KR101084970B1 - Method for inspecting edge of plate - Google Patents

Abstract

A method of inspecting the edge of a substrate is disclosed. A method of inspecting an edge of a substrate by loading a substrate on a support table that is reciprocating along a first travel axis, the method comprising: (a) a vision portion is provided with respect to a first edge pair of the substrate loaded on a support table moving along a first travel axis; Acquiring first image information, (b) rotating the support table by a predetermined angle, (c) acquiring second image information on a second edge pair of the substrate while the vision unit moves along the second travel axis; (d) According to the substrate edge inspection method comprising the support table is rotated in the opposite direction by a predetermined angle, the driving table is provided in each of the support table and the vision portion to enable independent reciprocating movement of the substrate edge Some of the support tables are moved and inspected, while others are moved and inspected to shorten the entire inspection process, thereby reducing the tact time.

Board, Edge, Inspection, Support Table, Vision

Description

Method for inspecting edge of plate

The present invention relates to a method for inspecting the edge of a substrate.

Recently, flat panel glass substrates are used in liquid crystal display (LCD) panels, plasma display panels (PDPs), and electroluminescent (EL) panels. In the case of solar cells, transparent substrates such as glass materials may be processed. It is used as a base material. Accordingly, in the process of manufacturing a flat panel display panel, a solar cell, or the like, a process of cutting a substrate and polishing a cut edge portion is performed.

Normally, an LCD display panel is composed of a top and bottom glass substrate in which liquid crystal is enclosed, and a printed circuit board is provided on the side of the glass substrate. The liquid crystal display device is driven by electrically connecting the printed circuit board and the terminal of the liquid crystal panel. In this case, a flexible connector is used. In the case of using the display panel immediately after cutting the glass substrate, the flexible connector connecting the printed circuit board and the terminal portion of the glass substrate may be cut by the edge of the glass substrate edge. Therefore, the edge of the glass substrate is reworked through a polishing process following the cutting process. A normal polishing process is performed by bringing the edge of the glass substrate sharply formed by cutting into contact with the outer peripheral surface of the polishing wheel rotating at high speed. The edges are formed smoothly.

However, many defects may occur at the edges of the substrate in the cutting and polishing processes of the substrate. In the cutting process, the substrate may have a size error, poor linearity, cracks, chips, and the like. There exists a possibility that a chip | tip etc. may generate | occur | produce in the inclination-angle error of the grinding | polishing surface formed by substrate edge grinding, and a grinding | polishing surface.

If the production process of the flat panel display panel or the solar cell is continued while overlooking the above defects, an error may occur during the transfer or alignment of the substrate, and not only the substrate but also the production line due to the particles generated during the production process. Various devices arranged in the can also cause serious problems. In addition, even when the fabrication is completed as a flat panel display device or a solar cell, stress concentration may occur around the above-mentioned defects even in a small external shock, and thus may be easily damaged.

Therefore, there is a need for a technique capable of inspecting the edges of such substrates to determine the presence of defects and preventing unnecessary work in the next process, thereby increasing the production efficiency and inspecting the edges of the substrates that can maintain high reliability and high quality.

The edge inspection apparatus of a substrate according to the prior art has a fixed vision portion disposed at positions corresponding to both edges of an end of the substrate, and a support for supporting the substrate and rotating and moving the substrate so as to correspond to edge inspection of the long side and the short side of the substrate. It consists of a table.

In describing the edge inspection method of the substrate, it is assumed that edge inspection is performed on the long side after performing edge inspection on the short side of the substrate first.

After the substrate is loaded on the support table, the support table moves forward along the traveling axis toward the fixed vision unit, thereby allowing the fixed vision unit to acquire image information corresponding to the short side edge of the substrate.

Thereafter, in order to acquire image information corresponding to the long side edge of the substrate, the support table is rotated 90 degrees and then moved back to the original position where the substrate is loaded along the travel axis. The rotation and the return are not determined before and after, and the rotation may be performed after the return. Here, the reason why the return movement is required is that the fixed vision unit can acquire the image information only for the movement in the predetermined direction.

The width of the fixed vision unit is adjusted according to the width between the long side edges of the substrate, and the support table moves forward again along the travel axis, thereby allowing the fixed vision unit to acquire image information corresponding to the long side edge of the substrate.

