CN202030864U - Silicon carbide paddle for diffusion furnace - Google Patents
Silicon carbide paddle for diffusion furnace Download PDFInfo
- Publication number
- CN202030864U CN202030864U CN2011200303877U CN201120030387U CN202030864U CN 202030864 U CN202030864 U CN 202030864U CN 2011200303877 U CN2011200303877 U CN 2011200303877U CN 201120030387 U CN201120030387 U CN 201120030387U CN 202030864 U CN202030864 U CN 202030864U
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- CN
- China
- Prior art keywords
- oar
- silicon carbide
- diffusion furnace
- quartz boat
- paddle
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Abstract
The utility model relates to a silicon carbide paddle, in particular to the silicon carbide paddle in a diffusion furnace for manufacturing a solar cell silicon wafer. The silicon carbide paddle comprises a carbonized paddle body which is internally provided with a quartz boat hole position. In the silicon carbide paddle for a dust remover in printing and dyeing, the structure is simple, the efficiency is high, and the environmental pollution is reduced.
Description
Technical field
The utility model patent relates to a kind of silicon carbide oar, relates in particular to a kind of silicon carbide oar that is used for making the diffusion furnace of solar cell silicon wafer.
Background technology
Play crucial effects at present traditional manufacturing processed that is diffused in solar battery sheet, the PN junction in the inner formation of battery sheet in this process is the heart of solar cell.Make a PN junction, the part that must make a complete semiconductor crystal is the p type island region territory, another part is N type zone, the silicon chip of making solar cell is the P type, the method that adopts is that silicon chip is put into quartz member at present, feeds phosphorated gas, has just formed the N type in the one side that the phosphorus infiltration is arranged, in the one side that does not have infiltration is original P type, has so just reached in silicon chip inside to have formed desired PN junction.
Silicon slice placed places quartz boat in the diffusion process, refill and be stated from the silicon carbide oar, in silica tube, process, the diffusion source of the gas is to feed from the Quartz stove tube afterbody, because the flowing relation of air-flow, the source of the gas of the middle portion contact of silicon chip is less, and often square resistance is bigger, influences battery sheet total quality.
Summary of the invention
The utility model mainly is to solve the deficiencies in the prior art, provide a kind of make air-flow be evenly distributed in silicon chip around, reach the silicon carbide oar that is used for diffusion furnace of better diffusion effect.
Above-mentioned technical problem of the present utility model is mainly solved by following technical proposals:
A kind of silicon carbide oar that is used for diffusion furnace comprises carbonization oar body, is provided with position, quartz boat hole in the described carbonization oar body.Make the source of the gas concentration that is comprised around each position of silicon chip close for knowing clearly, in diffusion, form square resistance in the uniform sheet, the corresponding site hollow out of silicon carbide oar carrying quartz boat can be formed position, quartz boat hole, air-flow is more evenly distributed around silicon chip, reaches better diffusion effect.
As preferably, described carbonization oar body comprises oar head and oar tail, and position, described quartz boat hole is located in the oar head, and position, described quartz boat hole is a strip.
As preferably, the two ends of position, described quartz boat hole are circular-arc.
Therefore, the silicon carbide oar that is used for diffusion furnace of the present utility model, simple in structure, the efficient height promotes quality product.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Embodiment
Below by embodiment, and in conjunction with the accompanying drawings, the technical solution of the utility model is described in further detail.
Embodiment 1: as shown in Figure 1, a kind of silicon carbide oar that is used for diffusion furnace, comprise carbonization oar body 1, be provided with position, quartz boat hole 2 in the described carbonization oar body 1, described carbonization oar body 1 comprises oar head 3 and oar tail 4, position, described quartz boat hole 2 is located in the oar head 3, and position, described quartz boat hole 2 is a strip, and the two ends of position, described quartz boat hole 2 are circular-arc.
Claims (3)
1. a silicon carbide oar that is used for diffusion furnace is characterized in that: comprise carbonization oar body (1), be provided with position, quartz boat hole (2) in the described carbonization oar body (1).
2. the silicon carbide oar that is used for diffusion furnace according to claim 1, it is characterized in that: described carbonization oar body (1) comprises oar head (3) and oar tail (4), position, described quartz boat hole (2) is located in the oar head (3), and position, described quartz boat hole (2) is a strip.
3. the silicon carbide oar that is used for diffusion furnace according to claim 1 and 2 is characterized in that: the two ends of position, described quartz boat hole (2) are circular-arc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200303877U CN202030864U (en) | 2011-01-28 | 2011-01-28 | Silicon carbide paddle for diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200303877U CN202030864U (en) | 2011-01-28 | 2011-01-28 | Silicon carbide paddle for diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202030864U true CN202030864U (en) | 2011-11-09 |
Family
ID=44893169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200303877U Expired - Fee Related CN202030864U (en) | 2011-01-28 | 2011-01-28 | Silicon carbide paddle for diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202030864U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111081606A (en) * | 2019-12-12 | 2020-04-28 | 浙江晶科能源有限公司 | Silicon wafer coating equipment and paddle thereof |
| CN112071791A (en) * | 2020-08-31 | 2020-12-11 | 赛姆柯(苏州)智能科技有限公司 | Quartz boat conveying and mounting device and using method |
| CN112391615A (en) * | 2019-10-23 | 2021-02-23 | 深圳市拉普拉斯能源技术有限公司 | Boat transportation structure based on double paddles |
-
2011
- 2011-01-28 CN CN2011200303877U patent/CN202030864U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112391615A (en) * | 2019-10-23 | 2021-02-23 | 深圳市拉普拉斯能源技术有限公司 | Boat transportation structure based on double paddles |
| CN111081606A (en) * | 2019-12-12 | 2020-04-28 | 浙江晶科能源有限公司 | Silicon wafer coating equipment and paddle thereof |
| CN111081606B (en) * | 2019-12-12 | 2022-11-18 | 浙江晶科能源有限公司 | Silicon wafer coating equipment and paddle thereof |
| CN112071791A (en) * | 2020-08-31 | 2020-12-11 | 赛姆柯(苏州)智能科技有限公司 | Quartz boat conveying and mounting device and using method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111109 Termination date: 20150128 |
|
| EXPY | Termination of patent right or utility model |