JPS58127033A - Clean working room - Google Patents

Abstract

PURPOSE:To cut an equipment cost, thereby making it possible to air-condition each production line independently, by remarkably reducing spaces of area to be cleaned and air-conditioned, with regard to a clean working room adapted to produce a clean working environment for the production of semiconductors and the like. CONSTITUTION:A housing 1 including an air supplying duct 7 and a return duct 8 for air-conditioning with lagging covers provided has production line equipments 9 arranged to confront against each other therein, and a set of two production line equipments are covered with a clean tunnel 11. The clean tunnel 11 is adapted to clean the tunnel room 12 by discharging clean air from a ceiling thereof. A room air is exhausted from a side outlet 14 into a surrounding maintenance region 16, thereby cleaning the maintenance region 16 to some extent. However, cleanliness of the maintenance region 16 is poorer than that in the clean tunnel room 12. The clean tunnel 11 has an end panel 11a including a door provided at opposite ends thereof for partioning the clean tunnel room and the maintenance region 16. Furthermore, temperature and humidity of the clean tunnel can be controlled, and air conditioning temperature control is available to apply independently for each production line (each production stage) by connecting an air inlet 15 of the clean tunnel 11 to the air supplying duct 7 for air conditioning.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention (2) relates to a clean working room for creating a clean working environment required for semiconductor manufacturing, etc.

A cleaning method that has traditionally been used in the semiconductor manufacturing process.

Typical example of a business room (full down flow complete clean).

(room) is shown in Figure 1. (al is a cutaway plan view, (b)
teeth.

In the side sectional view, 1 is the building, 2 is the inside of the clean room, 53
4 is a high-performance filter, 4 is a lighting lamp, and 5 is a ceiling part.

A perforated plate, 6 a perforated floor plate, and 7 an air conditioning air supply duct.

8 is the return duct for air conditioning, 9 is the exposure, etching,
.

Manufacturing line equipment for diffusion, metallization, etc. 10° is piping that supplies water, gas, etc. to the manufacturing line. As shown by arrows in the figure, clean air processed by the high-performance filter 3 is blown out into the room 2 from the entire surface of the ceiling, and the room air is exhausted through the floor. to this.

This allows the entire room to be maintained at a nearly uniform high level of cleanliness, allowing all processes to be carried out in this clean atmosphere. This complete downflow clean room.

This is the best way to increase the cleanliness of the entire room.

However, it has the following drawbacks.　　　.

(1) Since the cleaning area and the area to be air conditioned are large and a large number of expensive high-performance filters are used, it is difficult to install them.
Preparation costs are very high.

(2) Expenses such as air conditioning maintenance costs and filter replacement costs.

processing costs are high.

(3) In order to air condition the entire room, each production line (engineering) is installed.

The temperature of the air conditioner cannot be controlled. 1゜(
4) Clean repair of production line equipment and piping.

Since the process is carried out inside a room, the resulting dust generation has a significant impact on other manufacturing lines (processes).

The main object of the present invention is to solve the above-mentioned drawbacks (1) of the prior art.
-(4) has been significantly improved. In the semiconductor manufacturing process.

The objective is to provide a clean work room for a large-scale production line.

In order to achieve the second objective, the present inventors covered only the production line section by line in a long and narrow tunnel-shaped clean work room called a clean tunnel, and separated it from the surrounding maintenance area that does not require as much cleanliness. hand.

I thought about cleaning it.

The purpose and structure of the present invention other than those mentioned above will be made clear in the description of the embodiments described below.

I'll do it. 10
Figure 2 shows an example of construction of a clean work room according to the present invention.

In the figures, (a) is a cutaway plan view, and (b) is a side sectional view.

The same reference numerals as in FIG. 1 indicate corresponding parts. .

Air conditioning supply duct 7 and return duct 8 were installed.

Manufacturing line equipment 9 is installed facing each other in the building 1, and the two lines are covered as one set with a clean tunnel 11°. I'll explain the details later, but it's clean.

Channel 11 has an air purification element built into its ceiling.

Clean air is then drawn from the ceiling as shown by the arrow in Figure 2.

Blows out into the clean tunnel room 12, and inside the room.

Cleanse. The indoor air is discharged from the side exhaust port 14 to the surrounding preservation area 16, and the preservation area 16 is also cleaned to some extent by this, but the degree of cleanliness is lower than that of the clean tunnel room 12. End panels 11a with doors are attached to both ends of the clean tunnel 11 to partition the interior of the clean tunnel from the conservation area 16. Pipes 10' for water, gas, etc., electric wires, etc. used in the production line are installed in a conservation area 16, and drawn into the production line equipment 9 through a side exhaust port 14'. child.

By doing so, maintenance of the piping 10, electric wires, etc. can be performed in the maintenance area 16. 8. Also, as described later, the side plates of the clean tunnel 11.

If you make it partially removable, it can be used as a production line.

Most of the repairs to equipment 9 are from maintenance areas 1 and 6.

I can do it. In addition, even when a set of manufacturing equipment for a certain process needs to be repaired, the maintenance work can only be done in the clean tunnel room of that process.

The dust generated by this process affects other manufacturing lines (processes).

There are almost no spills.

Furthermore, the air suction port of the clean tunnel 11.

By connecting the air conditioner 15 to the air conditioning supply air duct 7, the temperature, humidity, etc. of the clean tunnel interior 12 can be controlled, and air conditioning temperature control for each manufacturing line (each process) is also possible. Even in this case, in order to increase the indoor cleanliness, it is necessary to
A portion of the indoor air exhausted from the
It is better to take it in and recirculate it.

In this way, the clean working room according to the present invention is highly clean.

A conservation area surrounding only the production line parts that require high-level maintenance.

Since the cleaning is performed separately, the area to be cleaned and the area to be air-conditioned is greatly reduced compared to the conventional method KI0 shown in FIG. 1, and it has many advantages.

FIG. 5 shows one example of the configuration of a clean tunnel. This figure is a cross-sectional view perpendicular to the longitudinal direction of the clean tunnel.
A gate-shaped frame 15 is assembled with pillars 17 and cross beams 18, and a top plate 19 and side plates 20 on both sides are attached to this.

This tunnel-like ring forms a tunnel-like cover.

Manufactured in a clean tunnel room surrounded by a wall and a floor.

Work section 12a and workers installing equipment 9 for the manufacturing line.

A passage section 12b through which the clean tunnel passes is provided continuously in the 2° and 4° directions of the length of the clean tunnel. 101 and 102 are a clean air outlet for the working section and a clean air outlet for the passage section, respectively. Between the clean air outlet 101 for the work area and the top plate 19, there are a blower 23, high performance filters 24, 25, which are air purifying elements. A ventilation chamber 26 and a work section illumination light 27 are housed, and a grid-shaped work section light diffusion plate 28 is installed below the illumination light 27. These equipments are suspended and supported from the cross beam 18 by a method to be described later. Reference numeral 60 denotes a decorative board for partitioning between the work area diffuser plate "Air Blow Ro-Ro" and the clean air outlets 102 and 10 for the passage area. As a passageway, the passageway illumination lamp 22 is housed, and a grid-like base board 29 is installed below it.The height of the air outlet in the passageway is set high enough for workers to stand and pass through. 15
The height of the air outlet in the section should be kept low as long as it does not interfere with work.

(-For example, the height of the air outlet in the 2-passage section.

2200mm, working part air outlet height 1800m+n
). .

The height of the air outlet in the working area should be as low as possible.

2. There is less turbulence in the airflow in the work area, maintaining cleanliness.

This is because the durability is improved. In this case, a high-performance filter is installed above the clean air outlet 102 for the first passage.

Since the blower etc. are not stored, even if the height of the air outlet in the two passages is increased, the entire top plate 19 is kept at almost the same height.
The overall height can be reduced.

By operating the blower 26, external air is passed through the prefilter 21.
The air is sucked in from the air suction port 13 through the air.

Ru. A portion of the air sent out from the blower 26 is high.

2 working parts after being purified by a performance filter 25.

1 from the clean air outlet 101 to the indoor working area 12a.
The remaining air sent out from the blower 23 is purified by the high-performance filter 24, and then flows downward from the clean air outlet 102 for the second passage section to the indoor passage section 12b. burst into speech. Arrows in the diagram.

shows this air flow. Diffusion plate 28, 29.5
are provided to diffuse lighting and rectify clean airflow.

