CN220636400U - Template structure of gas distribution plate - Google Patents
Template structure of gas distribution plate Download PDFInfo
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- CN220636400U CN220636400U CN202322331594.1U CN202322331594U CN220636400U CN 220636400 U CN220636400 U CN 220636400U CN 202322331594 U CN202322331594 U CN 202322331594U CN 220636400 U CN220636400 U CN 220636400U
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- gas distribution
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- distribution plate
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- 238000009826 distribution Methods 0.000 title claims abstract description 56
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 238000009415 formwork Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 8
- 238000005553 drilling Methods 0.000 description 8
- 238000009434 installation Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000003825 pressing Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Casting Support Devices, Ladles, And Melt Control Thereby (AREA)
Abstract
The utility model provides a template structure of a gas distribution plate, which comprises a plate body, wherein a plurality of threaded holes are formed in one side surface of the plate body, the plurality of threaded holes are used for fixing the gas distribution plate, and the distance between the centers of adjacent threaded holes in the length direction of the plate body is 39.9-40.1 mm; the distance between the centers of adjacent screw holes in the width direction of the plate body is 39.9-40.1 mm. According to the utility model, the concrete arrangement of the plate body and the threaded holes enables the template structure to adapt to the size requirements of different products, the template is not required to be replaced frequently, the structure is simple, the operability is strong, the production efficiency is further improved, the production cost is saved, and the method is suitable for popularization and use.
Description
Technical Field
The utility model belongs to the technical field of a universal template structure of a horizontal machining center, relates to a template structure of a gas distribution plate, and particularly relates to a quick-change template structure of a machining universal type of a semiconductor machine gas distribution plate.
Background
Chemical vapor deposition techniques are commonly used in semiconductor fabrication to produce thin films by chemical reaction of one or more vapor compounds or elements containing thin film elements on a substrate surface. The principle is that by means of chemical reaction, various energy sources such as heating, plasma excitation or light radiation are utilized, and chemical substances in gas state or vapor state are chemically reacted on gas phase or gas-solid interface in a reactor to form solid sediment. During the deposition of films using chemical vapor deposition, the wafer is under the gas distribution plate. In the chemical vapor deposition process, the gas distribution plate needs to ensure good stability, thereby ensuring the stability of the deposition process.
The prior art discloses a gas distribution plate drilling processing template, which comprises a first drilling template, wherein a first through hole is formed in the first drilling template, a first annular step is formed in the first through hole, and a gas distribution plate is fixed on an annular step surface of the first annular step; the first drilling jig comprises a first drilling jig plate, and is characterized in that a second drilling jig plate connected with the first annular step is arranged on one side surface of the first drilling jig plate, a second through hole is formed in the second drilling jig plate, and a second annular step is arranged in the second through hole.
The prior art still discloses a processing anchor clamps of gas distribution dish part, gas distribution dish part side opening processing anchor clamps include body and two at least locating component, two at least locating component symmetric distributions in the surface of body, the spacing groove has been seted up on the surface of body, the spacing inslot be provided with two at least reference columns, locating component include the clamp plate, place the gas distribution dish part in the surface of body, the one end of clamp plate can be dismantled and connect the body, the other end is compressed gas distribution dish part down is fixed.
The prior art also discloses a universal fixture comprising a fixture body; the top surface of the clamp main body is provided with a groove for accommodating a piece to be welded, the clamp main body is provided with a pressing plate along the edge of the groove, and part of the bottom surface of the pressing plate is connected with the top surface of the piece to be welded; the side wall of the clamp main body is provided with a threaded through hole, a set screw is arranged in the threaded through hole in a penetrating mode, and the positioning end of the set screw is connected with the outer side wall of the to-be-welded piece.
At present, the prior art also has the problems that after the size of the gas distribution plate is changed, the size of the template is required to be frequently replaced for adapting, the replacement frequency is higher, the structure is complex, the operation is tedious and the like. Therefore, there is a need to design and develop a template structure of a gas distribution plate, which overcomes the defects of the prior art, so as to meet the practical application requirements.
Disclosure of Invention
Aiming at the defects existing in the prior art, the utility model aims to provide the template structure of the gas distribution plate, in the utility model, the template structure can adapt to the size requirements of different products by specifically arranging the plate body and the threaded holes, the template is not required to be frequently replaced, the structure is simple, the operability is high, the production efficiency is further improved, the production cost is saved, and the template structure is suitable for popularization and use.
