CN212275626U

CN212275626U - Stretching ring wafer inspection machine

Info

Publication number: CN212275626U
Application number: CN202021499377.3U
Authority: CN
Inventors: 田金泉; 李涛; 王广禄; 陈曦; 柯华榕
Original assignee: Jingcheng Optoelectronic Technology Xiamen Co Ltd
Current assignee: Jingcheng Optoelectronic Technology Xiamen Co Ltd
Priority date: 2020-07-27
Filing date: 2020-07-27
Publication date: 2021-01-01
Anticipated expiration: 2030-07-27

Abstract

The utility model discloses a stretched film ring wafer inspection machine, which comprises an inspection machine main body, a wafer basket, a workbench, a longitudinal moving assembly, a transverse moving assembly, a mounting seat, an X-axis moving assembly, a Y-axis moving assembly, an adsorption platform, a bracket, an INKER marking instrument, a CCD alignment instrument, an inspection assembly and a scanner; the utility model discloses a, through addding the longitudinal movement subassembly, the lateral shifting subassembly, the X axle removes the subassembly, the Y axle removes the subassembly, adsorption platform and inspection subassembly, and cooperation CCD counterpoint appearance and scanner, thereby make the wafer inspection machine can fix a position the position of waiting to examine the wafer in real time, treat automatically that the inspection wafer accomplishes the removal, press from both sides and get, the centre gripping, the action of absorption and inspection, the degree of automation of wafer inspection machine has not only been improved, personnel's intensity of labour has been reduced, the efficiency of wafer inspection has been improved, still avoided artificial misoperation to cause the problem of damage to the wafer surface, the defective percentage of wafer inspection has been reduced, the resource has been saved.

Description

Stretching ring wafer inspection machine

Technical Field

The utility model relates to a wafer inspection machine technical field specifically is a stretch membrane ring wafer inspection machine.

Background

A wafer refers to a substrate, also called a substrate, for manufacturing a semiconductor transistor or an integrated circuit, and is called a wafer because it is a crystalline material and its shape is circular. Generally, silicon is purified to form a silicon ingot, and then the silicon ingot is melted and pulled out of a single crystal silicon ingot through processes such as photoengraving, grinding, polishing and slicing, and then the silicon ingot is cut into thin wafers.

At present, a wafer inspection machine is commonly used in the industry to inspect the appearance of a wafer manufactured by cutting, inspect the appearance and defects of the wafer, measure data and the like, and screen out defective wafers with defects on the surface.

However, most of the conventional wafer inspection machines need manual operation, which not only increases labor intensity of personnel and reduces efficiency of wafer inspection, but also easily damages the surface of the wafer due to manual operation errors, inevitably increases defective rate of wafer inspection, and causes unnecessary waste of resources.

Therefore, it is necessary to design a tension ring wafer inspection machine.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a stretch film ring wafer inspection machine to solve the problem that proposes among the above-mentioned background art.

In order to solve the technical problem, the utility model provides a following technical scheme: a stretched film ring wafer inspection machine comprises an inspection machine main body, a wafer basket, a workbench, a longitudinal moving assembly, a transverse moving assembly, a mounting seat, an X-axis moving assembly, a Y-axis moving assembly, an adsorption platform, a support, an INKER marker, a CCD alignment instrument, an inspection assembly and a scanner, wherein one corner of the top of the inspection machine main body is fixedly connected with the bottom of the wafer basket, the top of the inspection machine main body is fixedly connected with the bottom of the workbench, one side of the top of the workbench is fixedly connected with the bottom of the longitudinal moving assembly through a support column, the transverse moving assembly is arranged right above one side of the top of the longitudinal moving assembly, two sides of the bottom of the transverse moving assembly are fixedly connected with one adjacent side of the top of the workbench through the mounting seat, the center of the top of the workbench is fixedly connected with the bottom of the X-axis moving assembly, and the Y-axis moving assembly is fixedly mounted on the X-axis moving assembly, an adsorption platform is fixedly arranged on the Y-axis moving component; the utility model discloses a CCD camera, including workstation top, support, inspection subassembly and scanner, the both sides fixed connection of adjacent both sides and support bottom at workstation top, the both sides at support side center are fixed mounting INKER mark appearance and CCD alignment appearance respectively, and the center and one side of support another side fixed mounting have inspection subassembly and scanner respectively, the inspection subassembly is located the X axle and removes the subassembly middle section directly over.

Further, the longitudinal moving assembly comprises a first fixing plate, a longitudinal sliding rail, a longitudinal moving seat, a clamping manipulator, a first belt and a first driving pulley, wherein the bottom of the first fixing plate is fixedly connected with one side of the top of the workbench through a supporting column, the longitudinal sliding rail is fixedly arranged on two sides of the top of the first fixing plate, the middle section of the longitudinal sliding rail is fixedly connected with two sides of the bottom of the longitudinal moving seat through a sliding block, the clamping manipulator is fixedly arranged on the top of the longitudinal moving seat, one side of the bottom of the longitudinal moving seat is fixedly connected with the middle section of the first belt, the inner circumference of one end of the first belt is fixedly sleeved with the outer circumference of the first driven pulley, the inner circumference of the other end of the first belt is fixedly sleeved with the outer circumference of the first driving pulley, and the center of the bottom of the first driving pulley is fixedly connected with the output end, the top of the longitudinal moving motor is fixedly connected with one side of the bottom of the first fixing plate.

Furthermore, the transverse moving component comprises a second mounting plate, a transverse sliding rail, a transverse moving seat, a clamping manipulator, a second belt, a second driven belt wheel, a second driving belt wheel and a transverse moving motor, wherein two sides of the bottom of the second mounting plate are fixedly connected with one adjacent side of the top of the workbench through the mounting seat, the transverse sliding rail is fixedly mounted at the top end and the bottom end of the front surface of the second mounting plate, the middle section of the transverse sliding rail is fixedly connected with the top end and the bottom end of the back surface of the transverse moving seat through a sliding block, the clamping manipulator is fixedly mounted at the top end of the front surface of the transverse moving seat, one side of the back surface of the transverse moving seat is fixedly connected with the middle section of the second belt, the inner circumference of one end of the second belt is fixedly sleeved with the outer circumference of the second driven belt wheel, and the inner circumference of the other end of the, the center of the back of the second driving belt wheel is fixedly connected with the output end of the transverse moving motor, and the transverse moving motor is fixedly installed on one side of the back of the second installation plate.

Further, the X-axis removes the subassembly and comprises third mounting panel, X-axis travelling rail and X-axis travelling cylinder, the bottom of third mounting panel and the central fixed connection at workstation top, and one side fixed mounting at third mounting panel top has X-axis travelling rail, the one end of X-axis travelling rail and X-axis travelling cylinder's output fixed connection, and the central fixed connection of slider and Y-axis travelling subassembly bottom is passed through in the middle section of X-axis travelling rail.

Further, Y axle removes the subassembly and comprises fourth mounting panel, Y axle traveling rail and Y axle traveling cylinder, the middle section fixed connection of slider and X axle traveling rail is passed through at the center of fourth mounting panel bottom, and the center fixed mounting at fourth mounting panel top has Y axle traveling rail, Y axle traveling rail one end and Y axle traveling cylinder's output fixed connection, and the middle section of Y axle traveling rail passes through the slider and adsorbs the center fixed connection of platform bottom.

Further, the inspection subassembly comprises fifth mounting panel, lift seat, microscope and elevator motor, the side of fifth mounting panel and the central fixed connection of support another side, and the both sides fixed mounting of fifth mounting panel another side has a lift slide rail, the both sides fixed connection of slider and lift seat side is passed through in the middle section of lift slide rail, the top fixed mounting of lift seat has the microscope, and the center of lift seat side passes through ball nut and threaded screw's middle section fixed connection, the top and the bottom fixed connection of lead screw fixing base and fifth mounting panel another side are passed through at the both ends of threaded screw, and threaded screw's one end passes through shaft coupling and elevator motor's output fixed connection, elevator motor fixed mounting is at the center at fifth mounting panel top.

Compared with the prior art, the utility model discloses the beneficial effect who reaches is: the stretched film ring wafer inspection machine is additionally provided with the longitudinal moving assembly, the transverse moving assembly, the X-axis moving assembly, the Y-axis moving assembly, the adsorption platform and the inspection assembly and is matched with the CCD aligner and the scanner, so that the wafer inspection machine can position the position of a wafer to be inspected in real time, and automatically complete the actions of moving, clamping, adsorbing and inspecting the wafer to be inspected, thereby not only improving the automation degree of the wafer inspection machine, reducing the labor intensity of personnel, improving the wafer inspection efficiency, but also avoiding the problem of damage to the surface of the wafer caused by human errors, reducing the defective rate of wafer inspection and saving resources.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a top view of the overall structure of the present invention;

FIG. 2 is an enlarged view of a portion of FIG. 1 at A;

FIG. 3 is an enlarged view of a portion of FIG. 1 at B;

FIG. 4 is an enlarged view of a portion of FIG. 1 at C;

FIG. 5 is an enlarged view of a portion of FIG. 1 at D;

in the figure: 1. a checking machine main body; 2. a wafer basket; 3. a work table; 4. a longitudinal movement assembly; 41. a first fixing plate; 42. a longitudinal slide rail; 43. a longitudinal moving seat; 44. a gripping manipulator; 45. a first belt; 46. a first driving pulley; 5. a lateral movement assembly; 51. a second mounting plate; 52. a transverse slide rail; 53. a transverse moving seat; 54. clamping the manipulator; 55. a second belt; 56. a second driven pulley; 57. a second driving pulley; 58. a transverse moving motor; 6. a mounting seat; 7. an X-axis moving assembly; 71. a third mounting plate; 72. an X-axis movable slide rail; 73. an X-axis moving cylinder; 8. a Y-axis moving assembly; 81. a fourth mounting plate; 82. a Y-axis movable slide rail; 83. a Y-axis moving cylinder; 9. an adsorption platform; 10. a support; 11. an marker for marker INKER; 12. a CCD aligner; 13. inspecting the component; 131. a fifth mounting plate; 132. a lifting seat; 133. a microscope; 134. a lifting motor; 14. a scanner.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides a technical solution: a stretched film ring wafer inspection machine comprises an inspection machine body 1, a wafer basket 2, a workbench 3, a longitudinal moving assembly 4, a transverse moving assembly 5, a mounting seat 6, an X-axis moving assembly 7, a Y-axis moving assembly 8, an adsorption platform 9, a support 10, an INKER marking instrument 11, a CCD contraposition instrument 12, an inspection assembly 13 and a scanner 14, wherein one corner of the top of the inspection machine body 1 is fixedly connected with the bottom of the wafer basket 2, the top of the inspection machine body 1 is fixedly connected with the bottom of the workbench 3, one side of the top of the workbench 3 is fixedly connected with the bottom of the longitudinal moving assembly 4 through a supporting column, the longitudinal moving assembly 4 consists of a first fixing plate 41, a longitudinal sliding rail 42, a longitudinal moving seat 43, a clamping manipulator 44, a first belt 45 and a first driving belt wheel 46, the bottom of the first fixing plate 41 is fixedly connected with one side of the top of the workbench 3 through the supporting column, a longitudinal slide rail 42 is fixedly arranged on two sides of the top of the first fixing plate 41, the middle section of the longitudinal slide rail 42 is fixedly connected with two sides of the bottom of the longitudinal moving seat 43 through a slide block, a clamping manipulator 44 is fixedly arranged on the top of the longitudinal moving seat 43, one side of the bottom of the longitudinal moving seat 43 is fixedly connected with the middle section of a first belt 45, the inner circumference of one end of the first belt 45 is fixedly sleeved with the outer circumference of a first driven pulley, the inner circumference of the other end of the first belt 45 is fixedly sleeved with the outer circumference of a first driving pulley 46, the center of the bottom of the first driving pulley 46 is fixedly connected with the output end of a longitudinal moving motor, the top of the longitudinal moving motor is fixedly connected with one side of the bottom of the first fixing plate 41, a transverse moving assembly 5 is arranged right above one side of the top of the longitudinal moving assembly 4, and the, The two sides of the bottom of the second mounting plate 51 are fixedly connected with the adjacent side of the top of the workbench 3 through the mounting seat 6, the top end and the bottom end of the front surface of the second mounting plate 51 are fixedly provided with the transverse slide rails 52, the middle section of the transverse slide rails 52 is fixedly connected with the top end and the bottom end of the back surface of the transverse moving seat 53 through the slide blocks, the top end of the front surface of the transverse moving seat 53 is fixedly provided with the clamping manipulator 54, one side of the back surface of the transverse moving seat 53 is fixedly connected with the middle section of the second belt 55, the inner circumference of one end of the second belt 55 is fixedly sleeved with the outer circumference of the second driven belt 56, the inner circumference of the other end of the second belt 55 is fixedly sleeved with the outer circumference of the second driving belt 57, the center of the back surface of the second driving belt 57 is fixedly connected with the output end of the transverse moving motor 58, the transverse moving motor 58 is fixedly arranged on one side of the back of the second mounting plate 51, two sides of the bottom of the transverse moving assembly 5 are fixedly connected with one adjacent side of the top of the workbench 3 through the mounting base 6, the center of the top of the workbench 3 is fixedly connected with the bottom of the X-axis moving assembly 7, the X-axis moving assembly 7 is composed of a third mounting plate 71, an X-axis moving slide rail 72 and an X-axis moving air cylinder 73, the bottom of the third mounting plate 71 is fixedly connected with the center of the top of the workbench 3, the X-axis moving slide rail 72 is fixedly arranged on one side of the top of the third mounting plate 71, one end of the X-axis moving slide rail 72 is fixedly connected with the output end of the X-axis moving air cylinder 73, the middle section of the X-axis moving slide rail 72 is fixedly connected with the center of the bottom of the Y-axis moving assembly 8 through a slide block, the Y-axis moving assembly 8, The Y-axis movable sliding rail 82 and the Y-axis movable air cylinder 83 are formed, the center of the bottom of the fourth mounting plate 81 is fixedly connected with the middle section of the X-axis movable sliding rail 72 through a sliding block, the Y-axis movable sliding rail 82 is fixedly mounted at the center of the top of the fourth mounting plate 81, one end of the Y-axis movable sliding rail 82 is fixedly connected with the output end of the Y-axis movable air cylinder 83, the middle section of the Y-axis movable sliding rail 82 is fixedly connected with the center of the bottom of the adsorption platform 9 through a sliding block, and the adsorption platform 9 is fixedly mounted on the Y-axis movable; the two adjacent sides of the top of the workbench 3 are fixedly connected with the two sides of the bottom of the bracket 10, the two sides of the center of the side surface of the bracket 10 are respectively and fixedly provided with the INKER marker 11 and the CCD contraposition instrument 12, the center and one side of the other side surface of the bracket 10 are respectively and fixedly provided with the inspection component 13 and the scanner 14, the inspection component 13 is positioned right above the middle section of the X-axis moving component 7, the inspection component 13 consists of a fifth mounting plate 131, a lifting seat 132, a microscope 133 and a lifting motor 134, the side surface of the fifth mounting plate 131 is fixedly connected with the center of the other side surface of the bracket 10, the two sides of the other side surface of the fifth mounting plate 131 are fixedly provided with lifting slide rails, the middle section of the lifting slide rails is fixedly connected with the two sides of the side surface of the lifting seat 132 through a slide block, the top of the lifting seat, two ends of a threaded screw rod are fixedly connected with the top end and the bottom end of the other side surface of the fifth mounting plate 131 through a screw rod fixing seat, one end of the threaded screw rod is fixedly connected with the output end of the lifting motor 134 through a coupler, the lifting motor 134 is fixedly mounted at the center of the top of the fifth mounting plate 131, and the longitudinal moving assembly 4, the transverse moving assembly 5, the X-axis moving assembly 7, the Y-axis moving assembly 8, the adsorption platform 9 and the inspection assembly 13 are additionally arranged and matched with the CCD aligner 12 and the scanner 14, so that the wafer inspection machine can position the position of a wafer to be inspected in real time, and automatically complete the actions of moving, clamping, adsorbing and inspecting the wafer to be inspected, thereby not only improving the automation degree of the wafer inspection machine, reducing the labor intensity of personnel, improving the wafer inspection efficiency, but also avoiding the problem of damage to the surface of the wafer caused by human, the defective rate of wafer inspection is reduced, and resources are saved; when the utility model works, firstly, the wafer to be inspected is put into the wafer basket 2, then the