The wind speed of the clean airflow is, for example, 0.4° in the working section 12a.
/s, 0.2m/s at the passage section 12b, etc.
Each part.

Set according to the required cleanliness. To do this...

Therefore, the cleanliness of the second working section 12a can be made higher than the cleanliness of the passage section 12b.

The clean air blown into the room flows as shown by the arrow in the figure, and flows through the side exhaust provided at the bottom of the side plate 20.

It is discharged from the air port 14 to the outside (protected area). Since the pressure in the room 5 becomes positive with respect to the outside air by the pressure loss at the side exhaust port 14, it is possible to prevent contaminated air from entering from outside.

The side exhaust port 14 is also useful for drawing in piping for water, gas, etc., electric wires, etc. to the production line.

used. The side plate 20 can be secured using screws or hooks for repairing piping or equipment.

Make it publicly removable. Also, due to the need to improve the indoor working environment and manage work from outside.

A part of the side plate 20 may be a transparent plate.　　.

Figure 4 shows the outside of a clean work room using this method, which is constructed by connecting a number of modular clean tunnels 15.

show a view.

Figure 5 shows the case where the production line is located on one side of the aisle.

An example of the configuration of a clean tunnel is shown in a cross section perpendicular to the longitudinal direction. In FIG. 5, the same reference numerals as in FIG. 32 indicate corresponding parts, and the configuration is substantially the same as that in FIGS. There is no difference.

FIG. 6 shows another configuration example of a clean tunnel with further improved cleanliness retention performance. In this example,

Floor drainage is provided on the floor of the central passageway inside the clean tunnel room.

Air vents 34 are provided to exhaust air from three locations including the side exhaust ports 14 at the bottom of both side panels.

The clean air flow in the indoor working section 12a is 10 as shown by the arrow.
It is divided into two parts, a floor exhaust port 34 and a side exhaust port 14.

If it is discharged from the side, it passes through the first passage section 12b.

Dust generated by workers was installed on production line equipment 9.

It is possible to prevent the water from flowing into the working part 12b and keep it clean.

The temperature retention performance can be improved. For this reason, in 15, the average wind speed of the 2 passages is calculated as 6 times the wind speed of the clean air flow.

It is desirable to maintain the relationship with the average wind speed of the business area. Also,
If it is necessary to increase the opening size of the side exhaust port 14° in order to draw in various types of piping, install a soft material at the side 2° side exhaust port 14 in order to prevent the exhaust volume of the floor exhaust port 34 from decreasing. Attach the partition cover 66 to adjust the displacement.

If the partition cover 36 is made of a soft material such as a rubber plate, the opening size of the side exhaust port 14 can be enlarged in two parts to allow piping to pass through.

A conventional full-scale down-flow clean room.

Since the entire floor is made of perforated plates, it is vulnerable to vibrations.

However, the two clean tunnels shown in Figure 6 were constructed with perforated plates only on the tread floor, and were equipped with production line equipment 9.

Since the floor surface of the work section on which the workpiece is placed is flat, the floor strength 10 can be increased, and it is also excellent in terms of vibration prevention for semiconductor manufacturing and equipment that performs microfabrication.

In Figure 6, a side plate 61 is further provided on the outside of the side plate 20 to connect the side exhaust port 14 and the underfloor return air.

A side return air duct 32 connected to the duct 35 is formed between the side plate 2Q3 and the side plate 61, and most of the exhaust air is carried out through the side return air duct 32.

This ([111 plane from the return air duct 32 to the pre-filter 21
of.

The air is returned to the air intake row 3 through the air conditioning supply air duct.

However, the amount of air supplied to the air intake port 15.

Only the corresponding portion is provided at the bottom of the side plate 61 to exhaust heat.

It is discharged from the port 33 to the outside (maintenance area). This method is 9
Since most of the air is locally circulated and used, it is also separated from the conservation area, which has great effects in ultra-purifying indoor air and saving energy in air conditioning. FIG. 7 is a perspective view showing the appearance of the clean tunnel shown in FIG. 6. The method shown in FIGS. 6 and 7 is the most expensive of the previous embodiments, but it is still an expensive ``high-performance filter only installed inside the clean tunnel.''

Since I am using it, compared to a one-sided down flow system.

If so, it is cheap. 10 The method shown in Fig. 8 is a modification of the method shown in Fig. 6.7, and is a very good example of an adjacent clean tunnel.

The conservation area 16 between the main walls 11 is reduced to the minimum space possible.

and use this part as a return passage for clean air.

It is something to be used. 37 is a floor return air port of the maintenance area 16 that communicates with the underfloor return air duct 351.

According to the configuration shown in FIGS. 3 to 7, the clean.

The top plate of the channel 11 can be made almost flat.

So clean ceiling partitions between adjacent tunnels.

By constructing the board 38, between it and the ceiling of the building.

The air conditioning air supply duct 7 can be easily formed.

Duct construction costs can be significantly reduced.

The overall configuration of the clean tunnel and the system using it has been explained above.

Next, detailed examples of improvement will be explained.

Figures 9 and 10 show commonly considered high-performance filters.

The installation structure of the filter is shown. In the clean tunnel.

Air conditioning ducts, etc. are often installed above it.

Therefore, maintenance such as replacing high-performance filters is required.

It is necessary to be able to do this from inside the clean room. 109th
The figure shows the working part of the high-performance filter 241 for the 1-passage part.

Attach the high-performance filter 25 to the filter case 42 using the mounting bracket 39, and perform 5 steps when replacing the filter.

If it is, remove the work part diffuser plate 281, the work part illumination light 27°, remove the mounting bracket 39, and take out the high performance filter 25 for 1 work part 1° downward. This is.

Although this is a generally considered method, there are some defects such as the first order.

There is a point.

(1) If the high-performance filter is installed incorrectly, the air will be contaminated.

Leakage 40 occurs and indoor cleanliness deteriorates. 2゜,
11. (2) Air stagnation 41 occurs around the high-performance filter and the cleanliness does not improve, and over a long period of time, the dust stagnant in this area comes out to the clean room side and impairs the cleanliness.

(3) The outer frame of a high-performance filter is usually made of wood, and it is undesirable for the wood to be exposed on the side of the Western-style room because it becomes a source of dust.

A mounting structure for a high performance filter that has improved these drawbacks is shown in Figures 11 and 12. In this example, it is for 2 passages.

The high-performance filter 241 and the high-performance filter 25° for the working section are respectively attached to the blowing chamber 26 using a cross-sectional presser frame 44 and a mounting bracket 6910. High performance filter 2
The upstream side and downstream side (clean room side) of 4 and 25 are partitioned by a partition plate 46 and a partition decorative board 30. However, in order to take out the presser frame 44 and the high-performance filter 24.25 when the filter is assembled, the 15 partition plate 46, the partition decorative plate 50, and the presser frame.

44. A certain gap is required between the two. this.

This gap is filled with a sealing pad 45 to prevent contaminated air from leaking from the gap. This.

With such a structure, even if the position of the presser frame 44 shifts due to the tightness of the high-performance filters 24, 25, etc., the above-mentioned clearance dimensions will not change, so the sealing backing 45 will provide an effective seal. I can do it. With this improvement, will maintenance of high-performance filters be improved? It can be performed from the I room side and the first-order effect can be obtained.

(1) Even if the high-performance filter is installed incorrectly and contaminated air leaks from between it and the blower chamber 26, there is a negative pressure around the high-performance filter, so the contaminated air will leak into the clean room. This is not the case (see Figure 11).

e indicates the positive pressure section and e indicates the negative pressure section). ″(2
) of air within the clean area around the high performance filter.

I can't do anything.

(3) The wooden frame of the high-performance filter will not be exposed to the clean room side and become a source of contamination.

(4) Even if a defect occurs in the sealing backing 45, clean air will flow to the negative pressure area around the high-performance filter.

The more contaminated air leaks to the C2 clean room side.

It never happens.

Examples of this improvement are not limited to clean tunnels, but other sky systems using high-performance filters such as Kureen Bench.

It can also be applied to gas to oil equipment.

Next, an example of improving the flow of clean air at the air outlet will be described.

In a generally considered method, as shown in FIG. 10, the filter cases 42 are sequentially butted against each other in the longitudinal direction of the clean tunnel and connected. in this case,.

The filter case 42 is used for attaching the diffuser plate 28 and for fixing it.

