CN218203036U

CN218203036U - Vacuum coating support plate for solar cell

Info

Publication number: CN218203036U
Application number: CN202222635709.1U
Authority: CN
Inventors: 范恒灵; 庄正军; 上官泉元
Original assignee: CHANGZHOU BITAI TECHNOLOGY CO LTD
Current assignee: CHANGZHOU BITAI TECHNOLOGY CO LTD
Priority date: 2022-10-08
Filing date: 2022-10-08
Publication date: 2023-01-03
Anticipated expiration: 2032-10-08

Abstract

The utility model discloses a vacuum coating support plate for solar cells, which comprises a support plate body; the upper side surface of the carrier plate body is provided with positioning grooves for bearing the silicon wafer in a rectangular manner; the carrier plate body is also provided with a reinforcing rib assembly; the reinforcing rib assembly comprises connecting rods symmetrically arranged at two side ends of the carrier plate body and a reinforcing rib body arranged on the carrier plate body; the two ends of the reinforcing rib body are respectively connected with the connecting rods at the two side ends of the carrier plate body. The utility model discloses a design of strengthening rib subassembly on the support plate has solved the problem of large tracts of land support plate plane degree and structural strength, has guaranteed the stability and the rigidity of support plate, and the emergence of warping when avoiding using from this is to the silicon chip on the automation harmful effects that key parameter such as unloading precision and coating film homogeneity produced.

Description

Vacuum coating support plate for solar cell

Technical Field

The utility model relates to a solar cell prepares technical field, in particular to a solar wafer vacuum coating support plate for bearing silicon chip.

Background

In the production process of the solar cell, the silicon wafer is required to be placed on a support plate, and the silicon wafer is carried by the support plate and enters the solar cell coating equipment for carrying out the process reaction. Generally, the temperature of the process chamber should reach more than 400 ℃, even up to 600 ℃, so that the carrier plate should have good high temperature resistance, and particularly, the carrier plate should have a small expansion coefficient and not deform at high temperature. In addition, as the demand for production capacity increases, the size of the process equipment increases, and the carrier board also needs to increase, which is limited by the transmission structure, and requires a large size, a light weight, and a certain rigidity. Therefore, the carbon fiber material with the characteristics of high strength, low density, high temperature resistance and the like is gradually applied to the manufacture of the silicon wafer carrier plate.

At present, large-size silicon wafers become an industry development trend, and in order to realize large-area film coating and continuously improve the equipment capacity, silicon wafer support plates also begin to develop towards large sizes so as to be capable of bearing larger and more silicon wafers. Along with the increase of carrier plate size, in order to guarantee its planar structure intensity, the thickness of current carbon fiber carrier plate has often accomplished more than 5mm, and the cost of manufacturing the carrier plate is just very high like this. In addition, in a high-temperature process environment, an excessively thick carrier plate has a large deformation amount, so that the precision requirements of placing and taking the silicon wafers during automatic feeding and discharging of the silicon wafers cannot be met. Moreover, after the carrier plate is used for a period of time, the middle area of the carrier plate can generate permanent sinking deformation, so that key coating parameters such as coating uniformity and the like are influenced, the yield of products is reduced, particularly, in order to improve the productivity, the number of silicon wafers borne by a single carrier plate is increased, the length of the carrier plate is about 2 meters, and the sinking deformation defect of a thick carbon fiber plate is more remarkable

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a solar cell vacuum coating support plate, which comprises a support plate body;

the upper side surface matrix of the carrier plate body is provided with positioning grooves for bearing the silicon wafer;

the carrier plate body is also provided with a reinforcing rib assembly;

the reinforcing rib assembly comprises connecting rods symmetrically arranged at two side ends of the carrier plate body and a reinforcing rib body arranged on the carrier plate body; and the two ends of the reinforcing rib body are respectively connected with the connecting rods at the two side ends of the carrier plate body.

The reinforcing rib body is arranged in pairs, every pair of reinforcing rib bodies are butted in parallel and clamped by a mounting clamping block with a right-angled U-shaped cross section, a first avoiding groove is formed in the opposite inner side of each reinforcing rib body, a second locking hole corresponding to the first avoiding groove is formed in the bottom of each mounting clamping block, and every pair of reinforcing rib bodies are matched with the first avoiding groove and the second locking hole through locking bolts and are mounted on the carrier plate body.

And the opposite outer sides of the reinforcing rib bodies are provided with second positioning grooves corresponding to the mounting fixture blocks, so that accurate alignment of each pair of reinforcing rib bodies and the mounting fixture blocks is realized.

The connecting rod is provided with a first positioning groove corresponding to the end part of the reinforcing rib body, so that the reinforcing rib body can be accurately positioned and installed.

And the two end parts of the reinforcing rib body are respectively provided with a second avoiding groove corresponding to the first positioning groove so as to improve the mounting precision of the reinforcing rib body and the connecting rod.

The connecting rod is provided with a first locking hole, and the connecting rod is matched with the first locking hole through a locking screw rod and is arranged on the carrier plate body.

The carrier plate body is made of carbon fiber materials.

Wherein, the reinforcing rib component is made of carbon fiber material

Through the technical scheme, the utility model discloses following beneficial effect has: the design of the reinforcing rib assembly on the support plate solves the problems of large-area support plate flatness and structural strength, ensures the stability and rigidity of the support plate, and avoids the adverse effects of deformation during vacuum coating on key parameters such as silicon wafer automation feeding and discharging precision and coating uniformity.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below.

Fig. 1 is a schematic view of a carrier structure according to an embodiment of the present invention;

fig. 2 is an exploded schematic view of a reinforcing rib assembly according to an embodiment of the present invention;

fig. 3 is an enlarged schematic view of a portion a in fig. 2.

The figures in the drawings represent: 121. a connecting rod; 1211. a first locking hole; 1212. a first positioning groove; 122. a reinforcing rib body; 1221. a second positioning groove; 1222. a first avoiding groove; 1223. a second avoiding groove; 123. and (6) installing a clamping block. .

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

Example 1:

referring to fig. 1, the vacuum coating carrier plate for solar cells provided in embodiment 1 includes a carrier plate body 10, wherein the carrier plate body 10 is provided with a positioning hole 13 for positioning the carrier plate on a carrier or a conveying line; the upper side surface of the carrier plate body 10 is provided with a positioning groove 11 for bearing a silicon wafer in a matrix manner; the carrier body 10 is further provided with a reinforcing rib assembly 12.

In this embodiment 1, the reinforcing rib assembly 12 is used in a vacuum coating process for a solar cell, so as to solve the problems of flatness and structural strength of a large-area carrier plate, and ensure the stability and rigidity of the carrier plate, thereby avoiding adverse effects on key parameters such as feeding and discharging precision and coating uniformity of silicon wafer automation caused by deformation during use.

Example 2:

referring to fig. 2, in the embodiment 2, the stiffener assembly 12 includes connecting rods 121 symmetrically installed at both sides of the carrier body 10, and stiffener bodies 122 installed on the carrier body 10; two ends of the stiffener body 122 are respectively connected to the connecting rods 121 at two sides of the carrier body 10.

The reinforcing rib bodies 122 are arranged in pairs, each pair of reinforcing rib bodies 122 are butted in parallel and clamped by a mounting fixture block 123 with a right-angled U-shaped cross section, a first avoiding groove 1222 is arranged on the opposite inner side of each pair of reinforcing rib bodies 122, a second locking hole corresponding to the first avoiding groove 1222 is arranged at the bottom of the mounting fixture block 123, and each pair of reinforcing rib bodies 122 are arranged on the carrier plate body 10 by matching a locking bolt with the first avoiding groove 1222 and the second locking hole; second positioning grooves 1221 corresponding to the mounting fixture blocks 123 are formed in the opposite outer sides of the reinforcing rib bodies 122, so that accurate alignment of each pair of reinforcing rib bodies 122 and each pair of mounting fixture blocks 123 is realized; the connecting rod 121 is provided with a first positioning groove 1212 corresponding to the end of the reinforcing rib body 122 for accurate positioning and installation of the reinforcing rib body 122; the two end parts of the reinforcing rib body 122 are respectively provided with a second avoiding groove 1223 corresponding to the first positioning groove 1212, so as to improve the mounting accuracy of the reinforcing rib body 122 and the connecting rod 121; the connecting rod 121 is provided with a first locking hole 1211, and the connecting rod 121 is mounted on the carrier plate body 10 by the locking screw rod matching with the first locking hole 1211.

This embodiment 2 is through setting up the strengthening rib body 122 of strengthening rib subassembly 12 in pairs and installing on support plate body 10 through installation fixture block 123, and the both ends of strengthening rib body 122 are passed through connecting rod 121 cooperation and are locked, and this kind of structural arrangement not only is convenient for the dismouting of strengthening rib subassembly 12 to be changed, has higher mechanical strength moreover.

Example 3:

based on embodiment 1 or 2, in embodiment 3, the carrier body 10 and the stiffener assembly 12 are made of high-strength and lightweight carbon fibers; the thickness of the carrier plate body 10 is less than or equal to 4mm, preferably 3 mm; the thickness of the reinforcing rib body 12 is 5-10mm, and the height is 5-15mm.

Compared with the embodiment 3 in which the carrier plate is made of metal materials such as aluminum/steel, the carbon fiber material has better structural stability and high-temperature deformability; compared with the carbon fiber plate with the thickness of more than 5mm, the structure reduces the manufacturing cost and the deformation of the carrier plate in the high-temperature process environment of vacuum coating because the thickness of the carrier plate body 10 is less than or equal to 4 mm.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to the above-described embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A solar cell vacuum coating carrier plate is characterized by comprising a carrier plate body (10);

the upper side surface of the carrier plate body (10) is provided with positioning grooves (11) for bearing silicon wafers in a matrix manner;

the carrier plate body (10) is also provided with a reinforcing rib assembly (12);

the reinforcing rib assembly (12) comprises connecting rods (121) symmetrically arranged at two side ends of the carrier plate body (10) and reinforcing rib bodies (122) arranged on the carrier plate body (10); two ends of the reinforcing rib body (122) are respectively connected with the connecting rods (121) at two side ends of the carrier plate body (10).

2. The vacuum coating carrier plate for solar cells according to claim 1, wherein the stiffener bodies (122) are arranged in pairs, each pair of stiffener bodies (122) are butted side by side and clamped by a mounting block (123) having a right-angled U-shaped cross section, a first avoiding groove (1222) is arranged on the opposite inner side of each pair of stiffener bodies (122), a second locking hole corresponding to the first avoiding groove (1222) is arranged at the bottom of the mounting block (123), and each pair of stiffener bodies (122) are mounted on the carrier plate body (10) by a locking bolt matching the first avoiding groove (1222) and the second locking hole.

3. The vacuum coating carrier plate for solar cells according to claim 2, wherein the opposite outer sides of the stiffener body (122) are provided with second positioning grooves (1221) corresponding to the mounting blocks (123) for precise alignment.

4. The vacuum coating carrier plate for solar cells according to claim 1, wherein the connecting rod (121) is provided with a first positioning groove (1212) corresponding to an end of the stiffener body (122) for precise positioning and installation of the stiffener body (122).

5. The vacuum coating carrier plate for solar cells as claimed in claim 4, wherein the two ends of the stiffener body (122) are respectively provided with a second avoiding groove (1223) corresponding to the first positioning groove (1212) for improving the mounting accuracy.

6. The vacuum coating carrier plate for solar cells as claimed in claim 1, wherein the connecting rod (121) has a first locking hole (1211), and the connecting rod (121) is mounted on the carrier plate body (10) through a locking screw rod engaging with the first locking hole (1211).

7. The vacuum coating carrier plate for solar cells according to claim 1, wherein the carrier plate body (10) is made of carbon fiber material.

8. The vacuum coating carrier plate for solar cells according to claim 1, wherein the reinforcing rib assembly (12) is made of carbon fiber material.