EP0340433A2 - Tunnel module for creating a clean space by the laminar flow technique - Google Patents

Tunnel module for creating a clean space by the laminar flow technique Download PDF

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Publication number
EP0340433A2
EP0340433A2 EP89104834A EP89104834A EP0340433A2 EP 0340433 A2 EP0340433 A2 EP 0340433A2 EP 89104834 A EP89104834 A EP 89104834A EP 89104834 A EP89104834 A EP 89104834A EP 0340433 A2 EP0340433 A2 EP 0340433A2
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EP
European Patent Office
Prior art keywords
chamber
tunnel module
fan
module according
opening
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Granted
Application number
EP89104834A
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German (de)
French (fr)
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EP0340433B1 (en
EP0340433A3 (en
Inventor
Herbert Eidam
Gerhard Frankenberger
Karl-Heinz Velde
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Grenzebach GmbH and Co KG
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Babcock BSH AG
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Priority to AT89104834T priority Critical patent/ATE83307T1/en
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Publication of EP0340433A3 publication Critical patent/EP0340433A3/en
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Publication of EP0340433B1 publication Critical patent/EP0340433B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/24—Means for preventing or suppressing noise
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Definitions

  • the invention relates to a tunnel module according to the preamble of claim 1.
  • the clean room tunnel system shown on sheet 004 is a portable module that can be strung together in any number.
  • a tunnel module of the system shown consists of an upper part and two side walls with double walls.
  • the upper part has a chamber system with two return air inlets, a fan and superimposed chambers, the lower chamber being limited at the bottom by an arrangement of high-performance particulate filters.
  • the air returned between the side walls and their double walls is conveyed through the upper chambers from both sides into the lower chamber and fed into the clean room through the high-performance suspended matter filters.
  • a prerequisite for laminar flow in the clean room is an even speed distribution behind the high-performance particulate filters, which can be generated by applying the filters evenly.
  • the high-performance particulate filters have very high air resistances, which significantly reduce the flow velocities. Only the static pressure component of an air flow upstream of the high-performance particulate filters is therefore effective.
  • Laminar flow technology therefore requires an air flow with as little turbulence as possible and with the highest possible static pressure in the chamber in front of the high-performance particulate filters.
  • a low-turbulence flow is promoted by a one-sided air supply to the chamber in front of the high-performance particulate filters.
  • the static pressure component of a flow can be increased by converting dynamic pressure into static pressure.
  • Such a conversion is achieved by passing the air through a multi-chamber system, thereby reducing the flow rate.
  • the conversion from dynamic to static pressure leads to large energy losses and high energy requirements for the fans.
  • a generic tunnel module is shown schematically in the brochure "ias / Clean Room Tunnels, LVT Tunnel Series 2 (CRT-5-84)".
  • this tunnel module In the upper part of this tunnel module there are two chamber systems arranged side by side in mirror image and separated by a central wall.
  • Each chamber system has three chambers, one above the other, divided by two intermediate floors, a fan and a return air opening.
  • the fan is located in a box in front of the upper chamber on one side of the upper part and the return air opening in the fan box.
  • the three chambers are connected to one another by openings in the intermediate floors, the opening of the upper intermediate floor being opposite to that of the return air opening the side and that of the lower intermediate floor is on the side of the return air opening.
  • the lower chamber is limited at the bottom by an arrangement of high-performance filters.
  • the object of the invention is to develop a tunnel module for building a clean room using laminar flow technology, in which a uniform speed distribution in the clean room is ensured with the lowest possible energy requirement.
  • the fan for generating a low-turbulence, high-static pressure air flow in the lower chamber in front of the high-performance filters requires significantly less energy.
  • the arrangement of the fan in the middle chamber on the side opposite the return air opening leads to significantly lower friction losses. Flow obstacles through a fan box in front of the upper chamber are avoided. Sucking the return air through the upper chamber smoothes the air flow to the fan.
  • the energy requirement is further reduced by the construction of the fan with backward curved blades and external rotor motor. Flow obstacles through a housing are avoided.
  • the position of the fan described in the feature of claim 4 leads to the greatest degrees of efficiency of the fan compared to a greater distance from the side wall or asymmetrical position between the front and rear walls.
  • the advantage of the feature of claim 5 is a guidance of the air flow into the inlet nozzle of the fan.
  • the feature of claim 6 leads to an equalization of the air flow in the upper chamber above the fan.
  • the advantage of the feature of claim 7 is a simultaneous equalization and guidance of the air flow to the fan.
  • the feature of claim 9 leads to an advantageous reduction in the noise level in the clean room.
  • the noise level is further reduced by the arrangement of the middle silencing backdrops described in the feature of claim 10. It also promotes low-loss conversion from dynamic to static pressure.
  • the feature of claim 11 leads to an advantageous, low-turbulence flow in the chamber before the high-performance filters.
  • the feature of claim 13 is advantageous for tunnel modules of the open design if conditioned air is required.
  • the advantage of the feature of claim 15 is the simple construction of a tunnel module.
  • Tunnel modules with the feature of claim 16 are particularly suitable for building wider clean rooms.
  • Example 1 Tunnel module with an open design
  • a tunnel module consists of an upper part 1, which is supported by two U-profiles 2, and two side walls 3, 4.
  • the upper part 1 is approximately cuboid and has a chamber system which extends over the entire width of the upper part 1. Its side walls 5, 6 and the front and rear walls, which are not visible in the drawing and are parallel to the plane of the drawing, are made of folded sheets.
  • the upper part 1 is divided by two intermediate floors 7, 8 into three flat chambers 9, 10, 11, one above the other, on levels.
  • the chamber heights of the upper and middle chambers 9, 10 are approximately the same size, those of the lower chamber 11 about half as large as that of the middle chamber 9.
  • the chambers 9, 10, 11 are through mutually arranged openings 12, 13 in the intermediate floors 7 , 8 connected to each other.
  • the upper chamber 9 has a return air opening 14 in the side wall 6.
  • the opening 12 of the upper intermediate floor 7 is located in the vicinity of the opposite side wall 5.
  • the opening 13 of the lower intermediate floor 8 is a gap which is formed between the edge of the lower intermediate floor 8, which does not quite reach the side wall 6 which has the return air opening 14, and the side wall 6 remains free.
  • the lower chamber 11 is delimited at the bottom by six high-performance suspended matter filters 15 which are placed next to one another in a tile-like manner and are suspended in a grid-like frame construction. Of the six high-performance particulate filters 15, two are arranged one behind the other and three next to one another. The high-performance particulate filters 15 are provided with dry and liquid seal seals.
  • the inlet nozzle 17 of which is seated in the opening 12 of the upper intermediate floor 7 and which is fastened to the upper intermediate floor 7.
  • the fan 16 is designed as a housing-free radial fan with an external rotor motor 18 and has backward curved blades 19.
  • the distance of the fan axis 20 from the side wall 5 lying next to it corresponds to approximately 0.8 times the diameter of the fan 16.
  • the fan axis 20 lies in the middle between front and back wall.
  • a ceiling 21 and the upper intermediate floor 7 are covered with silencing baffles 22, which extend from the side wall 6 to close to the inlet nozzle 17.
  • the thickness of the silencing baffles 22 is approximately one third of the height of the upper chamber 9, so that a gap remains between them, the height of which also is a third of the chamber height.
  • a rectification plate 23 is located transversely above the inlet nozzle 17 and is parallel to the front and rear walls. It protrudes somewhat on both sides beyond the inlet nozzle 17 and ends on the side of the inlet nozzle 17 facing the return air opening 14 just before the silencing backdrops 22.
  • Two inflow plates 24 extend between the front and rear walls, which on one side extend into the gap between the silencing gates 22, are rounded downwards on the other side and extend directly to the inlet nozzle 17. In the gap, the inflow plates 24 abut one another in the middle and in the further course against the rectifying plate 23. In the gap between the silencing baffles 22, the inflow plates 24 are located at about a third of the gap height. The distance between the edges of the inflow plates 24 above the inlet nozzle 17 and the fan axis 20 is approximately 10% of the diameter of the inlet nozzle 17.
  • silencing baffles 25 which extend from the fan 16 in the direction of the side wall 6 and extend approximately to the middle of the middle chamber 10. Their thickness and the thickness of the gap remaining between them each amount to approximately one third of the chamber height.
  • the two intermediate floors 7, 8 are also provided with silencing baffles 26. Its thickness is only about one sixth of the chamber height.
  • Another, middle silencing backdrop 27, the height of which is approximately one third of the chamber height, is located in the middle between the two silencing backdrops 26; Above and below the middle silencing backdrop 27 there is a gap with a height of approximately one sixth of the chamber height. The two gaps continue the gap between the silencing backdrops 26 in the half of the middle chamber 10 facing the fan 16, so that the cross-section of the gap resembles a tuning fork.
  • a baffle 28 extending from the front to the rear wall and extending from the sound-reducing link 27 through the center of the opening 13 of the lower intermediate floor 8 into the lower chamber 11 is fastened.
  • the edge of the guide plate 28 projects horizontally below the lower intermediate floor 8 at about half the height of the lower chamber 11.
  • a sheet metal strip extending from the front to the rear wall, a so-called spoiler 29, is attached on the side wall 6, at a height of approximately 40% of the height of the lower chamber 11, a sheet metal strip extending from the front to the rear wall, a so-called spoiler 29, is attached. It projects horizontally below the opening 13 of the lower intermediate floor 8 into the lower chamber 11. The distance between the edge of the spoiler 29 and the guide plate 28 is approximately half the height of the lower chamber 11.
  • a pre-filter 30 and a water-cooled air cooler 31 are fastened to the side wall 6. Air cooler 31 and pre-filter 30 are sandwiched one above the other, with the pre-filter 30 pointing outwards. Both extend over the entire width of the side wall 6.
  • Exhaust vents 32, 33 are located in the side walls 3, 4 of the tunnel module near the floor.
  • the direction of air flow is symbolized by arrows.
  • the free interiors of the upper chamber 9 and the middle chamber 10 form a hairpin-shaped air duct.
  • the air duct is branched through the middle silencing link 27.
  • the baffle 28 continues the branching in the opening 13 of the lower intermediate floor 8 and in a small, adjoining area of the lower chamber 11.
  • Figure 2 shows an arrangement of four tunnel modules of the open design.
  • the tunnel modules are arranged alternately one behind the other, the fan 16 being located in successive tunnel modules alternately on the right and on the left side of the arrangement.
  • the tunnel modules are screwed together on the U-profiles 2.
  • the arrangement is limited at the front and rear by a front wall 34 and a rear wall 35.
  • the arrows drawn in FIG. 2 symbolize the direction of flow of the air at the level of the upper chambers 9.
  • air is drawn in from the outside through the pre-filters 30, the coolers 31, the return air openings 14 and the upper chambers 9 by the fans 16 and is fed to the clean room via the middle and lower chambers 10, 11 by the high-performance suspended matter filters 15.
  • the cleaned air flows through the clean room in a laminar manner and leaves it through the exhaust air openings 32, 33.
  • Example 2 tunnel module of closed construction
  • the tunnel module of closed construction shown in FIG. 3 corresponds to that of Example 1 except for the following points:
  • the lower chamber 11 is delimited at the bottom by eight high-performance suspended matter filters 15, two being arranged one behind the other and four next to one another.
  • the example 2 shown has an air-permeable double floor 38, which is necessary from a width of 4.5 m to maintain the laminar flow.
  • the exhaust air openings 32, 33 are located below the raised floor 38.
  • Figure 4 shows three mutually successive tunnel modules of closed design.
  • the arrangement of the three tunnel modules is delimited at the front and rear by a front wall 39 and a rear wall 40.
  • the gaps adjoining on one side between the side walls 3, 4 and their double walls 36, 37 are connected to one another.
  • the arrows symbolize the direction of flow of air at the level of the upper chambers 9.
  • the air flows through the double floor 38, under the double floor 38 to the exhaust air openings 32, 33 on both sides and through the exhaust air openings 32, 33 into the interconnected gaps between the side walls 3, 4 and the double walls 36, 37. It becomes sucked out of the columns through the return air openings 14 connected to the columns into the chamber systems of the tunnel modules, conveyed through the chamber systems and returned to the clean room in a cleaned state.
  • FIG. 5 shows an arrangement of four tunnel modules of example 3, which are arranged one behind the other.
  • a tunnel module of example 3 differs from that of example 2 in that in the tunnel module of example 3 two chamber systems, separated by a central wall 41, are arranged side by side in mirror image.
  • the two chamber systems of a tunnel module meet with the sides on which the fans 16 are located on the central wall 41.
  • the return air openings 14 are accordingly on the two sides of the tunnel module.
  • the arrangement of the four tunnel modules is limited by a front wall 42 and a rear wall 43.
  • the gaps adjoining on one side between the side walls 3, 4 of the tunnel modules and their double walls 36, 37 are connected to one another.
  • the arrows in FIG. 5 symbolize the direction of flow of the air at the level of the upper chambers 9.
  • the air flowing from the exhaust air openings 32, 33 is sucked through the gaps between the side walls 3, 4 and the double walls 36, 37 into the separate chamber systems, conveyed through the chamber systems and returned to the clean room in a cleaned manner.