This allows the support table to rotate 90 degrees in the opposite direction when the image acquisition operation is completed for the short and long edges of the substrate so that the substrate is placed in the same manner as when the substrate was loaded into the support table and then unloaded. .

According to the edge inspection method of the substrate described above, the support table repeatedly performs the forward movement, the return movement, and the advance movement between the loading and unloading of the substrate, thereby increasing the process and increasing the tact time of the edge inspection. There is this.

The background art described above is technical information possessed by the inventors for the derivation of the present invention or acquired during the derivation process of the present invention, and is not necessarily a publicly known technique disclosed to the general public before the application of the present invention.

SUMMARY OF THE INVENTION The present invention provides a method for edge inspection of a substrate which can shorten the inspection process by shortening the inspection process by allowing the support table and the vision unit to reciprocate along separate travel axes.

According to an aspect of the present invention, a method of inspecting an edge of a substrate by mounting a substrate on a support table that is reciprocating along a first travel axis, comprising: (a) forming a substrate on a support table moving along the first travel axis; Obtaining, by the vision unit, the first image information with respect to the first edge pair; (b) rotating the support table by a predetermined angle; and (c) moving the vision portion along the second travel axis to the second edge pair of the substrate. 2. A method of inspecting a substrate edge is provided, comprising obtaining image information and (d) rotating the support table in an opposite direction by a predetermined angle.

Between steps (a) and (c), (b1) may further comprise aligning the vision portion corresponding to the position of the second edge pair of the rotated substrate. Here, steps (b) and (b1) can be performed together.

In step (a) the vision part can also be moved in a direction facing each other with the support table.

In step (c) the support table can also be moved in a direction facing each other.

The first travel shaft and the second travel shaft may be parallel to each other.

The first edge pair may correspond to any one of the long side and the short side of the substrate, and the second edge pair may correspond to the other of the long side and the short side of the substrate.

The substrate may have a rectangular shape, and the predetermined angle may be 90 degrees.

The vision portion includes a path member moving along the second travel axis and an imaging unit moving along the path member in a direction orthogonal to the second travel axis, and after step (c), (d1) the vision part is directed to the subsequent substrate. The method may further include returning the vision unit to the initial state by moving the path member and the imaging unit to acquire the image information.

(e) removing the substrate from the unloading unit, and the support table may further include the step of returning to the loading unit.

Other aspects, features, and advantages other than those described above will become apparent from the following drawings, claims, and detailed description of the invention.

According to a preferred embodiment of the present invention, because the support shaft and the vision portion are provided with driving shafts, respectively, so that the reciprocating movement can be performed independently. As a result, the overall inspection process can be shortened, thereby reducing the tact time.

As the invention allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the written description. However, this is not intended to limit the present invention to specific embodiments, it should be understood to include all transformations, equivalents, and substitutes included in the spirit and scope of the present invention. In the following description of the present invention, if it is determined that the detailed description of the related known technology may obscure the gist of the present invention, the detailed description thereof will be omitted.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

When a component is said to be "connected" or "connected" to another component, it may be directly connected to or connected to that other component, but it may be understood that another component may exist in between. Should be.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and in the following description with reference to the accompanying drawings, the same or corresponding components are given the same reference numerals and redundant description thereof will be omitted. Shall be.

1 is a perspective view schematically showing a substrate edge inspection apparatus according to an embodiment of the present invention, Figure 2 is a plan view showing a substrate edge inspection apparatus according to an embodiment of the present invention, Figure 3 is an embodiment of the present invention It is a side view which shows the board | substrate edge inspection apparatus which concerns on an example. 1 to 3, the substrate 1, the support table 10, the suction unit 14, the first travel shaft 12, the vision unit 20, the path member 22, and the imaging unit 24. ), The second travel shaft 26, the loading part 30, and the unloading part 40 are shown.

The present embodiment shortens the inspection process by configuring the support table and the vision unit to independently move along the first travel axis and the second travel axis, respectively, in the process of inspecting an edge of an LCD panel or a glass substrate for a solar cell. And reduced tact time of the process.

Hereinafter, the term 'substrate' is used as a term meaning a flat plate that cuts to a certain size and polishes and inspects the cut edges according to product specifications, such as a glass substrate used for an LCD panel or a transparent substrate for a solar cell. .

In addition, the "vision part" is a concept including an imaging unit, for example, a camera for inspecting edge defects of a substrate, and will be described below with reference to specific components such as a camera.

In the substrate edge inspection apparatus according to the present embodiment, the support table 10 and the support table 10 capable of reciprocally moving along the first travel shaft 12 and supporting the loaded substrate 1 rotatably are moved. While obtaining the image information corresponding to the first edge pair of the substrate 1 and the second edge pair of the rotated substrate 1 reciprocating along the second travel axis 26 after the substrate 1 is rotated. The vision unit 20 for acquiring the image information corresponding to the main frame is a basic frame. According to an exemplary embodiment, the apparatus may further include an inspection unit (not shown) which collects image information acquired by the vision unit 20 and inspects whether there is an edge defect.

In order to check whether all edges of the substrate 1 are defective, conventionally, as described with reference to FIG. 2, after the loading of the substrate 1, the forward movement, rotation, return movement, and advance movement are sequentially performed. There is a problem that the unloading of 1) is performed to increase the tact time of the process.

Therefore, in this embodiment, the vision unit 20 moves relatively and independently with respect to the substrate 1 loaded on the support table 10 so that the support table 10 can be moved between loading and unloading of the substrate 1. The return movement can be omitted, allowing stable and high quality edge inspections to be performed.

Hereinafter, it is assumed that the substrate 1 used in the LCD panel, the solar cell, or the like has a rectangular shape, and image information is provided for the first pair of edges, that is, the opposite edges in the short-side direction when inspecting the edge of the substrate 1. It is assumed that after acquiring the second edge pair, that is, obtaining image information on the opposite edges in the long side direction, and checking whether there is an edge defect. This is for the convenience of understanding and explanation of the invention, the scope of the present invention is not limited to this, and when inspecting the edge of the substrate 1 to obtain the image information in the order of the long side edge and short side edge to determine whether there is an edge defect Of course, you can check.

The support table 10 loads and moves a substrate at a predetermined initial position. The support table 10 moves along the first travel shaft 12 that defines the movement path of the support table 10. To this end, the first travel shaft 12 moves along the predetermined path to the support table 10. It may be made of LM or ball screw to move.

When the substrate 1 is supplied from one end of the first travel shaft 12 and the substrate 1 is carried out to the other end of the first travel shaft 12, the substrate to be inspected at one end of the first travel shaft 12. The loading part 30 which supplies (1) is located, and the unloading part 40 which carries out the inspected board | substrate 1 is located in the other end of the 1st travel axis | shaft 12. As shown in FIG.

The support table 10 may move to the loading unit 30 to load and move another substrate to be inspected along the first travel shaft 12. In this process, the support table 10 may be lifted up from the top such as a gripper and supported. Various loading methods may be applied, such as a method in which the table 10 enters the bottom of the substrate to support and load the central portion of the substrate.

The support table 10 moves along the first travel shaft 12 in a state where the substrate 1 is loaded, and passes through the vision unit 20 to allow the support table 10 to be loaded on the support table 10. Since the edge is inspected, the loaded substrate 1 is preferably fixed to the support table 10 so as not to move.

To this end, an adsorption part 14 may be formed on the surface of the support table 10 according to the present embodiment. For example, a plurality of adsorption holes are drilled on the surface of the support table 10 and a vacuum line is provided in the adsorption hole. In the case where the adsorption unit is connected to each other, a vacuum is formed in the bonding hole through the vacuum line, so that the substrate 1 loaded on the support table 10 may be attached to and fixed on the surface of the support table 10.

As a result, the edge inspection process may be smoothly performed without the substrate 1 moving or the alignment being disturbed in the process of moving the substrate 1 loaded on the support table 10.

On the other hand, the substrate 1 used in the LCD panel or the solar cell is often formed in a rectangular shape, and in order to inspect the edge of the rectangular substrate 1, the substrate 1 is inspected after inspecting the short side (or long side). The long side (or short side) is again inspected by rotating.

To this end, a support shaft 10 may be coupled to the support table 10 according to the present embodiment, and the support table 10 rotates as the drive shaft is driven. Accordingly, the support table 10 may be rotated to rotate the substrate 1 loaded on the support table 10 by a desired angle. In the case of the rectangular substrate 1, image information may be acquired with respect to the first edge pair. After this is completed, the support table 10 and the substrate 1 loaded thereon are rotated by a predetermined angle, for example, by 90 degrees, to the vision unit 20 with respect to the second edge pair of the rotated substrate 1. One image information can be obtained.

After acquiring the image information of all the edges of the substrate 1, the support table 10 rotates the substrate 1 in the opposite direction by a predetermined angle to return to the unloading unit 40 after the original position. In the unloading part 40, as in the loading part 30, the substrate is pulled up from the top like a gripper, and the support table 10 comes out of the bottom of the substrate so that the unloading part 40 supports both sides of the substrate. Various export methods may be applied, such as the export method.

Thereafter, the support table 10 moves back to the loading unit 30 along the first travel shaft 12, loads the substrate to be inspected subsequently, and repeats the above-described process.

The vision unit 20 is disposed to intersect the first travel shaft 12 of the support table 10 at a predetermined position, and the substrate 1 supported on the support table 10 is loaded from the loading unit 30. Image information is obtained with respect to the first edge pair of the substrate 1 before the rotation and the second edge pair of the substrate 1 after the rotation in the process of moving to the unloading part 40.

In the present embodiment, the support table 10 moves from the loading part 30 to the unloading part 40 along the first travel shaft 12 to all edges of the substrate 1 without performing a return movement. The vision unit 20 is moved along the second travel shaft 26 to perform the inspection.

The vision unit 20 includes a pair of imaging units 24 spaced apart from one surface of the substrate 1. The vision unit 20 may span an intermediate point of the first travel shaft 12, for which the pillars are erected on both sides of the first travel shaft 12, as shown in FIGS. After the installation, the both ends of the path member 22 serving as the movement path of the imaging unit 24 are coupled to the lower end of the girder, so that the imaging unit 24 can move to the position where the pillar is installed without being interfered with the girder.

The distance between the imaging units 24 according to the type, size, etc. of the substrate, or the long side, the short side, etc., for the same substrate is determined by moving the imaging unit 24 along the path member 22 (the first travel shaft 12). Alternatively, it may be adjusted in a direction orthogonal to the second travel shaft 26.

In addition, the vision unit 20 may reciprocate along the second travel shaft 26. The second travel shaft 26 may be parallel to the first travel shaft 12 in space. In the present embodiment, the second travel shaft 26 corresponds to the girder at which both ends of the path member 22 are coupled, and both ends thereof are coupled to the girder so that the member serving as the movement path of the imaging unit 24 is movable. Can be.

In addition, the vision unit 20 may include a pair of illumination units (not shown) spaced apart from the other surface of the substrate 1 and installed to face the imaging unit 24, respectively. The corresponding imaging unit 24 and the illumination unit may be integrally coupled and moved in conjunction with each other.

For example, the imaging unit 24 includes a barrel constituting the external body, a lens installed in the barrel, and an image sensor for converting an image incident through the lens into an electrical signal and outputting the electrical signal to the inspection unit.

For example, the lighting unit may be used a fluorescent lamp, mercury lamp, LED, etc., and provides a light source in the process of obtaining image information on the edge of the substrate 1 by using the imaging unit 24, the imaging unit It can be positioned on a straight line connecting the lens of the 24 and the image sensor so that the light projected on the substrate 1 is incident on the lens of the imaging unit 24.

In addition, the first moving speed along the first travel shaft 12 of the support table 10 and the second moving speed along the second travel shaft 26 of the vision unit 20 are the image information of the vision unit 20. It can be adjusted according to the acquisition speed.

In the conventional edge inspection apparatus of the substrate, only the support table 10 is moved. When the first movement speed is increased to correspond to the image information acquisition speed, the loaded substrate 1 may not be stably fixed, thereby obtaining accurate image information. Although it may be difficult, it is possible to flexibly cope with the image information acquisition speed by moving not only the support table 10 but also the vision unit 20 according to the present invention, and the substrate 1 supported on the support table 10 is stably fixed. By doing so, there is an advantage that high accuracy image information can be obtained.

The substrate edge inspection apparatus according to the present exemplary embodiment further includes an inspection unit (not shown) which inspects an edge defect of the substrate 1 according to a predetermined program logic by using image information collected through the vision unit 20. can do. The inspection unit inspects the size error of the substrate, the straightness defect, the crack, the chip, the inclination angle error of the substrate edge polished surface, the presence of the chip on the inclined surface through image processing of the image information, and may be implemented as a software program.

In addition, the substrate edge inspection apparatus according to the present embodiment further includes an alignment unit (not shown) for aligning the substrate 1 so that the vision unit 20 may obtain accurate image information with respect to the edge of the substrate 1. You could do it.

4 is a flowchart illustrating a substrate edge inspection method according to an embodiment of the present invention, and FIGS. 5A to 5E are conceptual diagrams illustrating a substrate edge inspection process according to an embodiment of the present invention. 5A to 5E, the substrate 1, the support table 10, the first travel shaft 12, the vision unit 20, the path member 22, the second travel shaft 26, and the loading unit ( 30, the unloading portion 40 is shown.

The present embodiment relates to a process of inspecting edge defects of the substrate 1 by driving the above-described substrate edge inspection apparatus, and in addition to the above-described substrate edge inspection apparatus for performing the substrate edge inspection method according to the present embodiment, Of course, components may be added, changed, or omitted.

In addition, hereinafter, the present invention relates to a process of inspecting all four sides of the substrate 1 by inspecting the short side edge pair of the substrate 1 and then rotating the substrate 1 to inspect the long side edge pair of the substrate 1. The scope of the present invention is not limited thereto. Of course, the short side edge pair may be inspected after the long side edge pair is first examined.

As will be described later, the present embodiment is a method of reducing the tact time of the entire process by simultaneously performing the rotation of the support table 10 and the alignment of the vision unit 20 after the inspection of the short side edge pairs of the substrate 1, For convenience, explanation will be given from the step of loading the substrate 1.

When the substrate 1 is loaded in the loading unit 30 and passed out of the unloading unit 40 after passing through the vision unit 20, the loading unit 30 is turned on the basis of the moving direction of the substrate 1. The front, the unloading portion 40 will be described as referred to the rear.

As shown in FIG. 5A, the substrate 1 is loaded on the support table 10 in the loading unit 30 (step S10), and the support table 10 moves rearward along the first travel shaft 12. To move forward (step S20).

Here, the alignment operation may be preceded to perform accurate edge inspection on the substrate 1 moved along the first travel shaft 12. Alignment work is performed by the interaction of the support table 10 and the alignment part (not shown). When the substrate 1 to be moved is stopped at the alignment portion for alignment, when the position of the substrate 1 at this time is referred to as the 'initial position', the support table 10 moves the substrate 1 to the initial position. The alignment unit acquires image data by photographing an alignment mark displayed on the surface of the substrate 1. The alignment unit compares the acquired image data with pre-stored reference data to determine whether the substrate 1 is properly loaded or whether there is some error to align it.

If it is determined that the substrate 1 is not properly loaded and needs alignment to some extent, the alignment unit outputs an angle at which the support table 10 should rotate to align the substrate 1, and the support table 10 With this result, the loaded substrate 1 is rotated by a predetermined angle, thereby completing the alignment of the substrate 1.

The substrate 1 (or the substrate 1 having been aligned as necessary) loaded on the support table 10 moves toward the rear along the support table 10, and is connected to the short side edges by the vision unit 20. Image information acquisition operation is performed (step S30). Here, the vision unit 20 places the imaging unit 24 and the path member 22 at a predetermined position so that image information about the short edge pair of the substrate 1 can be obtained smoothly. State '.

In this case, the vision unit 20 is stopped while the support table 10 is moved, or the vision unit 20 moves in a direction facing each other while the support table 10 is moved. Obviously, the edge inspection of the short side edge pair of the substrate 1 may be performed.

After the edge inspection on the short side edge pair is completed, as shown in FIG. 5B, the support table 10 is rotated by a predetermined angle (step S40), and the vision corresponds to the position of the long side edge pair of the rotated substrate 1. The unit 20 is aligned (step S50).

The imaging unit 24 moves along the path member 22 in the direction orthogonal to the travel shaft for the alignment of the vision unit 20. In addition, the path member 22 may also move along the girder, that is, the second travel shaft 26, corresponding to the portion where the long side edge of the rotated substrate 1 starts.

The rotation of the support table 10 and the alignment of the vision unit 20 do not have their back and forth, and may be performed simultaneously. Since the rotation of the support table 10 and the alignment of the vision unit 20 are performed at the same time, the process of moving the support table 10 back to the initial position can be omitted, thereby shortening the inspection process, and the tact of the process. This saves time.

Next, as illustrated in FIG. 5C, the vision unit 20 moves along the second travel axis 26 to perform image information acquisition for the long side edge pair of the substrate 1 (step S50).

In this case, the support table 10 is stopped while the vision unit 20 moves, or the support table 10 is also moved while the vision unit 20 moves, thereby flexibly responding to the image information acquisition speed. It goes without saying that an edge check for the long side edge pair of 1) may be performed.

When image information acquisition for the long side edge pair is completed, as shown in FIG. 5D, the support table 10 is rotated by a predetermined angle in a direction opposite to that in step S40 to return to the original direction of the substrate 1 (step S60). ), The vision unit 20 returns to the initial state (the position corresponding to the short side edge pair in this embodiment) so that edge inspection can be performed on the substrate 1 in the later stage (step S65).

Next, as shown in FIG. 5E, the support table 10 takes out the substrate 1 to the unloading part 40 (step S70) to complete the substrate edge inspection process.

The substrate edge inspection method according to the embodiment of the present invention described above may be performed in combination with a predetermined device, for example, a substrate edge inspection device after being stored in a recording medium. Here, the recording medium may be a magnetic or optical recording medium such as a hard disk, a video tape, a CD, a VCD, a DVD, or a database of a client or server computer built offline or online.

Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art to which the present invention pertains without departing from the spirit and scope of the invention as set forth in the claims below It will be appreciated that modifications and variations can be made.

1 is a perspective view schematically showing a substrate edge inspection apparatus according to an embodiment of the present invention.

2 is a plan view showing a substrate edge inspection apparatus according to an embodiment of the present invention.

3 is a side view showing a substrate edge inspection apparatus according to an embodiment of the present invention.

4 is a flow chart showing a substrate edge inspection method according to an embodiment of the present invention.

5A through 5E are conceptual views illustrating a substrate edge inspection process according to an embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

1: Substrate 10: Support Table

12: first running shaft 14: adsorption unit

20: vision part 22: path member

24: imaging unit 26: second travel shaft

30: loading part 40: unloading part

Claims (10)

A method of inspecting an edge of a substrate by loading the substrate on a support table that can move back and forth along a first travel axis, (a) obtaining, by the vision unit, first image information with respect to a first edge pair of the substrate loaded on the support table moving along the first travel axis; (b) rotating the support table by a predetermined angle; (c) acquiring second image information on a second edge pair of the substrate while the vision unit moves along a second driving axis; And (d) rotating the support table in the opposite direction by the predetermined angle. The method of claim 1, Between steps (a) and (c), (b1) further comprising aligning the vision portion corresponding to the position of the second edge pair of the rotated substrate. 3. The method of claim 2, The singular steps (b) and (b1) are performed together. The method of claim 1, And said vision portion moves in a direction facing said support table in said step (a). The method of claim 1, And in the step (c), the support table also moves in a direction facing each other. The method of claim 1, And the first travel shaft and the second travel shaft are parallel to each other. The method of claim 1, The first edge pair corresponds to any one of a long side and a short side of the substrate, and the second edge pair corresponds to the other of the long side and the short side of the substrate. The method of claim 1, And said substrate has a rectangular shape and said predetermined angle is 90 degrees. The method of claim 1, The vision unit includes a path member moving along the second travel axis and an imaging unit moving in a direction orthogonal to the second travel axis along the path member, After step (c), and (d1) moving the path member and the imaging unit to return the vision unit to an initial state so that the vision unit acquires image information for a subsequent substrate. The method of claim 1, (e) unloading the substrate to the unloading portion, and the support table further moves back to the loading portion.

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