In order to strengthen the router case itself, it is normal to bend the periphery of the air outlet slightly in the horizontal direction.
Therefore, as shown in FIG. 2, a thin flow 43 is generated near the connection part of the filter case 10.

The thin flow may entrain dust generated by workers, causing a low level of cleanliness.

In the improved example shown in FIG. 12 (al), the presser frame 44.

A bent part on the edge of the air outlet that obstructs the airflow.

There is no thin air flow, so there is no flow of clean air.

It gets better. However, in FIG. 12 (al), the wind speed is still slightly slow near the connecting part of the presser frame 42 that is adjacent to it.

An example of this improvement is shown in Figure 12(b).
.

Shown in tc+. 2
゜・ 15・ (An example of improving BL is to partially install a diffusion punching plate 47 at the bottom of the outlet of the high-performance filter 25, and to flow more air to the end of the outlet where the punching plate 47 does not exist. , the air velocity at the outlet is averaged.

It is something that The diffusion punching plate 47 has 5 lights 2
Under the illumination light 27, which also serves to prevent turbulence caused by 7.

It is best to place it on the side and use a material that allows light to pass through.゛Again. In the improvement example (C), a wind direction plate 48 is installed at the lower part of the outlet of the high-performance filter 25, and the end of the outlet is fixed.

A large amount of airflow is allowed to flow through the area, and the wind speed is averaged.

These improvements have reduced the amount of glue near the end of the outlet.

This prevents the generation of airflow and evens out the clean airflow.

cleanliness can be improved.

Next, an example of improving the mounting structure of the air purification unit is shown in Section 5.9.
This will be explained with reference to FIGS. In Figure 9.10.

As shown, typically a filter case 42.

The ceiling of the clean tunnel is made up of a sheet metal case,
A method of connecting in the longitudinal direction is usually used. In this case, the floor of the building has considerable unevenness, so if the building is assembled using pillars on the floor, the height of the ceiling will be uneven in line with the floor, especially when viewed from inside the clean tunnel. The aisle is scattered.

The front surface of the base plate 29 and the filter case 42 is undulated.

Problem 5 is that the product becomes stamped and its marketability is impaired. Therefore, in the improved example shown in Fig. 11.12.

Place the rear part of the ventilation chamber 26 on the cross beam 49 of the ceiling.

It is fixed with the mounting bracket 50, and the front part on the 1st passage side can be made longer.

From the top plate 19 using the adjustment fitting (turnbuckle) 51.

It has a structure that allows it to be suspended. Air blower ζ2610
One end of the is fixed to the cross beam 49 for hanging support.

The seismic resistance is insufficient if only the parts are suspended in the event of an earthquake.

This is because there is a risk of movement and damage. This structure.

According to Zukuri, the top plate 19 has waves that follow the unevenness of the floor.

Even in the case of a hammered shape, the partition decorative board 30 on the passage side can be adjusted horizontally using the adjustable length fitting 51.

At the same time, the passage diffuser plate 29 can also be adjusted horizontally.

Therefore, problems such as incorrect installation of nine parts can be eliminated.

Next, an example of improvement of the diffuser plate will be explained with reference to FIG. 16. The work section light diffusion plate 282 and the passage section light diffusion plate 29.

・　16　・ Usually a grid-shaped resin molded product is used. in this case.

If the diffuser plate is used alone, it will sag due to its own weight as shown in Figure 16 (a). However, in this structure, the reinforcing sash 52 obstructs the airflow, as shown in FIG.

A thin flow 46 occurs downstream thereof, impairing cleanliness.

Examples of improvements are shown in (d) to (g) of the figure. (d) and (e
As shown in FIG. 1, a reinforcing plate 53 having a partially L-shaped shape is attached to the soil surface of the diffuser plate 28. The details of the mounting part 10 of the reinforcing plate 56 are as shown in (fl, (gl), and the mounting part 54
The L-shaped part of the reinforcing plate 56 is connected to the diffuser plate 28 by 55.
Fix it to the top surface. According to this structure, only the poles of the reinforcing plate 53 (fbl, fbl,
Compared to structure (C), thin flow is significantly reduced.
15 FIG. 14 shows an example of an improved diffuser plate mounting structure. .

As shown in FIG.
Attach to the partition decorative board 30 at °. of the receiving metal fitting 56.

The mounting hole is a long hole, and the receiving bracket 56 is a grid of the diffuser plate 28.

It is possible to slide left or right by more than one eye. Hang the grid of the diffuser plate 28 on the claws 57 provided on the 2° bracket 56 and attach it as shown in FIG. 13(a) and (bl).If the diffuser plate shown in FIG. There is no need to obstruct the airflow.The ordinary diffuser plate shown in Fig. 10.

The advantages of this improvement over bone structures are independent of the dimensions of the high-performance filter, as shown in Figure 12 (al).

Installed continuously using standard length diffuser plates.

That's true. In this case, if the receiving bracket 56 is made to be able to slide more than 1 degree above the diffuser plate, the diffuser plate can be moved.

You can deal with whatever position you find yourself in. ! O
Figure 15 shows an example of improving the mounting force of the passage diffuser plate.

vinegar. In the assembly work of the clean tunnel, gate-shaped frames are used.

- Air purification units are installed on the ceilings of the two working areas.

For installation, one assembly error is the dimension of the center passage.

wrinkled. In this case, the diffuser plate receiving portion of the partition decorative plate 301° is shaped as shown in FIG. 15 (al or (bl), and the dimensions of each part are:
9th.

The relationship between the width t1 and the first dimension t2 is determined as follows.

Ru.

(1) L,')z,, (21T-2>12. (
3) L2+L3<t+ , 0・19 - By doing this, if the error in the dimensions of the two passages becomes large and the original diffuser plate cannot be inserted, the first cut of the grid can be made. If the diffuser plate is cut in the middle of the grating, its strength will be weakened, so it is important to be able to make one cut.

Next, an example of improvement of the illumination light mounting structure will be described. .

Illumination lights are generally located at 22 and 27 in Figure 6.

They are installed as shown, but they are all high.

Because it is located at the outlet of a high-performance filter, in a work room that requires ultra-cleanliness, there are inconveniences such as obstructing the air flow and collecting dust on top of the 10 lighting lights. In the improved example shown in FIG. 16, lighting lights 22 and 27 are used.

It is housed in a case 61, embedded in the partition decorative plate 3o and the side plate 20, and covered with a transparent cover 59 to separate it from a clean area. If this is done, the air outlet of the high performance filter 24, 25 will become a source of dust.

As a large structure, it can provide the necessary lighting.

Wear. The lighting case 61 is used for internal reflection.

This is to further improve the illuminance, and one can fit into the case.

By providing the air holes 60, temperature rise can be prevented, and since the inside of the case becomes negative pressure within 2 degrees, contaminated air will leak into the clean area. A punching plate 62 may be attached to the outlet of the high-performance filter 24, 25 in order to protect the high-performance filter and improve airflow distribution. This improved example can also be applied to Tsukuda's air purification devices such as clean benches. .

Figure 17 relates to wind, volume adjustment, and prevention of backflow from the blower.

An example of improvement is shown below. Cleaning work such as clean tunnels.

In principle, the room should be operated continuously to maintain cleanliness.

However, since it is uneconomical to operate at full air volume during non-working hours such as at night, it is desirable to stop some of the blowers and adjust the air volume. In this case, if you partially stop the blower with the structure shown in Figure 11, it will stop.

The air flows backwards from the blower, causing large losses.

If the blower drive motor is a single-phase motor, the 15 remoter is rotating in the opposite direction due to reverse flow, so the primary airflow is operated at full volume.

If this is done, the motor will not return to normal rotation.

There are serious drawbacks. In the improved example shown in FIG.

A fulcrum shaft 64 is inserted into each outlet of the blower 23.

A damper 63 that opens and closes as a core is provided. This 2゜・
20 - The damper 63 is affected by the wind pressure during air blowing (shown in al).

It is in the open state, and a weight (or bar) is placed when the air blowing is stopped.

e) The rotational force by 65 brings it into the closed state as shown in FIG. 6(b).

This prevents air backflow. Furthermore, if the opening angle of the damper 63' is made smaller than 90' as shown in FIG.

Even when the air is turned off, the damper 63 acts as a wind direction plate to uniformly distribute the air volume inside the air blowing chamber 26.

can be converted into

Next, ten improved examples of the connection structure of an air conditioning air supply duct will be described. When controlling the temperature inside the clean tunnel room, generally, as shown in FIG.

A conceivable method is I5, in which air is supplied from the air conditioner 66 by connecting the air conditioner 7. 67 is a supply air amount control damper, 68° is an air supply blower for the air conditioner, and 69.70 is a ventilation blower.

It's the air volume. However, with this method, the supply air amount is controlled.

Opening and closing of the damper 67 leads to the clean tunnel 11.

At the same time as the supply air amount changes, the return air amount from the air suction port 13□0 also changes, so the pre-filter 21
The drawback is that the pressure drop at the clean tunnel changes, which in turn causes the pressure inside the clean tunnel to fluctuate greatly.

Fluctuations in indoor pressure like this are a major hindrance to maintaining a high level of indoor cleanliness.

The improved example shown in FIG. 19.20 is shown in FIG.

The air suction port 15 of the clean tunnel 11° is eliminated, and a flap is provided surrounding the return air suction port 13 of the clean tunnel 11°.

Install it with the tip of the air conditioning monthly 10 air duct 7 slightly inserted inside the flange 71 or flange 72.

Ta. If you do this, it will be empty as shown by the arrow in Figure 1.

The air supply from the control device 66 is the return from the maintenance area 16.

The air is sucked through the pre-filter 21 together with the air.

Since the air is sucked into the inlet 13, even if the air supply amount changes 15, the amount of air passing through the pre-filter 21 returns.

It is always constant including the amount of air. In this case, since the amount of air sucked into the pre-filter 21 is larger than the amount of air supplied by the air conditioner, the entire amount of air supplied from the air conditioner is sucked. .

With this improvement, the pressure change inside the clean tunnel chamber.

In addition, compared to the method shown in Figure 18,
Since there is no rigid connection between the air conditioning supply air duct and the Clean Tunnel, there will be no problems such as mismatching the dimensions of the duct connection during construction.

FIG. 21 shows a modification of the clean tunnel.

In this modification, a blower is not built inside the clean tunnel 11, and a main duct 73 is provided in the ceiling.

Then, put a high-performance filter 24.25 on the outlet.

Install. A main blower 74 is installed outside the clean tunnel 11 and blows air through the main duct 73. Furthermore, by providing a suction duct 75 from the ceiling and connecting it to the main blower 74, it is possible to maintain negative pressure around the high-performance filters 24, 25. child.

According to the configuration, the main blower has a clean tunnel.

Since it can be installed at a distance from the clean tunnel, the noise level in the clean tunnel room 15 can be reduced, and a large-capacity blower is used.

This makes it more efficient than using multiple small blowers.

Fortunately, energy savings can be achieved. Also, Cree.

Air conditioning supply ducts must be installed around the tunnel.

There will be no need.

0 ・ 25 ・ Figure 22 also shows another modification of the clean tunnel. In this modification, the clean tunnel 11 is made into a unit for each module to enable connection and disconnection. The casters 76 and adjusters 77 are used to facilitate movement, but unless they are moved frequently, there is another method only when moving.

It may be transported by A place to unite like this.

In this case, recent semiconductor manufacturing equipment has established basic dimensions.

Although it is often designed with dimensions n times the basic dimensions.

If the module dimensions of the clean tunnel 11 are also adjusted to the basic dimensions of the semiconductor 10 manufacturing equipment, then the production line can be completed.

Deal with layout changes, additions, abolitions, etc.

It is convenient because it allows you to add and disconnect the tunnels. .

In addition, by matching basic dimensions, semiconductor manufacturing is possible.

During equipment maintenance, the pillars become an obstacle, making it impossible to carry out maintenance work from all over the area.

There will be no pull. 78 in the figure is the unit connection hole.

be.

As is clear from the above description, according to the present invention.

All 2°, which was conventionally considered the best method for semiconductor manufacturing, etc.
24 - The cleanliness of the most important production line working area is equivalent to that of a down-flow complete clean room.

or better performance, and even more.

There is an effect.

(1) Equipment costs will be reduced by about half because the area to be cleaned and the area subject to air conditioning will be significantly reduced5.

(2) Running costs are reduced by about half, saving energy.

It can be converted into a rugi.

(3) Full-scale downflow manufacturing was difficult with a one-way method.

It becomes possible to control the air conditioning temperature for each room. IQ(
4) If maintenance of the production line is outside the
C. Dust generation due to maintenance work is another problem.

This can prevent the production line from being affected. .

In addition, various modifications of the present invention and modifications of Tanibe.

The effect of a good example is +5 as described in each description.

[Brief explanation of drawings]

Figure 1 shows a complete downflow set that is the prior art. Diagrams showing a lean room, (a) is a cutaway plan view, (b)
teeth. The side sectional view, FIG.
(a) is a cutaway plan view and a cross-sectional view from the fblld side, Fig. 3 is a sectional view perpendicular to the longitudinal direction showing an example of the configuration of a clean tunnel, and Fig. 4 is its external appearance. FIG. 5 is a perspective view showing the clean. FIG. 6 is a sectional view perpendicular to the longitudinal direction showing another example of the structure of the channel, which further improves the cleanliness retention performance. FIG. 7 is a sectional view perpendicular to the longitudinal direction of another configuration example. A perspective view showing its appearance, and FIG. 8 shows a modification of the present invention. A side sectional view showing an example of construction, Figure 9 shows a high-performance filter. A partially cutaway front view showing a general example of the mounting structure, FIG. 10 is an open cutaway side view, and FIG. 11 is a high performance filter installed. Fig. 12 (a) is a partially cutaway front view showing an example of improved structure; (b) is a perspective view of the diffuser plate and reinforcing sash in the general example.
Figure 5 (Fig. 5) is a cutaway side view of the same, and (d) is the diffuser plate and sleeve of an improved example. A perspective view of the strong plate, (e) a cut side view of the same, (f), (
GL is reinforced. A detailed sectional view of the plate mounting part, FIG. 14 shows the diffuser plate mounting structure. Figures illustrating an example of improved structure; (a) is a partially cutaway front view; (b) is a partially cutaway front view;
) is a partial plan view, (C) is a perspective view of the bracket mounting part, 1st
5□. Figures fal, fb) A partially cutaway front view showing an example of an improved mounting structure for a light passage diffuser plate, Fig. 16 is a partially cutaway front view showing an improved example of a illumination light mounting structure, and Fig. 17 shows an example of air volume adjustment and blower installation. A diagram showing an example of improvement regarding backflow prevention. (al is a partially cutaway front view during ventilation, (b) is a partially cutaway front view when ventilation is stopped, (C) is a partially cutaway side view during ventilation,
. Figure 18 shows a general example of an air conditioning duct connection structure. The cross-sectional view, Figure 19, shows the improvement of the air conditioning duct connection structure. An illustrative cutaway front view, FIG. 20, is shown in FIG. 19. (a) and 1 are detailed diagrams of the air conditioning duct connections in the improved example.
0(C) is a partially cutaway front view, (b) and (d) are side views, FIG. 21 is a view showing a modification of the clean tunnel, and (a) is a diagram showing a modified example of the clean tunnel. A cutaway front view, (b) a partially cutaway side view, and FIG. 22 a beam. FIG. 7 is a perspective view showing another modification of the lean tunnel. 1: Building, 9: Production line equipment + 10'1
5 piping, 11: Clean work room (clean tunnel) according to the present invention, 12: 17' J-tunnel x
Inside,. 12a: Indoor working section, 12b: Indoor passage section,
. 13: Return air intake, 14: Side exhaust. Port, 15: Air intake connected to the air conditioning air supply duct. Entrance, 16: Conservation area, 17: Pillar, 18: Cross beam, 19: Top plate, 2o: Side plate, 23: Blower, 24: High performance filter for passage section, 25: High performance filter for working section, 101: Work Clean air outlet for section, 102: Clean air outlet for passage section,
34: Floor exhaust port agent, patent attorney Junnosuke Nakamura. 0 +5 0 ・ 28 ・ 1-1 Figure (Q) Figure 2 (Q) (b) ++ 15 13 It 7 ( Figure 3 Figure 19-165- Fang 10 Figure 1P14 Figure (Q) Figure 15 (Q) q (b) 9 17-20 Figure 1' Figure 21 (Q) 1 (b)

Claims (1)

[Claims] Each production line is covered in a tunnel shape. A clean work room that blows clean air from the ceiling into a circular room to purify the room.