CN205002551U - Online air knife of battery silicon chip weathers device - Google Patents
Online air knife of battery silicon chip weathers device Download PDFInfo
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- CN205002551U CN205002551U CN201520568869.6U CN201520568869U CN205002551U CN 205002551 U CN205002551 U CN 205002551U CN 201520568869 U CN201520568869 U CN 201520568869U CN 205002551 U CN205002551 U CN 205002551U
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Abstract
The utility model discloses an online air knife of battery silicon chip weathers device for carry out the drying to battery silicon chip behind making herbs into wool or the wet etching, in relative setting, lower air knife, the literal row had the wind hole shape formula of certain distance between the design of air knife air outlet was three rows, the middle one hole slope setting of airing exhaust, when the silicon chip under the gyro wheel transmission during through the air knife, middle one airs exhaust the hole blows off the incline direction and silicon chip motion opposite direction of wind, on, lower distance on and between the air knife, the air knife is adjusted apart from accessible adjustment support with the silicon chip surface down, it is better that the messenger weathers the effect, when the silicon chip passes through the air knife under the gyro wheel drives, the wind energy that is blown off by the wind hole is driven the liquid on silicon chip surface away well, and reach the online mesh that weathers the silicon chip fast down in hot -air drying effect.
Description
Technical field
The utility model relates to semiconductor solar cell sheet production equipment field, more specifically, relates to a kind of online air knife drying device cell silicon chip after making herbs into wool or wet etching being carried out to drying.
Background technology
Solar cell is by photoelectric effect or Photochemical effects, luminous energy is converted into the device of electric energy.When solar irradiation is mapped on semiconductor, wherein a part fallen by surface reflection, remainder by semiconductor absorber or through; Absorbed photon, has some to become heat, and other then collide with the valence electron of composition semiconductor, produce electron-hole pair.Like this, luminous energy is just to produce the formal transformation of electron-hole pair for electric energy.
Day by day serious along with global greenhouse effect, the resources such as oil, natural gas, coal day by day exhausted, environmental protection and energy saving have become the theme of world development.The regenerative resource that solar energy is unlimited as a kind of reserves, clean, safe is the developing direction of global new forms of energy.Under the guidance of national novel energy and regenerative resource industrial policy and under the drive of American-European solar energy market solid demand, recent year solar photovoltaic industry obtains develop rapidly.At present, China has become solar cell and has manufactured big country, has the maximum manufacture of solar cells producer in the whole world and production capacity over half.
At present, the production process of solar battery sheet can comprise: silicon wafer wool making-spread-etch and go each operations such as PSG-PECVD-sintering-printing, forms basic cell piece.In these technical process, silicon chip needs the chemical solution different from some to carry out suitable chemical reaction.In order to prevent the chemical solution in last process from entering next procedure, need operations such as after each chemical reaction, silicon chip being cleaned, dry.Particularly all need to clean silicon chip and dry up in the finishing operation of making herbs into wool and etching, normally carry out to facilitate later process collecting with silicon chip.
Conventional silicon chip drying mode can comprise drying and (is placed on by silicon chip in drier, be full of hot nitrogen, and dry silicon chip), baking (silicon chip is after isopropanol dehydration, put to baking oven baking) and warm pure water lift and toast (slowly put forward from the hot water storgae of heat by silicon chip, carry out the dry silicon chip of air cooking mode simultaneously) mode slowly.These drying modes are very limited in production capacity, and more complicated in processing performance and frame for movement, thus gradually substitute by air knife drying mode.
But, also there is obvious deficiency in existing air knife drying device.Existing air knife drying device generally includes two air knives be oppositely arranged up and down, and the exhaust vent of air knife is generally single setting, and its blowing direction passes through direction perpendicular to silicon chip; Meanwhile, the spacing between the upper and lower air knife of existing air knife drying device is normally fixing.The vibrational power flow form of this air knife is difficult to fast and is blown clean by the chemical solution on silicon chip up hill and dale and drying, and the inconvenience causing debugging and safeguard.
Therefore, need to provide a kind of novel online air knife drying device, to blow clean fast and up hill and dale by the chemical solution on silicon chip and drying.
Utility model content
The purpose of this utility model is the above-mentioned defect overcoming prior art existence, provides a kind of online air knife drying device of new cell silicon chip, in order to blow clean fast and up hill and dale by the chemical solution on silicon chip and drying.
For achieving the above object, the technical solution of the utility model is as follows:
A kind of online air knife drying device of cell silicon chip, for carrying out drying to cell silicon chip after making herbs into wool or wet etching, comprise the upper and lower air knife be oppositely arranged, upper and lower described air knife is provided with the air channel, inside of being narrowed to the air outlet of its opposite face by air intake vent, first ~ three vent of wrong arrangement between its air outlet is provided with, described air holes is communicated with air channel, and described air channel is communicated with vacuum compression pump; Wherein, the wind direction being positioned at middle second row air holes is obliquely installed towards silicon chip by the reverse of direction, and the wind direction being positioned at the first of its both sides, the 3rd vent is vertically arranged, and upper and lower described air knife position is in the vertical direction adjustable;
Wherein, gas is passed into by described air knife narrows up and down air channel, inside, the supercharging hot blast of acceleration is formed under the effect of described vacuum compression pump, blow out respectively to vertical and reverse incline direction through described first ~ three vent, to dry up by the silicon chip passed through between upper and lower described air knife fast online.
Preferably, the air channel, inside of described air knife is narrowed to arc transition within air outlet direction by air intake vent.
Preferably, the arc transition that described air knife has air channel inner with it corresponding narrows profile.
Preferably, the aperture of described air holes is Ф 1.1 ~ 1.3mm.
Preferably, the wind direction of described second row air holes and the angle of vertical direction are 15 ~ 45 °.
Preferably, upper and lower described air knife regulates the distance between itself and silicon chip respectively by adjusting pole, described adjusting pole is provided with lifting screw in the both sides of air knife on described, regulates by rotating described lifting screw the distance between described upper air knife and silicon chip upper surface coordinated with it; Described adjusting pole is provided with the adjustment block of band long slot bore in the both sides of described lower air knife, regulated the distance between described lower air knife and silicon chip lower surface coordinated with it by the hold-down screw high and low position adjusted in described long slot bore.
Preferably, the adjustable distance between described upper air knife and silicon chip is for being no more than 15mm; Adjustable distance between described lower air knife and silicon chip is for being no more than 10mm.
Preferably, described air knife is POM forming materials.
Preferably, the air intake vent end of described air knife is provided with the air knife cover plate for sealing, and adopts and is threaded, and sealed by O RunddichtringO between described air knife with described air knife cover plate.
Preferably, before and after described lower air knife, both sides are provided with roller, need dry silicon chip for horizontal feed between upper and lower described air knife.
The utility model has the following advantages:
1, by three vents of wrong arrangement between the air outlet setting of upper and lower air knife, and a middle vent is obliquely installed towards silicon chip, when silicon chip roller drive under through air knife, from air knife exhaust vent blowout wind energy well the liquid of silicon chip surface is driven away fast;
2, by arranging the air channel, inside of narrowing gradually in air knife, the process that wind is blown out from air knife air intake vent to air outlet, because air channel cross-sectional area reduces, wind speed increases gradually, and under the effect of vacuum compression pump, hot blast is formed, by silicon chip flash baking in the chamber of air channel;
3, by arranging adjusting pole, the distance between upper and lower described air knife and silicon chip can be regulated respectively, both can ensure silicon wafer blow-drying, be unlikely to again because blast is excessive and cause silicon chip to damage.
Accompanying drawing explanation
Fig. 1 is the structural representation of the online air knife drying device of a kind of cell silicon chip in the utility model one preferred embodiment;
Fig. 2 is the structure for amplifying schematic diagram of air knife air holes in Fig. 1;
Fig. 3 is the upward view of air knife air holes;
Fig. 4 is one of sectional view of air knife air holes;
Fig. 5 is the sectional view two of air knife air holes;
Fig. 6 a is the partial structurtes schematic diagram of upper air knife adjusting pole;
Fig. 6 b is the top view of Fig. 6 a;
Fig. 7 a is the partial structurtes schematic diagram of lower air knife adjusting pole;
Fig. 7 b is the side view of Fig. 7 a.
Detailed description of the invention
Below in conjunction with accompanying drawing, detailed description of the invention of the present utility model is described in further detail.
It should be noted that, in following detailed description of the invention, when describing embodiment of the present utility model in detail, in order to clearly represent structure of the present utility model so that explanation, special to the structure in accompanying drawing not according to general scale, and carried out partial enlargement, distortion and simplify processes, therefore, should avoid being understood in this, as to restriction of the present utility model.
In following detailed description of the invention of the present utility model, refer to Fig. 1, Fig. 1 is the structural representation of the online air knife drying device of a kind of cell silicon chip in the utility model one preferred embodiment.The online air knife drying device of a kind of cell silicon chip of the present utility model, can be arranged on solar battery slice etching device and wet-method etching equipment, for carrying out drying to the cell silicon chip after making herbs into wool or wet etching.As shown in Figure 1, the online air knife drying device of a kind of cell silicon chip of the present utility model, comprises a pair upper and lower air knife 1 be oppositely arranged.Upper and lower air knife 1 is provided with the air channel, inside 13 of being narrowed to the air outlet of opposite face inside it by the air intake vent in outside.Be provided with air holes 4 at the air outlet of upper and lower air knife 1, the first ~ three vent of wrong arrangement between air holes 4 comprises, the air holes 4 of each row is connected with air channel 13.The air channel, inside 13 of upper and lower air knife 1 is connected with vacuum compression pump (scheming slightly).
As one preferred embodiment, the air channel, inside 13 of air knife can the arc transition form of illustrated inside contraction be narrowed to air outlet direction gradually by air intake vent, is formed by wide to narrow approximate funnel type cross sectional shape.Inner air channel 13 is designed to by the wide form to narrow arc transition, wind can be made to enter air outlet and the process blown out by air holes 4 from air knife 1 air intake vent, cross-sectional area reduces wind speed gradually and increases rapidly, to play the effect that enhancing blows away silicon chip 14 surface liquid fast; Meanwhile, because total air-out area of air holes 4 is less than air intake vent area, by the effect of vacuum compression pump, hot blast can be formed in air knife 1 air channel chamber 13 wide at the top and narrow at the bottom, to dry silicon chip 14 in time.When actual drying process, by regulating vacuum compression pump power output, make the hot blast temperature formed in air channel chamber 13 remain on 30 ~ 60 DEG C, its drying effect is comparatively suitable.
Refer to Fig. 2, Fig. 2 is the structure for amplifying schematic diagram of air knife air holes in Fig. 1.As shown in Figure 2, in three vents that the air outlet of upper and lower air knife 1 opposite side is respectively arranged, the wind direction (as illustrated the incline direction arrow indication in second row air holes 16 exit) being positioned at middle second row air holes 16 wherein passes through reverse being obliquely installed in direction (as diagram horizontal direction arrow indication) towards silicon chip 14; The wind direction (as illustrated the vertical direction arrow indication in the first, the 3rd vent 15,17 exit) being positioned at the first of second row air holes 16 both sides, the 3rd vent 15,17 is vertically arranged.
The positional structure form of wrong arrangement between the first ~ three vent 15 ~ 17, can show further by Fig. 3 ~ Fig. 5.As shown in Figure 3, air holes 15 ~ 17 is positioned at the air outlet place of air knife 1, and the first, the 3rd vent 15,17 is positioned at the both sides of second row air holes 16, and second row air holes 16 is arranged towards the opposite direction inclination certain angle of silicon chip by direction; Stagger and the setting that keeps at a certain distance away in each vent 15 ~ 17 mutual alignment.The wind-force effective coverage range of each vent, should ensure to be greater than the maximum by width of silicon chip, the quantity of each vent 15 ~ 17 of can rationally arranging on this basis, accomplish to be uniformly distributed, do not dredge not close.Fig. 4, Fig. 5 respectively illustrate air knife second row air holes 16 and the sectional view of the first, the 3rd vent 15,17 at air knife air outlet place, can obtain understanding more intuitively by composition graphs 2.
As one preferred embodiment, as shown in Figure 1, the included angle A formed between the wind direction of described second row air holes and horizontal direction can be 45 ~ 75 °; Also the included angle A namely formed between the wind direction of second row air holes 16 as shown in Figure 2 and vertical direction ' be 15 ~ 45 °.Further, as shown in Figure 3, the aperture of each described air holes 15 ~ 17 can be Ф 1.1 ~ 1.3mm, and the air-flow of its blowout of the aperture of this scope is comparatively suitable.
Please continue to refer to Fig. 1.One is respectively provided with for sealing the air knife cover plate 2 of air knife air intake vent at the air intake vent end of upper and lower air knife 1.Can adopt between air knife 1 with air knife cover plate 2 and such as be threaded, and seal between air knife 1 and air knife cover plate 2 by O RunddichtringO 12, to ensure the sealing of hot air duct chamber 13 in air knife.
Refer to Fig. 1.Upper and lower air knife 1 position in the vertical direction can regulate, and its adjustment is implemented by adjusting pole 3.Adjusting pole 3 is separately installed with, for regulating the distance between upper and lower air knife 1 and silicon chip 14 respectively at the sidepiece of upper and lower air knife 1.
Refer to the partial structurtes schematic diagram that Fig. 6 a and Fig. 6 b, Fig. 6 a is upper air knife adjusting pole, Fig. 6 b is the top view of Fig. 6 a.As shown in Fig. 6 a, Fig. 6 b, the connection bracket 6 that upper air knife 1 is equipped with by its adjusting pole 3 is fixed on etching device or wet-method etching equipment.Fixed block 7 is equipped with in the be in the wind both sides of cutter 1 of adjusting pole, and fixed block 7 coordinates an adjustable lifting screw 8 is housed, and upper air knife 1 forms threads turn with lifting screw 8 and coordinates.During adjustment, by rotating lifting screw 8, the upper air knife 1 coordinated with lifting screw 8 is regulated to move up and down on adjusting pole easily, thus the distance between adjustable upper air knife 1 and silicon chip 14 upper surface.
Refer to the partial structurtes schematic diagram that Fig. 7 a and Fig. 7 b, Fig. 7 a is lower air knife adjusting pole, Fig. 7 b is the top view of Fig. 7 a.As shown in Fig. 7 a, Fig. 7 b, the fixed block 9 that lower air knife 1 is equipped with by its adjusting pole 3 is too fixed on etching device or wet-method etching equipment.Adjusting pole is equipped with the adjustment block 10 of band vertical direction long slot bore (figure slightly) in the both sides of lower air knife 1, lower air knife 1 is by being movably arranged in the adjustment block 10 of adjusting pole with long slot bore clamping.Long slot bore is equipped with hold-down screw 11, by the adjustment high and low position of hold-down screw 11 in long slot bore, can regulate the distance between lower air knife 1 and silicon chip 14 lower surface coordinating with long slot bore and install easily.
As one preferred embodiment, the adjustable distance between described upper air knife 1 and silicon chip 14 is for being no more than 15mm; Adjustable distance between described lower air knife 1 and silicon chip 14 is for being no more than 10mm.Further, make the distance between upper and lower air knife 1 remain on 5 ~ 10mm scope by adjustment more suitable, can make to dry up effect and reach preferably state, both can ensure that silicon chip 14 is dried up in time, be unlikely to again to cause because blast is excessive silicon chip 14 to damage.
Refer to Fig. 1.In order to the silicon chip 14 by needing drying to process between upper and lower air knife 1, before and after lower air knife 1, both sides respectively can be provided with a roller 5.When silicon chip 14 is transmitted from etching device or wet-method etching equipment, can dock and move is carried on these two rollers 5, carries out drying to opposite side horizontal feed (as diagram horizontal direction arrow indication) between upper and lower air knife 1 by side.As one preferred embodiment, the arc transition that the profile of air knife 1 can have air channel 13 inner with it corresponding narrows shape.The circular arc portion of lower air knife 1 can make air knife penetrate with between two rollers 5 and not interfere, and can fit as far as possible with roller 5 simultaneously, forms approximate confined space, loses to reduce the process of drying up as far as possible at the hot blast of silicon chip 14 lower zone.
Consider that air knife is the design form of arc transition wide at the top and narrow at the bottom, its machining deformation is larger, therefore, the main material of air knife 1 can select POM (polyformaldehyde) forming materials to make, and it can meet good mechanical strength, rigidity (indeformable after processing) and the heat-resisting quantity (indeformable under high temperature) of air knife requirement simultaneously.
Device of the present utility model in use, by passing into gas in the air channel, inside 13 of air knife 1 arc transition wide at the top and narrow at the bottom up and down, the supercharging hot blast of acceleration is formed under the effect of vacuum compression pump, blow out respectively to vertical and reverse incline direction through the first ~ three vent 15 ~ 17, can by being carried on roller 5, by between upper and lower air knife 1 horizontally through silicon chip 14 on solution blow to rapidly silicon chip tail end, and can under hot-air seasoning effect, in time silicon chip 14 upper and lower surface is dried up, while reaching and drying up object, again can be easy to operate, quick.
In sum, the utility model is by three vents of wrong arrangement between the air outlet setting of upper and lower air knife, and a middle vent is obliquely installed towards silicon chip, when silicon chip roller drive under through air knife, from air knife exhaust vent blowout wind energy well the liquid of silicon chip surface is driven away fast; By arranging the air channel, inside of narrowing gradually in air knife, the process that wind is blown out from air knife air intake vent to air outlet, because air channel cross-sectional area reduces, wind speed increases gradually, and under the effect of vacuum compression pump, hot blast is formed, by silicon chip flash baking in the chamber of air channel; By arranging adjusting pole, the distance between upper and lower described air knife and silicon chip can be regulated respectively, both can ensure silicon wafer blow-drying, be unlikely to again because blast is excessive and cause silicon chip to damage.Therefore, the utility model has significant application advantage.
Above-describedly be only preferred embodiment of the present utility model; described embodiment is also not used to limit scope of patent protection of the present utility model; therefore the equivalent structure that every utilization description of the present utility model and accompanying drawing content are done changes, and in like manner all should be included in protection domain of the present utility model.
Claims (10)
1. the online air knife drying device of a cell silicon chip, for carrying out drying to cell silicon chip after making herbs into wool or wet etching, it is characterized in that, comprise the upper and lower air knife be oppositely arranged, described upper and lower air knife is provided with the air channel, inside of being narrowed to the air outlet of its opposite face by air intake vent, first ~ three vent of wrong arrangement between its air outlet is provided with, described air holes is communicated with air channel, and described air channel is communicated with vacuum compression pump; Wherein, the wind direction being positioned at middle second row air holes is obliquely installed towards silicon chip by the reverse of direction, and the wind direction being positioned at the first of its both sides, the 3rd vent is vertically arranged, and upper and lower described air knife position is in the vertical direction adjustable;
Wherein, gas is passed into by described air knife narrows up and down air channel, inside, the supercharging hot blast of acceleration is formed under the effect of described vacuum compression pump, blow out respectively to vertical and reverse incline direction through described first ~ three vent, to dry up by the silicon chip passed through between upper and lower described air knife fast online.
2. online air knife drying device according to claim 1, is characterized in that, the air channel, inside of described air knife is narrowed to arc transition within air outlet direction by air intake vent.
3. online air knife drying device according to claim 2, is characterized in that, the arc transition that described air knife has air channel inner with it corresponding narrows profile.
4. online air knife drying device according to claim 1, is characterized in that, the aperture of described air holes is Ф 1.1 ~ 1.3mm.
5. online air knife drying device according to claim 1, is characterized in that, the wind direction of described second row air holes and the angle of vertical direction are 15 ~ 45 °.
6. online air knife drying device according to claim 1, it is characterized in that, upper and lower described air knife regulates the distance between itself and silicon chip respectively by adjusting pole, described adjusting pole is provided with lifting screw in the both sides of air knife on described, regulates by rotating described lifting screw the distance between described upper air knife and silicon chip upper surface coordinated with it; Described adjusting pole is provided with the adjustment block of band long slot bore in the both sides of described lower air knife, regulated the distance between described lower air knife and silicon chip lower surface coordinated with it by the hold-down screw high and low position adjusted in described long slot bore.
7. online air knife drying device according to claim 6, is characterized in that, the adjustable distance between described upper air knife and silicon chip is for being no more than 15mm; Adjustable distance between described lower air knife and silicon chip is for being no more than 10mm.
8. the online air knife drying device according to claim 1,2,3,6 or 7, is characterized in that, described air knife is POM forming materials.
9. the online air knife drying device according to claim 1,2,3,6 or 7, it is characterized in that, the air intake vent end of described air knife is provided with the air knife cover plate for sealing, and adopts and is threaded, and sealed by O RunddichtringO between described air knife with described air knife cover plate.
10. online air knife drying device according to claim 1, is characterized in that, before and after described lower air knife, both sides are provided with roller, needs dry silicon chip for horizontal feed between upper and lower described air knife.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520568869.6U CN205002551U (en) | 2015-07-31 | 2015-07-31 | Online air knife of battery silicon chip weathers device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520568869.6U CN205002551U (en) | 2015-07-31 | 2015-07-31 | Online air knife of battery silicon chip weathers device |
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| Publication Number | Publication Date |
|---|---|
| CN205002551U true CN205002551U (en) | 2016-01-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520568869.6U Active CN205002551U (en) | 2015-07-31 | 2015-07-31 | Online air knife of battery silicon chip weathers device |
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| Country | Link |
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| CN (1) | CN205002551U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104990383A (en) * | 2015-07-31 | 2015-10-21 | 北京七星华创电子股份有限公司 | On-line air knife drying device |
| CN108534539A (en) * | 2018-05-14 | 2018-09-14 | 安徽宏实自动化装备有限公司 | A kind of porous type air blade device |
-
2015
- 2015-07-31 CN CN201520568869.6U patent/CN205002551U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104990383A (en) * | 2015-07-31 | 2015-10-21 | 北京七星华创电子股份有限公司 | On-line air knife drying device |
| CN108534539A (en) * | 2018-05-14 | 2018-09-14 | 安徽宏实自动化装备有限公司 | A kind of porous type air blade device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
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| CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20171226 Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |