CN218101205U - Wafer transmission system for controlling wind direction - Google Patents
Wafer transmission system for controlling wind direction Download PDFInfo
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- CN218101205U CN218101205U CN202122059158.4U CN202122059158U CN218101205U CN 218101205 U CN218101205 U CN 218101205U CN 202122059158 U CN202122059158 U CN 202122059158U CN 218101205 U CN218101205 U CN 218101205U
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- honeycomb core
- wafer
- auxiliary fixing
- fixing plate
- core plate
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Abstract
The utility model discloses a wafer transmission system for controlling wind direction, including system frame and the wafer transmission cavity that is located system frame inside, wafer transmission cavity includes the air intake that is located its top and the air outlet that is located its bottom, the air intake is fixed and is used for the fan filter unit of the air feed to wafer transmission cavity, the air exit of fan filter unit removes fixed honeycomb core, the air exit is vertical downwards; the honeycomb core plate comprises a plurality of through holes parallel to the air outlet. The utility model provides a pair of a wafer transmission system for controlling wind direction ensures the inside wind speed homogeneity of wafer transmission system, avoids the wafer to be damaged.
Description
Technical Field
The utility model belongs to the semiconductor device field specifically belongs to a wafer transmission system for controlling wind direction.
Background
FFU is called (Fan Filter Unit) in English, and Chinese is a Fan Filter Unit. But FFU fan filter screen unit modularization connects the use, uses FFU wide application in application occasions such as toilet, clean workstation, clean production line, assembled toilet and local hundred grades. The FFU is provided with a primary and a high-efficiency two-stage filter screen. The fan sucks air from the top of the FFU, the air is filtered by the primary and high-efficiency filters, and the filtered clean air is sent out at a constant speed of 0.45M/S +/-20% on the whole air outlet surface.
In a wafer transfer system, in order to ensure the cleanliness of the wafer surface, it is usually necessary to provide an FFU at the inlet of the wafer transfer system. In the past, the FFU directly supplies air to the inside of the equipment above the equipment, and ideally, the air is uniformly and vertically blown downwards, so that no vortex is generated in the ideal state. In the actual blowing process, wind generated by a fan in the FFU enters the wafer transmission chamber through the filter, and the wind entering the wafer transmission chamber has a part of disorderly transverse and oblique directions except downward; the air flow thus generates a vortex, with which dust particles inside the apparatus float and collect. Once a shift occurs when FFU wind speed is adjusted, the particles that have gathered and floated may collect on the wafer, causing the wafer to be scrapped.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the utility model provides a wafer transmission system for controlling wind direction ensures the inside wind speed homogeneity of wafer transmission system, avoids the wafer to be damaged.
In order to realize the purpose, the utility model adopts the following technical scheme: a wafer transmission system for controlling wind direction comprises a system frame and a wafer transmission chamber located inside the system frame, wherein the wafer transmission chamber comprises an air inlet located at the top end of the wafer transmission chamber and an air outlet located at the bottom end of the wafer transmission chamber; the honeycomb core plate comprises a plurality of through holes parallel to the air outlet.
Further, the height of the through hole is 13-17mm.
Further, the cross section of the through hole is in a regular hexagon shape.
Further, the perimeter of the regular hexagon is 8mm.
Furthermore, the honeycomb core plate is fixed on the auxiliary fixing plate through a fixing piece, and the auxiliary fixing plate is fixed on the system frame.
Further, the fixing piece comprises a gasket, a screw and a nut; the lower surface of the honeycomb core plate is in contact with the upper surface of the auxiliary fixing plate, the upper surface of the honeycomb core plate is in contact with the lower surface of the gasket, and the screw penetrates through the gasket, the through hole in the honeycomb core plate and the auxiliary fixing plate and is fixed through the nut.
Further, the fixing piece comprises a gasket, a screw and a nut; the upper surface of the honeycomb core plate is in contact with the lower surface of the auxiliary fixing plate, the lower surface of the honeycomb core plate is in contact with the upper surface of the gasket, and the screw penetrates through the gasket, the through hole in the honeycomb core plate and the auxiliary fixing plate and is fixed through the nut.
Furthermore, the auxiliary fixing plate is a strip-shaped auxiliary fixing plate.
Further, the sectional area of the gasket is larger than that of the through hole.
Further, the cross-sectional area of the auxiliary fixing plate is smaller than that of the honeycomb core plate.
The utility model discloses following beneficial effect has: the utility model discloses the oblique wind of air intake department and the production of crosswind in the effectual prevention cavity of ability, and then reduced vortex's in the cavity production for dust receives vertical wind-force to influence to be close to the smooth discharge of equipment bottom in the cavity. The method and the device can improve the problem of wind speed uniformity, reduce the floating amount of dust and reduce the possibility of wafer pollution.
Drawings
FIG. 1 is a schematic structural view of a honeycomb core board of the present invention;
FIG. 2 is a schematic view of one of the honeycomb core boards of the present invention;
FIG. 3 is a schematic view of the wind direction simulation after adding the honeycomb core plate of the present invention;
fig. 4 is a comparative air-out situation diagram of the honeycomb core plate not included in the prior art and the honeycomb core plate included in the present invention.
Reference numerals: 1 honeycomb core plate, 2 gaskets, 3 auxiliary fixing plates, 4 screws and 5 nuts.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following describes the embodiments of the present invention in further detail with reference to the accompanying drawings.
Wafer transmission systems are used for transporting or transmitting wafers in the semiconductor industry, and with the improvement of integration, more and more industries have new requirements on the cleanliness of the surfaces of the wafers, so that the cleanliness of each link of wafer transmission and processing needs to be continuously improved.
The application provides a wafer transmission system for controlling wind direction, which comprises a system frame and a wafer transmission chamber located inside the system frame, wherein the wafer transmission chamber comprises an air inlet, a fan filter unit used for supplying air to the wafer transmission chamber is fixed on the air inlet, a honeycomb core plate is fixed at an air outlet of the fan filter unit, and the air outlet is vertically downward; the honeycomb core plate comprises a plurality of through holes parallel to the air exhaust openings.
The specific fan in the application can be an FFU; the air inlet of the wafer transmission cavity is arranged at the top end of the cavity, the air outlet is arranged at the lower end of the cavity, and in the process that the air inlet and the air outlet form circulation, the circulating air can drive impurities such as particles in the cavity to be discharged out of the wafer transmission cavity together, so that the cleanliness of the interior of the wafer transmission cavity is ensured. Meanwhile, impurities in the air can be filtered through the FFU design, and the cleanliness of the air entering the wafer transmission chamber is guaranteed. Generally, the air blown from the air inlet is downward, and the air inlet and the air outlet are located at the top end and the bottom end of the wafer conveying system, respectively. When the honeycomb core plate is not added, even if the air inlet and the air outlet are positioned at the opposite positions up and down, oblique wind and transverse wind are generated inside the wafer transmission chamber; as shown in fig. 3, after the honeycomb core plates are added, the wind direction changes to be vertical downward after the backflow effect, so that the wind direction in the wafer transmission chamber can be ensured to be vertical downward.
Referring to fig. 1, a detailed schematic diagram of one of the honeycomb core plates of the present application is shown, in which the height of the through holes is selected to be 15mm. The cross section of the through hole is in a regular hexagon shape; the perimeter of the regular hexagon is 8mm. The cross-sectional shape of the middle through hole of the utility model can also be other shapes.
Contain a plurality of through-holes among the honeycomb core, unable snap-on is in system frame or air outlet department, the utility model discloses well honeycomb core fixes on auxiliary fixed plate with the help of the mounting, then fixes auxiliary fixed plate on system frame again. The auxiliary fixing plate can be a strip-shaped auxiliary fixing plate and can not shield all through holes of the honeycomb core plate, so that the strip-shaped auxiliary fixing plate can be optimized, only two ends of the strip-shaped auxiliary fixing plate are required to be fixed on the system frame, and the honeycomb core plate is fixed in the middle of the strip-shaped auxiliary plate; in order to fix the honeycomb core plate firmly, the honeycomb core plate can be fixed by a plurality of strip-shaped auxiliary fixing plates.
FIG. 2 is a schematic view of one of the fixtures; in the embodiment, the honeycomb core plate and the auxiliary fixing plate are fixed through fixing pieces, and the fixing pieces comprise gaskets 2, screws 4 and nuts 5; the lower surface of the honeycomb core plate 1 is in contact with the upper surface of the auxiliary fixing plate 3, the upper surface of the honeycomb core plate 1 is in contact with the lower surface of the gasket 2, and the screw 4 penetrates through the gasket 2, the through hole in the honeycomb core plate and the auxiliary fixing plate 3 and is fixed through the nut 5. In this structure, the nut may be fixed to the lower surface of the auxiliary fixing plate or may be fixed to the upper surface of the spacer; only the gaskets on the upper side and the lower side of the honeycomb core plate and the auxiliary fixing plate are pressed tightly through the bolts and the nuts. In the embodiment, the number of the fixing parts is 15, and the fixing parts are uniformly distributed on the three auxiliary fixing plates to firmly fix the honeycomb core plate.
In the same way, the gasket can be arranged at the lower end of the honeycomb core plate, the auxiliary fixing plate is arranged at the upper end of the honeycomb core plate, and the fixing effect on the honeycomb core plate can be realized. For example: the upper surface of the honeycomb core plate is in contact with the lower surface of the auxiliary fixing plate, the lower surface of the honeycomb core plate is in contact with the upper surface of the gasket, and the screw penetrates through the gasket, the through hole in the honeycomb core plate and the auxiliary fixing plate and is fixed through the nut. In this structure, the nut may be fixed to the upper surface of the auxiliary fixing plate or may be fixed to the lower surface of the spacer; only the gaskets on the upper side and the lower side of the honeycomb core plate and the auxiliary fixing plate are pressed tightly through the bolts and the nuts.
It should be noted that the cross-sectional area of the auxiliary fixing plate needs to be smaller than the cross-sectional area of the honeycomb core plate, so that the through holes in the honeycomb core plate outside the auxiliary fixing plate can achieve the function of guiding the wind direction, and if the auxiliary fixing plate completely covers the honeycomb core plate, the function of guiding the wind direction cannot be achieved. The fixing pieces are uniformly distributed on the strip-shaped auxiliary fixing plate, the whole strip-shaped auxiliary fixing plate is not required to be fixed by the fixing pieces, only the auxiliary fixing plate is required to be arranged at a selected proper position, and the fixing pieces are arranged at the proper position of the auxiliary fixing plate, so that the honeycomb core plate is ensured to be firmly fixed on the auxiliary fixing plate; generally, the strip-shaped auxiliary fixing plates may be uniformly distributed in different directions of the honeycomb chip, and the fixing members may be uniformly distributed on the auxiliary fixing plates.
In the utility model, since the honeycomb core plates are all of through hole structures and can not be fixed, the honeycomb core plates can be fixed by means of gaskets, and the sectional area of each specific gasket needs to be larger than that of a single through hole; in practical operation, the gasket can be kept the same as the cross-sectional area of the auxiliary fixing member, that is, the cross-sectional area of the auxiliary fixing plate is kept consistent, or a separate gasket can be arranged only at the position where the fixing member needs to be fixed for fixing, and the area of the single gasket is smaller than the cross-sectional area of the auxiliary fixing plate.
The utility model discloses well FFU below installation honeycomb core utilizes the through-hole direction to make the wind direction blow down in the honeycomb core, can effectual prevention oblique wind and the production of crosswind, has avoided the production of vortex in the wafer transmission cavity. And then the dust in the wafer transmission chamber is guided by vertical wind power and is smoothly discharged close to the bottom of the equipment. The even problem of wind speed can be improved to honeycomb core plate structure in this application, reduces the dust and floats quantity, reduces the wafer contaminated possibility.
The utility model discloses the problem of the unable homogeneity of realization of inside wind speed of effectual solution wafer transmission system avoids the wafer to damage. When the honeycomb plate is not added, after the wind blows out, transverse wind can be generated, and vortex is generated; when the honeycomb core plate is added, as shown in figure 3, wind passes through the through holes in the honeycomb core plate and directly faces downwards, and part of wind is produced and collides with the through holes and then faces downwards again.
As shown in fig. 4, a test report before and after the use of the honeycomb core of fig. 1 is shown. Fig. 4 examines the contents: the wind speed inside the casing was measured to confirm the FFU characteristics.
The measuring method comprises the following steps: an anemometer and a differential pressure meter are arranged in the outer cover. Wind speed is measured relative to the volume of the FFU.
Wind speed measurement points: reference numerals in FIG. 4
Where the wind speed measurement point position: transverse: LP1, LP4 central position; depth: LP back position 150mm; height: 200mm under the FFU, and LP Slot1. Differential pressure measurement points: reference numerals in FIG. 4
Treating; the position of a differential pressure measuring point is as follows: transverse: a housing center; depth: the central portion of the housing.
The test conditions are as follows: LP gate closed/RB stopped state.
A measuring instrument: wind speed test: ultrasonic anemometer CLIMOMASTER (MODEL: MODEL6543, serial:600602, manufacturer: KANOMAX).
And (3) differential pressure test: a differential pressure gauge body (model: EMT1BOFVD, manufacturer: shanben motor), and a display (model: EMP3D011D, manufacturer: shanben motor).
In fig. 4, the test data is shown in table 1 when no honeycomb core is added, and the test data is shown in table 2 when a honeycomb core is added:
TABLE 1 test data without honeycomb core
| |
1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 |
| Rotating speed (r/min) | 750 | 800 | 850 | 900 | 950 | 1000 | 1050 | 1100 | 1150 | 1200 |
| Under LP1 FFU | 0.78 | 0.84 | 0.87 | 0.97 | 0.99 | 1.07 | 1.20 | 1.25 | 1.32 | 1.50 |
| Under LP2 FFU | 0.52 | 0.55 | 0.57 | 0.59 | 0.59 | 0.60 | 0.60 | 0.63 | 0.64 | 0.64 |
| Absolute value (Difference) | (0.26) | (0.29) | (0.30) | (0.38) | (0.40) | (0.47) | (0.60) | (0.62) | (0.68) | (0.86) |
Table 2 test data for adding honeycomb core board
| |
1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 |
| Rotating speed (r/min) | 750 | 800 | 850 | 900 | 950 | 1000 | 1050 | 1100 | 1150 | 1200 |
| Under LP1 FFU | 0.34 | 0.37 | 0.41 | 0.44 | 0.47 | 0.51 | 0.52 | 0.53 | 0.57 | 0.59 |
| Under LP2 FFU | 0.32 | 0.35 | 0.38 | 0.40 | 0.44 | 0.46 | 0.49 | 0.52 | 0.54 | 0.57 |
| Absolute value (Difference) | (0.02) | (0.02) | (0.03) | (0.04) | (0.03) | (0.05) | (0.03) | (0.01) | (0.03) | (0.02) |
It can be seen through the experimental data of test report in fig. 4 that, when FFU adds the utility model discloses the time, reduced the wind speed value under LP, reflect the utility model discloses the vortex of effectual reduction both sides produces, and it is even to improve the wind speed.
The above description is only a preferred embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, so that all the structural changes equivalent to the contents of the description and the drawings of the present invention are included in the scope of the appended claims of the present invention.
Claims (10)
1. A wafer transmission system for controlling wind direction is characterized by comprising a system frame and a wafer transmission chamber located inside the system frame, wherein the wafer transmission chamber comprises an air inlet located at the top end of the wafer transmission chamber and an air outlet located at the bottom end of the wafer transmission chamber; the honeycomb core plate comprises a plurality of through holes parallel to the air exhaust openings.
2. The wafer conveying system for controlling wind direction as claimed in claim 1, wherein the height of the through hole is 13-17mm.
3. The wafer conveying system for controlling the wind direction as claimed in claim 1, wherein the cross section of the through hole is a regular hexagon.
4. The wafer transfer system for controlling wind direction as claimed in claim 3, wherein the perimeter of the regular hexagon is 8mm.
5. The wafer transfer system according to claim 1, wherein the honeycomb core is fixed to an auxiliary fixing plate by a fixing member, and the auxiliary fixing plate is fixed to the system frame.
6. The wafer transfer system for controlling the direction of wind as claimed in claim 5, wherein the fixing member comprises a washer, a screw and a nut; the lower surface of the honeycomb core plate is in contact with the upper surface of the auxiliary fixing plate, the upper surface of the honeycomb core plate is in contact with the lower surface of the gasket, and the screw penetrates through the gasket, the through hole in the honeycomb core plate and the auxiliary fixing plate and is fixed through the nut.
7. The wafer transfer system for controlling the direction of wind as claimed in claim 5, wherein the fixing member comprises a washer, a screw and a nut; the upper surface of the honeycomb core plate is in contact with the lower surface of the auxiliary fixing plate, the lower surface of the honeycomb core plate is in contact with the upper surface of the gasket, and the screw penetrates through the gasket, the through hole in the honeycomb core plate and the auxiliary fixing plate and is fixed through the nut.
8. The system as claimed in claim 5, wherein the auxiliary fixing plate is a strip-shaped auxiliary fixing plate.
9. The wafer transfer system of claim 6, wherein the cross-sectional area of the spacer is larger than the cross-sectional area of the through hole.
10. The wafer conveying system for controlling the wind direction as claimed in claim 5, wherein the cross-sectional area of the auxiliary fixing plate is smaller than that of the honeycomb core plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122059158.4U CN218101205U (en) | 2021-08-30 | 2021-08-30 | Wafer transmission system for controlling wind direction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122059158.4U CN218101205U (en) | 2021-08-30 | 2021-08-30 | Wafer transmission system for controlling wind direction |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218101205U true CN218101205U (en) | 2022-12-20 |
Family
ID=84442717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122059158.4U Active CN218101205U (en) | 2021-08-30 | 2021-08-30 | Wafer transmission system for controlling wind direction |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218101205U (en) |
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2021
- 2021-08-30 CN CN202122059158.4U patent/CN218101205U/en active Active
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