JPS61101733A - Unit type clean room - Google Patents
Unit type clean roomInfo
- Publication number
- JPS61101733A JPS61101733A JP59223468A JP22346884A JPS61101733A JP S61101733 A JPS61101733 A JP S61101733A JP 59223468 A JP59223468 A JP 59223468A JP 22346884 A JP22346884 A JP 22346884A JP S61101733 A JPS61101733 A JP S61101733A
- Authority
- JP
- Japan
- Prior art keywords
- grid
- equipment
- clean room
- structural
- panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 14
- 238000004378 air conditioning Methods 0.000 description 11
- 230000003749 cleanliness Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 244000025254 Cannabis sativa Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 244000144985 peep Species 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
- E04B1/343—Structures characterised by movable, separable, or collapsible parts, e.g. for transport
- E04B1/34315—Structures characterised by movable, separable, or collapsible parts, e.g. for transport characterised by separable parts
- E04B1/34331—Structures characterised by movable, separable, or collapsible parts, e.g. for transport characterised by separable parts mainly constituted by three-dimensional elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、門形の構造グリッドと設備グリッドとを車位
グリッドとしてこれらを交互に配置接合して構成するこ
とにより、既存の建屋の中に適宜配置することができる
ユニット型クリーンルームに関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention is constructed by alternately arranging and joining a gate-shaped structural grid and an equipment grid to form a vehicle position grid, so that it can be installed in an existing building. The present invention relates to a unit type clean room that can be arranged as appropriate.
クリーンルームは、高い清浄度の作業環境を提供するも
のであり、例えばＬＳＩ（半導体製造工程）や精密殿械
等の工業用クリーンルーム、手術室や食品加工等のハイ
オクリーンルームその他さまざまな産業分野、研究分野
で用いられている。Clean rooms provide a highly clean working environment, and are used in various industrial and research fields, such as industrial clean rooms for LSI (semiconductor manufacturing) and precision equipment, high-quality clean rooms for operating rooms and food processing, and other fields. It is used in
従来のクリーンルームとしては、品性能フィルタで処理
された１８浄空気を天井より室内に吹き出し室内空気を
床下を通して排出することによって作業室全体をほぼ一
様に高清浄度に維持する全面ダランフロ一式クリーンル
ームや、製造ラインに沿って区域毎にトンネル状のクリ
ーンルームを形成し、そのクリーンルーＪ、に天井面か
ら清浄空気を吹き出すようにすることによって、トンネ
ル状のクリーンルームを−（ｐに高清浄度に維持するク
リーン トンネル・システムなどがある。Conventional clean rooms include clean rooms with a full-scale D/R flow system that maintains the entire working room at a nearly uniformly high level of cleanliness by blowing 18-purified air processed by quality filters into the room from the ceiling and exhausting the room air through the floor below. , a tunnel-shaped clean room is formed in each area along the production line, and clean air is blown from the ceiling into the clean room to maintain a high level of cleanliness at -(p). There are clean tunnel systems, etc.
しかしながら、従来のシステムには種々の問題点がある
。例えば全面ダウンフロ一式クリーンルームでは、次の
ような欠点があるう
■ 清浄化区域及び空調対象区域が広く、高価な高性能
フィルタを多量に使用しているため、設備費が非常に高
い。However, conventional systems have various problems. For example, a full-scale down-flow clean room has the following drawbacks: (1) The cleaning area and the area to be air-conditioned are wide, and a large amount of expensive high-performance filters are used, so the equipment cost is extremely high.
■ 空調維持費、フィルタ交換費用などのランニング・
コストが高い。■ Running costs such as air conditioning maintenance costs and filter replacement costs
High cost.
■ 室全体の空調を行うため、製造ライン別（工程別）
の空調温度制御品かできない。■ To air condition the entire room, each production line (by process)
Only air conditioner temperature control products can be used.
■ 製造ライン用機器や配管類の補修をクリーンルーム
内で行うため、それによる発塵が他の製造ライン（工程
）に及ぼす影響が大きい。■ Since manufacturing line equipment and piping are repaired in a clean room, the resulting dust generation has a large impact on other manufacturing lines (processes).
