CN216663230U - Graphite boat stuck point and graphite boat - Google Patents

Graphite boat stuck point and graphite boat Download PDF

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Publication number
CN216663230U
CN216663230U CN202123112292.2U CN202123112292U CN216663230U CN 216663230 U CN216663230 U CN 216663230U CN 202123112292 U CN202123112292 U CN 202123112292U CN 216663230 U CN216663230 U CN 216663230U
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China
Prior art keywords
mounting hole
graphite boat
mounting
bearing
graphite
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CN202123112292.2U
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Chinese (zh)
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王亚楠
谈仕祥
施佳伟
缪杰
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Tongwei Solar Meishan Co Ltd
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Tongwei Solar Meishan Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model discloses a graphite boat stuck point and a graphite boat, and belongs to the technical field of solar cell production. The graphite boat stuck point comprises a central part and a bearing part, wherein the central part is vertically connected with the bearing part, and the bearing part penetrates through the center of the central part; the both ends of bearing the weight of the portion are provided with the installation department respectively, and this installation department includes the round platform body, and this round platform body includes first mesa and second mesa, and first mesa contacts with bearing the weight of the portion. The utility model discloses a graphite boat includes a plurality of graphite flake, the graphite flake includes a plurality of mounting groove, and the side of every mounting groove is equipped with the mounting hole, installs foretell graphite boat stuck point in every mounting hole. Aiming at the problems that the clamping point design of the graphite boat in the prior art is unreasonable, so that the insertion sheet is difficult, and the sheet and the warping sheet are easy to fall, the utility model can simplify the insertion sheet, avoid the problems of warping sheet and winding plating, and improve the practicability of the graphite boat.

Description

Graphite boat stuck point and graphite boat
Technical Field
The utility model belongs to the technical field of solar cell production, and particularly relates to a graphite boat stuck point and a graphite boat.
Background
At present, in the conventional PECVD for producing solar silicon battery wafers, a graphite boat cylindrical clamping point is generally used for clamping a silicon wafer in the graphite boat wafer so as to have good electrification during a discharge reaction, so that silicon nitride is deposited on the surface of the silicon wafer to form a silicon nitride film with a certain thickness. In the manufacturing process of the solar cell, when the surface of the silicon wafer is coated, the silicon wafer which is not coated is inserted into a wafer carrier of PECVD vacuum coating equipment, generally, the wafer carrier is realized by a graphite boat, namely, the silicon wafer which is not coated is inserted into the graphite boat, then, the graphite boat carrying the silicon wafer is placed in a cavity of the PECVD vacuum coating equipment, and the silicon wafer is coated by adopting a PECVD process. And after the coating is finished, taking out the graphite boat from the cavity of the vacuum coating equipment, and then unloading the coated silicon wafer from the graphite boat.
The graphite boat bears the silicon chip to be coated through the stuck point arranged on the graphite boat, and the existing graphite boat for the coated battery piece is provided with 5 graphite stuck points (4U-shaped main stuck points and 1V-shaped auxiliary stuck point). For example, the utility model and creation names are: a graphite boat suitable for photovoltaic super large silicon wafers (application date: 2020, 7 and 28 days; application number: 202021519143.0) discloses a graphite boat suitable for photovoltaic super large silicon wafers, which is used for improving the graphite boat and belongs to the technical field of solar cells, the graphite boat comprises a plurality of rows of graphite boat sheets which are connected together, wherein a graphite boat groove is arranged on each graphite boat sheet, a clamping point component for fixing a silicon wafer is arranged on each graphite boat sheet, the clamping point components are distributed around the graphite boat groove and comprise bottom clamping points, side clamping points and top clamping points, two side clamping points are respectively arranged at two sides of the graphite boat groove, this scheme is through designing the stuck point subassembly, and the perfect battery piece edge around degree overweight problem has been solved, has avoided producing the short circuit in glow discharge, causes the heavy industry of stopping work, has effectively guaranteed the efficiency and the productivity of equipment production, has reduced production staff's intensity of labour simultaneously. But the disadvantages of this solution are: the spacing between the U-shaped clamping points is too small, so that the graphite boat is difficult to insert the sheets automatically, and the sheets are frequently dropped and clamped; and tends to result in higher EL card dot prints.
In conclusion, how to avoid the problems of the prior art that the inserting sheet is difficult and the sheets are easy to fall and warp due to the unreasonable design of the clamping point of the graphite boat is a problem that needs to be solved urgently by the technical staff in the field.
SUMMERY OF THE UTILITY MODEL
1. Problems to be solved
Aiming at the problems that in the prior art, the clamping point of a graphite boat is unreasonable in design, so that the insertion sheet is difficult to fall and the sheet and the warping sheet are easy to fall, the utility model provides the clamping point of the graphite boat and the graphite boat, which can realize simplification of the insertion sheet, avoid the problems of the warping sheet and the plating winding, further reduce the consumption of the clamping point and the proportion of EL (electro-luminescent) clamping point printing, and improve the practicability of the graphite boat.
2. Technical scheme
In order to solve the problems, the technical scheme adopted by the utility model is as follows:
the utility model relates to a graphite boat stuck point, which comprises a central part and a bearing part, wherein the central part is vertically connected with the bearing part, and the bearing part penetrates through the center of the central part; the both ends of bearing the weight of the portion are provided with the installation department respectively, and this installation department includes the round platform body, and this round platform body includes first mesa and second mesa, and first mesa contacts with the bearing the weight of the portion, and the diameter of first mesa is less than the diameter of second mesa, and the diameter of first mesa is greater than the width of bearing the weight of the portion.
Further, the bearing parts are symmetrically arranged along the central part.
Further, the perpendicular distance of the surface of the mounting portion from the surface of the corresponding center portion was 0.3 mm.
Furthermore, the first table top is connected with the second table top through a circular table top, and the included angle between the circular table top and the second table top is 57 degrees.
Furthermore, the central part and the bearing part are both cylinders, and the diameter of the central part is larger than that of the bearing part.
The graphite boat comprises a plurality of graphite sheets, wherein each graphite sheet comprises a plurality of mounting grooves, a mounting hole is formed in the side edge of each mounting groove, and the graphite boat clamping point is mounted in each mounting hole.
Further, the mounting holes comprise a first mounting hole, a second mounting hole and a third mounting hole, and the first mounting hole, the second mounting hole and the third mounting hole are respectively positioned on different sides of the mounting groove.
Furthermore, the device also comprises an auxiliary mounting hole and a plug, wherein the plug is arranged in the auxiliary mounting hole.
Furthermore, the auxiliary mounting holes comprise a first auxiliary mounting hole and a second auxiliary mounting hole, the first auxiliary mounting hole and the first mounting hole are located on the same side of the mounting groove, and the second auxiliary mounting hole and the third mounting hole are located on the same side of the mounting groove.
Further, the first mounting hole is disposed at one side of the mounting groove, and the second mounting hole is disposed at the other side of the mounting groove opposite to the first mounting hole.
3. Advantageous effects
Compared with the prior art, the utility model has the beneficial effects that:
(1) the graphite boat clamping point has the advantages of U-shaped clamping points and V-shaped clamping points in the prior art, and the opening of the clamping point is enlarged, so that a battery plate can easily fall into a gap of the clamping point and can slide into a U-shaped groove of the clamping point along the gradient of the clamping point. In addition, in the process, the depth of the groove cannot be raised even if the battery piece is bent and deformed, so that the raising and the winding plating are reduced.
(2) According to the graphite boat, the 3 mounting holes and the 2 auxiliary mounting holes are formed, the mounting holes are matched with the clamping points of the graphite boat, the auxiliary mounting holes are matched with the plugs, and the problem of high clamping point consumption in the prior art is solved. In addition, because the EL card point print is positioned at the card point position corresponding to the auxiliary mounting hole in the prior art, after the auxiliary mounting hole is plugged by the plug, the battery piece can not contact the card point, so that the contact type EL card point print at the position is eliminated.
Drawings
FIG. 1 is a schematic diagram of a graphite boat stuck point structure according to the present invention;
FIG. 2 is a schematic view of the structure of a graphite boat according to the present invention;
in the figure: 100. a central portion; 200. a bearing part; 300. an installation part; 310. a circular truncated cone; 311. a first table top; 312. a second table top; 313. a circular table top;
400. mounting grooves; 411. a first mounting hole; 412. a second mounting hole; 413. a third mounting hole; 421. a first auxiliary mounting hole; 422. and a second auxiliary mounting hole.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments; moreover, the embodiments are not relatively independent, and can be combined with each other according to needs, so that a better effect is achieved. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
For a further understanding of the present invention, reference is made to the following detailed description taken in conjunction with the accompanying drawings and examples.
Example 1
Referring to fig. 1, the graphite boat stuck point of the present invention includes a central portion 100, a bearing portion 200 and a mounting portion 300, wherein the bearing portion 200 and the mounting portion 300 are respectively symmetrically disposed along the central portion 100, specifically, the central portion 100 is vertically connected to the bearing portion 200, the bearing portion 200 is disposed through the center of the central portion 100, the bearing portion 200 is used for bearing the mounting portion 300, specifically, the mounting portion 300 is disposed at each of two ends of the bearing portion 200, and it should be noted that the mounting portion 300 is disposed so as to press the battery piece. The mounting part 300 of the present invention comprises a circular truncated cone body 310, the circular truncated cone body 310 comprises a first table surface 311 and a second table surface 312, the first table surface 311 is in contact with the bearing part 200, the diameter of the first table surface 311 is smaller than that of the second table surface 312, and the diameter of the first table surface 311 is larger than the width of the bearing part 200. The central portion 100 and the bearing portion 200 in this example are respectively cylindrical, that is, the end surface of the central portion 100 and the end surface of the bearing portion 200 are both circular; in addition, the diameter of the central portion 100 is larger than that of the carrier portion 200 in this example, so that the battery cell can be stably fixed.
Further, the vertical distance between the mounting part 300 and the corresponding central part 100 is 0.29-0.31 mm, and the vertical distance between the surface of the mounting part 300 and the surface of the corresponding central part 100 is 0.3mm in the present example, so that the battery piece can be conveniently clamped. In addition, the radius of the first table 311 is 0.25mm longer than the radius of the end face of the bearing part 200, namely, a groove is formed between the mounting part 300 and the central part 100, so that the battery piece can be clamped, the phenomenon of point clamping can be avoided, and the difficulty of placing the battery piece is greatly reduced.
It should be further noted that the first table surface 311 is connected to the second table surface 312 through the circular table surface 313, it should be noted that an included angle between the circular table surface 313 and the second table surface 312 is defined according to the size of the circular table body 310 and the first table surface 311, in this embodiment, the included angle between the circular table surface 313 and the second table surface 312 is 57 °, that is, the circular table surface 313 of the mounting portion 300 is a slope, and by increasing the opening of the clamping point, the battery piece can slide down along the circular table surface 313 into the U-shaped groove of the clamping point, and the depth of the groove cannot be raised even if the battery piece is bent and deformed, thereby avoiding the problems of warping and plating. In addition, the diameter of the second table-board 312 of the utility model is 7.50-8.5 mm, and the diameter of the second table-board 312 in this example is 7.99 mm.
The graphite boat clamping point has the advantages of U-shaped clamping points and V-shaped clamping points in the prior art, and the opening of the clamping point is enlarged, so that a battery piece can easily fall into a gap of the clamping point and can slide into a U-shaped groove of the clamping point along the gradient of the clamping point. In addition, in the process, the depth of the groove cannot be raised even if the battery piece is bent and deformed, so that the raising and the winding plating are reduced.
The graphite boat stuck point is applied to a graphite boat, and particularly, the graphite boat comprises a plurality of graphite sheets, wherein each graphite sheet comprises a plurality of mounting grooves 400, and the mounting grooves 400 are used for placing battery sheets. Further, a mounting hole is formed in the side of each mounting groove 400, and one of the graphite boat clamping points is mounted in each mounting hole. It should be noted that the mounting holes of the present invention include a first mounting hole 411, a second mounting hole 412 and a third mounting hole, and the first mounting hole 411, the second mounting hole 412 and the third mounting hole are respectively located at different sides of the mounting groove 400, so as to facilitate fixing the battery piece, specifically, the first mounting hole 411 of the present invention is located at one side of the mounting groove 400, the second mounting hole 412 is located at the other side of the mounting groove 400 opposite to the first mounting hole 411, and the third mounting hole 413 is mounted at the bottom side of the mounting groove 400, so as to facilitate mounting and fixing the battery piece.
It should be further noted that the graphite boat of the present invention further includes an auxiliary mounting hole and a plug, wherein the plug is mounted in the auxiliary mounting hole, such that the number of the clamping points can be reduced, and the production cost can be greatly reduced. The plug is a prior art component, the plug of this example being a small cylinder of 9mm diameter and 2mm or 3mm thickness. Regarding the auxiliary installation holes, the auxiliary installation holes of the present invention include a first auxiliary installation hole 421 and a second auxiliary installation hole 422, the first auxiliary installation hole 421 and the first installation hole 411 are located on the same side of the installation groove 400, and the second auxiliary installation hole 422 and the third installation hole 413 are located on the same side of the installation groove 400.
It is worth to be noted that 3 mounting holes and 2 auxiliary mounting holes are arranged, the mounting holes are matched with the graphite boat clamping points, the auxiliary mounting holes are matched with plugs, and the problem of high clamping point consumption in the prior art is solved. In addition, because the EL card point print is positioned at the card point position corresponding to the auxiliary mounting hole in the prior art, after the auxiliary mounting hole is plugged by the plug, the battery piece can not contact the card point, so that the contact type EL card point print at the position is eliminated.
The utility model has been described in detail hereinabove with reference to specific exemplary embodiments thereof. It will, however, be understood that various modifications and changes may be made without departing from the scope of the utility model as defined in the appended claims. The detailed description and drawings are to be regarded as illustrative rather than restrictive, and any such modifications and variations are intended to be included within the scope of the present invention as described herein. Furthermore, the background is intended to be illustrative of the state of the art as developed and the meaning of the present technology and is not intended to limit the scope of the utility model or the application and field of application of the utility model.

Claims (10)

1. A graphite boat stuck point is characterized by comprising a central part and a bearing part, wherein the central part is vertically connected with the bearing part, and the bearing part penetrates through the center of the central part; the both ends of bearing the weight of the portion are provided with the installation department respectively, and this installation department includes the round platform body, and this round platform body includes first mesa and second mesa, and first mesa contacts with the bearing the weight of the portion, and the diameter of first mesa is less than the diameter of second mesa, and the diameter of first mesa is greater than the width of bearing the weight of the portion.
2. The graphite boat stuck point of claim 1, wherein the bearing parts are symmetrically arranged along the central part.
3. The graphite boat stuck point of claim 2, wherein the perpendicular distance between the surface of the mounting portion and the corresponding surface of the central portion is 0.3 mm.
4. The graphite boat stuck point of claim 1, wherein the first table surface is connected with the second table surface through a circular table surface, and the included angle between the circular table surface and the second table surface is 57 degrees.
5. The graphite boat stuck point of any one of claims 1 to 4, wherein the central portion and the bearing portion are both cylindrical, and the diameter of the central portion is larger than that of the bearing portion.
6. A graphite boat comprising a plurality of graphite sheets, wherein each graphite sheet comprises a plurality of mounting grooves, a mounting hole is formed in the side edge of each mounting groove, and a graphite boat clamping point according to any one of claims 1 to 5 is mounted in each mounting hole.
7. The graphite boat of claim 6, wherein the mounting holes comprise a first mounting hole, a second mounting hole and a third mounting hole, the first mounting hole, the second mounting hole and the third mounting hole are respectively located on different sides of the mounting groove.
8. The graphite boat of claim 7, further comprising an auxiliary mounting hole and a plug, wherein the plug is mounted in the auxiliary mounting hole.
9. The graphite boat of claim 8, wherein the auxiliary mounting holes comprise a first auxiliary mounting hole and a second auxiliary mounting hole, the first auxiliary mounting hole and the first mounting hole are located on the same side of the mounting slot, and the second auxiliary mounting hole and the third mounting hole are located on the same side of the mounting slot.
10. The graphite boat according to any one of claims 7 to 9, wherein the first mounting hole is located at one side of the mounting groove, and the second mounting hole is located at the other side of the mounting groove opposite to the first mounting hole.
CN202123112292.2U 2021-12-13 2021-12-13 Graphite boat stuck point and graphite boat Active CN216663230U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202123112292.2U CN216663230U (en) 2021-12-13 2021-12-13 Graphite boat stuck point and graphite boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202123112292.2U CN216663230U (en) 2021-12-13 2021-12-13 Graphite boat stuck point and graphite boat

Publications (1)

Publication Number Publication Date
CN216663230U true CN216663230U (en) 2022-06-03

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ID=81796284

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202123112292.2U Active CN216663230U (en) 2021-12-13 2021-12-13 Graphite boat stuck point and graphite boat

Country Status (1)

Country Link
CN (1) CN216663230U (en)

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