CN207958476U - A kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove - Google Patents
A kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove Download PDFInfo
- Publication number
- CN207958476U CN207958476U CN201721911113.2U CN201721911113U CN207958476U CN 207958476 U CN207958476 U CN 207958476U CN 201721911113 U CN201721911113 U CN 201721911113U CN 207958476 U CN207958476 U CN 207958476U
- Authority
- CN
- China
- Prior art keywords
- selenizing stove
- indium
- copper
- solar cell
- selenizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model provides a kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove, it includes selenizing stove（1）, it is characterised in that：In selenizing stove（1）At least one side side wall be equipped with one group of gas vent（2）, in selenizing stove（1）Air jet pipe is equipped in the furnace wall of the other side（3）, in air jet pipe（3）The furnace wall of side is equipped with RF auxiliary heaters（4）.The utility model is simple in structure, easy to use, jet is uniform, the problem of effectively avoiding process gas excessive concentration immediately below air jet pipe.
Description
Technical field：
The utility model is related to copper-indium-galliun-selenium film solar cell production equipment fields, are specifically exactly a kind of copper and indium
The gas distribution structure of gallium selenium thin-film solar cells selenizing stove.
Background technology：
Copper indium gallium selenide (CIGS) solar cell belongs to compound semiconductor solar cell, and mass production is averaged opto-electronic conversion
Efficiency has been above 16%, is one of highest thin-film solar cells of photoelectric conversion efficiency, have it is undamped, be more suitable for building
Integration, the advantages that appearance is beautiful, production process low energy consumption is pollution-free, high-temperature power generation ability is strong, the crystalline silicon sun can be replaced
Energy battery captures market segment.
When producing copper indium gallium selenide (CIGS) solar cell using existing selenizing equipment, usually occur due to selenizing equipment
Uniform air distribution degree is poor, non-uniform temperature in equipment, causes substrate selenization process uniform in effect poor, affects the quality of product.
Utility model content：
The utility model is exactly to provide a kind of copper-indium-galliun-selenium film solar cell to overcome deficiency in the prior art
The gas distribution structure of selenizing stove.
The utility model provides following technical scheme：
A kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove, it includes selenizing stove, it is characterised in that：
At least one side furnace wall of selenizing stove is equipped with one group of gas vent, and at least two air jet pipes are equipped in selenizing furnace roof portion furnace wall,
The furnace wall of air jet pipe side is equipped with RF auxiliary heaters, and in the air jet pipe upper edge, it is axially arranged at least two groups jet
Hole.
Based on the above technical solution, there can also be technical solution further below：
The aperture of two groups of fumaroles is identical or different.
The air jet pipe is arranged at interval with RF auxiliary heaters.
One group of gas vent is in a row to be spaced apart or be distributed on the furnace wall of selenizing stove.
Utility model advantage：
The utility model is simple in structure, easy to use, effective by way of RF auxiliary heaters are arranged on furnace wall
It ensures selenizing in-furnace temperature uniformity, at least two groups fumarole is set on air jet pipe and has effectively disperseed air-flow, is avoided
On existing air jet pipe immediately below stomata caused by single group fumarole the problem of process gas excessive concentration, and different holes on air jet pipe
The fumarole and the further diffusing air current of energy of diameter so that selenizing furnace gas distribution more uniformity.It can be seen that the utility model
The selenization process effect of substrate can effectively be improved, it is ensured that product quality reduces cost, improves the competitiveness of product.
Description of the drawings：
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of spray tube in Fig. 1.
Specific implementation mode：
As illustrated in fig. 1 and 2, a kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove, it includes selenizing stove
1, the air jet pipe 3 equipped with three parallelly distribute ons, the jet are hung in the top in 1 furnace wall of selenizing stove along selenizing furnace length direction
The diameter of pipe is between 0~2000mm, and length is between 0~10m.It hangs and is equipped with and jet between two adjacent air jet pipes
Manage parallel RF auxiliary heaters 4.The uniformity of selenizing in-furnace temperature is effectively ensured by RF auxiliary heaters.
It is equipped in the 3 tube wall lower part of air jet pipe and is provided along its length three groups of fumaroles, wherein there is two groups of diameters
The diameter of identical big fumarole 3a is identical, and one group is additionally provided with along air jet pipe 3 between the big fumarole 3a of two groups of same diameters
The smaller small fumarole 3b of the diameter of distribution of lengths.This allows for being easier to spread when process gas is sprayed from air jet pipe, work
Uniformity of the skill gas in substrate surface concentration.The shape of the fumarole can be the various shapes such as circle, rectangle, triangle
Shape, and with the shape of group fumarole can it is identical also can be different.
It is equipped with one group of gas vent 2 in 1 bottom of selenizing stove, the spacing between adjacent gas vent can be 0.5mm, intensive row
The gas vent of cloth can improve the uniformity flowed along substrate surface direction gas.It is distributed in one group of exhaust of 1 bottom of selenizing stove
Hole 2 is spaced apart or is distributed on 1 bottom of selenizing stove to be multiple rows of.According to reality need can also selenizing stove both sides furnace wall with
And it also is provided with gas vent 2 on the top of furnace wall.
Above description is only the most preferred embodiment of the utility model, if others skilled in the art change row
The number of rows of stomata, the shape of gas vent, the quantity of gas vent, the diameter of gas vent, the quantity of spray tube, the shape of fumarole,
The quantity of fumarole, the diameter etc. of fumarole are vented, just as long as still using spray tube gas distribution in selenizing stove by gas vent
The permission for not jumping out the utility model, is still within the protection scope of the utility model.
Claims (4)
1. a kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove, it includes selenizing stove（1）, it is characterised in that：
In selenizing stove（1）At least one side furnace wall be equipped with one group of gas vent（2）, in selenizing stove（1）At least two are equipped in the furnace wall of top
Root air jet pipe（3）, in air jet pipe（3）The furnace wall of side is equipped with RF auxiliary heaters（4）, in the air jet pipe（3）Upper edge
It is axially arranged at least two groups fumarole.
2. according to a kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove described in claim 1, feature
It is：Two groups of fumaroles（3a）Aperture it is identical or different.
3. according to a kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove described in claim 1, feature
It is：The air jet pipe（3）With RF auxiliary heaters（4）It is arranged at interval.
4. according to a kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove described in claim 1, feature
It is：One group of gas vent（2）To be in a row spaced apart or being distributed on selenizing stove（1）Furnace wall on.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721911113.2U CN207958476U (en) | 2017-12-30 | 2017-12-30 | A kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721911113.2U CN207958476U (en) | 2017-12-30 | 2017-12-30 | A kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207958476U true CN207958476U (en) | 2018-10-12 |
Family
ID=63731195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721911113.2U Active CN207958476U (en) | 2017-12-30 | 2017-12-30 | A kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207958476U (en) |
-
2017
- 2017-12-30 CN CN201721911113.2U patent/CN207958476U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102820383B (en) | Spread method of polycrystalline silicon solar cell | |
| CN101022140A (en) | Method for realizing crystal silicon solar cell selective emitter region | |
| CN102903619B (en) | Crystalline silicon diffusion process for realizing deep-freeze low surface concentration | |
| CN102983179A (en) | Upper-lower electrode structure of solar cell | |
| CN101494253A (en) | Heavy diffusion and light diffusion technology for manufacturing selective emitter solar battery | |
| CN207958476U (en) | A kind of gas distribution structure of copper-indium-galliun-selenium film solar cell selenizing stove | |
| CN204668282U (en) | A kind of high-temperature low-pressure disperser | |
| CN205282456U (en) | Solar energy silicon chip diffusion equipment | |
| CN101339965A (en) | Selective one-time dispersing method of crystalline silicon solar cell | |
| CN207793058U (en) | A kind of kiln chamber structure | |
| CN204230280U (en) | A kind of for regulating the system of Reducing thickness uniformity in silicon chip texture etching slot | |
| CN206188931U (en) | Diffusion furnace | |
| WO2018196753A1 (en) | Heating device for pre-heating chamber based on lpcvd | |
| CN202695516U (en) | Flow-equalizing block piece | |
| CN101339964A (en) | Selective dispersing method of crystalline silicon solar cell | |
| CN205920985U (en) | Positive electrode network version of brilliant silicon solar cell | |
| CN202030864U (en) | Silicon carbide paddle for diffusion furnace | |
| CN205347629U (en) | Low pressure high temperature diffusion stove | |
| CN205002551U (en) | Online air knife of battery silicon chip weathers device | |
| CN103436967B (en) | A kind of method optimizing solar battery sheet tubular diffusion furnace air flow method | |
| CN104779321B (en) | A kind of method for improving stria cell piece qualification rate | |
| CN206298661U (en) | A kind of diffusion furnace | |
| CN103441190B (en) | PN junction manufacture method in a kind of solar cell | |
| CN203085500U (en) | Diffusion quartz boat | |
| CN203562411U (en) | Diffusion quartz boat structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |