CN202268378U - Quartz boat used for diffusion crystalline silica solar cell diffusion - Google Patents
Quartz boat used for diffusion crystalline silica solar cell diffusion Download PDFInfo
- Publication number
- CN202268378U CN202268378U CN2011203795784U CN201120379578U CN202268378U CN 202268378 U CN202268378 U CN 202268378U CN 2011203795784 U CN2011203795784 U CN 2011203795784U CN 201120379578 U CN201120379578 U CN 201120379578U CN 202268378 U CN202268378 U CN 202268378U
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- China
- Prior art keywords
- diffusion
- quartz boat
- dead levers
- bearing rods
- parallel
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a quartz boat used for diffusion crystalline silica solar cell diffusion, including four parallel dead levers and a bearing unit fixedly arranged on the dead levers. The four dead levers include two upper dead levers and two lower dead levers; the bearing unit includes four parallel bearing rods, which are divided to two upper bearing rods and two lower bearing rods; the two upper bearing rods are vertically connected between the two upper dead levers; the two lower bearing rods are vertically connected between the two lower dead levers; the distance between the two upper bearing rods is larger than the distance between the two lower bearing rods; the bearing rods are uniformly provided with a set of card slots; and the direction of the card slots is parallel to the dead levers. In the quartz boat provided in the utility model, the structure is simple, the design is reasonable, the technology problem caused by the prior gas non-uniformity is substantially improved, the cell sheet performance is raised, and with the crystalline silica sheet for quartz boat diffusion, the square resistance uniformity error of a single sheet is controlled not more than 3 ohm/sq.
Description
Technical field
The utility model relates to a kind of crystal silicon solar energy battery diffusion and uses quartz boat.
Background technology
Solar cell can be an electric energy with conversion of solar energy directly as emerging clean reproducible energy because of having, and have the life-span long, safeguard simple, can realize advantage such as unattended operation and get most of the attention.
Emitter has determined Solar cell performance as the key components of solar cell; The uniformity of its diffusion directly influences the efficient of solar cell, in order further to improve the efficient of crystal silicon solar energy battery; Evenly the side hinders the preparation of emitter, becomes the trend of industry at present.Traditional diffusion technology generally adopts nitrogen to carry the diffusion of POCl3 tubular type, and process gas feeds boiler tube; Its airflow direction is vertical with the silicon chip direction; The air-flow of process gas can transmit through silicon chip edge backward, and regional process gas density is lower than silicon chip edge between the silicon chip, and then can cause the diffusion layer concentration ratio silicon chip central area of silicon chip edge high; This uneven diffusion must cause the decline of solar cell properties.
The utility model content
Goal of the invention: in order to overcome the deficiency that exists in the prior art, the utility model provides a kind of crystal silicon solar energy battery diffusion to use quartz boat, improves the diffusion uniformity deviation state.
Technical scheme: for solving the problems of the technologies described above, the technical scheme that the utility model adopts is:
Quartz boat is used in a kind of crystal silicon solar energy battery diffusion, comprises four parallel fixed levers and is fixed on the load bearing unit on the fixed lever, comprises in said four fixed levers that two are gone up fixed lever and two following fixed levers; Said load bearing unit comprises four parallel carrier bars; Be divided into two and go up carrier bar and two following carrier bars; Said two last carrier bars vertically are connected across two and go up between the fixed lever; Two following carrier bars vertically are connected across between two following fixed levers, and two are gone up spacing between the carrier bar greater than the spacing between two following carrier bars; On carrier bar, be provided with one group of draw-in groove equably, the direction of draw-in groove is parallel with fixed lever.
During use; The crystal silicon sheet places on four carrier bars in the corresponding draw-in groove, is parallel to the plane that forms between adjacent last fixed lever and the following fixed lever, and it is vertical with direction that traditional crystal silicon sheet is placed; Make the process gas airflow direction parallel like this with silicon chip; Can let silicon chip gas density on every side even, solve original because the inhomogeneous influence to technology of gas has improved Solar cell performance.
The number of said load bearing unit can be for more than two, and shared one of adjacent load bearing unit is gone up carrier bar, and promptly n load bearing unit uses n+1 to go up carrier bar altogether.
The number of said load bearing unit is 7, and the draw-in groove number on the said carrier bar is 40; Such quartz boat can carry 560 platelet silicon chips.
Beneficial effect: quartz boat is used in a kind of crystal silicon solar energy battery diffusion that the utility model provides; Simple in structure, reasonable in design; The position that the crystal silicon sheet is placed is parallel with flowing to of process gas flow; Can make the interior gas density of crystal silicon sheet even,, improve the performance of battery sheet with the inhomogeneous technological problems that brings of the original gas of remarkable improvement; Single tube diffusion sheet number can reach 560, has effectively improved production capacity with respect to the conventional diffusion mode; The crystal silicon sheet that the quartz boat that adopts the utility model to provide spreads, monolithic side's resistance uniformity can be controlled in the 3ohm/sq.
Description of drawings
Fig. 1 is the three-dimensional structure sketch map of the utility model;
Fig. 2 is the plan structure sketch map of the utility model;
Fig. 3 is the enlarged diagram of A portion among Fig. 2.
Embodiment
Below in conjunction with accompanying drawing the utility model is done explanation further.
Like Fig. 1, Fig. 2, shown in Figure 3; For quartz boat is used in a kind of crystal silicon solar energy battery diffusion; Its length is 1201 ± 1mm; Width is 188mm, comprises four parallel fixed levers 1 and 7 load bearing units that are fixed on the fixed lever 1, comprises in said four fixed levers 1 that two are gone up fixed lever and two following fixed levers; Said load bearing unit comprises four parallel carrier bars 2; Be divided into two and go up carrier bar and two following carrier bars; Said two last carrier bars vertically are connected across two and go up between the fixed lever; Two following carrier bars vertically are connected across between two following fixed levers, and two are gone up spacing between the carrier bar greater than the spacing between two following carrier bars; Shared one of adjacent load bearing unit is gone up carrier bar, and the quartz boat in this example has used 7 to go up carrier bar and 14 following carrier bars altogether; On carrier bar 2, be provided with 40 draw-in grooves 3 equably, the direction of draw-in groove 3 is parallel with fixed lever 1, and the quartz boat in this example can carry 560 platelet silicon chips altogether.
The above only is the preferred implementation of the utility model; Be noted that for those skilled in the art; Under the prerequisite that does not break away from the utility model principle; Can also make some improvement and retouching, these improvement and retouching also should be regarded as the protection range of the utility model.
Claims (3)
1. quartz boat is used in a crystal silicon solar energy battery diffusion, it is characterized in that: this quartz boat comprises four parallel fixed levers (1) and is fixed on the load bearing unit on the fixed lever (1), comprises in said four fixed levers (1) that two are gone up fixed lever and two following fixed levers; Said load bearing unit comprises four parallel carrier bars (2); Be divided into two and go up carrier bar and two following carrier bars; Said two last carrier bars vertically are connected across two and go up between the fixed lever; Two following carrier bars vertically are connected across between two following fixed levers, and two are gone up spacing between the carrier bar greater than the spacing between two following carrier bars; On carrier bar (2), be provided with one group of draw-in groove (3) equably, the direction of draw-in groove (3) is parallel with fixed lever (1).
2. quartz boat is used in crystal silicon solar energy battery diffusion according to claim 1, and it is characterized in that: the number of said load bearing unit is more than two, and shared one of adjacent load bearing unit is gone up carrier bar.
3. quartz boat is used in crystal silicon solar energy battery diffusion according to claim 1 and 2, and it is characterized in that: the number of said load bearing unit is 7, and the draw-in groove number on the said carrier bar (2) is 40.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203795784U CN202268378U (en) | 2011-09-28 | 2011-09-28 | Quartz boat used for diffusion crystalline silica solar cell diffusion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203795784U CN202268378U (en) | 2011-09-28 | 2011-09-28 | Quartz boat used for diffusion crystalline silica solar cell diffusion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202268378U true CN202268378U (en) | 2012-06-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203795784U Expired - Lifetime CN202268378U (en) | 2011-09-28 | 2011-09-28 | Quartz boat used for diffusion crystalline silica solar cell diffusion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202268378U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103614708A (en) * | 2013-12-10 | 2014-03-05 | 浙江正泰太阳能科技有限公司 | Graphite boat with gradient type spacing |
-
2011
- 2011-09-28 CN CN2011203795784U patent/CN202268378U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103614708A (en) * | 2013-12-10 | 2014-03-05 | 浙江正泰太阳能科技有限公司 | Graphite boat with gradient type spacing |
| CN103614708B (en) * | 2013-12-10 | 2015-11-18 | 浙江正泰太阳能科技有限公司 | A kind of graphite boat of gradual change type spacing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120606 |
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| CX01 | Expiry of patent term |