corresponding data is inputted into the inspection machine main body 1, the inspection machine main body 1 automatically starts the longitudinal moving motor in the longitudinal moving component 4, further the first driving pulley 46 cooperates with the first driven pulley to drive the first belt 45, further the longitudinal moving seat 43 is driven to move on the longitudinal slide rail 42, the wafer to be inspected in the wafer basket 2 is clamped and longitudinally moved by the clamping manipulator 44, then the inspection machine main body 1 makes the clamping manipulator 54 in the transverse moving component 5 clamp the wafer to be inspected, simultaneously the clamping manipulator 44 loosens the wafer to be inspected, then the transverse moving motor 58 is automatically started, the second driving pulley 57 cooperates with the second driven pulley 56 to drive the second belt 55, further the transverse moving seat 53 is driven to move on the transverse slide rail 52, transversely moving the wafer to be inspected to the position right above the adsorption platform 9 through the clamping mechanical arm 54, automatically lifting the adsorption platform 9 to a corresponding height through the inspection machine main body 1, adsorbing the wafer to be inspected, loosening the clamping mechanical arm 54 to loosen the wafer to be inspected, automatically starting the X-axis moving cylinder 73 in the X-axis moving assembly 7 through the inspection machine main body 1, enabling the fourth mounting plate 81 in the Y-axis moving assembly 8 to move on the X-axis moving slide rail 72 in the X-axis direction, simultaneously starting the Y-axis moving cylinder 83, enabling the adsorption platform 9 to move on the Y-axis moving slide rail 82 in the Y-axis direction, further enabling the wafer to be inspected to move in the X-axis direction and the Y-axis direction under the microscope 133 in the inspection assembly 13, and finally automatically starting the lifting motor 134 through the inspection machine main body 1 to adjust the height of the lifting seat 132, and adjusting the proper height through the microscope 133, and then the appearance of the wafer to be inspected is comprehensively inspected, defective products of the wafer with a defective surface are marked by the INKER marking instrument 11, the main body 1 of the inspection machine can position the position of the wafer to be inspected in real time through the CCD alignment instrument 12 and the scanner 14 which are matched with each other in the whole process, so that automatic clamping, moving, adsorbing and inspecting are completed, the automation degree of the wafer inspection machine is improved, the labor intensity of personnel is reduced, the wafer inspection efficiency is improved, the problem that the surface of the wafer is damaged due to manual operation errors is avoided, the defective product rate of the wafer inspection is reduced, and resources are saved.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a stretch membrane ring wafer inspection machine, includes inspection machine main part (1), wafer hand-basket (2), workstation (3), longitudinal movement subassembly (4), lateral shifting subassembly (5), mount pad (6), X axle removal subassembly (7), Y axle removal subassembly (8), adsorbs platform (9), support (10), INKER mark appearance (11), CCD counterpoint appearance (12), inspection subassembly (13) and scanner (14), its characterized in that: one corner of the top of the inspection machine main body (1) is fixedly connected with the bottom of the wafer lifting basket (2), the top of the inspection machine main body (1) is fixedly connected with the bottom of the workbench (3), one side of the top of the workbench (3) is fixedly connected with the bottom of the longitudinal moving assembly (4) through a support column, a transverse moving assembly (5) is arranged right above one side of the top of the longitudinal moving assembly (4), two sides of the bottom of the transverse moving assembly (5) are fixedly connected with one adjacent side of the top of the workbench (3) through a mounting seat (6), the center of the top of the workbench (3) is fixedly connected with the bottom of the X-axis moving assembly (7), a Y-axis moving assembly (8) is fixedly mounted on the X-axis moving assembly (7), and an adsorption platform (9) is fixedly mounted on the Y-axis moving assembly (8); the utility model discloses a CCD camera, including workstation (3), workstation (10), CCD, inspection subassembly (13) and scanner (14), the both sides at workstation (3) top adjacent both sides and the both sides fixed connection of support (10) bottom, the both sides at support (10) side center are fixed mounting INKER mark appearance (11) and CCD alignment appearance (12) respectively, and the center and one side of support (10) another side fixed mounting respectively, inspection subassembly (13) are located X axle removal subassembly (7) middle section directly over.

2. The tension ring wafer inspection machine of claim 1, wherein: the longitudinal moving assembly (4) consists of a first fixing plate (41), a longitudinal sliding rail (42), a longitudinal moving seat (43), a clamping manipulator (44), a first belt (45) and a first driving pulley (46), wherein the bottom of the first fixing plate (41) passes through a supporting column and is fixedly connected with one side of the top of the workbench (3), the longitudinal sliding rail (42) is fixedly installed on two sides of the top of the first fixing plate (41), the middle section of the longitudinal sliding rail (42) is fixedly connected with two sides of the bottom of the longitudinal moving seat (43) through a sliding block, the clamping manipulator (44) is fixedly installed on the top of the longitudinal moving seat (43), one side of the bottom of the longitudinal moving seat (43) is fixedly connected with the middle section of the first belt (45), the inner circumference of one end of the first belt (45) is fixedly sleeved with the outer circumference of the first driven pulley, and the inner circumference of the other end of the first belt (45) is fixedly sleeved with the outer circumference of the first driving pulley (46, the center of the bottom of the first driving belt wheel (46) is fixedly connected with the output end of the longitudinal moving motor, and the top of the longitudinal moving motor is fixedly connected with one side of the bottom of the first fixing plate (41).

3. The tension ring wafer inspection machine of claim 1, wherein: the transverse moving assembly (5) consists of a second mounting plate (51), a transverse sliding rail (52), a transverse moving seat (53), a clamping manipulator (54), a second belt (55), a second driven belt wheel (56), a second driving belt wheel (57) and a transverse moving motor (58), wherein two sides of the bottom of the second mounting plate (51) are fixedly connected with one adjacent side of the top of the workbench (3) through a mounting seat (6), the top end and the bottom end of the front surface of the second mounting plate (51) are both fixedly provided with the transverse sliding rail (52), the middle section of the transverse sliding rail (52) is fixedly connected with the top end and the bottom end of the back surface of the transverse moving seat (53) through a sliding block, the top end of the front surface of the transverse moving seat (53) is fixedly provided with the clamping manipulator (54), and one side of the back surface of the transverse moving seat (53) is fixedly connected with the middle section of the second, the inner circumference of one end of the second belt (55) is fixedly sleeved with the outer circumference of the second driven belt wheel (56), the inner circumference of the other end of the second belt (55) is fixedly sleeved with the outer circumference of the second driving belt wheel (57), the center of the back face of the second driving belt wheel (57) is fixedly connected with the output end of the transverse moving motor (58), and the transverse moving motor (58) is fixedly installed on one side of the back face of the second installation plate (51).

4. The tension ring wafer inspection machine of claim 1, wherein: x axle removes subassembly (7) and comprises third mounting panel (71), X axle movable slide rail (72) and X axle traveling cylinder (73), the bottom of third mounting panel (71) and the center fixed connection at workstation (3) top, and one side fixed mounting at third mounting panel (71) top has X axle movable slide rail (72), the one end of X axle movable slide rail (72) and the output fixed connection of X axle traveling cylinder (73), and the middle section of X axle movable slide rail (72) passes through the center fixed connection of slider and Y axle movable subassembly (8) bottom.

5. The tension ring wafer inspection machine of claim 1, wherein: y axle removes subassembly (8) and comprises fourth mounting panel (81), Y axle traveling rail (82) and Y axle traveling cylinder (83), the middle section fixed connection of slider and X axle traveling rail (72) is passed through at the center of fourth mounting panel (81) bottom, and the center fixed mounting at fourth mounting panel (81) top has Y axle traveling rail (82), the output fixed connection of Y axle traveling rail (82) one end and Y axle traveling cylinder (83), and the middle section of Y axle traveling rail (82) passes through the slider and adsorbs the center fixed connection of platform (9) bottom.

6. The tension ring wafer inspection machine of claim 1, wherein: the inspection component (13) consists of a fifth mounting plate (131), a lifting seat (132), a microscope (133) and a lifting motor (134), the side surface of the fifth mounting plate (131) is fixedly connected with the center of the other side surface of the bracket (10), and the two sides of the other side surface of the fifth mounting plate (131) are fixedly provided with lifting slide rails, the middle sections of the lifting slide rails are fixedly connected with the two sides of the side surface of the lifting seat (132) through slide blocks, the top of the lifting seat (132) is fixedly provided with a microscope (133), and the center of the side surface of the lifting seat (132) is fixedly connected with the middle section of the threaded screw rod through a ball nut, two ends of the threaded screw rod are fixedly connected with the top end and the bottom end of the other side surface of the fifth mounting plate (131) through a screw rod fixing seat, one end of the threaded screw rod is fixedly connected with the output end of the lifting motor (134) through a coupler, the lifting motor (134) is fixedly arranged in the center of the top of the fifth mounting plate (131).