CN108534539A - A kind of porous type air blade device - Google Patents
A kind of porous type air blade device Download PDFInfo
- Publication number
- CN108534539A CN108534539A CN201810458571.8A CN201810458571A CN108534539A CN 108534539 A CN108534539 A CN 108534539A CN 201810458571 A CN201810458571 A CN 201810458571A CN 108534539 A CN108534539 A CN 108534539A
- Authority
- CN
- China
- Prior art keywords
- blade
- hole
- connector
- blind hole
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims description 13
- 239000012530 fluid Substances 0.000 abstract description 6
- 230000006698 induction Effects 0.000 abstract description 3
- 238000012545 processing Methods 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/003—Supply-air or gas filters
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Air-Flow Control Members (AREA)
Abstract
A kind of porous type air blade device, including air knife ontology, air knife ontology is integrally formed formula structure, air knife ontology includes blade, knife face and connector, the blade is trapezoidal column, the trapezoidal upper bottom surface open-ended of blade, and inner hollow, knife face is rectangular plate-like, connector is the rectangular scapus chamber of upper and lower ends face open-ended, the trapezoidal big end bottom surface open-ended end of blade is integrally connected with knife face, the trapezoidal small end upper surface open-ended end of blade and the column chamber of connector are integrally connected, the linearly aligned through-hole of even level and blind hole are equipped in the middle part of the connecting pin of knife face and blade, through-hole is vertically positioned at below the column chamber of connector, blind hole is located at through-hole both sides, and side blind hole is vertically positioned at below the upper wall of blade side inner cavity, other side blind hole, which tilts, is directed toward blade other side intracavity sidewall.With Bernoulli principle, causes an induction flow field, guiding to remain in the outflow of the fluid in substrate surface and hole, replaced with treatment fluid in substrate surface, realize the processing in device to hole.
Description
Technical field
The present invention relates to wet process apparatus field more particularly to a kind of porous type air blade devices.
Background technology
Wet process board is designed in encapsulation, photovoltaic, panel industry using the current adult form machine that belongs to, but in part machine
Structure designs, and uses the problems such as above having maintenance difficult, cut that water is bad, liquid consumption is big etc..Wherein cut that water is bad and liquid consumes
Big problem is measured, is current relatively common problem, for this problem, current design uses in mechanism section design mostly
The mode of installation air knife is solved, and for air knife generally by the way of tilting, occupied space is big, and water and liquid wind are cut by air knife
Knife switchback, increase subject surface, which cuts water and reduces liquid, takes consumption out of, but increases air knife in this way, it is necessary to have height
The output condition of flow and pressure be easy to cause object quotient and takes winding and shake under high flow capacity or pressure condition, it is therefore desirable to
Compacting idler wheel overcomes the floating displacement and shake of the object caused by wind pressure in design in mechanism design.
Invention content
The present invention is exactly in view of the deficienciess of the prior art, provide a kind of porous type air blade device.
To solve the above problems, the technical solution used in the present invention is as follows：
A kind of porous type air blade device, including air knife ontology, the air knife ontology are horizontally arranged at wet process equipment
On hanger, and air knife ontology is symmetrically mounted on substrate both sides, and air knife ontology is integrally formed formula structure, and air knife ontology includes knife
Body, knife face and connector, the blade are trapezoidal column, the trapezoidal upper bottom surface open-ended of blade, and inner hollow, knife face are
Rectangular plate-like, connector are the rectangular scapus chamber of upper and lower ends face open-ended, the trapezoidal big end bottom surface open-ended end of blade and knife
Face is integrally connected, and the trapezoidal small end upper surface open-ended end of blade and the column chamber of connector are integrally connected, the company of knife face and blade
It connects end middle part and is equipped with the linearly aligned through-hole of even level and blind hole, through-hole is vertically positioned at below the column chamber of connector, blind hole point
Not Wei Yu through-hole both sides, and side blind hole is vertically positioned at below blade side inner cavity upper wall, and other side blind hole, which tilts, is directed toward blade
Other side intracavity sidewall.
Further, the wall thickness for tilting the blade side wall wall ratio other side blade side wall that blind hole is directed toward side is big.
Further, the vertical blind hole side end of the knife face is equipped with acclivity mouth.
Further, the blade outer wall is equipped with the connector convenient for hanging support.
Further, the connection head section is equipped with highly effective air air filter.
The spacing of the knife face and substrate surface is in 125~150mils.
Further, the air knife ontology is mounted on wet process board, and its exterior is equipped with blimps.
Compared with prior art, beneficial effects of the present invention are as follows by the present invention：
A kind of porous type air blade device of the present invention, air knife chamber body body structure, be equipped in the middle part of knife face through-hole and
Blind hole, side blind hole are vertically positioned at below the inner wall of blade side, and other side blind hole, which tilts, is directed toward other side blade inner wall, is different from
Air knife generally in a manner of high pressure etc. handled in hole, and with Bernoulli principle, an induction flow field (layer is caused in substrate surface
Stream), guiding remains in the outflow of the fluid in substrate surface and hole, is replaced with treatment fluid, realizes the processing in device to hole, such as air knife
(blind hole and through-hole) liquid in hole is taken out of and is passed through liquid in the purpose of drying or air knife to reach in hole, it can be by liquid or water
It is sent into hole, reaches the effect that liquid is thoroughly reacted or cleaned, air knife ontology is horizontally mounted, occupies little space, and is conveniently replaceable dimension
Shield, it is of low cost, ultra-thin or small plate can be handled.
Description of the drawings
Fig. 1 is a kind of porous type air blade device structural schematic diagram of the present invention；
Fig. 2 is assembly structure diagram of the air knife ontology on wet process board.
Specific implementation mode
Illustrate present disclosure below in conjunction with specific embodiments.
As depicted in figs. 1 and 2, a kind of porous type air blade device, including air knife ontology 10, the air knife ontology 10
It is horizontally arranged on the hanger of wet process equipment, and air knife ontology 10 is symmetrically mounted on substrate both sides, air knife ontology 10 is one
Body formed formula structure, air knife ontology 10 include blade 11, knife face 12 and connector 13, and the blade 11 is trapezoidal column, blade
11 trapezoidal upper bottom surface open-ended, and inner hollow, knife face 12 are rectangular plate-like, and connector 13 is upper and lower ends face open-ended
Rectangular scapus chamber, the trapezoidal big end bottom surface open-ended end of blade 11 is integrally connected with knife face 12, on the trapezoidal small end of blade 11
End face open-ended end and the column chamber of connector 13 are integrally connected, and even level's line is equipped in the middle part of knife face 12 and the connecting pin of blade 11
Property arrangement through-hole 14 and blind hole 15, through-hole 14 is vertically positioned at below the column chamber of connector 13, and blind hole 15 is located at through-hole 14
Both sides, and side blind hole 15 is vertically positioned at below 11 side inner cavity upper wall of blade, other side blind hole 15, which tilts, is directed toward blade 11 separately
Side intracavity sidewall.
A kind of porous type air blade device, 10 intracavity structure of air knife ontology, 12 middle part of knife face are equipped with 14 He of through-hole
Blind hole 15, side blind hole 15 are vertically positioned at below 11 side inner wall of blade, and other side blind hole 15, which tilts, is directed toward other side blade 11
Side inner wall is different from the air knife generally in a manner of high pressure etc. and handled in hole, with Bernoulli principle, made in substrate surface
At induction flow field (laminar flow), guiding remains in the outflow of the fluid in substrate surface and hole, is replaced with treatment fluid, realizes device to hole
Interior processing can take liquid in hole out of if air knife is passed through gas to achieve the purpose that be passed through liquid in dry or air knife in hole
Liquid or water can be sent into hole by body, achieve the effect that liquid thoroughly reaction or clean, air knife ontology 10 is horizontally mounted, and is occupied
Space is small, is conveniently replaceable maintenance, of low cost, can handle ultra-thin or small plate.
The wall thickness for tilting 11 side wall wall ratio other side blade of blade, 11 side wall that blind hole 15 is directed toward side is big, and enhancing is inclined
The impact force of oblique blind hole 15, extends the service life of air knife.
15 side end of vertical blind hole of the knife face 12 is equipped with acclivity mouth 16, is discharged, subtracts convenient for gas or liquid
Few influence to substrate face, it is ensured that treatment effect of the air knife ontology 10 to substrate surface.
11 outer wall of the blade is equipped with the connector convenient for hanging support, is installed or removed convenient for air knife ontology 10, convenient for wet
The installation of formula process work bench, debugging and maintenance.
13 sections of the connector is equipped with highly effective air air filter 17, the requirement to cleannes in the process of semiconductor wet process
Higher, high efficiency particle air filter 17 can effectively filter out tiny particle, reduce pollution sources, and good work is improved for wet process
Make environment.
The air knife ontology 10 is mounted on wet process board, and its exterior is equipped with blimps, when air knife ontology 10 works
Noise figure generally in 70dB, noise figure can be controlled below 60 after adding blimp.
The spacing of the knife face 12 and substrate surface is in 125~150mils, in this spacing range, air knife ontology 10
Treatment effect is preferable.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement etc., should all be included in the protection scope of the present invention made by within refreshing and principle.
Claims (7)
1. a kind of porous type air blade device, characterized in that including air knife ontology (10), the air knife ontology (10) is horizontally arranged at
On the hanger of wet process equipment, and air knife ontology (10) is symmetrically mounted on substrate both sides, and air knife ontology (10) is integrally formed
Formula structure, air knife ontology (10) include blade (11), knife face (12) and connector (13), and the blade (11) is trapezoidal column,
The trapezoidal upper bottom surface open-ended of blade (11), and inner hollow, knife face (12) are rectangular plate-like, and connector (13) is upper and lower two
The rectangular scapus chamber of end face open-ended, trapezoidal big end bottom surface open-ended end and the knife face (12) of blade (11) are integrally connected, blade
(11) trapezoidal small end upper surface open-ended end and the column chamber of connector (13) is integrally connected, the company of knife face (12) and blade (11)
It connects end middle part and is equipped with the linearly aligned through-hole of even level (14) and blind hole (15), through-hole (14) is vertically positioned at connector (13)
Below column chamber, blind hole (15) is located at through-hole (14) both sides, and side blind hole (15) is vertically positioned at blade (11) side inner cavity
Below upper wall, other side blind hole (15), which tilts, is directed toward blade (11) other side intracavity sidewall.
2. a kind of porous type air blade device according to claim 1, characterized in that the blind hole (15) that tilts is directed toward side
The wall thickness of blade (11) side wall wall ratio other side blade (11) side wall is big.
3. a kind of porous type air blade device according to claim 1, characterized in that the vertical blind hole of the knife face (12)
(15) side end is equipped with acclivity mouth (16).
4. a kind of porous type air blade device according to claim 1, characterized in that blade (11) outer wall is equipped with just
In the connector of hanging support.
5. a kind of porous type air blade device according to claim 1, characterized in that connector (13) section is equipped with efficient
Air air filter (17).
6. a kind of porous type air blade device according to claim 1, characterized in that the air knife ontology (10) is mounted on wet
On formula process work bench, its exterior is equipped with blimps.
7. a kind of porous type air blade device according to claim 1, characterized in that the knife face (12) and substrate surface
Spacing is in 125~150mils.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810458571.8A CN108534539A (en) | 2018-05-14 | 2018-05-14 | A kind of porous type air blade device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810458571.8A CN108534539A (en) | 2018-05-14 | 2018-05-14 | A kind of porous type air blade device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108534539A true CN108534539A (en) | 2018-09-14 |
Family
ID=63477104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810458571.8A Pending CN108534539A (en) | 2018-05-14 | 2018-05-14 | A kind of porous type air blade device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108534539A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023279412A1 (en) * | 2021-07-05 | 2023-01-12 | 长鑫存储技术有限公司 | Air knife and cleaning apparatus |
| WO2023089004A1 (en) * | 2021-11-17 | 2023-05-25 | Krones Ag | Air blade device |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2863283Y (en) * | 2006-07-06 | 2007-01-31 | 深圳市龙岗区龙岗爱联宇宙机器设备厂 | Blind hole water knife |
| CN2886476Y (en) * | 2005-07-15 | 2007-04-04 | 深圳市龙岗区龙岗爱联宇宙机器设备厂 | Strong wind cutter |
| CN202648348U (en) * | 2012-06-04 | 2013-01-02 | 汕头超声印制板公司 | Water-propelling-through-ostiole drying device of printer circuit board (PCB) |
| CN203672080U (en) * | 2014-01-06 | 2014-06-25 | 宇宙电路板设备(深圳)有限公司 | Drying device for touch panel |
| CN205002551U (en) * | 2015-07-31 | 2016-01-27 | 北京七星华创电子股份有限公司 | Online air knife of battery silicon chip weathers device |
| CN205069665U (en) * | 2015-10-13 | 2016-03-02 | 苏州宝馨科技实业股份有限公司 | Air knife and have wet processing device of air knife |
| CN205393103U (en) * | 2016-03-16 | 2016-07-27 | 东莞市晋拓自动化科技有限公司 | Novel small -size clean air knife |
| WO2018072464A1 (en) * | 2016-10-18 | 2018-04-26 | 东莞宇宙电路板设备有限公司 | Air knife assembly and drying device |
| CN208704395U (en) * | 2018-05-14 | 2019-04-05 | 安徽宏实自动化装备有限公司 | A kind of porous type air blade device |
-
2018
- 2018-05-14 CN CN201810458571.8A patent/CN108534539A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2886476Y (en) * | 2005-07-15 | 2007-04-04 | 深圳市龙岗区龙岗爱联宇宙机器设备厂 | Strong wind cutter |
| CN2863283Y (en) * | 2006-07-06 | 2007-01-31 | 深圳市龙岗区龙岗爱联宇宙机器设备厂 | Blind hole water knife |
| CN202648348U (en) * | 2012-06-04 | 2013-01-02 | 汕头超声印制板公司 | Water-propelling-through-ostiole drying device of printer circuit board (PCB) |
| CN203672080U (en) * | 2014-01-06 | 2014-06-25 | 宇宙电路板设备(深圳)有限公司 | Drying device for touch panel |
| CN205002551U (en) * | 2015-07-31 | 2016-01-27 | 北京七星华创电子股份有限公司 | Online air knife of battery silicon chip weathers device |
| CN205069665U (en) * | 2015-10-13 | 2016-03-02 | 苏州宝馨科技实业股份有限公司 | Air knife and have wet processing device of air knife |
| CN205393103U (en) * | 2016-03-16 | 2016-07-27 | 东莞市晋拓自动化科技有限公司 | Novel small -size clean air knife |
| WO2018072464A1 (en) * | 2016-10-18 | 2018-04-26 | 东莞宇宙电路板设备有限公司 | Air knife assembly and drying device |
| CN208704395U (en) * | 2018-05-14 | 2019-04-05 | 安徽宏实自动化装备有限公司 | A kind of porous type air blade device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023279412A1 (en) * | 2021-07-05 | 2023-01-12 | 长鑫存储技术有限公司 | Air knife and cleaning apparatus |
| WO2023089004A1 (en) * | 2021-11-17 | 2023-05-25 | Krones Ag | Air blade device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102059031B (en) | Gas filter device | |
| CN108534539A (en) | A kind of porous type air blade device | |
| CN208704395U (en) | A kind of porous type air blade device | |
| TW200746251A (en) | Conveying/processing apparatus | |
| CN209230229U (en) | LCD substrate drying device | |
| CN207413039U (en) | A kind of exhaust gas spray process equipment | |
| CN205498441U (en) | English teaching blackboard wet or dry water conservancy diversion dust collector | |
| CN206401727U (en) | The internally dry dehumidifier of high-voltage board | |
| CN206089019U (en) | Special drainage system of airtight transportation of crude oil | |
| CN210699507U (en) | Nitric acid blows white exhaust-gas treatment equipment | |
| CN207734779U (en) | A kind of suction box | |
| CN105727872B (en) | Defoam offset plate material oxidation trough | |
| CN216223496U (en) | Impact wet dust collecting equipment with adjustable | |
| CN212651552U (en) | Waste gas treatment equipment | |
| CN205119393U (en) | High -efficient noise elimination static pressure case | |
| CN220233090U (en) | Sealing device for plasma cavity inlet and outlet | |
| CN204469468U (en) | A kind of aerosol cleaning device | |
| CN218101205U (en) | Wafer transmission system for controlling wind direction | |
| CN217474394U (en) | Metering bin with dustproof exhaust device | |
| CN215148807U (en) | Clean room is with workstation convenient to it is clean | |
| CN207739064U (en) | Paper making equipment oil suction ink system | |
| CN110270933A (en) | A kind of vaccum suction pipe and the sand flushing device using the vaccum suction pipe | |
| CN214389373U (en) | Dust removal and purification device for food workshop | |
| CN214513460U (en) | Stone dust remover | |
| CN220224344U (en) | Aluminum plate washs pickling tank |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |