implemented by contacting the fourth probe block PB4, so that the first 55-inch display panel DP4 is inspected for defects.

Meanwhile, when the first 55-inch display panel DP4 is inspected for defects, the first electrode pad of the first 55-inch display panel DP4 is moved through the movement of the vacuum adsorption module 140. , The second electrode pad, the third electrode pad, and the fourth electrode pad, respectively, and the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4. ) Will be released.

Thereafter, as shown in FIG. 27, the first electrode pad, the second electrode pad, the third electrode pad, and the fourth electrode of the second 55-inch display panel DP5 are moved through the movement of the vacuum adsorption module 140. Each pad and the first probe block (PB1), the second probe block (PB2), the third probe block (PB3) and the fourth probe block (PB4) contact with each other is implemented, the second 55 inches An inspection is performed on whether the display panel DP5 is defective.

When the second 55-inch display panel DP5 is inspected for defects, the first electrode pad of the second 55-inch display panel DP5 and the first electrode pad of the second 55-inch display panel DP5 are moved through the vacuum adsorption module 140. Each of the second electrode pad, the third electrode pad, and the fourth electrode pad, and the first probe block PB1, the second probe block PB2, the third probe block PB3, and the fourth probe block PB4. The contact is released, and the inspection for each of the display panels DP1, DP2, DP3, DP4, and DP5 included in the ledger panel is completed.

When the inspection for defects of all display panels (DP1, DP2, DP3, DP4, DP5) formed on one ledger panel as above is completed, the ledger panel MP is subjected to the following process (e.g., sealing process, etc.) ), and the inspection process for other ledger panels is repeated.

28 is a view for explaining a positional movement of an unused probe block when a display panel is inspected for defects by the display panel inspection apparatus according to the present invention.

Referring to FIG. 28, when an inspection is performed on whether a display panel is defective, some of the plurality of probe blocks on an arbitrary probe unit may not be used for inspection.

Hereinafter, a case where only the outermost probe block (PBX) of the plurality of probe blocks on an arbitrary probe unit is not used for inspection will be described as an example, but the same applies even when there are a plurality of probe blocks not used for inspection. Make it possible.

In the case of inspecting a display panel of a specific size, if some of the probe blocks on an arbitrary probe unit are in contact with a plurality of electrode pads, the remaining probe blocks PBX among the plurality of probe blocks are Some of the probe blocks of the probe blocks may be moved to prevent contact with other display panels on the ledger panel other than the display panel on which the inspection for the defect is performed by contacting the plurality of electrode pads. .

Specifically, the probe block PBX is a probe body portion PBX1 mounted on the probe unit PU, and a variable probe mounted on the probe body PBX1 so as to be movable toward an upper or lower portion and having a probe. A part PBX2 may be provided, and when the probe variable part PBX2 corresponds to the remaining probe block, the probe variable part PBX2 is moved downward from the probe body part PBX1 to meet the other display panel on the ledger panel. Contact can be prevented.

Here, the method of moving the position of the probe variable part PBX2 on the probe body part PBX1 may be a driving method such as an actuator, but is not necessarily limited thereto, and all known driving methods may be applied.

In the above, the configuration and features of the present invention have been described based on the embodiments according to the present invention, but the present invention is not limited thereto, and various changes or modifications can be made within the spirit and scope of the present invention. It will be apparent to those skilled in the art, and therefore, such changes or modifications are found to belong to the appended claims.

100: ledger panel transfer device
110: stage module
120: transfer module
130: picker module
140: vacuum adsorption module
200: display panel inspection device
300: first space portion
400: second space portion
1000: display panel inspection facility
1100: Inspection process preparation facility
1200: inspection process progress equipment

Claims (1)

Ledger panel-One side of the ledger panel is provided with at least one kind of display panel on which an organic material layer for forming an organic light emitting layer is deposited-When the other side of the ledger panel is adsorbed to the stage module with one side of the ledger panel facing upward, the The stage module is rotated so that the ledger panel is in a reversing state in which the one side faces downward in the normal state, and then the transfer module receives the ledger panel in the reversing state and performs the next process while maintaining the reversing state An inspection process preparation facility for moving the ledger panel to a facility for; And
After the picker module adsorbs the other surface of the ledger panel entered by the transfer module, when the vacuum adsorption module adsorbs the ledger panel in the inverted state through position movement of the picker module, the position of the vacuum adsorption module moves And a facility for performing an inspection process for inspecting whether the display panel is defective by allowing the electrode pads of the display panel to contact the probe block of the probe unit.

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