また、クリーン・トンネル システムでは、次のような
欠点がある。Additionally, the clean tunnel system has the following drawbacks:
■ 既存の建屋内に長いダクトを配設することが必要で
あり、そのため配設作業上、ｌ！屋の構造上で種々の問
題が生しる。■ It is necessary to install a long duct within the existing building, and therefore the installation work requires l! Various problems arise with the structure of the building.
■ クリーン−トンフルの下部からの空気の噴出によっ
て建屋内に塵埃が浮遊する。■ Clean - Dust is suspended inside the building due to the air ejected from the bottom of the tank.
■ 大容量のフィルタとポンプを建屋外に別置すること
が必要になる。■ Large-capacity filters and pumps will need to be placed separately outside the building.
本発明は、上述の問題点を解決するとともに、要求品質
に的確に対応できる安価なユニ７ト型クリーンルームの
提供を目的とするものである。The present invention aims to solve the above-mentioned problems and provide an inexpensive unit type clean room that can accurately meet required quality.
そのために本発明のユニット型クリーンルームは、門形
のフレームを骨組みとする構造グリッドを複数配列し、
該構造グリッドの間に空気清浄袋２や電気盤等の設備パ
ネルを配置してクリーンルームを構成するユニット型ク
リ−フレームであって、設備パネルは、天井に構造材を
有する構造グリッドと同形状の門形の設備グリッドに’
Ａｌｆａし、該設備グリッドを両側の構造グリッドに接
合することによってクリーンルームを構成することを特
徴とするものであり、さらに、設備パネルは、両側の構
造グリッドに直接接合し、天井は、両側の構造グリッド
間に跨がるパネルにより覆うことによってクリーンルー
ムを構成することを特徴とするものである。To this end, the unit-type clean room of the present invention has a plurality of structural grids arranged around gate-shaped frames,
This is a unit-type cre-frame in which a clean room is constructed by arranging equipment panels such as an air purifying bag 2 and an electrical panel between the structural grids, and the equipment panels have the same shape as the structural grid with structural materials on the ceiling. 'Gate-shaped equipment grid'
Alfa, the clean room is configured by joining the equipment grid to the structural grids on both sides, and furthermore, the equipment panel is directly joined to the structural grids on both sides, and the ceiling is connected to the structural grids on both sides. A clean room is constructed by covering the grid with panels that span between the grids.
本発明のユニット型クリーンルームでは、門形のフレー
ムを骨組みとする構造グリッドを基本にして、この間に
適宜必要な設備パネルを配列接合する。従って、清浄度
の要求、クリーンルームの大きさの要求に応じて構造グ
リッドの故、設備パネルの内容やその数などを選定して
クリーンルームを構成することができるので、クリーン
ルームのそのときどきの要求に柔軟に対応することが可
能となる。The unit-type clean room of the present invention is based on a structural grid having a gate-shaped frame as a framework, and necessary equipment panels are appropriately arranged and connected between the structural grids. Therefore, it is possible to configure a clean room by selecting the content and number of equipment panels based on the structural grid, depending on the cleanliness requirements and clean room size requirements, making it flexible to meet the clean room requirements from time to time. It becomes possible to correspond to
以下、実施例を図面を参照しつつ説明する。 Examples will be described below with reference to the drawings.
第１図は本発明のユニット型クリーンルームの全体の外
観を示す図、第２図は構造グリッドのフレーム構成の例
を示す図、第３図は設備グリッドのフレーム構成の例を
示す図、第４図は他の設備グリッドのフレーム構成の例
を示す図、第５図は第２図に示す構造グリッドのフレー
ムに内装及び外装パーツを装備した例を示す凹である。Fig. 1 is a diagram showing the overall appearance of the unit type clean room of the present invention, Fig. 2 is a diagram showing an example of the frame configuration of the structural grid, Fig. 3 is a diagram showing an example of the frame configuration of the equipment grid, and Fig. 4 is a diagram showing an example of the frame configuration of the equipment grid. The figure shows an example of the frame configuration of another equipment grid, and FIG. 5 is a concavity showing an example in which the frame of the structural grid shown in FIG. 2 is equipped with interior and exterior parts.
図において、工ないし３は構造グリッド、４と５は設備
グリッド、６は入口扉、７は覗き窓、８はエアー・シャ
ワー・ルーム、９は天井パネル、１０は設備パッケージ
、１１は外装パネル、１２と１３は構造材、１４は空調
パッケージ・ユニット内蔵パネル、１５は高性能フィル
タ吹出口、１６は空調用吸込口、１７は電気盤用パネル
、１日は将来対応側設ＯＩＲパネル、１９はボルト、２
０はコンセント、２１は内装パネルをそれぞれ示してい
る。In the figure, 3 is a structural grid, 4 and 5 are equipment grids, 6 is an entrance door, 7 is a viewing window, 8 is an air shower room, 9 is a ceiling panel, 10 is an equipment package, 11 is an exterior panel, 12 and 13 are structural materials, 14 is a panel with built-in air conditioning package unit, 15 is a high-performance filter outlet, 16 is an air conditioning inlet, 17 is a panel for electrical panel, 1st is a future compatible OIR panel, and 19 is a side installation panel. bolt, 2
0 indicates an outlet, and 21 indicates an interior panel.
本発明のユニット型クリーンルームは、第１図に示すよ
うに入口扉６を有するエアー・ンヤヮー・ルーム８に構
造グリッドｌを接合し、そして１頃に設備グリッド４、
ｔｉ造ダグリッド２設６ゴグリノド５、構造グリッド３
のように構造グリッドと設備グリンドの各ｍ位グリッド
を交げに配７？、接合して構成するものである。In the unit type clean room of the present invention, as shown in FIG.
Ti construction dagrid 2 set 6 gogrid 5, structure grid 3
As shown in the figure, the structural grid and the equipment grid are arranged at 7 m grids each. , are constructed by joining.
構造グリッドｌないし３は、第２図に示すように門形の
フレームからなる構造材１２に天井パネル９、外装パネ
ル１１、内装パネル２１を取り付けて第５図に示すよう
に構成したものである。これに対して設備グリッド４と
５は、構造グリノドエないし３と同様の形状で、高性能
フィルタを存する空気清浄装置や電気盤などのパネルを
装備するものであり、例えば第３図に示すように空調パ
ッケージ・ユニット内蔵パネル１４や電気盤用パネル１
７を装備し、或いは、第４図に示すように将来対応用設
備バふル１８を装備するものである。また、天井の構造
材１３は、空調パッケージ ユニット内蔵パネル１４や
電気盤用パネル１７などの設備パネル間のつなぎ鋼材で
あり、第５図に示した構造グリッドと同様に天井パスル
が取り付けられる。The structural grids 1 to 3 are constructed as shown in FIG. 5 by attaching a ceiling panel 9, an exterior panel 11, and an interior panel 21 to a structural member 12 consisting of a gate-shaped frame as shown in FIG. . On the other hand, the equipment grids 4 and 5 have the same shape as the structural grids 3 and 4, and are equipped with panels such as air purifiers with high-performance filters and electrical panels, for example, as shown in Fig. 3. Air conditioning package unit built-in panel 14 and electrical panel panel 1
7, or, as shown in FIG. 4, a baffle 18 for future use. Further, the structural material 13 of the ceiling is a connecting steel material between equipment panels such as the air conditioning package unit built-in panel 14 and the electrical panel panel 17, and a ceiling pulse is attached in the same manner as the structural grid shown in FIG. 5.
本発明は、上述したような草位グリッドを組み合わせ接
合することにより、任意の長さのクリーンルームを形成
するものである。準位グリッドは、幅方向で７〜ｌｏｍ
にすると７〜ｌｆ１ｍ幅で佳さの長さのクリーンルーム
を形成することが可能となる。The present invention forms a clean room of arbitrary length by combining and joining the grass grids as described above. Level grid is 7~lom in width direction
This makes it possible to form a clean room with a width of 7 to 1 m and a good length.
