CN220121806U - Tablet taking device - Google Patents

Abstract

The utility model relates to a tablet picker, comprising: the suction channel is arranged in the suction base body, one surface of the suction base body, which is used for being contacted with the silicon wafer, is a bearing surface, the bearing surface is provided with a broken hollow groove and a suction port, the broken hollow groove penetrates through the bearing surface, the suction port is positioned in the broken hollow groove, and the suction port is communicated with the suction channel. Therefore, when the negative pressure in the suction channel and at the suction port is overlarge, the air flow generated at the suction port is dispersed and dredged through the broken hollow groove, so that the negative pressure at the suction port is weakened, the phenomenon that the marks of a handle matrix are left on the surface of the silicon wafer due to overlarge negative pressure in the suction port and the broken hollow groove is avoided, the quality of the silicon wafer preparation process is ensured, and the yield of the solar cell can be effectively improved.

Description

Tablet taking device

Technical Field

The utility model relates to the technical field of solar cells, in particular to a sheet taking device.

Background

With the development of new energy technology, the crystalline silicon solar cell slice is rapidly developed, and the crystalline silicon solar cell slice is an electronic component capable of converting solar energy into electric energy. In general, crystalline silicon solar cells are generally produced by processes such as texturing, diffusion, coating, screen printing, and sintering. The coating process can reduce the recombination of carriers on the surface of the cell, so that the conversion efficiency of the crystalline silicon solar cell can be improved.

At present, when coating the surface of a silicon wafer, the silicon wafer needs to be placed in a graphite boat of PECVD (Plasma Enhanced Chemical Vapor Deposition) vacuum coating equipment for coating. In the process, a sucking disc component on a manipulator is used for sucking and transferring the silicon wafer. However, because the sucking disc is directly contacted with the silicon wafer, when the vacuum degree in the sucking disc is overlarge, sucking disc marks are easily formed on the surface of the silicon wafer, damage is caused to the battery piece, and the yield of the battery piece is affected.

Disclosure of Invention

Based on the above, it is necessary to provide a wafer extractor, which can avoid the occurrence of suction cup marks during the adsorption and transfer process of the silicon wafer, and can effectively improve the yield of the battery wafer.

A tablet dispenser comprising: the vacuum chuck comprises a chuck body, a chuck body and a chuck, wherein a chuck body is arranged on the chuck body, a chuck channel is arranged in the chuck body, one surface of the chuck body, which is used for being contacted with a silicon wafer, is a bearing surface, a broken groove and a suction port are arranged on the bearing surface, the broken groove penetrates through the bearing surface, the suction port is positioned in the broken groove, and the suction port is communicated with the chuck channel.

In the above-mentioned wafer extractor, because the suction channel is provided in the suction base body, the suction port is provided on the bearing surface of the suction base body, and the suction port is communicated with the suction channel, when the wafer extractor is used, the bearing surface of the wafer extractor can be directly attached to the silicon wafer, and then the negative pressure is formed at the suction port by reducing the air pressure in the suction channel, so that the silicon wafer is adsorbed on the bearing surface. In addition, because be equipped with broken empty slot on the loading surface, and broken empty slot runs through the loading surface, the suction inlet is located broken empty slot, therefore, when suction channel is interior and suction inlet department negative pressure is too big, accessible broken empty slot is with suction inlet department production air current dispersion dredging for suction inlet department's negative pressure weakens, avoid suction inlet and broken empty slot to lead to the silicon chip surface to leave the seal of taking out the hand base member because of the negative pressure is too big, the quality of silicon chip preparation process has been ensured, and then can effectively improve solar wafer's yield.

The technical scheme is further described as follows:

in one embodiment, the hollow breaking groove comprises a first groove body, the first groove body penetrates through the bearing surface, a plurality of first groove bodies are arranged at intervals, and each first groove body is internally provided with the suction port.

In one embodiment, the hollow breaking groove further comprises a second groove body, and the second groove body is communicated with each first groove body.

In one embodiment, the hollow breaking groove comprises a first groove body and a second groove body, the first groove body penetrates through the bearing surface, a plurality of first groove bodies are arranged at intervals relative to the first groove body, the second groove body is communicated with each first groove body, and a part of the first groove bodies are internally provided with the suction ports.

In one embodiment, the sheet taking device further comprises a support panel, the first groove body and the second groove body divide the bearing surface into a plurality of sub bearing surfaces, the support panel is provided with a plurality of sub bearing surfaces, and the support panel is respectively attached to the sub bearing surfaces in a one-to-one correspondence manner.

In one embodiment, the support panel is a glass panel.

In one embodiment, the handle base body comprises a handle head portion, a handle tail portion and a connecting portion, the connecting portion is connected between the handle head portion and the handle tail portion, the broken empty groove is located in the connecting portion, the edge of the handle head portion is arc-shaped, and the handle tail portion is provided with a clamping groove.

In one embodiment, the thickness of the handle head portion gradually decreases from the handle tail portion to the handle head portion.

In one embodiment, the handle head portion, the handle tail portion and the connecting portion are integrally formed.

In one embodiment, the drawer base is made of a ceramic material.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model.

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Moreover, the figures are not drawn to a 1:1 scale, and the relative sizes of various elements are merely exemplary in the figures, and are not necessarily drawn to true scale. In the drawings:

fig. 1 is a schematic perspective view of a film taker according to an embodiment of the present utility model.

Fig. 2 is a front view of a film taker according to an embodiment of the present utility model.

Fig. 3 is a rear view of the film taker in an embodiment of the present utility model.

Reference numerals illustrate:

10. a sheet taker; 110. a handle base; 111. a suction channel; 112. a bearing surface; 1121. a sub-bearing surface; 113. breaking the empty groove; 1131. a first tank body; 1132. a second tank body; 114. a suction port; 115. a handle head; 116. the tail part of the drawer; 1161. a clamping groove; 117. and a connecting part.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

Referring to fig. 1 to 3, an embodiment of the present utility model provides a tablet dispenser 10, comprising: the handle base 110 is pulled out. A suction passage 111 is provided in the suction base 110. The surface of the handle substrate 110 that is used to contact the silicon wafer is a bearing surface 112. The bearing surface 112 is provided with a breaking groove 113 and a suction port 114. The hollow groove 113 penetrates the bearing surface 112. The suction port 114 is located in the breaking groove 113, and the suction port 114 communicates with the suction passage 111.

In the above-mentioned wafer extractor 10, since the suction channel 111 is provided in the suction base 110, the suction port 114 is provided on the carrying surface 112 of the suction base 110, and the suction port 114 is in communication with the suction channel 111, when the wafer extractor 10 is used, the carrying surface 112 of the wafer extractor 10 can be directly attached to a silicon wafer, and then the negative pressure is formed at the suction port 114 by reducing the air pressure in the suction channel 111, so that the silicon wafer is adsorbed on the carrying surface 112. In addition, because the carrying surface 112 is provided with the broken hollow groove 113, the broken hollow groove 113 penetrates through the carrying surface 112, and the suction port 114 is positioned in the broken hollow groove 113, when the negative pressure in the suction channel 111 and at the suction port 114 is overlarge, the air flow generated at the suction port 114 can be dispersed and dredged through the broken hollow groove 113, so that the negative pressure at the suction port 114 is weakened, the phenomenon that the marks of the handle substrate 110 are left on the surface of a silicon wafer due to overlarge negative pressure in the suction port 114 and the broken hollow groove 113 is avoided, the quality of the silicon wafer preparation process is ensured, and the yield of solar cells can be effectively improved.

In this embodiment, as shown in fig. 3, the suction passage 111 is shown by a broken line.

Referring to fig. 1 and 2, in an embodiment, the breaking groove 113 includes a first groove body 1131, and the first groove body 1131 penetrates the bearing surface 112. The first grooves 1131 are provided with a plurality of first grooves 1131, and the first grooves 1131 are arranged at intervals. And each first groove 1131 is provided with a suction port 114 therein. Because each first groove 111 can generate the same negative pressure through the corresponding suction port 114 when the pressure in the suction channel 111 is reduced, the first groove can adsorb the silicon wafer, and thus, the adsorption area is increased.

Specifically, the handle base 110 has a strip structure, and the first groove 1131 penetrates the bearing surface 112 along the width direction of the handle base 110. The first grooves 1131 are disposed at equal intervals along the length direction of the handle base 110. Therefore, each silicon wafer can be adsorbed by the plurality of first groove bodies 1131 at the same time, so that the overall suction force of the silicon wafer is more uniform, the silicon wafer can be firmly sucked, and the situation that the silicon wafer falls off in the moving process of the wafer taking device 10 is effectively avoided.

Further, referring to fig. 1 and 2, in an embodiment, the breaking groove 113 further includes a second groove body 1132. The second grooves 1132 communicate with each of the first grooves 1131. Thus, when negative air pressure is generated in the suction channel 111, uniformity of air pressure in each first groove 1131 can be improved.

Specifically, in the present embodiment, the second groove 1132 extends along the length direction of the handle base 110.

Alternatively, in another embodiment, as shown in fig. 1 and 2, the break-away groove 113 includes a first groove body 1131 and a second groove body 1132. The first grooves 1131 penetrate the bearing surface 112, the first grooves 1131 are provided with a plurality of first grooves 1131, and the first grooves 1131 are arranged at opposite intervals. The second grooves 1132 are communicated with the first grooves 1131, and suction ports 114 are arranged in part of the first grooves 1131. Thus, the suction ports 114 are not required to be arranged in each first groove body 1131, and the uniformity of the adsorption of the broken groove 113 to the silicon wafer is ensured.

Alternatively, in another embodiment, the shape of the breaking groove 113 may be "king" shape, "earth" shape, "I" shape, "X" shape, or "rice" shape, etc. as a whole.

Because the grip base 110 is weak in abrasion resistance, it tends to become rough after a period of use, and the worn grip base 110 may generate particulate impurities. To improve wear of the drawer base 110, in one embodiment, the film remover 10 further includes a support panel (not shown). The first and second grooves 1131 and 1132 divide the bearing surface 112 into a plurality of sub-bearing surfaces 1121. The support panels are provided with a plurality of support panels, and the support panels are respectively attached to the plurality of sub-bearing surfaces 1121 in a one-to-one correspondence manner. In this way, the support panel can effectively avoid abrasion of each sub-bearing surface 1121 of the handle base 110, so that the situation that the handle base 110 scrapes the silicon wafer when absorbing the silicon wafer is avoided, and the transfer quality of the silicon wafer is improved.

Specifically, in the present embodiment, the support panel is a glass panel. By arranging the wear-resistant glass panel, the handle base 110 can be protected, and the service life of the handle base 110 can be effectively prolonged.

Referring to fig. 1 and 2, in one embodiment, the handle base 110 includes a handle head 115, a handle tail 116, and a connection 117. The connecting portion 117 is connected between the handle head 115 and the handle tail 116, and the breaking groove 113 is located at the connecting portion 117. And the edge shape of the handle head 115 is arc-shaped. The tail 116 of the drawer is provided with a clamping groove 1161. The edge of the handle head 115 is arranged into an arc-shaped structure, so that the probability that the surface of the silicon wafer is scratched when the wafer taking and placing device 10 takes and places the silicon wafer is overcome, the transfer quality of the silicon wafer is ensured, and the yield of solar cells is improved. Meanwhile, the clamping groove 1161 arranged at the tail 116 of the drawer can directly fix the wafer taking device 10 on the mechanical arm, so that the mechanical arm can automatically transfer the silicon wafer by using the wafer taking device 10.

It should be noted that, the mechanical arm should be provided with a clamping portion, and the clamping groove 1161 is in clamping fit with the clamping portion. The convenience of the mounting of the sheet taking device 10 is improved in a clamping manner, and the sheet taking device is convenient to rapidly mount on or dismount from the mechanical arm.

Specifically, in the present embodiment, the hand grip 115, the hand grip 116, and the connection 117 are integrally formed. Thus, the overall structural strength of the handle base 110 can be improved, and the service life of the handle base 110 can be prolonged.

Referring to fig. 1, in one embodiment, the thickness of the handle head 115 gradually decreases from the handle tail 116 to the handle head 115. When transferring a silicon wafer using the wafer taker 10, the wafer taker 10 is usually inserted under the silicon wafer, and negative air pressure is generated in the suction passage 111 to suck and transfer the silicon wafer. The thickness of the handle head 115 is set to gradually decrease from the handle tail 116 to the handle head 115, which is advantageous for the quick and accurate insertion of the handle base 110 under the silicon wafer for subsequent transfer.

In one embodiment, the drawer base 110 is made of a ceramic material. Compared with the handle base 110 made of plastic, the handle base 110 made of ceramic material can more effectively ensure the yield index of the silicon wafer.

In the description of the present utility model, it should be understood that, if any, these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., are used herein with respect to the orientation or positional relationship shown in the drawings, these terms refer to the orientation or positional relationship for convenience of description and simplicity of description only, and do not indicate or imply that the apparatus or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the utility model.

Furthermore, the terms "first," "second," and the like, if any, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the terms "plurality" and "a plurality" if any, mean at least two, such as two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly. For example, the two parts can be fixedly connected, detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, the meaning of a first feature being "on" or "off" a second feature, and the like, is that the first and second features are either in direct contact or in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that if an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. If an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein, if any, are for descriptive purposes only and do not represent a unique embodiment.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims (10)

1. A tablet dispenser, comprising: the vacuum chuck comprises a chuck body (110), wherein a suction channel (111) is arranged in the chuck body (110), one surface of the chuck body (110) which is used for being contacted with a silicon wafer is a bearing surface (112), a broken hollow groove (113) and a suction port (114) are arranged on the bearing surface (112), the broken hollow groove (113) penetrates through the bearing surface (112), the suction port (114) is positioned in the broken hollow groove (113), and the suction port (114) is communicated with the suction channel (111).

2. The tablet dispenser according to claim 1, wherein the breaking groove (113) comprises a first groove body (1131), the first groove body (1131) penetrates through the bearing surface (112), the first groove body (1131) is provided with a plurality of first groove bodies (1131) at intervals, and each first groove body (1131) is internally provided with the suction port (114).

3. The tablet dispenser of claim 2, wherein the break-out slot (113) further comprises a second slot (1132), the second slot (1132) communicating with each of the first slots (1131).

4. The sheet picker according to claim 1, wherein the breaking groove (113) comprises a first groove body (1131) and a second groove body (1132), the first groove body (1131) penetrates through the bearing surface (112), the first groove body (1131) is provided with a plurality of first groove bodies (1131) which are oppositely arranged at intervals, the second groove body (1132) is communicated with each first groove body (1131), and part of the first groove bodies (1131) are internally provided with the suction ports (114).

5. The sheet picker according to claim 3 or 4, further comprising a support panel, wherein the first groove body (1131) and the second groove body (1132) divide the bearing surface (112) into a plurality of sub bearing surfaces (1121), the support panel is provided with a plurality of support panels, and the plurality of support panels are respectively attached to the plurality of sub bearing surfaces (1121) in a one-to-one correspondence manner.

6. The sheet picker of claim 5 wherein the support panel is a glass panel.

7. The sheet picker according to any one of claims 1 to 4, wherein the drawer base (110) comprises a drawer head (115), a drawer tail (116) and a connecting portion (117), the connecting portion (117) is connected between the drawer head (115) and the drawer tail (116), the breaking groove (113) is located in the connecting portion (117), and the edge of the drawer head (115) is arc-shaped, and the drawer tail (116) is provided with a clamping groove (1161).

8. The film taker according to claim 7, wherein the thickness of the drawer head (115) decreases gradually from the drawer tail (116) to the drawer head (115).

9. The film taker according to claim 7, wherein the drawer head (115), the drawer tail (116) and the connecting portion (117) are integrally formed.

10. The tablet dispenser of any one of claims 1-4, wherein the drawer base (110) is made of a ceramic material.