To achieve the purpose, the utility model adopts the following technical scheme:
the utility model provides a template structure of a gas distribution plate, which comprises a plate body, wherein a plurality of threaded holes are formed in one side surface of the plate body, the plurality of threaded holes are used for fixing the gas distribution plate, and the distance between the centers of adjacent threaded holes in the length direction of the plate body is 39.9-40.1 mm; the distance between the centers of adjacent screw holes in the width direction of the plate body is 39.9-40.1 mm.
According to the utility model, the concrete arrangement of the plate body and the threaded holes enables the template structure to adapt to the size requirements of different products, the template is not required to be replaced frequently, the structure is simple, the operability is strong, the production efficiency is further improved, the production cost is saved, and the method is suitable for popularization and use.
The distance between the centers of adjacent threaded holes is 39.9-40.1 mm in the transverse or vertical view, because the gas distribution plates with different diameters are adapted in the size range, if the gas distribution plates are not in the size range, the gas distribution plates cannot be used commonly, the positions of the pressing plates are different due to the change of gaps, the pressing plates are far away or near to the products after the products are installed, the products cannot be installed or the stress points are not enough, and the products are too near to interfere with the pressing plates and cannot be used.
In the utility model, the gas distribution plate can be matched with the upright post and the threaded holes through the positioning pins by arranging the threaded holes, and then the gas distribution plate is quickly replaced through the bolt fixing, so that the gas distribution plate can meet the requirements of plate bodies with different sizes, and the templates do not need to be replaced frequently.
It should be noted that, the specific number of "several" in the present utility model is not limited in particular, and may be one, two, fifty, one hundred, etc., which are not exhaustive herein, and those skilled in the art may make quantitative adjustments according to practical situations. Wherein the threaded holes are equidistant from one another up, down, left and right.
It should be noted that, in the present utility model, the lateral distance between the threaded hole located near the installation position of the through hole and another threaded hole located in the circumferential direction of the threaded hole may be in the range of 29 to 30mm, and the threaded holes are located in the range between the circumferential threaded holes, and this distribution may be such that the threaded holes are distributed over the usable surface of the entire plate body. And can be adapted by a person skilled in the art.
As a preferable technical scheme of the utility model, the plate body is a P20 steel plate.
The P20 steel plate is adopted as the plate body, so that the plate has the advantages of good overall stability, high hardness, small abrasion and long service life.
In a preferred embodiment of the present utility model, the length of the plate body is 440 to 450mm, for example, 440mm, 441mm, 442mm, 443mm, 444mm, 445mm, 446mm, 447mm, 448mm, 449mm, 450mm, etc., but the present utility model is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are applicable.
The width of the plate body is preferably 440 to 450mm, and may be, for example, 440mm, 441mm, 442mm, 443mm, 444mm, 445mm, 446mm, 447mm, 448mm, 449mm, 450mm, etc., but is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are equally applicable.
The thickness of the plate body is preferably 27.98 to 28.02mm, and may be, for example, 27.98mm, 27.99mm, 28mm, 28.01mm, 28.02mm, etc., but is not limited to the recited values, and other values not recited in the range of values are equally applicable.
The length of the plate body is 440-450 mm, the width is 440-450 mm, and the thickness is 27.98-28.02 mm, because the equipment and the workbench interfere in the size range, and if the equipment and the workbench do not interfere in the size range, a large gas distribution plate cannot be used.
In a preferred embodiment of the present utility model, the hole wall finish of each of the screw holes is equal to or less than ra0.02, and may be, for example, 0.02, 0.015, 0.01, 0.008, 0.006, etc., but not limited to the recited values, and other non-recited values within the range of values are equally applicable.
Furthermore, the finish degree of the hole wall of each threaded hole is less than or equal to Ra0.02, so that the positioning is more accurate, repeated positioning is ensured, and the clamp product is free from errors during quick switching.
In a preferred embodiment of the present utility model, the depth of each of the screw holes is 19.9 to 20.1mm, for example, 19.9mm, 20mm, 20.1mm, etc., but the present utility model is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are equally applicable.
The depth of each threaded hole is 19.9-20.1 mm, and the screw teeth have higher rigidity in the size range, so that the screw teeth do not take force in the using process and slip teeth phenomenon occurs if the screw teeth are not in the size range.
In a preferred embodiment of the present utility model, the parallelism of the surface of the plate body is 0.01mm or less, for example, 0.01mm, 0.009mm, 0.008mm, 0.007mm, 0.006mm, 0.005mm, etc., but the present utility model is not limited to the above-mentioned values, and other values not shown in the above-mentioned numerical ranges are equally applicable.
The parallelism of the surface of the plate body is less than or equal to 0.01mm, and the flatness of the plate body is better in the size range, so that the gas distribution plate is convenient to install. Further, the plate body is firstly ground to ensure the flatness, so that the parallelism is within 0.02mm, and after the machining of the threaded holes and the like is finished, the grinding is performed to ensure the flatness parallelism of the plate body is within 0.01mm.
As a preferable technical scheme of the utility model, the plate body is detachably connected with a fixing piece near the edge, and the fixing piece is used for fixing the plate body on a machine tool.
As a preferable technical scheme of the utility model, the fixing piece is a fastening bolt, a through hole is formed in the position, close to the edge, of the plate body, and the fastening bolt is detachably connected in the through hole.
The through hole is obtained through mechanical punching, and the positioning pin can be matched with the fastening bolt for positioning. The specific size, the material and the like of the fastening bolt are not particularly limited, and can be adaptively adjusted according to actual conditions by a person skilled in the art.
In a preferred embodiment of the present utility model, the aperture of the through hole is 19.9 to 20.1mm, for example, 19.9mm, 20mm, 20.1mm, etc., but the present utility model is not limited to the recited values, and other values not recited in the numerical range are equally applicable.
The reason why the hole diameter of the through hole is 19.9 to 20.1mm in the present utility model is that the rigidity of the screw is enhanced in this size range, and if the hole diameter is not in this range, the screw is not hard in use and a slipping phenomenon occurs, and preferably the minimum linear distance between the center of the through hole and the edge of the plate body is 62.4 to 62.6mm, for example, 62.4mm, 62.5mm, 62.6mm, etc., but not limited to the above-mentioned values, and other values not shown in the above-mentioned numerical range are equally applicable.
The minimum linear distance between the center of the through hole and the edge of the plate body is 62.4-62.6 mm, and the through hole is formed by the fact that the clamp has stronger rigidity in the size range, and if the through hole is not formed in the size range, deformation can be caused, and the deformation is caused due to stress deformation of the material during processing, and deformation easily occurs due to long-time use stress, so that abnormal processing is caused.
As an optimal technical scheme of the utility model, the top of the plate body is provided with the lifting hole, and the lifting hole is used for lifting and installing the plate body and the gas distribution plate through auxiliary equipment.
The utility model has the advantages that the specific size, the number, the materials and the like of the lifting holes are not particularly limited, the lifting holes can be installed through auxiliary equipment such as a transverse vehicle and the like, the labor intensity of personnel is reduced, and the lifting holes can be adaptively adjusted according to actual conditions by a person skilled in the art. Wherein, the lifting hole can be installed in any position of the plate body, and the installation of the gas distribution plate is not affected.
Compared with the prior art, the utility model has the beneficial effects that:
according to the utility model, the concrete arrangement of the plate body and the threaded holes enables the template structure to adapt to the size requirements of different products, the template is not required to be replaced frequently, the structure is simple, the operability is strong, the production efficiency is further improved, the production cost is saved, and the method is suitable for popularization and use.
Drawings
FIG. 1 is a front view of a template structure of a gas distribution plate according to one embodiment of the present utility model;
FIG. 2 is a side view of a template structure of a gas distribution plate according to one embodiment of the present utility model;
wherein, 1-plate body; 2-a threaded hole; 3-through holes.
Detailed Description
It is to be understood that in the description of the present utility model, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus are not to be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
It should be noted that, in the description of the present utility model, unless explicitly specified and limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.
The technical scheme of the utility model is further described below by the specific embodiments with reference to the accompanying drawings.
In one embodiment, the utility model provides a template structure of a gas distribution plate, as shown in fig. 1 and 2, the template structure comprises a plate body 1, one side surface of the plate body 1 is provided with a plurality of threaded holes 2, and the plurality of threaded holes 2 are used for fixing the gas distribution plate.
Further, the distance between the centers of the adjacent screw holes 2 in the longitudinal direction of the plate body 1 is 39.9 to 40.1mm, and may be 39.9mm, 40mm, 40.1mm, or the like, for example, but is not limited to the recited values, and other values not recited in the numerical range are equally applicable.
Further, the distance between the centers of the adjacent screw holes 2 in the width direction of the plate body 1 is 39.9 to 40.1mm, and may be 39.9mm, 40mm, 40.1mm, or the like, for example, but is not limited to the recited values, and other non-recited values within the range of the values are equally applicable.
Further, the hole wall finish of each screw hole 2 is not more than ra0.02, and may be, for example, 0.02, 0.015, 0.01, 0.008, 0.006, etc., but is not limited to the recited values, and other non-recited values within the range of values are equally applicable.
According to the utility model, the concrete arrangement of the plate body 1 and the threaded holes 2 enables the template structure to adapt to the size requirements of different products, the template is not required to be replaced frequently, the structure is simple, the operability is strong, the production efficiency is further improved, the production cost is saved, and the method is suitable for popularization and use.
In the utility model, the gas distribution plate can be matched with the upright post and the threaded holes 2 through the positioning pins by arranging the threaded holes 2, and then the gas distribution plate can be quickly replaced through bolt fixing, so that the gas distribution plate can meet the requirements of plate bodies with different sizes, and the templates do not need to be frequently replaced.
It should be noted that, the specific number of "several" in the present utility model is not limited in particular, and may be one, two, fifty, one hundred, etc., which are not exhaustive herein, and those skilled in the art may make quantitative adjustments according to practical situations. Wherein the threaded holes 2 are equidistant from one another in the up-down, left-right direction, 2.
Further, the plate body 1 is a P20 steel plate. The P20 steel plate is selected as the plate body 1 in the utility model, and the material and the size enable the plate to have good overall stability, high hardness, small abrasion and long service life.
Further, the length of the plate body 1 is 440 to 450mm, and for example, 440mm, 441mm, 442mm, 443mm, 444mm, 445mm, 446mm, 447mm, 448mm, 449mm, 450mm, etc. may be used, but the present utility model is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are applicable.
Further, the width of the plate body 1 is 440 to 450mm, and for example, 440mm, 441mm, 442mm, 443mm, 444mm, 445mm, 446mm, 447mm, 448mm, 449mm, 450mm, etc. may be used, but the present utility model is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are applicable.
Further, the thickness of the plate body 1 is 27.98 to 28.02mm, and may be, for example, 27.98mm, 27.99mm, 28mm, 28.01mm, 28.02mm, etc., but is not limited to the values listed, and other values not listed in the range are applicable.
Further, the depth of each screw hole 2 is 19.9 to 20.1mm, and may be 19.9mm, 20mm, 20.1mm, or the like, for example, but not limited to the values listed, and other values not listed in the range are equally applicable.
Furthermore, the quick-change positioning pin hole is bored by adopting a punching processing mode, one surface of the plate body 1 is processed by a grinding machine, and the hole wall finish Ra0.2 is further ensured, and the hole diameter deviation is not more than 0.01mm.
Further, the parallelism of the surface of the plate body 1 is not more than 0.01mm, and may be, for example, 0.01mm, 0.009mm, 0.008mm, 0.007mm, 0.006mm, 0.005mm, etc., but not limited to the above-mentioned values, and other values not shown in the above-mentioned numerical range are equally applicable.
The parallelism of the surface of the plate body 1 is less than or equal to 0.01mm, and the flatness of the plate body 1 is better in the size range, so that the installation of the gas distribution plate is facilitated. Further, the plate body 1 in the utility model is firstly ground to ensure the flatness, so that the parallelism is within 0.02mm, and after the machining of the threaded holes 2 and the like is finished, the grinding is carried out to ensure the flatness parallelism of the plate body 1 to be within 0.01mm.
Further, the plate body 1 is detachably connected with a fixing piece near the edge, and the fixing piece is used for fixing the plate body 1 on a machine tool.
Further, the fixing piece is a fastening bolt, a through hole 3 is formed in the position, close to the edge, of the plate body 1, and the fastening bolt is detachably connected in the through hole 3. The through hole 3 in the present utility model is obtained by mechanical punching, and may be positioned by matching a positioning pin with a fastening bolt. The specific size, the material and the like of the fastening bolt are not particularly limited, and can be adaptively adjusted according to actual conditions by a person skilled in the art.
Further, the aperture of the through hole 3 may be 19.9 to 20.1mm, for example, 19.9mm, 20mm, 20.1mm, etc., but the present utility model is not limited to the above-mentioned values, and other values not shown in the above-mentioned numerical range are applicable.
Further, the minimum linear distance between the center of the through hole 3 and the edge of the plate body 1 is 62.4 to 62.6mm, for example, 62.4mm, 62.5mm, 62.6mm, etc., but the present utility model is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are equally applicable.
Further, the top of panel body 1 is provided with the lifting hole, and the lifting hole is used for lifting by crane the installation to panel body 1 and gas distribution dish through auxiliary assembly. The utility model has the advantages that the specific size, the number, the materials and the like of the lifting holes are not particularly limited, the lifting holes can be installed through auxiliary equipment such as a transverse vehicle and the like, the labor intensity of personnel is reduced, and the lifting holes can be adaptively adjusted according to actual conditions by a person skilled in the art. Wherein, the lifting hole can be arranged at any position of the plate body 1 without affecting the installation of the gas distribution plate.
Example 1
The present embodiment provides a template structure of a gas distribution plate, wherein:
the template structure comprises a plate body 1, wherein a plurality of threaded holes 2 are formed in one side surface of the plate body 1, the plurality of threaded holes 2 are used for fixing a gas distribution plate, and the distance between the centers of adjacent threaded holes 2 in the length direction of the plate body 1 is 40mm; the distance between the centers of the adjacent screw holes 2 in the width direction of the plate body 1 was 40mm, and the wall finish of each screw hole 2 was ra0.02.
The plate body 1 is a P20 steel plate. The length of the plate body 1 is 440mm, the width of the plate body 1 is 440mm, and the thickness of the plate body 1 is 28mm.
The depth of each threaded hole 2 is 20mm. The parallelism of the surface of the plate body 1 is 0.01mm.
The board body 1 is close to the edge and can be dismantled and be connected with the mounting, and the mounting is used for fixing board body 1 on the lathe, and the mounting is fastening bolt, and board body 1 is close to edge and is provided with through-hole 3, and fastening bolt can dismantle the connection in through-hole 3.
The aperture of the through hole 3 is 20mm. The minimum linear distance of the centre of the through hole 3 from the edge of the plate body 1 is 62.5mm.
The top of panel body 1 is provided with the lifting hole, and the lifting hole is used for lifting by crane the installation to panel body 1 and gas distribution dish through auxiliary assembly.
In summary, the concrete arrangement of the plate body 1 and the threaded hole 2 enables the template structure to adapt to the size requirements of different products, the template is not required to be replaced frequently, the structure is simple, the operability is high, the production efficiency is further improved, the production cost is saved, and the method is suitable for popularization and use.
The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and it should be apparent to those skilled in the art that any changes or substitutions that fall within the technical scope of the present utility model disclosed herein are within the scope of the present utility model.
Claims (10)
1. The template structure of the gas distribution plate is characterized by comprising a plate body, wherein a plurality of threaded holes are formed in one side surface of the plate body, and the plurality of threaded holes are used for fixing the gas distribution plate;
the distance between the centers of adjacent threaded holes in the length direction of the plate body is 39.9-40.1 mm; the distance between the centers of adjacent screw holes in the width direction of the plate body is 39.9-40.1 mm.
2. The gas distribution plate template structure of claim 1, wherein the plate body is a P20 steel plate.
3. The template structure of a gas distribution plate according to claim 1 or 2, wherein the length of the plate body is 440-450 mm, the width of the plate body is 440-450 mm, and the thickness of the plate body is 27.98-28.02 mm.
4. The gas distribution plate template structure of claim 1, wherein each of said threaded holes has a hole wall finish of at most ra0.02.
5. The template structure of a gas distribution plate according to claim 1, wherein the depth of each of the threaded holes is 19.9-20.1 mm.
6. The template structure of a gas distribution plate according to claim 1, wherein the parallelism of the plate body surface is 0.01mm or less.
7. The gas distribution plate die plate structure of claim 1, wherein the plate body is detachably connected near the edge with a fixing member for fixing the plate body to a machine tool.
8. The gas distribution plate template structure according to claim 7, wherein the fixing member is a fastening bolt, a through hole is formed in the plate body near the edge, and the fastening bolt is detachably connected in the through hole.
9. The template structure of the gas distribution plate according to claim 8, wherein the aperture of the through hole is 19.9-20.1 mm;
the minimum linear distance between the center of the through hole and the edge of the plate body is 62.4-62.6 mm.
10. The gas distribution plate formwork structure according to any one of claims 4 to 9, wherein a lifting hole is provided at a top of the plate body, the lifting hole being used for lifting and mounting the plate body and the gas distribution plate by an auxiliary device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322331594.1U CN220636400U (en) | 2023-08-29 | 2023-08-29 | Template structure of gas distribution plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322331594.1U CN220636400U (en) | 2023-08-29 | 2023-08-29 | Template structure of gas distribution plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220636400U true CN220636400U (en) | 2024-03-22 |
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ID=90291365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322331594.1U Active CN220636400U (en) | 2023-08-29 | 2023-08-29 | Template structure of gas distribution plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220636400U (en) |
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2023
- 2023-08-29 CN CN202322331594.1U patent/CN220636400U/en active Active
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