CN105463491B - Bearing jig - Google Patents
Bearing jig Download PDFInfo
- Publication number
- CN105463491B CN105463491B CN201410447156.4A CN201410447156A CN105463491B CN 105463491 B CN105463491 B CN 105463491B CN 201410447156 A CN201410447156 A CN 201410447156A CN 105463491 B CN105463491 B CN 105463491B
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- Prior art keywords
- those
- bearing fixture
- connectors
- objects
- fixture
- Prior art date
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- 238000005406 washing Methods 0.000 claims description 16
- 239000006210 lotion Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 6
- 238000005554 pickling Methods 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a bearing jig which is suitable for being inserted by a plurality of objects, wherein the objects comprise a plurality of plate bodies. The bearing jig comprises two end plates and a plurality of connecting pieces. The two end plates are spaced apart from each other by a distance. The two ends of each connecting piece are respectively connected with the two end plates. When the objects are inserted into the bearing jig, the connecting pieces support the side edges of the plate bodies so that the plate bodies can stand on the bearing jig at a specific angle.
Description
Technical field
The present invention relates to a kind of bearing fixture, and it is suitable to plant for object more particularly to one kind and makes object with specific angle
Spend the bearing fixture erected.
Background technology
Chemical vapor deposition manufacture craft and high temperature thermal diffusion manufacture craft have been widely used in the semiconductor industry,
The operation temperature of above-mentioned manufacture craft is about between 400 degree to 1200 degree Celsius of scope, during manufacture craft, part
Compound can deposit film forming on the part (being, for example, equal backing) of equipment, necessary when the film layer on part reaches certain thickness
These parts are pulled down and maintained.The mode of maintenance is that these parts are directly swung in into rinse bath, is removed in a manner of pickling
The film layer being attached on these parts.
However, because current rinse bath general can not adapt to variously-shaped part, and the regional area of part occurs
It can not clean clean.Current processing mode is overcome with secondary cleaning, but this mode quite wastes the production capacity of rinse bath simultaneously
And add the waste of washing lotion.
The content of the invention
It is an object of the invention to provide a kind of bearing fixture, and it can be such that object (being, for example, equal backing) is put with special angle
It is placed in rinse bath, to lift the probability that object can be cleaned in rinse bath, and the profit of the space in rinse bath can be improved
With rate.
For the above-mentioned purpose, a kind of bearing fixture of the invention, suitable for being planted for multiple objects, these objects include multiple
Plate body.Bearing fixture includes two end plates and multiple connectors.Two end plates are spaced a distance.The both ends of each connector connect respectively
It is connected to two end plates.When these objects are inserted in bearing fixture, connector supports the lateral margin of these plate bodys, so that those plate body energy
It is enough to be erected with special angle in the bearing fixture.
In one embodiment of this invention, these above-mentioned connectors are respectively multiple telescopic connectors, with adjustment
The distance between two end plates.
In one embodiment of this invention, above-mentioned bearing fixture also includes a moving member, is movably configured at wherein
The inner side of one end plate, one of object includes a plate body and protrudes from multiple hollow tubes of plate body, when this object is inserted
When being placed in bearing fixture, at least one of these bodys is adapted to secure to moving member, with by moving member relative to corresponding end
Plate is mobile and adjusts the angle of inclination of these hollow tubes.
In one embodiment of this invention, above-mentioned each end plate includes a grip part.
In one embodiment of this invention, above-mentioned bearing fixture also includes multiple location divisions, is adjustably arranged at this
On a little connectors, to fix the relative position between these plate bodys.
In one embodiment of this invention, these above-mentioned plate bodys are rounded, the diameters of these plate bodys about at 12 inches extremely
Between 15 inches, and the length of these connectors is about between 60 centimetres to 80 centimetres.It should be noted that plate body diameter is with being connected
The size of both parts, it can also make appropriate variation according to the needs of user, to meet different demands, however it is not limited to above-mentioned size
Numerical value.
In one embodiment of this invention, above-mentioned bearing fixture also includes a fixture, between two end plates and this
A little connectors are arranged in fixture, to fix the relative position between these connectors.
In one embodiment of this invention, when these plate bodys are inserted in the bearing fixture, these plate bodys are substantial parallel
In two end plates.