また、要求される空気の清浄度に応して設備グリッドに
装備する空気清浄装置の数や容〒を変えることも可能で
ある。なお、設備グリッドで特に設備を装備しない部分
については華なる盲板を取り付けるようにしてもよいこ
とはいうまでもない。It is also possible to change the number and capacity of air purifiers installed in the equipment grid depending on the required air cleanliness. It goes without saying that a blind plate may be attached to a part of the equipment grid where no equipment is installed.
第６図は本発明の他の実施例を説明するための図である
。第６図において、１ないし３．６ないし９と１１は第
１図と同しものを示し、３１．３３と３４は設備パネル
、３２は盲板をそれぞれ示している。FIG. 6 is a diagram for explaining another embodiment of the present invention. In FIG. 6, 1 to 3.6 to 9 and 11 are the same as in FIG. 1, 31, 33 and 34 are equipment panels, and 32 is a blind plate, respectively.
第６図に示すユニット型クリーンルームは、第３図及び
第４図に示したような空調パッケージ−ユニット内蔵パ
ふル１４や電気盤用パネル１７、将来対応用設備パネル
１８などの設備パネルを設備グリッドに装備せず、牟独
で構成して、構造グリッドｌないし３の間に取り付ける
ようにしたものである。The unit-type clean room shown in Fig. 6 is equipped with equipment panels such as the air conditioning package-unit built-in puffer 14, the electrical panel 17, and the equipment panel 18 for future use as shown in Figs. 3 and 4. It is not installed on the grid, but is constructed as a single unit, and is installed between structural grids 1 to 3.
従って第６図に示すように構造グリッドエないし３は、
それぞれ設備パネル相当の間隔をおいて配置され、その
間に空調パッケージ・ユニット内蔵パネル１４や電気盤
用パネル１７、将来対応用設備パネル１８に相当する設
備パネル３１．３３．３４、盲１反３２が取り付けられ
、また天井には構造グリッドの天井パネル９と同様の天
井パネルが取り付けられる。Therefore, as shown in FIG. 6, the structure grids A to 3 are
They are arranged at intervals equivalent to the equipment panels, and between them are the air conditioning package unit built-in panel 14, the electrical panel panel 17, the equipment panels 31, 33, and 34, which correspond to the future compatible equipment panel 18, and 1 blind 32. A ceiling panel similar to the ceiling panel 9 of the structural grid is attached to the ceiling.
第７図は第６図に示すユニット型クリーンルームに適用
される空調パッケージ・ユニット内蔵パネルの例を示す
図であり、４１は吹出口、４２は送風機、４３はガイド
ヘン、４４はスライド・バンパー、４５は加熱コイル、
４６は冷却コイル、４７は加湿器、４８は張込口、４９
は高性能フィルタをそれぞれ示している。FIG. 7 is a diagram showing an example of a panel with a built-in air conditioning package unit applied to the unit-type clean room shown in FIG. 45 is a heating coil;
46 is a cooling coil, 47 is a humidifier, 48 is an inlet, 49
indicate high-performance filters, respectively.
冷却コイル４６、加湿器４７、加熱コイル４５は、一般
に直列に配置されるが、この例では、第７図１ａｌの内
部正面配置図に示すように加湿器４７は下の隅に、加熱
コイル４５はその上に、冷却コイル４６はそれらと並列
に配置される。また、冷却コイル４６と加熱コイル４５
は、第７図（ｂｌの内部側面図に示すように前後に（噴
けるようにすると、さらに高さを抑えることができると
ともに、それぞれのコイル全面にわたって均等に空気の
接触を図ることができ、性能の低下を防止することがで
きる。The cooling coil 46, humidifier 47, and heating coil 45 are generally arranged in series, but in this example, the humidifier 47 is located in the lower corner, and the heating coil 45 are arranged thereon, and a cooling coil 46 is arranged in parallel therewith. In addition, the cooling coil 46 and the heating coil 45
As shown in the internal side view of Figure 7 (BL), by making it possible to spray from front to back (internal side view), the height can be further reduced, and even air contact can be achieved over the entire surface of each coil. Deterioration in performance can be prevented.
スライド・バンパー４４は、風早の調整が一応工場にお
いて行われるが、クリーンルームを形成した後の現場で
、再度要求に合わせて微調整するのに用いられ、これに
よりローコストで高効率のクリーンルームを提供する。The slide bumper 44 is adjusted for wind speed at the factory, but after the clean room has been formed, it is used to fine-tune it again to meet the requirements at the site, thereby providing a low-cost, high-efficiency clean room. .
送風機４２は、例えば低速回転モーフで駆動される中静
圧のンロッコ・ファンが使用される。送風＠４２の径を
大きくすると、渦流が発生しその渦流のために騒音が大
きくなるという問題が生しる。As the blower 42, for example, a medium static pressure Nrokko fan driven by a low speed rotation morph is used. If the diameter of the air blower @ 42 is increased, a problem arises in that eddy currents are generated and noise increases due to the eddy currents.
そこで、第７図１ａｌに示すようにガイドヘン４３を設
けるとともに、送風路を長くしてこのガイドヘノ４３に
よって送風機４２の出力を整流し、方向転換をしながら
徐々に送風路の幅を広げ、渦流が発生しないようにする
ことによって、渦流が原因で発生する騒音を抑えること
ができる。また騒音の低酸を図るには、随所に吸音材を
用いるようにしてもよい。Therefore, as shown in FIG. 7 1al, a guide hem 43 is provided, the air blow path is lengthened, the output of the blower 42 is rectified by the guide hem 43, and the width of the air blow path is gradually widened while changing direction. By preventing this from occurring, it is possible to suppress the noise caused by the eddy current. Also, in order to reduce the noise level, sound absorbing materials may be used everywhere.
吹出口４１は、グリルまたはパンチング・メタルを使っ
た固定式にしたり、室内レイアウト、特に１虱向きの影
♂が必′妥なときにはアクノチメントを設けて可動式に
したり、併用にしてもよいことはいうまでもない。吸込
口４８は、）■塵フィルタ内蔵型が一般に使用される。The air outlet 41 may be a fixed type using a grill or punched metal, or may be movable with an acnotiment when the indoor layout requires a shadow directed toward one area, or may be used in combination. Needless to say. The suction port 48 is generally of the type with a built-in dust filter.
（発明の効果〕
以上の説明から明らかなように、本発明は次のような効
果を奏するものである。(Effects of the Invention) As is clear from the above description, the present invention has the following effects.
■ 最小電位のグリフ）及びパネルを形成し、これを組
み合わセ接合してクリーンルームを構成するので、製造
が容易且つ安価になる。(2) Since a clean room is constructed by forming a glyph with the lowest potential and a panel, which are then combined and connected, manufacturing becomes easy and inexpensive.
■ 各グリッド及びパネルにパーツ化した内装と設備を
それぞれ装備しているので、スペースが有効に活用でき
るとともに、クリーン度などの要求に随意に対応できる
。■Each grid and panel is equipped with separate interiors and equipment, allowing for efficient use of space and allowing for flexible response to requirements such as cleanliness.
■ グリッド及びパネルにより承位化して重量を軽くし
たので、既存の建屋内に容易に搬入することができ、ま
た、クリーンルームを人手によって容易に運搬、組み立
てすることができる。■ The weight is reduced by mounting on grids and panels, so it can be easily transported into existing buildings, and the clean room can be easily transported and assembled by hand.
■ 各グリッド及びパスルの組み合わせ接合によってユ
ニット化したクリーンルームを構成するので、クリーン
ルームを既存の建屋の任、す°の位置に要求に応し極め
て迅速且つ安価に構築することかできる。- Since a unitized clean room is constructed by combining and joining each grid and pulse, a clean room can be constructed extremely quickly and inexpensively in any location in an existing building as required.
■ ユニット化して空気をルーム内で循環できるように
したので、設備を小型軽呈化でき、建屋内にダクト配備
等の大きな設備工事を必要としない。■ Since it is unitized so that air can be circulated within the room, the equipment can be made smaller and lighter, and there is no need for large equipment construction such as installing ducts inside the building.
■ グリッド及びパネルによりユニット化したので、要
求に最も近づけた内容のルーム形成が可能になり、過剰
な設備をすることがなく結果的に安価なりリーンルーム
を製作することができる。■ Since it is unitized with grids and panels, it is possible to form a room with the content closest to the requirements, and as a result, it is possible to create a lean room at a low cost without using excessive equipment.
■ より高いクリーン度の要求に対しても、各設備グリ
ッドまたはパネルの装備内容の変更、追加等により、フ
レキンプルに対応することができる。■ Flexible cleanliness can be accommodated by changing or adding equipment to each equipment grid or panel to meet higher cleanliness requirements.
第１図は本発明のユニット型クリーンルームの全体の外
観を示す図、第２図は構造グリッドのフレーム構成の例
を示す図、第３図は設備グリッドのフレーム構成の例を
示す図、第４図は他の設備グリッドのフレーム構成の例
を示す図、第５図は第２図に示す構造グリッドのフレー
ムに内装及び外装パーツを装備した例を示す図、第６図
は本発明の他の実施例を説明するための図、第７図は第
６図に示すユニット型クリーンルームに通用すれる空調
パッケージ・ユニット内装パネルの例を示す図である。
工ないし３・・構造グリッド、４と５・・・設備グリッ
ド、６・・・入口扉、７・・・覗き窓、８・・・エアー
ンヤワー・ルーム、９・・・天井パネル、１０・・・
設備パッケージ、１１・・・外装パネル、１２と１３・
・・構造材、１４・・・空調パッケージ・ユニット内装
パネル、１５・・・高性能フィルタ吹出口、１６・・空
調用吸込口、１７・・・電気盤用パネル、１８・・将来
対応用設備パネル、１９・・ボルト、２０・・・コンセ
ント、２１・・内装パネル、３１．３３と３４・・・設
備パヱル、３２・・・盲板、４１・・吹出口、４２・・
・送風機、４３・・・ガイドヘン、４４・・・スライド
・バンパー、４５・・・加熱コイル、４６・・・冷却コ
イル、４７は加湿器、４８・・・吸込口、４９・・・高
性能フィルタ。
特許出願人 清水建設株式会社
代理人弁理士 阿 部 ０ヒ 古
代 （因
λ ２ 圀
大 ３ 口
七で 今 圀
大 Ｓ 図
）Ｘ Ｇ 回
λ７切Fig. 1 is a diagram showing the overall appearance of the unit type clean room of the present invention, Fig. 2 is a diagram showing an example of the frame configuration of the structural grid, Fig. 3 is a diagram showing an example of the frame configuration of the equipment grid, and Fig. 4 is a diagram showing an example of the frame configuration of the equipment grid. 5 is a diagram showing an example of the frame configuration of another equipment grid, FIG. 5 is a diagram showing an example in which the frame of the structural grid shown in FIG. 2 is equipped with interior and exterior parts, and FIG. FIG. 7, which is a diagram for explaining the embodiment, is a diagram showing an example of an air conditioning package unit interior panel that can be used in the unit type clean room shown in FIG. 6. 3...Structural grid, 4 and 5...Equipment grid, 6...Entrance door, 7...Peep window, 8...Air room, 9...Ceiling panel, 10...・
Equipment package, 11...Exterior panel, 12 and 13.
... Structural materials, 14... Air conditioning package unit interior panel, 15... High performance filter outlet, 16... Air conditioning inlet, 17... Panel for electrical panel, 18... Equipment for future use Panel, 19...Bolt, 20...Outlet, 21...Interior panel, 31.33 and 34...Equipment panel, 32...Blind plate, 41...Air outlet, 42...
・Blower, 43... Guide head, 44... Slide bumper, 45... Heating coil, 46... Cooling coil, 47 is Humidifier, 48... Suction port, 49... High performance filter. Patent applicant Shimizu Corporation Patent attorney Abe 0hi Kodai (in λ 2 Kokudai 3 mouth 7 de Kon Kunidai S figure) X G times λ7 cut
Claims (2)
数配列し、該構造グリッドの間に空気清浄装置や電気盤
等の設備パネルを配置してクリーンルームを構成するユ
ニット型クリーンルームであって、設備パネルは、天井
に構造材を有し構造グリッドと同形状の門形の設備グリ
ッドに装備し、該設備グリッドを両側の構造グリッドに
接合することによってクリーンルームを構成することを
特徴とするユニット型クリーンルーム。(1) A unit-type clean room in which a clean room is constructed by arranging a plurality of structural grids each having a gate-shaped frame as a framework, and placing equipment panels such as air purifiers and electrical panels between the structural grids, and the equipment A unit type clean room characterized in that the panel has a structural material on the ceiling and is installed on a portal-shaped equipment grid having the same shape as the structural grid, and the clean room is constructed by connecting the equipment grid to the structural grids on both sides. .
数配列し、該構造グリッドの間に空気清浄装置や電気盤
等の設備パネルを配置してクリーンルームを構成するユ
ニット型クリーンルームであって、設備パネルは、両側
の構造グリッドに直接接合し、天井は、両側の構造グリ
ッド間に跨がるパネルにより覆うことによってクリーン
ルームを構成することを特徴とするユニット型クリーン
ルーム。(2) A unit-type clean room in which a clean room is constructed by arranging a plurality of structural grids each using a gate-shaped frame as a framework, and placing equipment panels such as air purifiers and electrical panels between the structural grids, and the equipment A unit type clean room characterized in that the clean room is constructed by having panels directly joined to structural grids on both sides, and a ceiling covered by panels spanning between the structural grids on both sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59223468A JPS61101733A (en) | 1984-10-24 | 1984-10-24 | Unit type clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59223468A JPS61101733A (en) | 1984-10-24 | 1984-10-24 | Unit type clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61101733A true JPS61101733A (en) | 1986-05-20 |
| JPH0543938B2 JPH0543938B2 (en) | 1993-07-05 |
Family
ID=16798612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59223468A Granted JPS61101733A (en) | 1984-10-24 | 1984-10-24 | Unit type clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61101733A (en) |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS646640A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Structure of clean workroom |
| JPS646636A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Structure of the clean workroom |
| JPS646638A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Air purification apparatus for clean workroom |
| JPS646637A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Air circulation method of clean workroom |
| JPS646639A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Air purification apparatus for clean workroom |
| EP0340433A2 (en) * | 1988-04-30 | 1989-11-08 | BABCOCK-BSH AKTIENGESELLSCHAFT vormals Büttner-Schilde-Haas AG | Tunnel module for creating a clean space by the laminar flow technique |
| JPH0389844U (en) * | 1989-09-01 | 1991-09-12 | ||
| US5051765A (en) * | 1987-01-20 | 1991-09-24 | Minolta Camera Kabushiki Kaisha | Camera |
| JPH0559828A (en) * | 1991-08-29 | 1993-03-09 | Gifu Kogyo Kk | Purified space housing unit |
| WO2006125546A1 (en) * | 2005-05-27 | 2006-11-30 | Opitz + Flierl Hospital Technik Ag | Clean room |
| WO2009001698A1 (en) * | 2007-06-25 | 2008-12-31 | Unitec Inc | Unit type clean room |
| WO2015079272A1 (en) * | 2013-11-27 | 2015-06-04 | Honvédelmi Minisztérium Elektronikai | Expandable self-supporting container frame structure for laboratory purposes |
| CN106121286A (en) * | 2016-08-22 | 2016-11-16 | 常州市浩东净化设备科技有限公司 | A kind of quick assembling type clean operating room |
| US9518748B2 (en) | 2009-08-16 | 2016-12-13 | G-Con Manufacturing Inc. | Modular, self-contained, mobile clean room |
| US9795957B2 (en) | 2009-08-16 | 2017-10-24 | G-Con Manufacturing, Inc. | Modular, self-contained, mobile clean room |
| US10161147B2 (en) | 2013-10-14 | 2018-12-25 | G-Con Manufacturing Inc. | Method for connecting modular mobile rooms |
| US10533758B2 (en) | 2014-07-11 | 2020-01-14 | G-Con Manufacturing Inc. | Modular parts that supply utilities to cleanroom, isolation or containment cubicles, pods, or modules |
| US11492795B2 (en) | 2020-08-31 | 2022-11-08 | G-Con Manufacturing, Inc. | Ballroom-style cleanroom assembled from modular buildings |
| US11624182B2 (en) | 2019-08-15 | 2023-04-11 | G-Con Manufacturing, Inc. | Removable panel roof for modular, self-contained, mobile clean room |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS565707U (en) * | 1979-06-26 | 1981-01-19 |
-
1984
- 1984-10-24 JP JP59223468A patent/JPS61101733A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS565707U (en) * | 1979-06-26 | 1981-01-19 |
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5051765A (en) * | 1987-01-20 | 1991-09-24 | Minolta Camera Kabushiki Kaisha | Camera |
| JPS646640A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Structure of clean workroom |
| JPS646636A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Structure of the clean workroom |
| JPS646638A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Air purification apparatus for clean workroom |
| JPS646637A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Air circulation method of clean workroom |
| JPS646639A (en) * | 1987-06-26 | 1989-01-11 | Mitsui Constr | Air purification apparatus for clean workroom |
| EP0340433A2 (en) * | 1988-04-30 | 1989-11-08 | BABCOCK-BSH AKTIENGESELLSCHAFT vormals Büttner-Schilde-Haas AG | Tunnel module for creating a clean space by the laminar flow technique |
| JPH0389844U (en) * | 1989-09-01 | 1991-09-12 | ||
| JPH0559828A (en) * | 1991-08-29 | 1993-03-09 | Gifu Kogyo Kk | Purified space housing unit |
| WO2006125546A1 (en) * | 2005-05-27 | 2006-11-30 | Opitz + Flierl Hospital Technik Ag | Clean room |
| US8371912B2 (en) | 2007-06-25 | 2013-02-12 | Unitec Inc. | Unit type clean room |
| WO2009001698A1 (en) * | 2007-06-25 | 2008-12-31 | Unitec Inc | Unit type clean room |
| TWI458923B (en) * | 2007-06-25 | 2014-11-01 | Unitec Inc | Unit type clean room and its combination method |
| US20100112926A1 (en) * | 2007-06-25 | 2010-05-06 | Unitec Inc. | Unit type clean room |
| US9795957B2 (en) | 2009-08-16 | 2017-10-24 | G-Con Manufacturing, Inc. | Modular, self-contained, mobile clean room |
| US10654036B2 (en) | 2009-08-16 | 2020-05-19 | G-Con Manufacturing, Inc. | Modular, self-contained, mobile clean room |
| US9518748B2 (en) | 2009-08-16 | 2016-12-13 | G-Con Manufacturing Inc. | Modular, self-contained, mobile clean room |
| US9765980B2 (en) | 2009-08-16 | 2017-09-19 | G-Con Manufacturing, Inc. | Modular, self-contained, mobile clean room |
| US10161147B2 (en) | 2013-10-14 | 2018-12-25 | G-Con Manufacturing Inc. | Method for connecting modular mobile rooms |
| EA034426B1 (en) * | 2013-11-27 | 2020-02-06 | Хонведельми Министериум Электроникаи, Логистикаи Эш Вадьонкезело Зрт. | Expandable self-supporting container frame structure for laboratory purposes |
| WO2015079272A1 (en) * | 2013-11-27 | 2015-06-04 | Honvédelmi Minisztérium Elektronikai | Expandable self-supporting container frame structure for laboratory purposes |
| US10533758B2 (en) | 2014-07-11 | 2020-01-14 | G-Con Manufacturing Inc. | Modular parts that supply utilities to cleanroom, isolation or containment cubicles, pods, or modules |
| CN106121286B (en) * | 2016-08-22 | 2018-12-11 | 常州市浩东净化设备科技有限公司 | A kind of quick assembling type clean operating room |
| CN106121286A (en) * | 2016-08-22 | 2016-11-16 | 常州市浩东净化设备科技有限公司 | A kind of quick assembling type clean operating room |
| US11624182B2 (en) | 2019-08-15 | 2023-04-11 | G-Con Manufacturing, Inc. | Removable panel roof for modular, self-contained, mobile clean room |
| US11492795B2 (en) | 2020-08-31 | 2022-11-08 | G-Con Manufacturing, Inc. | Ballroom-style cleanroom assembled from modular buildings |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543938B2 (en) | 1993-07-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |