KR910006190B1 - Clean room systems - Google Patents

Abstract

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Description

Clean room device

1 is a view showing a front downflow type clean room of the prior art,

Figure 1a is a cut flat surface,

Figure 1b is a side cross-sectional view.

2 is a view showing a construction example of a clean room device according to the present invention,

Figure 2a is a cut plan view,

Figure 2b is a side cross-sectional view.

3 is a cross-sectional view perpendicular to the longitudinal direction showing an example of the configuration of the clean room apparatus.

4 is a perspective view showing its appearance.

5 is a cross-sectional view perpendicular to the longitudinal direction showing another configuration example of the clean room apparatus.

6 is a cross-sectional view perpendicular to the longitudinal direction of another configuration in which the cleanliness retention performance is further improved.

7 is a perspective view showing its appearance.

8 is a side cross-sectional view showing a modified construction of the present invention.

9 is a partial cutaway front view showing a general example of a high performance filter attachment structure.

10 is a cutaway side view thereof.

Fig. 11 is a partially cutaway front view showing an example of improvement of a high performance filter attachment structure.

12a, b, and c are cutaway side views thereof.

13 is a view showing a general example and an improvement example of the diffuser plate,

13A is a diffuser plate attachment state of a general example;

13b is a perspective view of a diffuser plate and a reinforcement chassis of a general example,

13C is a cutaway side view thereof,

13d is a perspective view of the diffuser plate and the reinforcement plate of the improved example,

13E is a cutaway side view thereof,

13f, g are detailed sectional views of the reinforcing plate attachment portion.

14 is a view showing an improvement example of the diffuser plate attaching structure.

Figure 14a is a partial cutaway front view,

14b is a partial plan view,

14C is a perspective view of the attachment piece.

15A and 15B are partial cutaway front views showing an example of improvement of the attachment structure of the passage diffuser plate;

Fig. 16 is a partially cutaway front view showing an example of improvement of a structure for attaching a lamp.

FIG. 17 is a view showing an improvement example relating to the air volume control and the backflow prevention of the blower.

17a is a front view of a partial cut during blowing;

Figure 17b is a partial cutaway front view of the ventilation stop,

17C is a partial cutaway side view of the blowing air;

18 is a cutaway front view showing a general example of an air conditioning duct connection structure.

Fig. 19 is a cutaway front view showing an example of improvement of the air conditioning duct connection structure.

FIG. 20 is a detailed view of the air conditioning duct connection of the improvement example shown in FIG.

20a, c are partial cutaway front views,

20b, d are side views.

21 is a view showing a modification of the clean room device,

Figure 21a is a cut front view,

Figure 21b is a partial cutaway side view.

22 is a perspective view showing another modification of the clean room device.

* Explanation of symbols for main parts of the drawings

1 Building 9 Equipment for Manufacturing Line

10 pipes 11: clean room device according to the present invention

12: clean room 12a: indoor working part

12b: indoor passage 13: return air intake

14: side exhaust port 15: air inlet connected to the air supply duct

16: conservation station 17: landlord

18: sideways 19: top plate

20: side plate 23: blower

24: high performance filter for passage part 25: high performance filter for work part

34: floor exhaust 101: clean air outlet for the working part

102: clean air outlet for the passage

The present invention relates to a clean room apparatus for creating a clean working environment required for the manufacture of semiconductors and the like.

FIG. 1 shows a typical example of a clean room apparatus (front downflow clean room) used in a semiconductor manufacturing process. a is a cut plane view, b is a side view, (1) a building, (2) a clean room, (3) a high-performance filter, (4) a lamp, (5) a perforated ceiling plate, ( 6) bottom perforated plate, (7) air supply duct for air conditioning, (8) air return feedback duct, (9) equipment for manufacturing lines such as exposure, etching, diffusion, metallization, ( 10) is a pipe that supplies water, gas, and the like to the manufacturing line. As shown by the arrow in the figure, the clean air treated with the high performance filter 3 is ejected from the front of the ceiling to the room 2, and the room air is discharged through the floor. As a result, the entire interior is maintained at a substantially uniform high cleanliness, and the work of the entire process can be performed in this clean atmosphere. This front-downflow electric clean room is the best way to increase the cleanliness of the whole room, but it has the following drawbacks.

(1) The facility cost is very high because of the large area for clean-up and air-conditioning and the use of expensive high-performance filters in large quantities.

(2) Running costs such as air conditioning maintenance cost and filter replacement cost are high.

(3) The air conditioning temperature control for each production line cannot be performed because the whole room is air-conditioned.

(4) Since the equipment for the production line and the pipes are repaired in the clean room, the effect of the oscillation on other production lines (process) is large.

An object of the present invention can improve the workability of the operator in the clean room because even if the clean room device is installed in the existing building, the height of the passage space can be increased without increasing the external dimension in the height direction of the clean room device. In addition, the present invention provides a clean room apparatus that can prevent a decrease in the cleanliness caused by the inflow of polluted air, thereby maintaining high cleanliness, and furthermore, it is easy to install and lower the cost of equipment.

In order to achieve the above object, the clean room apparatus of the present invention surrounds a manufacturing line consisting of work tools arranged in a predetermined direction to be isolated from the building space to form a clean space independent of the building, and the work equipment is disposed in the clean space. Arranging a work space and a passage space formed in parallel with the work space, installing an air purifying means having a filter arranged to blow clean air in a downward direction and a transverse direction on an upper portion of the work space, It is characterized by supplying from the side to the upper part of the passage space from the upper to the working space.

2 is a view showing a construction example of a clean room apparatus according to the present invention, in which a is a cut plane view, b is a side cross-sectional view, and the same reference numerals as in FIG. 1 indicate corresponding parts.

In the building 1 in which the air-conditioning air supply duct 7 and the air-conditioning return duct 8 are installed, the apparatus 9 for the production line is faced to each other, and a pair of two lines is covered with a clean room apparatus 11. Although the details will be described later, the clean room apparatus 11 incorporates an air purifying means in the ceiling thereof, and cleans the room by blowing clean air from the ceiling surface into the clean room 12 as indicated by arrows in the figure. The indoor air is discharged from the side exhaust vent 14 to the surrounding maintenance zone 16, whereby the maintenance zone 16 is also somewhat cleaned, but lower in cleanliness than the clean room 12. The end panels 11a provided with doors are attached to both ends of the clean room apparatus 11 so as to partition the clean room and the maintenance area 16. Pipes 10 and electric wires, such as water and gas, used in the manufacturing line are installed in the maintenance station 16, and are introduced into the manufacturing line device 9 through the side exhaust pipe 14. By doing in this way, repair of pipings 10, an electric wire, etc. can be performed in the maintenance area 16. FIG. In addition, as long as the side plate of the clean room apparatus 11 can be partially detached as mentioned later, most maintenance of the manufacturing line apparatus 9 can also be performed in the maintenance area 16. FIG. In addition, even when repairing a set of a manufacturing apparatus of a process, it can be processed only in a clean room of the process, so that oscillation by the repair work hardly affects other manufacturing lines (processes).

In addition, by connecting the air inlet 15 of the clean room apparatus 11 to the air conditioning air supply duct 7, the temperature, humidity, etc. of the clean room 12 can be controlled, and the air conditioning temperature for each manufacturing line (process) Control is also possible. Even in this case, it is better to draw a part of the indoor air discharged from the side exhaust port 14 from the other air intake 13 and to recycle it.

As described above, the clean room apparatus according to the present invention cleans only the manufacturing line part requiring high cleanness from the surrounding maintenance area, so that the cleansing area and the air conditioning target area can be significantly reduced compared to the conventional method of FIG. Has an advantage.

3 shows one example of the configuration of the clean room apparatus. This figure is sectional drawing perpendicular | vertical to the longitudinal direction of a clean room apparatus, Comprising: A door-type frame is assembled by the support | pillar 17 and the horizontal beam 18, and this is a top plate 19 and the side plates (both sides). 20) to form a tunnel-type cover, and the work part 12a for installing the manufacturing line device 9 in the clean room surrounded by the tunnel-type cover and the bottom surface and the passage part 12b through which the worker passes. Are installed continuously in the longitudinal direction of the clean room. Reference numerals 101 and 102 denote clean air jets for the working part and clean air jets for the passage part, respectively. Between the air blower 101 for the work part 101 and the top plate 19, a blower 23, a high-performance filter 24, 25, a blower chamber 26, and a work part light 27, which are air purifying means, are stored. Then, a grid-shaped diffuser plate 28 is provided under the lamp 27. These base materials are suspended and supported by the sideways 18 by the method of mentioning later. Reference numeral 30 denotes a partition plate for partitioning between the clean air jet port 101 for the work part and the clean air jet port 102 for the passage part. Between the passage part clean air blower outlet 102 and the top plate 19, the passage part lighting lamp 22 is accommodated as an air path, and the grid-shaped diffuser plate 29 is provided below it. The height of the air outlet of the aisle is high enough that a worker can stand and pass, and the height of the air outlet of the work part is low as long as there is no problem in the work (for example, the height of the air outlet of the aisle is 2200 mm and the height of the air is 1800 mm). This is because the height of the work air outlet is as low as possible so that the airflow in the work space is less scattered and the cleanliness performance is improved. In this case, since the high-performance filter, the blower, etc. are not stored on the clean air outlet 102 for the passage part, even if the height of the passage part air outlet is high, the entire height of the top plate 19 can be approximately the same height, so that the overall height can be reduced. have.

By the operation of the blower 23, the external air is sucked from the air intake port 13 through the prefilter 21. A part of the air blown out from the blower 23 is purified by the high performance filter 25, and then blown downward from the clean air blower 101 for the work part to the work part 12a in the room, and from the blower 23. The remaining air that is sent out is cleaned by the high performance filter 24 and then blown downward from the clean air jet port 102 for the passage section to the passage section 12b in the room. Arrows in the figure indicate the flow of air. Diffuser plates 28, 29 will be installed for light diffusion and rectification of the clean air stream.

In the present embodiment, the air purifying means 120 having the filters 24 and 25 arranged to blow clean air in the downward and transverse directions is installed on the upper part of the working space 12a, and the clean air is provided in the working space. Since 12a is configured to be supplied from the upper side to the passage space 12b from the side, respectively, the air purifying means 120 is merely installed on the upper portion of the work space 12a, so that the work space 12a and the passage space ( Clean air can be supplied to both sides of 12b). In addition, the air purifying means 120 is disposed in the upper portion of the work space 12a, as shown in Figure 11, is supported by the frame body through the sideways 49, it is possible to reduce the weight on the ceiling, Furthermore, since the weight is biased against the strut 17 instead of the center of the ceiling, the bending of the top plate 19 can be made small, and the occurrence of gaps in the ceiling can be prevented and the appearance of the product is prevented from being damaged. can do.

In addition, since the filter 24 of the air purifying means is provided above the work space 12a and supplies clean air from above the passage space 12b, the upper portion of the passage space 12b can be made a simple space. . Therefore, this space can be used to absorb the dimensional error at the time of installation, and furthermore, since this space is filled with clean air, between the ceiling of the passage space 12b and the ceiling of the work space 12a at the time of installation. Even if a gap occurs in the air, air that does not pass through the filter 24 can be prevented from entering the passage space 12b. Thereby, the sealing work etc. of a ceiling part can be simplified significantly, and the workability at the time of installation improves, and the fall of the cleanness of the passage space 12b can be prevented.

The air velocity of the clean air flow is set according to the required cleanliness of each part, for example, 0.4 m / s in the work part 12a and 0.2 m / s in the passage part 12b. By doing this, the cleanliness of the work part 12a can be made higher than the cleanliness of the passage part 12b.

The clean air flowed into the room flows as indicated by the arrows in the figure, and is discharged to the outside (maintenance area) from the side exhaust port 14 installed at the lower side of the side plate 20. Since the indoor pressure becomes a positive pressure with respect to the outside air by the amount of pressure loss in the side exhaust port 14, the inflow of contaminated air from the outside can be prevented. The side exhaust pipe 14 is also used to draw piping or wires such as water and gas into the production line. The side plate 20 is partially detachable using screw fixing or fixing brackets for the maintenance of piping or equipment. In addition, part of the side plate 20 may be made of a transparent plate in order to improve an indoor working environment and to manage work from the outside.

4 shows the appearance of a clean room device according to the present method, which is formed by connecting a plurality of modular clean room devices.

5 shows an example of the configuration of the clean room apparatus when the production line is on one side of the passage in a cross section perpendicular to the longitudinal direction. In Fig. 5, the same reference numerals as those in Fig. 3 show corresponding parts, and are substantially different from those in Figs. 3 and 4 except that one side of the passage portion 12b is blocked by the side plate 20. Figs. There is nothing.

6 shows another configuration example of the clean room apparatus having further improved cleanliness performance. In this example, the bottom exhaust port 34 is installed on the bottom surface of the central passage in the clean room and combined with the side exhaust port 14 at the lower side of both side plates to exhaust the gas at three places. In particular, the purifier of the indoor work part 12a is provided. When the flow is divided into two, as indicated by the arrow, to be discharged from both the bottom exhaust port 34 and the side exhaust port 14, the oscillation from the operator passing through the passage portion 12b is provided with the equipment 9 for the production line. It can be prevented from flowing into the working portion 12b, it is possible to improve the cleanliness maintenance performance. For this purpose, it is preferable to maintain the wind speed of the clean air in relation to the average wind speed of the passage section ≤ the average wind speed of the work section. In addition, when it is necessary to increase the opening dimension of the side exhaust pipe 14 due to the introduction of the type pipes, a soft partition cover is provided on the side exhaust pipe 14 to prevent the displacement of the floor exhaust pipe 34 from decreasing. Attach (36) to adjust the displacement. When the partition cover 36 is made of a soft material such as a rubber plate, the opening dimension of the side exhaust pipe 14 can be partially enlarged so as to pass through the pipes.

Conventional front downflow type clean room was weak against vibration because the whole floor is made of porous plate, but the clean room device of the present invention shown in FIG. Since the bottom surface of the work part is flat, the strength of the floor can be increased, and it is also excellent in the point of vibration prevention of a semiconductor manufacturing apparatus which performs fine processing.

In addition, in FIG. 6, the side plate 20 and the side plate are provided with the side plate duct 32 which is provided on the outside of the side plate 20 again to be connected to the side vent 14 and the bottom floor ventilation duct 35. And a large part of the exhaust gas flows from the side ventilation duct 32 to the air inlet 13 through the prefilter 21 and is supplied from the air conditioning duct to the air inlet 15. Only the portion corresponding to the amount of air is discharged from the exhaust port 33 provided under the side plate 31 to the outside (maintenance area). Since this system uses most of the air circulating locally, it is also separated from the conservation area, and the effect of ultra-cleaning indoor air and saving energy of air conditioning is also great. FIG. 7 is a perspective view showing the appearance of the clean room apparatus shown in FIG. The methods of FIGS. 6 and 7 are the most expensive in the previous embodiments, but are still cheaper than the front downflow method because expensive high performance filters are used only inside the clean room apparatus.

The method shown in FIG. 8 can also be said to be a modification of the method of FIG. 6 and FIG. 7, and suppresses the maintenance area 16 between adjacent clean room devices 11 to a minimum space, and this part Is used as a return passage for clean air. Reference numeral 37 denotes a floor ventilation mechanism of the maintenance station 16 that contacts the floor ventilation duct 35.

According to the structure shown in FIGS. 3-7, since the top plate of the clean room apparatus 11 can be made substantially flat, the ceiling partition plate 38 is provided between adjacent clean room devices, and it is between a building ceiling. Since the air-conditioning air supply duct 7 can be easily formed, the duct construction cost can be reduced significantly.

The overall configuration of the clean room apparatus and the system using the above has been described.

Next, a detailed improvement example is demonstrated.

9 and 10 show an attachment structure of a high performance filter generally conceivable. In a clean room apparatus, air-conditioning ducts and the like are often installed thereon, and therefore, it is necessary to repair the high-performance filter and the like inside the clean room. In FIG. 9, the high performance filter 24 for the passage part and the high performance filter 25 for the work part are attached to the filter case 42 with the attachment piece 39. When the filter is replaced, the work part diffuser plate 28, The work piece lamp 27 is peeled off, and then the attachment piece 39 is peeled off to remove the work piece high performance filter 25 downward. This is the way in which it is commonly thought, but it has the following drawbacks:

(1) If the method of attaching the high performance filter is bad, leakage of contaminated air 40 occurs, resulting in a decrease in cleanliness of the room.

(2) The stagnation of air 41 is generated around the high-performance filter, so that the cleanliness does not increase, and in the long term, the stagnant dust, etc., comes out to the clean room side and impairs the cleanliness.

(3) The outer frame of the high-performance filter is usually made of wood, and it is not preferable that the wood is exposed on the clean room side as a source of dust.

11 and 12 show the attachment structure of the high performance filter which has improved these disadvantages. In this example, the high-performance filter 24 for the passage portion and the high-performance filter 25 for the work portion are attached to the blowing chamber 26 by the pressing frame 44 and the attachment piece 39 each having a cross section b. The upstream side and the downstream side (clean room side) of the high performance filters 24 and 25 are partitioned by the partition plate 46 and the partition makeup plate 30. However, in order to take out the pressing frame 44 and the high performance filters 24 and 25 at the time of replacing the filter, a certain interval is required between the partition plate 46 and the partition makeup plate 30 and the pressing frame 44. Do. This gap is filled by the seal packing 45 so that no contaminated air leaks in this gap. With such a structure, even if the position of the pressing frame 44 is shifted by the tightening degree of the high performance filters 24 and 25, the above-mentioned space | interval dimension does not change. Therefore, a seal effective by the seal packing 45 is provided. I can do it. By this improvement, since the high performance filter can be repaired from the clean room, the following effects are obtained.

는 정압부,

는 부압부를 나타냄).(1) Even if contaminated air leaks between the blower chamber 26 due to poor attaching method of the high performance filter, the surroundings of the high performance filter have a negative pressure so that the contaminated air does not leak to the clean room side (11th). On the way

Is the static pressure part,

Indicates a negative pressure portion).

(2) No air congestion occurs in the clean area around the high performance filter.

(3) The wood frame of the high-performance filter is exposed to the clean room side and does not become a pollution source.

(4) Even if a defect occurs in the seal packing 45, clean air only flows into the negative pressure portion around the high performance filter, and contaminated air does not leak to the clean room side.

This improvement is not limited to a clean room apparatus, but can also be applied to other air purifiers using high performance filters such as clean benches.

Next, an example of improvement of the flow of clean air at the air ejection port will be described.

In a generally conceived manner, as shown in FIG. 10, the filter case 42 is sequentially connected to each other in the longitudinal direction of the clean room apparatus. In this case, the filter case 42 is usually slightly bent in the horizontal direction of the edge portion of the air outlet for the attachment of the diffuser plate 28 or the reinforcement of the filter case itself, so that as shown in the figure Vortex 43 occurs in the vicinity of the connection part of 42, and this vortex may attract an operator's oscillation and the like, causing a decrease in cleanliness.

In the improvement example shown in FIG. 12A, since there is no bend in the edge of the air ejection port 44 of the pressing frame 44 that prevents air flow, no vortex is generated, and the flow of clean air is improved. However, in FIG. 12A, since the wind speed tends to be slow in the vicinity of the connecting portion of the pressing frame 44 which is still adjacent to salt, an improvement example is shown in FIGS. 12B and C. FIG.

In the improvement of FIG. 12B, the diffusion punching plate 47 is partially provided in the lower part of the ejection opening of the high performance filter 25, so that a lot of air flows at the end of the ejection opening where the punching plate 47 does not exist, and the wind speed of the ejection opening It is averaged. The diffusion punching plate 47 also serves to prevent turbulence by the lamp 27 and is installed below the lamp 27, and the material may transmit light.

In addition, in the improved example of FIG. 12C, the wind direction plate 48 is provided in the lower part of the blower outlet of the high performance filter 25, and a lot of airflow flows to the tip of a blower outlet, and the wind speed is averaged.

By these improvement, the generation | occurrence | production of the vortex near the jet nozzle end can be prevented, and also a clean airflow can be made uniform, and cleanliness can be improved.

Next, the improvement example of the attachment structure of an air purification unit is demonstrated based on FIG. 9 thru | or FIG. As shown in FIG. 9 and FIG. 10, generally, the ceiling part of the clean room apparatus containing the filter case 42 is comprised by a sheet metal case, and the method of connecting in the longitudinal direction is normally used. In this case, since there are considerable irregularities on the floor of the building, the height of the ceiling becomes uneven along the floor in the way of assembling the posts on the floor, and especially when viewed in a clean room, the passage diffuser 29 And the front face of the filter case 42 is wavy, and there is a problem that the merchandise is impaired. Therefore, in the improvement example shown in FIG. 11 and FIG. 12, the rear part of the blowing chamber 26 is mounted on the sideways 49 of the ceiling part, and it is fixed by the attachment piece 50, and the whole of the passage side is turned on the turnbuckle 51 It was set as the structure to hang from the top plate 19, and to support. The one end of the blower chamber 26 is fixed to the sideways 49 because it is insufficient to be earthquake-resistant only by hanging it, and there is a fear that the hanging portion moves and breaks during an earthquake. According to this structure, even when the top plate 19 is made to wave in accordance with the irregularities of the bottom surface, the turntable 51 can adjust the partition makeup plate 30 on the side of the passage portion horizontally. Since the diffuser plate 29 can also be adjusted horizontally, it is possible to eliminate defects in the attachment of components.

Next, the improvement example of a diffuser plate is demonstrated based on FIG. A lattice type occasional molded article is usually used for the work part diffuser 28 and the passage part diffuser 29. In this case, when the diffuser plate is used alone, as shown in FIG. 13A, the diffuser plate 28 is bent due to its own weight, and therefore, as shown in FIG. The reinforcement chassis 52 of the mold is enclosed and reinforced. However, in this structure, as shown in FIG. 13C, since the reinforcing chassis 52 obstructs airflow, a vortex 43 is generated downstream thereof to achieve cleanliness. The improvement example is shown to FIG. 13d-g degree. As shown in FIGS. 13D and e, only a part of the reinforcing plate 53 is attached to the upper surface of the diffuser plate 28. The details of the attachment portion of the reinforcement plate 53 are as shown in Figs. 13F and 13G, and the recessed portion of the reinforcement plate 53 is attached to the diffuser plate 28 by the attachment holes 54 or 55. Fix it to the upper surface of. According to this structure, only the part of the reinforcement board 53 which obstructs airflow is only a little, and a vortex decreases significantly compared with the structure of FIG. 13b, c degree.

In Fig. 14, the diffuser plate attaching structure shows an improvement example. An attachment piece 56 having a ＂B＂ shape as shown in FIG. 13C is attached to the partitioning plate 30 for partitioning with a pin 58. The attachment hole of the attachment piece 56 is a long hole, and the attachment piece 56 is slidably moved left and right more than one grating | lattice of the diffuser plate 28. As shown in FIG. The lattice of the diffuser 28 is attached to the click 57 provided on the attachment piece 56, and is attached as shown in Figs. 14A and 14B. The diffuser plate may be used as shown in FIG. 13D because it does not disturb the airflow. Compared with the conventional diffuser plate attaching structure shown in FIG. 10, the advantage of this improvement is that it is continuous by using the fixed material of the diffuser plate, as shown in FIG. 12A, regardless of the dimensions of the high performance filter. Attach it. In this case, if the attachment piece 56 is allowed to slide more than one eye of the diffuser plate 28, it can cope with any position where the diffuser plate 28 comes.

15 shows an improvement of the method of attaching the passage diffuser. In assembling work of the clean room device, the door frame is manufactured and the air purifying unit is attached to the ceiling of the working part. In this case, the diffuser cardboard portions of the partitioning screen pad (30) with a shape shown in FIG claim 15a also or b, each part dimensions L _1, L _2, L ₃ and passage width ℓ ₁ of the acid gwangpan 29 And the relationship between the dimension l ₂ at a glance.

(1) L ₁ 〉 ℓ ₁ , (2) L ₂ 〉 ℓ ₂ , (3) L ₂ + L ₃ 〈ℓ ₁

In this way, an error in the passage dimension increases, and when the original diffuser plate does not enter, the grating of the grating can be cut off. It is important to be able to cut at a glance because cutting the diffuser in the middle of the lattice weakens the strength.

Next, an example of improvement of the lighting lamp attachment structure will be described. Lighting lamps are generally attached as shown in Figs. 22 and 27 of FIG. 3, but since they are all located at the outlet of the high performance filter, they obstruct the airflow in a room that requires a high degree of precision, There is a defect such as accumulation. In the improvement example shown in FIG. 16, the lighting lamps 22 and 27 are accommodated in the lighting case 61, embedded in the partition board 30 and the side plate 20, and light-transmitted to the surface. The cover 59 is covered to distinguish it from the clean area. In this way, necessary illumination can be provided as a structure having no oscillation source at the ejection openings of the high performance filters 24 and 25. The lighting case 61 is used to improve the lighting by internal reflection. When the vent hole 60 is disposed in this case, the temperature rise can be prevented and the inside of the case becomes negative pressure, so that the polluted air No leaks into clean areas. The punching plate 62 may be attached to the ejection openings of the high performance filters 24 and 25 in order to protect the high performance filter and to improve the air flow distribution. This improvement can be applied to other air purifiers, such as a clean bench.

Fig. 17 shows an improvement on the airflow control and the backflow prevention of the blower. In principle, a clean room such as a clean room device is operated continuously to maintain cleanness, but it is not economical to operate the entire air volume at the time of non-working at night. Therefore, it is preferable to stop some blowers to adjust the air volume. In this case, if some blowers are stopped as in the structure shown in FIG. 11, air flows back from the stopped blower, and if the loss is large, the blower drive motor is reversed by reverse flow in the case of a single-phase motor. There is a significant drawback that the motor will not return to normal operation when running. In the improvement example of FIG. 17, the damper 63 which opens and closes with respect to the branch shaft 64 was provided in the blower outlet of the blower 23, respectively. The damper 63 is in the open state shown in Fig. 17a by the wind pressure during the blowing, and in the closed state shown in Fig. 17b by the rotational force by the weight (or spring) 65 at the time of blowing stop. Prevent backflow of air. In addition, when the open angle of the damper 63 is made smaller than 90 degrees as shown in FIG. 17A, even when the blower 23 is structurally attached and the damper 63 is attached to the wind direction plate, By playing a role, it is possible to equalize the air volume distribution in the blowing chamber 26.

Next, an example of improvement of the connection structure of the air conditioning air supply duct will be described. In the case of temperature control of the clean room, the air conditioning duct 7 is connected to the air inlet 15 provided separately from the return air inlet 13 of the clean room device 11, as shown in FIG. Thus, a method of supplying air from the air conditioner 66 can be considered. Numeral 67 denotes an air supply control damper, numeral 68 denotes an air blower for an air conditioner, and numerals 69 and 70 denote ventilation fans. In this system, however, the air supply amount to the clean room apparatus 11 is changed by opening and closing the air supply amount control damper 67, and the amount of return air from the return air inlet 13 is also changed. There is a drawback that the losses change and furthermore, the pressure in the clean room varies greatly.

This fluctuation in the room pressure is a major obstacle in maintaining the interior with high cleanliness. Thus, in the improved example shown in FIGS. 19 and 20, the air inlet 15 shown in FIG. 18 is eliminated, and the clean room device ( The front end of the air-conditioning air supply duct 7 was attached to the inside of the flange 71 or the flange 72 which surrounds the return air suction opening 13 of 11), and was slightly entered. In this way, the air supply from the air conditioning apparatus 66 is sucked into the air intake port 13 through the prefilter 21 together with the return air from the maintenance area 16, as shown by the arrow of the figure, Even if the amount of air changes, the amount of air passing through the prefilter 21 is always constant including the return air amount. In this case, since the suction air volume of the prefilter 1 is larger than the air-conditioning air supply amount, the air supply from the air conditioning apparatus is sucked in the whole amount. This improvement eliminates pressure fluctuations in the clean room, and also does not rigidly connect the air conditioning duct and the clean room device compared to the method shown in FIG. Disappear.

21 shows a modification of the clean room apparatus. In this modified example, the blower is not built into the clean room apparatus 11, the main duct 73 is provided in the ceiling portion, and the high performance filters 24 and 25 are attached to the blower outlet. Then, the main blower 74 is installed outside the clean room apparatus 11 and blown through the main duct 73. If the suction duct 75 from the ceiling is provided and connected to the main blower 74, the periphery of the high performance filters 24 and 25 can be maintained at a negative pressure.

According to this configuration, since the main blower can be installed away from the clean room device, the noise level in the clean room can be reduced, and since the large-capacity blower is used, it is more efficient than using a large number of small blowers, and energy saving can be achieved. Can be. In addition, there is no need to install an air supply duct around the clean room device.

22 shows another modification of the clean room apparatus. This modified example enables the clean room apparatus 11 to be unitized per module, and to be connected and disconnected. The casters 76 and the adjusters 77 are intended to facilitate movement. However, the casters 76 and the adjusters 77 may be transported by other methods only during movement unless they are frequently moved. In the case of unitization as described above, the recent semiconductor manufacturing apparatus is often designed to have a base dimension n times the basic dimension, so that the module dimensions of the clean room apparatus 11 are also aligned with the basic dimensions of the semiconductor manufacturing apparatus. It is convenient because the clean room device can be added and removed in response to the layout change, expansion, or abolition of the line. In addition, by adjusting the basic dimensions, problems such as maintenance of the semiconductor manufacturing apparatus due to impairment of the support and the inability to perform maintenance work from the maintenance area are eliminated. Reference numeral 78 in the figure represents a unit connection hole.

As apparent from the above description, according to the present invention, even when the clean room device is installed in the interior of an existing building, the height of the passage space can be increased without increasing the external dimension in the height direction of the clean room device, thereby improving the workability of the worker in the clean room. In addition, it is possible to prevent the lowering of the cleanliness caused by the inflow of contaminated air, thereby maintaining a high cleanliness, and furthermore, a clean room apparatus can be obtained, which is easy to install and lower the equipment cost.

Claims (11)

A manufacturing line consisting of work tools arranged in a predetermined direction is surrounded so as to be isolated from the building space to form a clean space independent from the building, and a work space where work equipment is disposed in the electric cleaning space and a passage space formed in parallel with the work space. And arranging air purifying means having a filter arranged to blow clean air in a downward direction and a transverse direction in an upper portion of the work space, respectively. A clean room device, characterized in that the supply. The clean room apparatus according to claim 1, wherein the clean space is formed by connecting a plurality of clean space units provided with air purifying means in a ceiling on a floor in a building (1) in a predetermined direction. 2. The air purifying means according to claim 1, wherein the air purifying means includes a pressure chamber, and the filter is connected to the pressure chamber to supply clean air from above to the work space and to supply clean air from above to the passage space. Clean room apparatus, characterized in that it has a portion to. 2. The air purifier of claim 1, wherein the air purifying means includes a pressure chamber, and the filter is connected to the pressure chamber, the first filter supplying clean air to the work space from above, and the pressure chamber connected to the pressure chamber. And a second filter for supplying clean air to the upper part of the passage space from the side. 5. The air purifying means according to claim 4, wherein the air purifying means includes a blower having a blower outlet connected to the pressure chamber, wherein the first filter, the pressure chamber, the second filter, and the pressure chamber have a periphery of the inlet of the blower. Clean room device, characterized in that configured to communicate with. 5. The pressure chamber of claim 4, wherein the pressure chamber includes a first pressure chamber that pressurizes clean air supplied to the work space and a second pressure chamber that pressurizes clean air supplied to the passage space. A first filter and a first blower to blow air to the first filter, the second pressure chamber including a second filter and a second blower to blow air to the second filter, The first filter is attached to face the work space below the first pressure chamber, and the second filter is attached to face the top of the passage space to the side of the second pressure chamber. Clean room device. 2. The air outlet of claim 1, further comprising a side outlet for discharging air in the clean space to the outside of the clean space at a constant pressure below the work space, and returning the air flow discharged from the side outlet to the air purifying means. Clean room device, characterized in that configured to. 2. The air outlet according to claim 1, further comprising a bottom outlet for discharging air in the clean space out of the clean space under the passage space, and configured to return the airflow discharged from the bottom outlet to the air purifying means. Clean room device. According to claim 1, wherein the working space and the passage space has a side outlet and a bottom outlet for discharging the air in the clean space out of the clean space, respectively, the air outlet discharged from the side outlet and the bottom outlet Clean room device, characterized in that configured to reflux to the purifying means. A plurality of manufacturing lines comprising work machines arranged in a predetermined direction are surrounded so as to be separated from the building space at predetermined intervals to form a plurality of rows of clean spaces independent from the building, and the area partitioned by the outer surface of the clean space. A maintenance area is provided, and a work space where work equipment is disposed in each clean space and a passage space formed in parallel to the work space are disposed, and clean air is provided in the downward and transverse directions above the work space. A filter arranged to blow-out, having an air purifying means for supplying clean air to the working space from above and above the passage space, respectively, and discharging air in the clean space out of the charging space below the passage space; A first air distribution unit configured to connect the first air distribution unit and the maintenance area to the clean space; Clean room unit that is configured to communicate with and through a space formed in the lower bottom, the reflux at least a portion of the purified air discharged from the air distribution portion of the first in the air-cleaning means via the global beam, characterized. The manufacturing line, which is installed in the building and arranged in a predetermined direction, is surrounded by a manufacturing line so as to be isolated from the building space to form a clean space independent from the building, and the area partitioned by the outer surface of the clean space is used as the maintenance area. Air purifying means having a work space in which the work equipment is disposed in the clean space and a passage space formed in parallel with the work space, and having a filter disposed on the upper portion of the work space to blow clean air in the downward and transverse directions. A clean room device configured to supply clean air to the working space from above and to the passage space from the side, and to allow air in the clean space to flow out at a constant pressure from the lower side of the clean space to the maintenance area; And air conditioning water installed to perform air conditioning of the air in the maintenance area. Provided, and the clean room system to the maintenance region of the air and the air-conditioning air by the air-conditioning unit characterized in that is configured to reflux in the air-cleaning means for.

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