In one embodiment of this invention, these above-mentioned objects be respectively be used in chemical vapor deposition manufacture craft or
It is multiple equal backings of high temperature thermal diffusion manufacture craft, and the material of these objects includes quartz or carborundum.
In one embodiment of this invention, above-mentioned bearing fixture is placed on a rinse bath with these objects suitable for together with
It is interior, and the washing lotion of rinse bath fits along the gap that the direction of the normal perpendicular to these plate bodys is flowed between these objects.
Object is supported by being connected to these connectors of two end plates based on above-mentioned, of the invention bearing fixture, so that
Object can be plugged on bearing fixture with special angle (be, for example, upright), when wanting cleaning objects, as long as object together with
Bearing fixture is put into rinse bath together, object can be made to maintain special angle in rinse bath, the washing lotion of rinse bath just being capable of edge
The gap that the direction of the normal perpendicular to plate body is flowed between these objects, and improves the cleaned clean level of object.And
And because object is inserted in a manner of upright on the bearing fixture of the present invention, and being taken up space in rinse bath is reduced,
And then lift the space availability ratio in rinse bath.
For features described above of the invention and advantage can be become apparent, special embodiment below, and it is attached appended by cooperation
Figure is described in detail below.
Brief description of the drawings
Fig. 1 is a kind of schematic diagram of bearing fixture of one embodiment of the invention；
Fig. 2 is the schematic diagram at Fig. 1 another visual angle；
Fig. 3 is the schematic diagram for the bearing fixture that object inserts Fig. 1；
Fig. 4 is the schematic diagram at Fig. 3 another visual angle；
Fig. 5 inserts after Fig. 1 bearing fixture the schematic diagram for being placed into rinse bath together for object.
Symbol description
10：Object
12：Plate body
14：Hollow tube
20：Rinse bath
100：Bearing fixture
110：End plate
112：Grip part
120：Connector
130：Location division
140：Fixture
150：Moving member
Embodiment
Fig. 1 is a kind of schematic diagram of bearing fixture according to one embodiment of the invention.Fig. 2 is Fig. 1 another visual angle
Schematic diagram.Fig. 3 is the schematic diagram for the bearing fixture that object inserts Fig. 1.Fig. 4 is the schematic diagram at Fig. 3 another visual angle.Fig. 5 is thing
Part inserts after Fig. 1 bearing fixture the schematic diagram for being placed into rinse bath together.
Fig. 1 to Fig. 5 is referred to, the bearing fixture 100 of the present embodiment is suitable to plant for multiple objects 10, so that these objects
10 can be erected with special angle in bearing fixture 100, afterwards, when these objects 10 as bearing fixture 100 is placed together
When in a rinse bath 20, object 10 can maintain certain angle in rinse bath 20, so that the washing lotion energy in rinse bath 20
It is enough more fully to clean to object 10.
In the present embodiment, these objects 10 are, for example, to be used in chemical vapor deposition manufacture craft or high temperature thermal diffusion
Multiple equal backings of manufacture craft.The material of object 10 includes quartz or carborundum.As shown in Figures 3 to 5, these objects 10
Including multiple plate bodys 12, plate body 12 is rounded, and the diameter of plate body 12 is about between 12 inches to 15 inches, one of object 10
Including a plate body 12 and protrude from multiple hollow tubes 14 of plate body 12.Certainly, the species of object 10, material, size, shape
With plate body diameter, it can also make appropriate variation according to the needs of user, to meet different demands, not with the above-mentioned system that is limited.
In addition, in the present embodiment, rinse bath 20 is a descaling bath, washing lotion includes nitric acid, sulfuric acid or hydrofluoric acid etc., passed through
The mode of pickling is removed to be deposited on object 10 after chemical vapor deposition manufacture craft or high temperature thermal diffusion manufacture craft
Film layer.It should be noted that in order to be clearly seen bearing fixture 100 and configuration of the object 10 in rinse bath 20, Fig. 5 is specially hidden
The first half of rinse bath 20 is hidden, only symbolically illustrates the regional area of rinse bath 20.
In order that bearing fixture 100 can also bear the process of pickling, in the present embodiment, the material of bearing fixture 100
Including Teflon, it has the speciality of acid and alkali-resistance environment.Certainly, the material category of bearing fixture 100 is not limited thereto system, only
The material of the environment in rinse bath 20 can be born.
Fig. 1 is gone back to, bearing fixture 100 includes two end plates 110 and multiple connectors 120.Two end plates 110 are spaced one
Distance.The both ends of each connector 120 are connected to two end plates 110.In the present embodiment, the shape of end plate 110 is fallen close to one
That puts is trapezoidal, and the quantity of connector 120 is four, and four connectors 120 are respectively connecting to the edge of end plate 110 by subapical
Position.Certainly, in other examples, the shape of end plate 110 can also be semicircle or other shapes, connector 120
Quantity and link position are also not limited system.
In addition, bearing fixture 100 also includes multiple location divisions 130, it is arranged on these connectors 120.Carrying is made to control
When having 100, designer can first measure the size of the object 10 of required carrying and required spacing in advance, and make location division 130 can be with being connected
Part 120 is made in a manner of integrally formed.Or location division 130 can also be movably disposed on connector 120, root
The position between location division 130 is adjusted according to actually the distance between object 10.
As shown in Figures 3 to 5, in the present embodiment, object 10 divides for three groups, and two groups these objects 10 are four wherein
The individual plate body 12 being stacked, a distance has been respectively separated between plate body 12, this four objects 10 of each group are plugged on two-phase together
Between adjacent location division 130.Another group of object 10 is has three plate bodys 12 and four protrude from a wherein plate body 12
Blank pipe body 14, between these objects 10 of this group similarly and by plate body 12 are plugged on two adjacent location divisions 130, with
Position between fixation.
When these objects 10 are inserted in bearing fixture 100, connector 120 supports the lateral margin of these plate bodys 12, so that plate
Body 12 can erect bearing fixture 100 with special angle (being, for example, 90 degree), and to control when these plate bodys 12 are inserted in carrying
When having 100, these plate bodys 12 can be erected with the angle substantially parallel to two end plates 110.
In existing cleaning way, object 10 is directly placed in rinse bath 20.In more detail, the number of bottom
Individual object 10 is so that on the lower surface of whole plate body 12 contact rinse bath 20, this space configuration to be only capable of in a rinse bath 20
Several objects 10 are placed, other objects 10 are stacked in again on the plate body 12 contacted with the lower surface of rinse bath 20, and these are each other
Overlapping plate body 12 is parallel with the lower surface of rinse bath 20, washing lotion from the following table of rinse bath 20 spray upwardly when, part washing lotion
May be covered by the plate body 12 positioned at bottom, may not can hydro-peening to plate body 12 above.
On the contrary, in the present embodiment, as shown in figure 5, because object 10 is (namely close to vertical in a manner of upright
Directly in the angle of the lower surface of rinse bath 20) it is inserted on bearing fixture 100, when object 10 is put together with bearing fixture 100
Put in rinse bath 20, this configuration is not only able in the confined space of rinse bath 20, places more multigroup object 10, and is lifted clear
Space availability ratio in washing trough 20.When object 10 is placed in rinse bath 20 to carry out pickling together with bearing fixture 100
Cheng Shi, because the washing lotion of rinse bath 20 can flow upwards out from Fig. 5 lower surface, the plate body 12 of object 10 is to be almost 90 degree of angle
Degree is erected in the underlying surfaces of rinse bath 20, and allows the washing lotion of rinse bath 20 along the normal perpendicular to these plate bodys 12
The gap that flows between these objects 10 of direction, and washing lotion can be made to touch whole object 10, be cleaned with increasing object 10
Clean level, and then provide preferable hydro-peening effect.
It is noted that in the present embodiment, in order that bearing fixture 100 can be applied to carry a greater variety of things
Part 10, these connectors 120 are respectively multiple telescopic connectors, that is to say, that the distance between two end plates 110 can be adjusted
It is whole.When the quantity of object 10 is more, or hollow tube 14 length it is longer when, still be able to be placed in bearing fixture 100.
In the present embodiment, the length of these connectors 120 is about between 60 centimetres to 80 centimetres, but the length range of connector 120
It is not limited thereto system.
In addition, go back to Fig. 1, in the present embodiment, each end plate 110 includes a grip part 112, two in two end plates 110
Hands grasping of the grip part 112 for operator, to lift bearing fixture 100 and these objects 10 disposed thereon.Compare
When not having bearing fixture 100 in the past, operator needs to now only need these objects 10 single-handedly to move to rinse bath 20
These objects 10 are first arranged on bearing fixture 100, then move into rinse bath 20 together, it is more convenient in operation.
In addition, can have more preferably support strength to provide these connectors 120, in the present embodiment, carrying is controlled
Tool 100 also includes a fixture 140, and between two end plates 110 and these connectors 120 are arranged in fixture 140, with fixation
Relative position between these connectors 120.
Further, since one of object 10 has four hollow tubes 14, in order to avoid washing lotion remains in after cleaning
In hollow tube 14, in the present embodiment, bearing fixture 100 also includes a moving member 150, can be configured at up or down wherein
The inner side of one end plate 110.When the plate body 12 of the object 10 with hollow tube 14 is inserted in bearing fixture 100, in these
At least one of blank pipe body 14 is adapted to secure to (in the present embodiment, two hollow tubes 14 of closer lower section of moving member 150
It is fixed to moving member 150), to be moved up and down by moving member 150 relative to corresponding end plate 110 to adjust these hollow tubes
14 angle of inclination.Consequently, it is possible to which these hollow tubes 14 just there can be a little inclination angle, and enable the washing lotion after cleaning
Enough outflows, to avoid hollow tube 14 that the problem of residual sour occurs.
In summary, bearing fixture of the invention supports object by being connected to these connectors of two end plates, so that
Object can be plugged on bearing fixture with special angle (be, for example, upright), when wanting cleaning objects, as long as object together with
Bearing fixture is put into rinse bath together, object can be made to maintain special angle in rinse bath, the washing lotion of rinse bath just being capable of edge
The gap that the direction of the normal perpendicular to plate body is flowed between these objects, and improves the cleaned clean level of object.And
And because object is inserted in a manner of upright on the bearing fixture of the present invention, and being taken up space in rinse bath is reduced,
And then lift the space availability ratio in rinse bath.In addition, the connector adjustable length of the bearing fixture of the present invention, with response to not
With the size of species object.In addition, in order that the object with hollow tube can be cleaned and avoid residual acid, can pass through
At least one body is fixed on moving member, moved up and down by moving member relative to corresponding end plate to adjust these hollow tubes
The angle of inclination of body.
Although the present invention is disclosed with reference to above example, but it is not limited to the present invention, any affiliated technology
Have usually intellectual in field, without departing from the spirit and scope of the present invention, a little change and retouching can be made, therefore this hair
Bright protection domain should be defined by what the claim enclosed was defined.
Claims (9)
1. a kind of bearing fixture, suitable for being planted for multiple objects, those objects include multiple plate bodys, and the bearing fixture includes：
Two end plates, it is spaced a distance；
Multiple connectors, respectively the both ends of the connector be connected to the two end plates；And
Moving member, the inner side of one of them end plate is movably configured at, wherein
When those objects are inserted in the bearing fixture, those connectors support the lateral margin of those plate bodys, so that those plate body energy
Enough to be erected with special angle in the bearing fixture, one of them object includes the plate body and protrudes from the multiple of the plate body
Hollow tube, when the object is inserted in the bearing fixture, at least one of those bodys is adapted to secure to the moving member, with logical
Cross the moving member and adjust the angle of inclination of those hollow tubes relative to the movement of the corresponding end plate.
2. bearing fixture as claimed in claim 1, wherein those connectors are respectively multiple telescopic connectors, with adjustment
The distance between the two end plates.
3. bearing fixture as claimed in claim 1, wherein respectively the end plate includes grip part.
4. bearing fixture as claimed in claim 1, in addition to：
Multiple location divisions, adjustably it is arranged on those connectors, to fix the relative position between those plate bodys.
5. bearing fixture as claimed in claim 1, in addition to：
Fixture, between the two end plates and those connectors are arranged in the fixture, to fix between those connectors
Relative position.
6. bearing fixture as claimed in claim 1, wherein those plate bodys are rounded, the diameter of those plate bodys is at 12 inches to 15
Between inch, and the length of those connectors is between 60 centimetres to 80 centimetres.
7. bearing fixture as claimed in claim 1, wherein when those plate bodys are inserted in the bearing fixture, those plate bodys essence
On parallel to the two end plates.
8. bearing fixture as claimed in claim 1, wherein those objects are respectively to be used in chemical vapor deposition manufacture craft
Or multiple equal backings of high temperature thermal diffusion manufacture craft, and the material of those objects includes quartz or carborundum.
9. bearing fixture as claimed in claim 1, the wherein bearing fixture and those objects be suitable to together with to be placed on one clear
In washing trough, and the washing lotion of the rinse bath fit along the normal perpendicular to those plate bodys direction flow between those objects between
Gap.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103128632 | 2014-08-20 | ||
| TW103128632A TWI481737B (en) | 2014-08-20 | 2014-08-20 | Bearing fixture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105463491A CN105463491A (en) | 2016-04-06 |
| CN105463491B true CN105463491B (en) | 2017-12-22 |
Family
ID=53441555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410447156.4A Active CN105463491B (en) | 2014-08-20 | 2014-09-04 | Bearing jig |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5986170B2 (en) |
| CN (1) | CN105463491B (en) |
| TW (1) | TWI481737B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109737142B (en) * | 2018-12-20 | 2020-06-23 | 兰州空间技术物理研究所 | Solid lubrication bearing inner ring protection device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06112176A (en) * | 1992-06-26 | 1994-04-22 | Nippon Steel Corp | Wafer holder for cleaning and etching |
| JP2004158726A (en) * | 2002-11-07 | 2004-06-03 | Kobe Steel Ltd | Semiconductor element with heat spreader and semiconductor package |
| JP2006261347A (en) * | 2005-03-16 | 2006-09-28 | Shimada Phys & Chem Ind Co Ltd | Substrate holding structure, substrate treatment method, and substrate conveying method |
| CN202398591U (en) * | 2011-12-30 | 2012-08-29 | 中芯国际集成电路制造(上海)有限公司 | Wafer cleaning device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8303602A (en) * | 1983-10-19 | 1985-05-17 | Johannes Hendrikus Leonardus H | PLASMA-STIMULATED CHEMICAL VAPOR DEVICE, IN PARTICULAR A SUBSTRATE SUPPORT AND ELECTRODE ARRANGEMENT FOR IT AND ITS COMPONENTS. |
| US5895549A (en) * | 1994-07-11 | 1999-04-20 | Applied Komatsu Technology, Inc. | Method and apparatus for etching film layers on large substrates |
| US8251012B2 (en) * | 2005-03-01 | 2012-08-28 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and semiconductor device producing method |
| JP2011258733A (en) * | 2010-06-09 | 2011-12-22 | Casio Comput Co Ltd | Semiconductor device and manufacturing method of semiconductor device |
-
2014
- 2014-08-20 TW TW103128632A patent/TWI481737B/en active
- 2014-09-04 CN CN201410447156.4A patent/CN105463491B/en active Active
- 2014-11-13 JP JP2014230930A patent/JP5986170B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06112176A (en) * | 1992-06-26 | 1994-04-22 | Nippon Steel Corp | Wafer holder for cleaning and etching |
| JP2004158726A (en) * | 2002-11-07 | 2004-06-03 | Kobe Steel Ltd | Semiconductor element with heat spreader and semiconductor package |
| JP2006261347A (en) * | 2005-03-16 | 2006-09-28 | Shimada Phys & Chem Ind Co Ltd | Substrate holding structure, substrate treatment method, and substrate conveying method |
| CN202398591U (en) * | 2011-12-30 | 2012-08-29 | 中芯国际集成电路制造(上海)有限公司 | Wafer cleaning device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201608046A (en) | 2016-03-01 |
| JP2016046504A (en) | 2016-04-04 |
| CN105463491A (en) | 2016-04-06 |
| JP5986170B2 (en) | 2016-09-06 |
| TWI481737B (en) | 2015-04-21 |
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Effective date of registration: 20190627 Address after: Hsinchu Science Park, Taiwan, China Patentee after: Lijing Jicheng Electronic Manufacturing Co., Ltd. Address before: Hsinchu Science Park, Taiwan, China Patentee before: Powerflash Technology Corporation |