CN206806305U - A kind of diffusing quartz boat - Google Patents
A kind of diffusing quartz boat Download PDFInfo
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- CN206806305U CN206806305U CN201720777043.XU CN201720777043U CN206806305U CN 206806305 U CN206806305 U CN 206806305U CN 201720777043 U CN201720777043 U CN 201720777043U CN 206806305 U CN206806305 U CN 206806305U
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- quartz
- diffusing
- neck
- separation
- quartz boat
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Abstract
The utility model discloses a kind of diffusing quartz boat, including base, more quartz rods being vertically set on the base and the top plate positioned at the quartz rod upper end, multiple necks are radially offered on the quartz rod, the separation of the two neighboring neck is different, separation positioned at the neck in the quartz rod centre position is maximum, and the separation of the neck is gradually reduced from the quartz rod centre position to the both ends of the quartz rod.A kind of diffusing quartz boat of the present utility model sets the separation of quartz rod neck to be gradually reduced from centre to both ends, so that the source flux that silicon chip touches gradually reduces, square resistance is gradually increased to consistent with the silicon chip in centre position；In the case of identical boiler tube internal diameter, reduce the separation of neck, the quantity of neck is added, single quartz boat is carried more silicon chips, so a kind of diffusing quartz boat of the present utility model not only can obtain uniform square resistance but also can improve the yield of diffusing procedure.
Description
Technical field
The utility model belongs to solar battery sheet manufacturing technology field, and in particular to a kind of diffusing quartz boat.
Background technology
As photovoltaic technology constantly develops, the solar cell as the semiconductor devices converted solar energy into electrical energy
Product has obtained quick exploitation.
In the crystal silicon solar batteries technological process of production, diffusion technique process need to be passed through and form PN junction, this technical process needs
Want high cleanliness factor and prolonged high temperature TongYuan process.The quartz boat that diffusion technique uses at present is mostly horizontal positioned, quartz
Multiple uniformly separation d neck is offered on the quartz rod of boat（As shown in Figure 1）, the silicon chip after cleaning is inserted vertically into neck
In, place into and technique is diffused in diffusion furnace.The defects of this method, is the silicon chip of diverse location from furnace wall heater strip
Cause temperature also different apart from difference, air-flow it is uneven make it that carrier gas carries phosphorus source it is also uneven, cause silicon chip square electric
Hinder uneven.
For it is such the problem of, those skilled in the art expects the spacing of neck being adjusted.Such as Chinese application number
For 201320629905.6, entitled " a kind of diffusing quartz boat structure ", by changing the spacing size of diffusing quartz boat, make stone
Silicon chip on Ying Zhou, from fire door to stove in, the sheet resistance in piece between piece is more uniform.But have a disadvantage in that and on the one hand use this
The horizontal positioned quartz boat production capacity of structure is relatively low, even if on the other hand quartz boat is changed to place vertically, although production capacity can be improved,
But in diffusion technique running, still can be nearest from the heater strip of furnace wall due to the silicon chip of top and bottom, temperature
Highest, the middle silicon temperature to both ends is caused to gradually rise, after diffusion technique terminates, the square electricity of the silicon chip of centre to both ends
Resistance gradually reduces.
The content of the invention
In view of this, in order to overcome prior art the defects of, the purpose of this utility model are to provide a kind of diffusing quartz boat,
The separation of quartz rod neck is set to be gradually reduced from centre to both ends, so that the source flux that silicon chip touches gradually reduces,
Square resistance is gradually increased to consistent with the silicon chip in centre position；And reduce the separation of neck, relative increase neck
Quantity, single quartz boat is set to carry more silicon chips.
In order to achieve the above object, the utility model uses following technical scheme：
A kind of diffusing quartz boat, including base, more quartz rods being vertically set on the base and positioned at described
The top plate of quartz rod upper end, multiple necks, the separation of the two neighboring neck are radially offered on the quartz rod
Difference, the separation positioned at the neck in the quartz rod centre position is maximum, and the separation of the neck is from the quartz
Bar centre position is gradually reduced to the both ends of the quartz rod.Top plate can be set to it is parallel with bottom plate, to increase the steady of quartz boat
It is qualitative.
Preferably, the separation is up to 3.5mm.
It is further preferred that the described amplitude such as be gradually decreased as uniformly reduces.
It is further preferred that the amplitude such as described is uniformly reduced to uniformly reduce by amplitudes such as 0.01mm gradients, reduce
Amplitude can also be adjusted according to actual conditions.
Preferably, the quartz rod is connected with the base and the top plate by way of welding.
Preferably, described base can be set to the shape being engaged with diffusion furnace bogey, to facilitate automation
Production, as base can be set to it is U-shaped.
Preferably, described quartz rod is four, is symmetrically arranged on the both sides of the base.
Preferably, described quartz boat also includes the handle being arranged between two quartz rods of described base the same side
Hand.
It is further preferred that described handle has outwardly extension, quartz boat of conveniently taking does not touch quartz again
Bar.
It is further preferred that the base, the quartz rod, the top plate and the handle are quartz material.
Compared with prior art, it is of the present utility model to be beneficial in that：A kind of diffusing quartz boat of the present utility model is set
The separation for putting quartz rod neck is gradually reduced from centre to both ends, so that the source flux that silicon chip touches gradually reduces, side
Block resistance is gradually increased to consistent with the silicon chip in centre position；In the case of identical boiler tube internal diameter, between the groove for reducing neck
The quantity of neck away from, relative increase, allows single quartz boat to carry more silicon chips.So one kind of the present utility model
Diffusing quartz boat not only can obtain uniform square resistance but also can improve the yield of diffusing procedure.
Brief description of the drawings
Fig. 1 is the schematic diagram of quartz boat separation in the prior art；
Fig. 2 is the stereogram of diffusing quartz boat of the present utility model；
Fig. 3 is the schematic diagram of diffusing quartz boat separation of the present utility model；
Wherein：Base -1, quartz rod -2, top plate -3, handle -4, extension -41.
Embodiment
The utility model preferred embodiment is described in detail below in conjunction with the accompanying drawings.
Referring to the drawings 2-3, a kind of diffusing quartz boat of the present embodiment, including base 1, be vertically set on base 1 four
Root quartz rod 2 and include symmetrically setting positioned at the upper end of quartz rod 2 and with the top plate 3 of 1 parallel setting of base, four quartz rods 2
Two quartz rods 2 in the left side of base 1 and two quartz rods 2 on the right side of base 1 are placed in, between two quartz rods 2 in the left side of base 1
Handle 4 is provided with, two quartz rods 2 on the relative right side of base 1 are also equipped with handle 4, and handle 4 also has outwardly prolong
Extending portion 41, quartz boat of conveniently taking do not touch quartz rod 2 again.Quartz boat integrally includes base 1, quartz rod 2, top plate 3 and handle 4
It is quartz material, and is linked together between each part by way of welding.Base 1 can be set to carry with diffusion furnace
The shape that device is engaged is for example U-shaped, to facilitate the production of automation.
300 necks are offered in the present embodiment on every quartz rod 2, the separation d of two neighboring neck is different, quartz
The separation d in the centre position of bar 2 is up to 3.5mm, separation d from the centre position of quartz rod 2 to the both ends of quartz rod 2 according to
The amplitudes such as 0.01mm gradient uniformly reduce, and the separation d nearest from base 1 and top plate 3 is minimum.
The number of quartz rod 2 and the position on base 1 arrange in other examples, neck is individual on quartz rod 2
Several setting, the separation d of neck and separation d, which reduces amplitude, to be adjusted according to the service condition of reality.
A kind of diffusing quartz boat of the present utility model sets the separation of quartz rod neck to be gradually reduced from centre to both ends,
So that the source flux that silicon chip touches gradually reduces, square resistance is gradually increased to consistent with the silicon chip in centre position；In phase
In the case of with boiler tube internal diameter, reduce the separation of neck, the relative increase quantity of neck, hold single quartz boat
Carry more silicon chips.So a kind of diffusing quartz boat of the present utility model can not only obtain uniform square resistance but also can carry
The yield of high diffusivity process.
For above-described embodiment only to illustrate technical concepts and features of the present utility model, its object is to allow be familiar with technique
Personage can understand content of the present utility model and implement according to this, the scope of protection of the utility model can not be limited with this,
All equivalent change or modifications made according to the utility model Spirit Essence, should all cover the scope of protection of the utility model it
It is interior.
Claims (10)
1. a kind of diffusing quartz boat, including base, more quartz rods being vertically set on the base and positioned at the stone
The top plate of English bar upper end, multiple necks are radially offered on the quartz rod, it is characterised in that：The two neighboring neck
Separation it is different, the separation positioned at the neck in the quartz rod centre position is maximum, the separation of the neck from
The quartz rod centre position is gradually reduced to the both ends of the quartz rod.
A kind of 2. diffusing quartz boat according to claim 1, it is characterised in that：The separation is up to 3.5mm.
A kind of 3. diffusing quartz boat according to claim 2, it is characterised in that：The described amplitude such as be gradually decreased as is uniform
Reduce.
A kind of 4. diffusing quartz boat according to claim 3, it is characterised in that：The amplitude such as described be uniformly reduced to by
The amplitudes such as 0.01mm gradient uniformly reduce.
A kind of 5. diffusing quartz boat according to claim 1, it is characterised in that：The quartz rod and the base and described
Top plate is connected by way of welding.
A kind of 6. diffusing quartz boat according to claim 1, it is characterised in that：Described base can be set to and diffusion furnace
The shape that bogey is engaged.
A kind of 7. diffusing quartz boat according to claim 1, it is characterised in that：Described quartz rod is four, symmetrically
It is arranged on the both sides of the base.
A kind of 8. diffusing quartz boat according to claim 1, it is characterised in that：Described quartz boat also includes being arranged at institute
State the handle between two quartz rods of base the same side.
A kind of 9. diffusing quartz boat according to claim 8, it is characterised in that：Described handle has outwardly prolong
Extending portion.
A kind of 10. diffusing quartz boat according to claim 9, it is characterised in that：It is the base, the quartz rod, described
Top plate and the handle are quartz material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720777043.XU CN206806305U (en) | 2017-06-29 | 2017-06-29 | A kind of diffusing quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720777043.XU CN206806305U (en) | 2017-06-29 | 2017-06-29 | A kind of diffusing quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206806305U true CN206806305U (en) | 2017-12-26 |
Family
ID=60747939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720777043.XU Active CN206806305U (en) | 2017-06-29 | 2017-06-29 | A kind of diffusing quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206806305U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112391615A (en) * | 2019-10-23 | 2021-02-23 | 深圳市拉普拉斯能源技术有限公司 | Boat transportation structure based on double paddles |
-
2017
- 2017-06-29 CN CN201720777043.XU patent/CN206806305U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112391615A (en) * | 2019-10-23 | 2021-02-23 | 深圳市拉普拉斯能源技术有限公司 | Boat transportation structure based on double paddles |
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