Abstract

A tunnel module consists of an upper part (1), which is downwardly delimited by high-performance filters (15), and two side walls (3, 4). The upper part (1) has three chambers (9, 10, 11) which are divided by two intermediate bottoms (7, 8) and lie on top of one another, a fan (16) and a return air opening (14). The chambers (9, 10, 11) are interconnected by means of openings (12, 13) arranged on alternate sides in the intermediate bottoms (7, 8), the opening (12) of the upper intermediate bottom (7) and the return air opening (14) being situated on opposite sides. In order to produce a low-turbulence airflow, which is provided with a high static pressure content, in the lower chamber (11) in front of the high-performance filters (15), with low energy expenditure, the fan (16) is arranged in the central chamber (10) below the opening (12) of the upper intermediate bottom (7). <IMAGE>

Description

Die Erfindung betrifft ein Tunnelmodul gemäß dem Oberbe­griff des Anspruchs 1.The invention relates to a tunnel module according to the preamble of claim 1.

Bestimmte Produktionsverfahren, zum Beispiel der Mikroelek­tronik, der Feinwerkmechanik, der Optik oder der Pharmazie, benötigen reine, staubfreie Atmosphären, die durch rein­raumtechnische Einrichtungen hergestellt werden. In der so­genannten Laminar-Flow-Technik wird die reine Atmosphäre erzeugt, indem hochgradig gefilterte Luft in turbulenzarmer Verdrängungsströmung durch den Reinraum geführt wird.Certain production processes, such as microelectronics, precision mechanics, optics or pharmacy, require clean, dust-free atmospheres that are created by clean room technology. In the so-called laminar flow technology, the pure atmosphere is created by leading highly filtered air through the clean room in a low-turbulence displacement flow.

In der in der EP-A2 0 202 110 beschriebenen Reinraumanlage in Laminar-Flow-Technik wird Luft durch Ventilatoren unter Druck in eine Kammer zwischen einer Decke und einer aus Hochleistungsfiltern gebildeten Zwischendecke gefördert. Die durch die Hochleistungsfilter gereinigte Luft durch­strömt den Reinraum vertikal nach unten, wird im Boden ab­gesaugt und über Seitenkanäle zu den Ventilatoren zurück­geführt. Bei dieser Anlage sind die reinraumtechnischen Einrichtungen fest installiert.In the clean room system in laminar flow technology described in EP-A2 0 202 110, air is conveyed by fans under pressure into a chamber between a ceiling and an intermediate ceiling formed from high-performance filters. The air cleaned by the high-performance filters flows vertically downwards through the clean room, is extracted in the floor and returned to the fans via side channels. The clean room facilities are permanently installed in this system.

Da sich die Produktionsbedingungen in vielen Bereichen mit zunehmender Schnelligkeit ändern, ist man an einem schnell auf- und abbaubaren Reinraumsystem, mit dem neue Reinräume schnell gebildet, alte entfernt oder vorhandene vergrößert oder verkleinert werden können, interessiert.Since the production conditions in many areas change with increasing speed, people are interested in a clean room system that can be quickly assembled and disassembled, with which new clean rooms can be quickly created, old ones removed or existing ones enlarged or reduced.

Dies hat zur Entwicklung von Modulsystemen geführt, von denen eines in dem Prospekt "Reinraum-Technik für die Elek­tronik" (Babcock-BSH Reinraum-Technik, 6.86) beschrieben ist. Bei dem auf Blatt 004 dargestellten Reinraum-Tunnel­system handelt es sich um transportable Module, die in be­liebiger Stückzahl aneinandergereiht werden können.This has led to the development of module systems, one of which is described in the brochure "Clean room technology for electronics" (Babcock-BSH clean room technology, 6.86). The clean room tunnel system shown on sheet 004 is a portable module that can be strung together in any number.

Ein Tunnelmodul des abgebildeten Systems besteht aus einem Oberteil und zwei Seitenwänden mit Doppelwänden. Das Ober­teil weist ein Kammersystem mit zwei Rücklufteinlässen, einem Ventilator und übereinanderliegenden Kammern auf, wo­bei die untere Kammer durch eine Anordnung von Hochlei­stungsschwebstoffiltern nach unten begrenzt ist. Die zwischen den Seitenwänden und ihren Doppelwänden zurückge­führte Luft, wird durch die oberen Kammern von beiden Sei­ten in die untere Kammer gefördert und durch die Hochlei­stungsschwebstoffilter dem Reinraum zugeführt.A tunnel module of the system shown consists of an upper part and two side walls with double walls. The upper part has a chamber system with two return air inlets, a fan and superimposed chambers, the lower chamber being limited at the bottom by an arrangement of high-performance particulate filters. The air returned between the side walls and their double walls is conveyed through the upper chambers from both sides into the lower chamber and fed into the clean room through the high-performance suspended matter filters.

Voraussetzung der laminaren Strömung im Reinraum ist eine gleichmäßige Geschwindigkeitsverteilung hinter den Hochlei­stungsschwebstoffiltern, die durch eine gleichmäßige Beauf­schlagung der Filter zu erzeugen ist.A prerequisite for laminar flow in the clean room is an even speed distribution behind the high-performance particulate filters, which can be generated by applying the filters evenly.

Die Hochleistungsschwebstoffilter haben sehr hohe Luft­widerstände, die die Strömungsgeschwindigkeiten erheblich reduzieren. Wirksam ist daher im wesentlichen nur der statische Druckanteil einer Luftströmung vor den Hochlei­stungsschwebstoffiltern.The high-performance particulate filters have very high air resistances, which significantly reduce the flow velocities. Only the static pressure component of an air flow upstream of the high-performance particulate filters is therefore effective.

Die Laminar-Flow-Technik erfordert demnach eine möglichst turbulenzarme Luftströmung mit möglichst hohem statischen Druckanteil in der Kammer vor den Hochleistungsschweb­stoffiltern.Laminar flow technology therefore requires an air flow with as little turbulence as possible and with the highest possible static pressure in the chamber in front of the high-performance particulate filters.

Eine turbulenzarme Strömung wird durch eine einseitige Luftzufuhr zu der Kammer vor den Hochleistungsschweb­stoffiltern begünstigt. Der statische Druckanteil einer Strömung kann durch Umwandlung von dynamischem Druck in statischen Druck erhöht werden.A low-turbulence flow is promoted by a one-sided air supply to the chamber in front of the high-performance particulate filters. The static pressure component of a flow can be increased by converting dynamic pressure into static pressure.

Eine solche Umwandlung wird erreicht, indem die Luft durch ein Kammersystem mit mehreren Kammern geführt und dadurch die Strömungsgeschwindigkeit reduziert wird. Die Umwandlung von dynamischem in statischen Druck führt zu großen Ener­gieverlusten und hohem Energiebedarf der Ventilatoren.Such a conversion is achieved by passing the air through a multi-chamber system, thereby reducing the flow rate. The conversion from dynamic to static pressure leads to large energy losses and high energy requirements for the fans.

Ein gattungsbildendes Tunnelmodul ist schematisch im Pro­spektblatt "ias/Clean Room Tunnels, LVT Tunnel Series 2 (CRT-5-84)" abgebildet. Im Oberteil dieses Tunnelmoduls befinden sich zwei spiegelbildlich nebeneinander angeord­nete, durch eine Mittelwand getrennte Kammersysteme.A generic tunnel module is shown schematically in the brochure "ias / Clean Room Tunnels, LVT Tunnel Series 2 (CRT-5-84)". In the upper part of this tunnel module there are two chamber systems arranged side by side in mirror image and separated by a central wall.

Jedes Kammersystem weist drei durch zwei Zwischenböden un­terteilte, übereinanderliegende Kammern, einen Ventilator und eine Rückluftöffnung auf. Der Ventilator befindet sich in einem Kasten vor der oberen Kammer an einer Seite des Oberteils und die Rückluftöffnung im Ventilatorkasten. Die drei Kammern sind durch Öffnungen in den Zwischenböden mit­einander verbunden, wobei sich die Öffnung des oberen Zwischenbodens auf der der Rückluftöffnung gegenüberliegen­ den Seite und die des unteren Zwischenbodens auf der Seite der Rückluftöffnung befindet. Die untere Kammer wird nach unten durch eine Anordnung von Hochleistungsfiltern be­grenzt.Each chamber system has three chambers, one above the other, divided by two intermediate floors, a fan and a return air opening. The fan is located in a box in front of the upper chamber on one side of the upper part and the return air opening in the fan box. The three chambers are connected to one another by openings in the intermediate floors, the opening of the upper intermediate floor being opposite to that of the return air opening the side and that of the lower intermediate floor is on the side of the return air opening. The lower chamber is limited at the bottom by an arrangement of high-performance filters.

In jedem der beiden Kammersysteme wird Luft durch die Rück­luftöffnungen angesaugt, durch die beiden oberen Kammern gefördert und der unteren Kammer vor den Hochleistungsfil­tern von einer Seite zugeführt.In each of the two chamber systems, air is drawn in through the return air openings, conveyed through the two upper chambers and fed from one side to the lower chamber in front of the high-performance filters.

Die Aufgabe der Erfindung ist, ein Tunnelmodul zum Aufbau eines Reinraums in Laminar-Flow-Technik zu entwickeln, bei dem eine gleichmäßige Geschwindigkeitsverteilung im Rein­raum bei möglichst geringem Energiebedarf gewährleistet ist.The object of the invention is to develop a tunnel module for building a clean room using laminar flow technology, in which a uniform speed distribution in the clean room is ensured with the lowest possible energy requirement.

Diese Aufgabe wird erfindungsgemäß durch das im Kennzeichen des Anspruchs 1 angegebene Merkmal gelöst.This object is achieved by the feature specified in the characterizing part of claim 1.

Durch das kennzeichnende Merkmal des Anspruchs 1 benötigt der Ventilator zur Erzeugung einer turbulenzarmen, mit einem hohen statischen Druckanteil versehene Luftströmung in der unteren Kammer vor den Hochleistungsfiltern wesent­lich weniger Energie. Die Anordnung des Ventilators in der mittleren Kammer auf der der Rückluftöffnung gegenüberlie­genden Seite führt zu wesentlich geringeren Reibungsver­lusten. Strömungshindernisse durch einen Ventilatorkasten vor der oberen Kammer werden vermieden. Das Ansaugen der Rückluft durch die obere Kammer vergleichmäßigt die Luft­strömung zum Ventilator.Due to the characterizing feature of claim 1, the fan for generating a low-turbulence, high-static pressure air flow in the lower chamber in front of the high-performance filters requires significantly less energy. The arrangement of the fan in the middle chamber on the side opposite the return air opening leads to significantly lower friction losses. Flow obstacles through a fan box in front of the upper chamber are avoided. Sucking the return air through the upper chamber smoothes the air flow to the fan.

Die im Merkmal des Anspruchs 2 beschriebene Anordnung des Ventilators mit in die obere Kammer ragender Einlaufdüse reduziert den Energiebedarf des Ventilators weiter.The arrangement of the fan described in the feature of claim 2 with the inlet nozzle projecting into the upper chamber further reduces the energy requirement of the fan.

Vorteil des Merkmals des Anspruchs 3 ist, daß der Energie­bedarf durch den Aufbau des Ventilators mit rückwärts ge­krümmten Schaufeln und Außenläufermotor weiter gesenkt wird. Strömungshindernisse durch ein Gehäuse werden vermieden.Advantage of the feature of claim 3 is that the energy requirement is further reduced by the construction of the fan with backward curved blades and external rotor motor. Flow obstacles through a housing are avoided.

Die im Merkmal des Anspruchs 4 beschriebene Lage des Ven­tilators führt zu den größten Wirkungsgraden des Ventila­tors, verglichen mit einem größeren Abstand zur Seitenwand oder asymmetrischer Lage zwischen Vorder- und Rückwand.The position of the fan described in the feature of claim 4 leads to the greatest degrees of efficiency of the fan compared to a greater distance from the side wall or asymmetrical position between the front and rear walls.

Der Vorteil des Merkmals des Anspruchs 5 ist eine Führung der Luftströmung in die Einlaufdüse des Ventilators.The advantage of the feature of claim 5 is a guidance of the air flow into the inlet nozzle of the fan.

Das Merkmal des Anspruchs 6 führt zu einer Vergleichmäßi­gung der Luftströmung in der oberen Kammer oberhalb des Ventilators.The feature of claim 6 leads to an equalization of the air flow in the upper chamber above the fan.

Vorteil des Merkmals des Anspruchs 7 ist eine gleichzeitige Vergleichmäßigung und Führung der Luftströmung zum Ventila­tor.The advantage of the feature of claim 7 is a simultaneous equalization and guidance of the air flow to the fan.

Durch den im Merkmal des Anspruchs 8 beschriebenen Spoiler reißt die Luftströmung, die durch die Öffnung des unteren Zwischenbodens geführt wird, ab. Die Umwandlung von dynamischem in statischen Druck wird an dieser Stelle unterstützt.Due to the spoiler described in the feature of claim 8, the air flow, which is guided through the opening of the lower intermediate floor, tears off. The conversion from dynamic to static pressure is supported here.

Das Merkmal des Anspruchs 9 führt zu einer vorteilhaften Verringerung des Lärmpegels im Reinraum.The feature of claim 9 leads to an advantageous reduction in the noise level in the clean room.

Der Lärmpegel wird durch die im Merkmal des Anspruchs 10 beschriebene Anordnung der mittleren Schalldämpfkulissen weiter gesenkt. Sie fördert auch eine verlustarme Umwand­lung von dynamischem in statischen Druck.The noise level is further reduced by the arrangement of the middle silencing backdrops described in the feature of claim 10. It also promotes low-loss conversion from dynamic to static pressure.

Das Merkmal des Anspruchs 11 führt zu einer vorteilhaften, turbulenzarmen Strömung in der Kammer vor den Hochlei­stungsfiltern.The feature of claim 11 leads to an advantageous, low-turbulence flow in the chamber before the high-performance filters.

Für Tunnelmodule, die bei halbreinen Außenräumen eingsetzt werden, ist das Merkmal des Anspruchs 12 einer sogenannten offenen Bauweise vorteilhaft.For tunnel modules that are used in semi-clean outdoor spaces, the feature of claim 12 of a so-called open design is advantageous.

Das Merkmal des Anspruchs 13 ist für Tunnelmodule der offenen Bauweise von Vorteil, wenn klimatisierte Luft benötigt wird.The feature of claim 13 is advantageous for tunnel modules of the open design if conditioned air is required.

Für Tunnelmodule bei verschmutzten Außenräumen ist das Merkmal des Anspruchs 14 einer sogenannten geschlossenen Bauweise vorteilhaft.The feature of claim 14 of a so-called closed construction is advantageous for tunnel modules in dirty outdoor spaces.

Der Vorteil des Merkmals des Anspruchs 15 ist der einfache Aufbau eines Tunnelmoduls.The advantage of the feature of claim 15 is the simple construction of a tunnel module.

Tunnelmodule mit dem Merkmal des Anspruchs 16 sind beson­ders zum Aufbau breiterer Reinräume geeignet.Tunnel modules with the feature of claim 16 are particularly suitable for building wider clean rooms.

Die Zeichnung dient der Erläuterung der Erfindung anhand vereinfacht dargestellter Ausführungsbeispiele.

  • Figur 1 zeigt einen Schnitt durch ein Tunnelmodul der offenen Bauweise mit Vorfilter und Kühler und Figur 2 eine Anordnung von Tunnelmodulen der offenen Bauweise.
  • In Figur 3 ist ein Beispiel der geschlossenen Bauweise und in Figur 4 eine Anordnung von drei derartiger Tunnelmodule hintereinander zu sehen.
  • In Figur 5 ist eine Anordnung mehrerer Tunnelmodule mit zwei Kammersystemen dargestellt.
The drawing serves to explain the invention on the basis of simplified exemplary embodiments.
  • Figure 1 shows a section through a tunnel module of the open design with prefilter and cooler and Figure 2 shows an arrangement of tunnel modules of the open design.
  • FIG. 3 shows an example of the closed construction and FIG. 4 shows an arrangement of three such tunnel modules one behind the other.
  • FIG. 5 shows an arrangement of several tunnel modules with two chamber systems.

Beispiel 1: Tunnelmodul mit offener BauweiseExample 1: Tunnel module with an open design

Ein Tunnelmodul besteht aus einem Oberteil 1, das von zwei U-Profilen 2 getragen wird, und zwei Seitenwänden 3, 4.A tunnel module consists of an upper part 1, which is supported by two U-profiles 2, and two side walls 3, 4.

Das Oberteil 1 ist in etwa quaderförmig und hat ein Kammer­system, das sich über die gesamte Breite des Oberteils 1 erstreckt. Seine Seitenwände 5, 6 sowie die in der Zeich­nung nicht sichtbare, zur Zeichenebene parallele Vorder- und Rückwand bestehen aus abgekanteten Blechen. Das Ober­teil 1 ist durch zwei Zwischenböden 7, 8 in drei etagen­artig übereinanderliegende flache Kammern 9, 10, 11 unter­teilt. Die Kammerhöhen der oberen und mittleren Kammer 9, 10 sind annähernd gleich groß, die der unteren Kammer 11 etwa halb so groß wie die der mittleren Kammer 9. Die Kam­mern 9, 10, 11 sind durch wechselseitig angeordnete Öff­nungen 12, 13 in den Zwischenböden 7, 8 miteinander ver­bunden.The upper part 1 is approximately cuboid and has a chamber system which extends over the entire width of the upper part 1. Its side walls 5, 6 and the front and rear walls, which are not visible in the drawing and are parallel to the plane of the drawing, are made of folded sheets. The upper part 1 is divided by two intermediate floors 7, 8 into three flat chambers 9, 10, 11, one above the other, on levels. The chamber heights of the upper and middle chambers 9, 10 are approximately the same size, those of the lower chamber 11 about half as large as that of the middle chamber 9. The chambers 9, 10, 11 are through mutually arranged openings 12, 13 in the intermediate floors 7 , 8 connected to each other.

Die obere Kammer 9 hat in der Seitenwand 6 eine Rückluft­öffnung 14. Die Öffnung 12 des oberen Zwischenbodens 7 be­findet sich in der Nähe der gegenüberliegenden Seitenwand 5. Die Öffnung 13 des unteren Zwischenbodens 8 ist ein Spalt, der zwischen dem Rand des unteren Zwischenbodens 8, der nicht ganz an die, die Rückluftöffnung 14 aufweisende, Seitenwand 6 heranreicht, und der Seitenwand 6 freibleibt.The upper chamber 9 has a return air opening 14 in the side wall 6. The opening 12 of the upper intermediate floor 7 is located in the vicinity of the opposite side wall 5. The opening 13 of the lower intermediate floor 8 is a gap which is formed between the edge of the lower intermediate floor 8, which does not quite reach the side wall 6 which has the return air opening 14, and the side wall 6 remains free.

Die untere Kammer 11 wird nach unten durch sechs fliesen­artig aneinandergesetzte, in einer gitterartigen Rahmenkon­struktion aufgehängte Hochleistungsschwebstoffilter 15 be­grenzt. Von den sechs Hochleistungsschwebstoffiltern 15 sind je zwei hintereinander und drei nebeneinander angeord­net. Die Hochleistungsschwebstoffilter 15 sind mit Trocken- und Liquid-Seal-Dichtungen versehen.The lower chamber 11 is delimited at the bottom by six high-performance suspended matter filters 15 which are placed next to one another in a tile-like manner and are suspended in a grid-like frame construction. Of the six high-performance particulate filters 15, two are arranged one behind the other and three next to one another. The high-performance particulate filters 15 are provided with dry and liquid seal seals.

In der mittleren Kammer 10 befindet sich ein Ventilator 16, dessen Einlaufdüse 17 in der Öffnung 12 des oberen Zwischenbodens 7 sitzt und der am oberen Zwischenboden 7 befestigt ist. Der Ventilator 16 ist als gehäuseloser Radialventilator mit Außenläufermotor 18 ausgebildet und hat rückwärts gekrümmte Schaufeln 19. Der Abstand der Ven­tilatorachse 20 von der ihr zunächstliegenden Seitenwand 5 entspricht etwa dem 0,8-fachen des Durchmessers des Ven­tilators 16. Die Ventilatorachse 20 liegt in der Mitte zwischen Vorder- und Rückwand.In the middle chamber 10 there is a fan 16, the inlet nozzle 17 of which is seated in the opening 12 of the upper intermediate floor 7 and which is fastened to the upper intermediate floor 7. The fan 16 is designed as a housing-free radial fan with an external rotor motor 18 and has backward curved blades 19. The distance of the fan axis 20 from the side wall 5 lying next to it corresponds to approximately 0.8 times the diameter of the fan 16. The fan axis 20 lies in the middle between front and back wall.

In der oberen Kammer 9 sind eine Decke 21 und der obere Zwischenboden 7 mit Schalldämpfkulissen 22, die von der Seitenwand 6 bis nah an die Einlaufdüse 17 reichen, bedeckt. Die Dicke der Schalldämpfkulissen 22 beträgt etwa je ein Drittel der Höhe der oberen Kammer 9, so daß zwischen ihnen ein Spalt verbleibt, dessen Höhe ebenfalls ein Drittel der Kammerhöhe beträgt. Oberhalb der Einlauf­düse 17 befindet sich in der Decke 21 eine mit einem Deckel verschlossene Öffnung zum Warten des Ventilators 16.In the upper chamber 9, a ceiling 21 and the upper intermediate floor 7 are covered with silencing baffles 22, which extend from the side wall 6 to close to the inlet nozzle 17. The thickness of the silencing baffles 22 is approximately one third of the height of the upper chamber 9, so that a gap remains between them, the height of which also is a third of the chamber height. Above the inlet nozzle 17 there is an opening in the ceiling 21 which is closed with a lid for servicing the fan 16.

Quer über der Einlaufdüse 17 befindet sich ein Gleichrich­teblech 23, das parallel zu Vorder- und Rückwand steht. Es ragt auf beiden Seiten etwas über die Einlaufdüse 17 hinaus und endet auf der zur Rückluftöffnung 14 weisenden Seite der Einlaufdüse 17 kurz vor den Schalldämpfkulissen 22.A rectification plate 23 is located transversely above the inlet nozzle 17 and is parallel to the front and rear walls. It protrudes somewhat on both sides beyond the inlet nozzle 17 and ends on the side of the inlet nozzle 17 facing the return air opening 14 just before the silencing backdrops 22.

Zwischen Vorder- und Rückwand erstrecken sich zwei Ein­strömbleche 24, die auf der einen Seite bis in den Spalt zwischen den Schalldämpfkulissen 22 reichen, auf der ande­ren Seite nach unten abgerundet sind und bis direkt an die Einlaufdüse 17 reichen. Im Spalt stoßen die Einströmbleche 24 in der Mitte aneinander und im weiteren Verlauf an das Gleichrichteblech 23. Im Spalt zwischen den Schalldämpfku­lissen 22 befinden sich die Einströmbleche 24 auf etwa einem Drittel der Spalthöhe. Der Abstand der Ränder der Einströmbleche 24 über der Einlaufdüse 17 von der Ventila­torachse 20 beträgt in etwa 10 % des Durchmessers der Ein­laufdüse 17.Two inflow plates 24 extend between the front and rear walls, which on one side extend into the gap between the silencing gates 22, are rounded downwards on the other side and extend directly to the inlet nozzle 17. In the gap, the inflow plates 24 abut one another in the middle and in the further course against the rectifying plate 23. In the gap between the silencing baffles 22, the inflow plates 24 are located at about a third of the gap height. The distance between the edges of the inflow plates 24 above the inlet nozzle 17 and the fan axis 20 is approximately 10% of the diameter of the inlet nozzle 17.

In der mittleren Kammer 10 sind an den beiden Zwischenböden 7, 8, die die mittlere Kammer 10 begrenzen, Schalldämpfku­lissen 25 befestigt, die sich vom Ventilator 16 in Richtung auf die Seitenwand 6 erstrecken und etwa bis zur Mitte der mittleren Kammer 10 reichen. Ihre Dicke und die Dicke des zwischen ihnen verbleibenden Spaltes betragen je etwa ein Drittel der Kammerhöhe.In the middle chamber 10 are attached to the two intermediate floors 7, 8, which delimit the middle chamber 10, silencing baffles 25, which extend from the fan 16 in the direction of the side wall 6 and extend approximately to the middle of the middle chamber 10. Their thickness and the thickness of the gap remaining between them each amount to approximately one third of the chamber height.

In der restlichen, der Seitenwand 6 zugekehrten Hälfte der mittleren Kammer 10 sind die beiden Zwischenböden 7, 8 ebenfalls mit Schalldämpfkulissen 26 versehen. Ihre Dicke beträgt nur etwa ein Sechstel der Kammerhöhe. Eine weitere, mittlere Schalldämpfkulisse 27, deren Höhe etwa ein Drittel der Kammerhöhe beträgt, befindet sich in der Mitte zwischen den beiden Schalldämpfkulissen 26; über und unter der mitt­leren Schalldämpfkulisse 27 verbleibt je ein Spalt mit einer Höhe von etwa einem Sechstel der Kammerhöhe. Die bei­den Spalte setzen den Spalt zwischen den Schalldämpfku­lissen 26 in der dem Ventilator 16 zugewandten Hälfte der mittleren Kammer 10 fort, so daß der Spaltquerschnitt einer Stimmgabel gleicht.In the remaining half of the middle chamber 10 facing the side wall 6, the two intermediate floors 7, 8 are also provided with silencing baffles 26. Its thickness is only about one sixth of the chamber height. Another, middle silencing backdrop 27, the height of which is approximately one third of the chamber height, is located in the middle between the two silencing backdrops 26; Above and below the middle silencing backdrop 27 there is a gap with a height of approximately one sixth of the chamber height. The two gaps continue the gap between the silencing backdrops 26 in the half of the middle chamber 10 facing the fan 16, so that the cross-section of the gap resembles a tuning fork.

An dem der Seitenwand 6 zugewandten Ende der mittleren Schalldämpfkulisse 27 ist ein sich von der Schalldämpfku­lisse 27 durch die Mitte der Öffnung 13 des unteren Zwischenbodens 8 in die untere Kammer 11 erstreckendes, von Vorder- zur Rückwand reichendes Leitblech 28 befestigt. Der Rand des Leitblechs 28 ragt auf etwa halber Höhe der unte­ren Kammer 11 waagerecht unter den unteren Zwischenboden 8.At the end of the middle sound-damping link 27 facing the side wall 6, a baffle 28 extending from the front to the rear wall and extending from the sound-reducing link 27 through the center of the opening 13 of the lower intermediate floor 8 into the lower chamber 11 is fastened. The edge of the guide plate 28 projects horizontally below the lower intermediate floor 8 at about half the height of the lower chamber 11.

An der Seitenwand 6 ist auf einer Höhe von etwa 40 % der Höhe der unteren Kammer 11 ein von Vorder- zur Rückwand reichender Blechstreifen, ein sogenannter Spoiler 29, ange­bracht. Er ragt waagerecht unter der Öffnung 13 des unteren Zwischenbodens 8 in die untere Kammer 11. Der Abstand zwischen dem Rand des Spoilers 29 und dem Leitblech 28 beträgt etwa die Hälfte der Höhe der unteren Kammer 11.On the side wall 6, at a height of approximately 40% of the height of the lower chamber 11, a sheet metal strip extending from the front to the rear wall, a so-called spoiler 29, is attached. It projects horizontally below the opening 13 of the lower intermediate floor 8 into the lower chamber 11. The distance between the edge of the spoiler 29 and the guide plate 28 is approximately half the height of the lower chamber 11.

Schräg, in einem spitzen Winkel zur Vertikalen, vor der Rückluftöffnung 14 sind ein Vorfilter 30 und ein wasserge­kühlter Luftkühler 31 an der Seitenwand 6 befestigt. Luft­kühler 31 und Vorfilter 30 sind sandwichartig übereinander angeordnet, wobei der Vorfilter 30 nach außen zeigt. Beide erstrecken sich über die gesamte Breite der Seitenwand 6.At an angle, at an acute angle to the vertical, in front of the return air opening 14, a pre-filter 30 and a water-cooled air cooler 31 are fastened to the side wall 6. Air cooler 31 and pre-filter 30 are sandwiched one above the other, with the pre-filter 30 pointing outwards. Both extend over the entire width of the side wall 6.

In den Seitenwänden 3, 4 des Tunnelmoduls befinden sich in der Nähe des Bodens Abluftöffnungen 32, 33.Exhaust vents 32, 33 are located in the side walls 3, 4 of the tunnel module near the floor.

Die Strömungsrichtung der Luft ist durch Pfeile symboli­siert. Die freien Innenräume der oberen Kammer 9 und der mittleren Kammer 10 bilden einen haarnadelförmigen Luft­kanal. Im Bereich der mittleren Kammer 10 ist der Luftkanal durch die mittlere Schalldämpfkulisse 27 verzweigt. Durch das Leitblech 28 setzt sich die Verzweigung in der Öffnung 13 des unteren Zwischenboden 8 und in einem kleinen, sich daran anschließenden Bereich der unteren Kammer 11 fort.The direction of air flow is symbolized by arrows. The free interiors of the upper chamber 9 and the middle chamber 10 form a hairpin-shaped air duct. In the area of the middle chamber 10, the air duct is branched through the middle silencing link 27. The baffle 28 continues the branching in the opening 13 of the lower intermediate floor 8 and in a small, adjoining area of the lower chamber 11.

Figur 2 zeigt eine Anordnung von vier Tunnelmodulen der offenen Bauweise. Die Tunnelmodule sind wechselseitig hintereinander angeordnet, wobei sich der Ventilator 16 in aufeinanderfolgenden Tunnelmodulen abwechselnd auf der rechten und auf der linken Seite der Anordnung befindet. Die Tunnelmodule sind an den U-Profilen 2 miteinander ver­schraubt. Vorne und hinten wird die Anordnung durch eine Vorderwand 34 und eine Rückwand 35 begrenzt. Die in Figur 2 eingezeichneten Pfeile symbolisieren die Strömungsrich­tung der Luft in Höhe der oberen Kammern 9.Figure 2 shows an arrangement of four tunnel modules of the open design. The tunnel modules are arranged alternately one behind the other, the fan 16 being located in successive tunnel modules alternately on the right and on the left side of the arrangement. The tunnel modules are screwed together on the U-profiles 2. The arrangement is limited at the front and rear by a front wall 34 and a rear wall 35. The arrows drawn in FIG. 2 symbolize the direction of flow of the air at the level of the upper chambers 9.

Im Betrieb wird Luft vom Außenraum über die Vorfilter 30, die Kühler 31, die Rückluftöffnungen 14 und die oberen Kammern 9 durch die Ventilatoren 16 angesaugt und über die mittleren und unteren Kammern 10, 11 durch die Hochlei­stungsschwebstoffilter 15 dem Reinraum zugeführt. Die gereinigte Luft durchströmt den Reinraum laminar und ver­läßt ihn durch die Abluftöffnungen 32, 33.In operation, air is drawn in from the outside through the pre-filters 30, the coolers 31, the return air openings 14 and the upper chambers 9 by the fans 16 and is fed to the clean room via the middle and lower chambers 10, 11 by the high-performance suspended matter filters 15. The cleaned air flows through the clean room in a laminar manner and leaves it through the exhaust air openings 32, 33.

Beispiel 2: Tunnelmodul geschlossener BauweiseExample 2: tunnel module of closed construction

Das in Figur 3 dargestellte Tunnelmodul geschlossener Bau­weise entspricht dem des Beispiels 1 bis auf folgende Punkte:The tunnel module of closed construction shown in FIG. 3 corresponds to that of Example 1 except for the following points:

Vor den Seitenwänden 3, 4 des Tunnelmoduls befinden sich Doppelwände 36, 37. Sie schließen oben mit der oberen Kammer 9, die an den Seiten etwas über die mittlere und untere Kammer 10, 11 hinausragt, ab. Der auf der Seite der Rückluftöffnung 14 liegende Spalt zwischen Seitenwand 4 und ihrer Doppelwand 37 ist über die Rückluftöffnung 14 mit der oberen Kammer 9 verbunden. Seine Breite beträgt in etwa der Breite des Spaltes, der zwischen den Schalldämpfkulissen 22 der oberen Kammer 9 freibleibt. Die Spalte zwischen den Seitenwänden 3, 4 des Tunnelmoduls und ihren Doppelwänden 36, 37 sind in der Nähe des Bodens durch die Abluftöff­nungen 32, 33 mit dem Reinraum verbunden. Der auf der Seite des Ventilators 16 liegende Spalt ist gegenüber dem Kammer­system des Oberteils 1 verschlossen.In front of the side walls 3, 4 of the tunnel module there are double walls 36, 37. They close off at the top with the upper chamber 9, which projects somewhat beyond the middle and lower chambers 10, 11 on the sides. The gap on the side of the return air opening 14 between the side wall 4 and its double wall 37 is connected to the upper chamber 9 via the return air opening 14. Its width is approximately the width of the gap that remains free between the silencing backdrops 22 of the upper chamber 9. The gaps between the side walls 3, 4 of the tunnel module and their double walls 36, 37 are connected to the clean room in the vicinity of the floor by the exhaust air openings 32, 33. The gap on the side of the fan 16 is closed off from the chamber system of the upper part 1.

Die untere Kammer 11 wird durch acht Hochleistungsschweb­stoffilter 15 nach unten begrenzt, wobei je zwei hinterein­ander und vier nebeneinander angeordnet sind.The lower chamber 11 is delimited at the bottom by eight high-performance suspended matter filters 15, two being arranged one behind the other and four next to one another.

Das dargestellte Beispiel 2 weist einen luftdurchlässigen Doppelboden 38, der ab einer Breite von 4,5 m zur Erhaltung der laminaren Strömung notwendig ist, auf. Die Abluftöff­nungen 32, 33 befinden sich unterhalb des Doppelbodens 38.The example 2 shown has an air-permeable double floor 38, which is necessary from a width of 4.5 m to maintain the laminar flow. The exhaust air openings 32, 33 are located below the raised floor 38.

Figur 4 zeigt drei wechselseitig hintereinander angeordnete Tunnelmodule geschlossener Bauweise. Vorne und hinten wird die Anordnung der drei Tunnelmodule durch eine Vorderwand 39 und eine Rückwand 40 begrenzt. Die auf einer Seite an­einandergrenzenden Spalte zwischen den Seitenwänden 3, 4 und ihren Doppelwänden 36, 37 sind miteinander verbunden. Die Pfeile symbolisieren die Strömungsrichtung der Luft auf Höhe der oberen Kammern 9.Figure 4 shows three mutually successive tunnel modules of closed design. The arrangement of the three tunnel modules is delimited at the front and rear by a front wall 39 and a rear wall 40. The gaps adjoining on one side between the side walls 3, 4 and their double walls 36, 37 are connected to one another. The arrows symbolize the direction of flow of air at the level of the upper chambers 9.

Im Betrieb strömt die Luft durch den Doppelboden 38, unter dem Doppelboden 38 zu den Abluftöffnungen 32, 33 auf beiden Seiten und durch die Abluftöffnungen 32, 33 in die mitein­ander verbundenen Spalte zwischen den Seitenwänden 3, 4 und den Doppelwänden 36, 37. Sie wird aus den Spalten durch die mit den Spalten verbundenen Rückluftöffnungen 14 in die Kammersysteme der Tunnelmodule angesaugt, durch die Kammer­systeme gefördert und gereinigt dem Reinraum wieder zuge­führt.In operation, the air flows through the double floor 38, under the double floor 38 to the exhaust air openings 32, 33 on both sides and through the exhaust air openings 32, 33 into the interconnected gaps between the side walls 3, 4 and the double walls 36, 37. It becomes sucked out of the columns through the return air openings 14 connected to the columns into the chamber systems of the tunnel modules, conveyed through the chamber systems and returned to the clean room in a cleaned state.

In der in Figur 4 dargestellten Anordnung der drei Tunnel­module wird die Luft der auf der linken Seite liegenden Spalte in das Kammersystem des mittleren Tunnelmoduls und die der auf der rechten Seite liegenden Spalte in die Kam­mersysteme des vorderen und des hinteren Tunnelmoduls ange­saugt.In the arrangement of the three tunnel modules shown in FIG. 4, the air from the column on the left is sucked into the chamber system of the central tunnel module and that of the column on the right into the chamber systems of the front and rear tunnel modules.

Beispiel 3: Tunnelmodul mit zwei KammersystemenExample 3: Tunnel module with two chamber systems

Eine Anordnung von vier hintereinanderstehenden Tunnel­modulen des Beispiels 3 zeigt Figur 5.FIG. 5 shows an arrangement of four tunnel modules of example 3, which are arranged one behind the other.

Ein Tunnelmodul des Beispiels 3 unterscheidet sich von dem des Beispiels 2 darin, daß im Tunnelmodul des Beispiels 3 zwei Kammersysteme, durch eine Mittelwand 41 getrennt, spiegelbildlich nebeneinander angeordnet sind. Die beiden Kammersysteme eines Tunnelmoduls treffen mit den Seiten, auf denen sich die Ventilatoren 16 befinden, an der Mittel­wand 41 aufeinander. Die Rückluftöffnungen 14 befinden sich dementsprechend an den beiden Seiten des Tunnelmoduls.A tunnel module of example 3 differs from that of example 2 in that in the tunnel module of example 3 two chamber systems, separated by a central wall 41, are arranged side by side in mirror image. The two chamber systems of a tunnel module meet with the sides on which the fans 16 are located on the central wall 41. The return air openings 14 are accordingly on the two sides of the tunnel module.

Die Anordnung der vier Tunnelmodule wird durch eine Vorder­wand 42 und eine Rückwand 43 begrenzt. Die auf einer Seite aneinandergrenzenden Spalte zwischen den Seitenwänden 3, 4 der Tunnelmodule und ihren Doppelwänden 36, 37 sind mitein­ander verbunden. Die Pfeile der Figur 5 symbolisieren die Strömungsrichtung der Luft auf Höhe der oberen Kammern 9.The arrangement of the four tunnel modules is limited by a front wall 42 and a rear wall 43. The gaps adjoining on one side between the side walls 3, 4 of the tunnel modules and their double walls 36, 37 are connected to one another. The arrows in FIG. 5 symbolize the direction of flow of the air at the level of the upper chambers 9.

Im Betrieb wird auf beiden Seiten der Tunnelmodule die aus den Abluftöffnungen 32, 33 strömende Luft durch die Spalte zwischen den Seitenwänden 3, 4 und den Doppelwänden 36, 37 in die voneinander getrennten Kammersysteme angesaugt, durch die Kammersysteme gefördert und gereinigt dem Rein­raum wieder zugeführt.In operation, on both sides of the tunnel modules, the air flowing from the exhaust air openings 32, 33 is sucked through the gaps between the side walls 3, 4 and the double walls 36, 37 into the separate chamber systems, conveyed through the chamber systems and returned to the clean room in a cleaned manner.

Claims (16)

1. Tunnelmodul zum Aufbau eines Reinraums in Laminar-Flow-­Technik, bestehend aus zwei Seitenwänden (3, 4) und einem Oberteil (1) mit mindestens einem Kammersystem,
- das drei durch zwei Zwischenböden (7, 8) unterteilte, übereinanderliegende Kammern (9, 10, 11), einen Ven­tilator (16) und eine Rückluftöffnung (14) aufweist,
- wobei die drei Kammern (9, 10, 11) durch wechselsei­tig angeordnete Öffnungen (12, 13) in den Zwischen­böden (7, 8) miteinander verbunden sind,
- die Öffnung (12) des oberen Zwischenbodens (7) und die Rückluftöffnung (14) sich auf gegenüberliegenden Seiten des Kammersystems befinden und
- die untere Kammer (11) nach unten durch Hochlei­stungsfilter (15) begrenzt ist,
dadurch gekennzeichnet, daß
- der Ventilator (16) in der mittleren Kammer (10) unter der Öffnung (12) des oberen Zwischenbodens (7) angeordnet ist.1. tunnel module for constructing a clean room using laminar flow technology, consisting of two side walls (3, 4) and an upper part (1) with at least one chamber system,
- which has three chambers (9, 10, 11) divided by two intermediate floors (7, 8), a fan (16) and a return air opening (14),
the three chambers (9, 10, 11) are connected to one another by mutually arranged openings (12, 13) in the intermediate floors (7, 8),
- The opening (12) of the upper intermediate floor (7) and the return air opening (14) are on opposite sides of the chamber system and
- The lower chamber (11) is limited at the bottom by high-performance filters (15),
characterized in that
- The fan (16) in the middle chamber (10) under the opening (12) of the upper intermediate floor (7) is arranged. 2. Tunnelmodul nach Anspruch 1, dadurch gekennzeichnet, daß eine Einlaufdüse (17) des Ventilators (16) durch die Öffnung (12) des oberen Zwischenbodens (7) in die obere Kammer (9) ragt.2. Tunnel module according to claim 1, characterized in that an inlet nozzle (17) of the fan (16) through the opening (12) of the upper intermediate floor (7) protrudes into the upper chamber (9). 3. Tunnelmodul nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, daß der Ventilator (16) ein gehäuseloser Radialventilator mit Außenläufermotor (18) und rückwärts gekrümmten Schaufeln (19) ist.3. Tunnel module according to one of claims 1 or 2, characterized in that the fan (16) is a housing-free radial fan with an external rotor motor (18) and backward curved blades (19). 4. Tunnelmodul nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Achse (20) des Ventilators (16) um das 0,75- bis 0,85-fache des Ventilatordurchmessers von einer Seitenwand (5) des Kammersystems entfernt und in der Mitte zwischen einer Vorder- und einer Rückwand des Kammersystems ist.4. Tunnel module according to one of claims 1 to 3, characterized in that the axis (20) of the fan (16) by 0.75 to 0.85 times the fan diameter from a side wall (5) of the chamber system and in is the middle between a front and a back wall of the chamber system. 5. Tunnelmodul nach einem der Ansprüche 2 bis 4, dadurch gekennzeichnet, daß
- sich in der oberen Kammer (9) oberhalb der Einlauf­düse (17) auf der zur Rückluftöffnung (14) zeigenden Seite senkrecht zu Vorder- und Rückwand des Kammer­systems mindestens ein Einströmblech (24) in einer Höhe von 25 bis 45 % der Höhe der oberen Kammer (9) befindet,
- wobei das Einströmblech (24) in der Nähe der Achse (20) des Ventilators (16) nach unten abgerundet ist und bis an die Einlaufdüse (17) heranragt.5. Tunnel module according to one of claims 2 to 4, characterized in that
- In the upper chamber (9) above the inlet nozzle (17) on the side facing the return air opening (14), perpendicular to the front and rear wall of the chamber system, at least one inflow plate (24) at a height of 25 to 45% of the height of the upper one Chamber (9) is located,
- The inflow plate (24) in the vicinity of the axis (20) of the fan (16) is rounded down and protrudes up to the inlet nozzle (17). 6. Tunnelmodul nach einem der Ansprüche 2 bis 5, dadurch gekennzeichnet, daß in der oberen Kammer (9) quer über der Einlaufdüse (17) parallel zur Vorder- und Rückwand des Kammersystems ein Gleichrichteblech (23) angebracht ist.6. Tunnel module according to one of claims 2 to 5, characterized in that in the upper chamber (9) across the inlet nozzle (17) parallel to the front and rear wall of the chamber system, a rectification plate (23) is attached. 7. Tunnelmodul nach Anspruch 6, dadurch gekennzeichnet, daß zwei Einströmbleche (24) vorhanden sind, wobei sich das eine zwischen Gleichrichteblech (23) und Vorderwand und das andere zwischen Gleichrichteblech (23) und Rückwand des Kammersystems erstreckt.7. Tunnel module according to claim 6, characterized in that two inflow plates (24) are present, one extending between the rectifying plate (23) and the front wall and the other between the rectifying plate (23) and the rear wall of the chamber system. 8. Tunnelmodul nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, daß unter der Öffnung (13) des unteren Zwischenbodens (8) oberhalb der Hochleistungsfilter (15) ein Spoiler (29) in die untere Kammer (11) ragt.8. Tunnel module according to one of claims 1 to 7, characterized in that under the opening (13) of the lower intermediate floor (8) above the high-performance filter (15), a spoiler (29) protrudes into the lower chamber (11). 9. Tunnelmodul nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, daß in der oberen Kammer (9) eine Decke (21) und der obere Zwischenboden (7) und in der mitt­leren Kammer (10) die beiden Zwischenböden (7, 8) mit Schalldämpfkulissen (22, 25, 26) bedeckt sind.9. Tunnel module according to one of claims 1 to 8, characterized in that in the upper chamber (9) a ceiling (21) and the upper intermediate floor (7) and in the middle chamber (10) the two intermediate floors (7, 8) are covered with silencing baffles (22, 25, 26). 10. Tunnelmodul nach Anspruch 9, dadurch gekennzeichnet, daß in einer dem Ventilator (16) entgegengesetzten Hälfte der mittleren Kammer (10) zwischen den Schalldämpfku­lissen (26) eine mittlere Schalldämpfkulisse (27) ange­bracht ist, wobei die Dicke der Schalldämpfkulissen (26) dieser Hälfte etwa halb so groß ist wie die der dem Ven­tilator (16) zugewandten Hälfte und die mittlere Schall­dämpfkulisse (27) halb über die Öffnung (13) des unteren Zwischenbodens (8) ragt.10. Tunnel module according to claim 9, characterized in that in a fan (16) opposite half of the middle chamber (10) between the silencing backdrops (26) a middle silencing backdrop (27) is attached, the thickness of the silencing backdrops (26) this Half is about half the size of the half facing the fan (16) and the middle silencing link (27) half protrudes over the opening (13) of the lower intermediate floor (8). 11. Tunnelmodul nach Anspruch 10, dadurch gekennzeichnet, daß am Ende der mittleren Schalldämpfkulisse (27) ein Leitblech (28) befestigt ist, das durch die Öffnung (13) des unteren Zwischenbodens (8) in die untere Kammer (11) ragt.11. Tunnel module according to claim 10, characterized in that a baffle (28) is attached to the end of the central silencing link (27) which projects through the opening (13) of the lower intermediate floor (8) into the lower chamber (11). 12. Tunnelmodul nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, daß vor jeder Rückluftöffnung (14) ein Vorfilter (30) angebracht ist.12. Tunnel module according to one of claims 1 to 11, characterized in that a pre-filter (30) is attached in front of each return air opening (14). 13. Tunnelmodul nach Anspruch 12, dadurch gekennzeichnet, daß vor der Rückluftöffnung (14) und hinter dem Vorfil­ter (30) ein wassergekühlter Luftkühler (31) angebracht ist.13. Tunnel module according to claim 12, characterized in that a water-cooled air cooler (31) is mounted in front of the return air opening (14) and behind the pre-filter (30). 14. Tunnelmodul nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, daß vor den Seitenwänden (3, 4) des Tunnelmoduls Doppelwände (36, 37) angebracht sind.14. Tunnel module according to one of claims 1 to 11, characterized in that double walls (36, 37) are attached in front of the side walls (3, 4) of the tunnel module. 15. Tunnelmodul nach einem der Ansprüche 1 bis 14, dadurch gekennzeichnet, daß sich ein Kammersystem über die gesamte Breite des Oberteils (1) erstreckt.15. Tunnel module according to one of claims 1 to 14, characterized in that a chamber system extends over the entire width of the upper part (1). 16. Tunnelmodul nach einem der Ansprüche 1 bis 14, dadurch gekennzeichnet, daß im Oberteil (1) zwei Kammersysteme nebeneinander angeordnet sind.16. Tunnel module according to one of claims 1 to 14, characterized in that two chamber systems are arranged side by side in the upper part (1).
EP89104834A 1988-04-30 1989-03-17 Tunnel module for creating a clean space by the laminar flow technique Expired - Lifetime EP0340433B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89104834T ATE83307T1 (en) 1988-04-30 1989-03-17 TUNNEL MODULE FOR CONSTRUCTING A CLEAN ROOM WITH LAMINAR FLOW TECHNOLOGY.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE8805774U 1988-04-30
DE8805774U DE8805774U1 (en) 1988-04-30 1988-04-30

Publications (3)

Publication Number Publication Date
EP0340433A2 true EP0340433A2 (en) 1989-11-08
EP0340433A3 EP0340433A3 (en) 1991-11-21
EP0340433B1 EP0340433B1 (en) 1992-12-09

Family

ID=6823584

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89104834A Expired - Lifetime EP0340433B1 (en) 1988-04-30 1989-03-17 Tunnel module for creating a clean space by the laminar flow technique

Country Status (5)

Country Link
EP (1) EP0340433B1 (en)
JP (1) JPH0229529A (en)
AT (1) ATE83307T1 (en)
DE (2) DE8805774U1 (en)
ES (1) ES2036732T3 (en)

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WO1993009389A1 (en) * 1991-11-08 1993-05-13 Novenco A/S Ventilation- and filtermodule comprising noise preventing means
DE4238595A1 (en) * 1992-11-16 1994-05-19 Kessler & Luch Gmbh Modular ventilation unit with integrated fan and connected filter frame, especially for clean room purposes
FR2700203A1 (en) * 1993-01-04 1994-07-08 Cherrier Gerard Laminar flow air diffusor
DE4320162A1 (en) * 1993-06-18 1994-12-22 Krantz Tkt Gmbh Module for a clean-room ceiling
EP0768498A2 (en) * 1995-10-13 1997-04-16 JENOPTIK Aktiengesellschaft Device for producing a clean and poor in turbulences air current, for supplying local clean-rooms
WO2011085726A2 (en) 2010-01-13 2011-07-21 Hürner-Funken GmbH Ventilator filter unit
DE102010001319A1 (en) * 2010-01-28 2011-08-18 YIT Germany GmbH, 80992 Air outlet with a housing and a ceiling sail with air passage
WO2018011462A1 (en) * 2016-07-13 2018-01-18 Framery Oy Ventilation system and method
WO2019234303A1 (en) * 2018-06-07 2019-12-12 Framery Oy Ventilation system and method
CN110594884A (en) * 2018-05-24 2019-12-20 湖南匡为科技有限公司 Mute air purification device

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DE3836147C2 (en) * 1988-10-23 1996-03-21 Ltg Lufttechnische Gmbh Clean room ceiling
DE9116423U1 (en) * 1991-07-08 1992-09-17 Babcock-Bsh Ag Vormals Buettner-Schilde-Haas Ag, 4150 Krefeld, De
DE4124808A1 (en) * 1991-07-26 1993-01-28 Prettl Rolf Air supply module - for maintaining controlled positive pressure within enclosure, partic. clean-room environment by adjustment of inlet flow area
DE19545252A1 (en) * 1995-11-24 1997-05-28 Helmut Kaeufer Modular and flexible plant for processing extremely hazardous materials
JP4547873B2 (en) * 2003-06-16 2010-09-22 ソニー株式会社 Pixel circuit, display device, and driving method of pixel circuit
DE102011106512A1 (en) * 2011-06-15 2013-01-03 Steinbeis GmbH & Co. für Technologietransfer vertreten durch STZ EURO Steinbeis-Transferzentrum Energie- Umwelt-Reinraumtechnik Filter device for filtering air introduced into clean room, has filter comprising air outlet surface, and deflection device arranged at housing between filter and flow straightener and deflecting air leaving from air outlet surface
CN103075765A (en) * 2013-01-18 2013-05-01 吴定汉 Air purifier

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993009389A1 (en) * 1991-11-08 1993-05-13 Novenco A/S Ventilation- and filtermodule comprising noise preventing means
DE4238595A1 (en) * 1992-11-16 1994-05-19 Kessler & Luch Gmbh Modular ventilation unit with integrated fan and connected filter frame, especially for clean room purposes
WO1994011679A1 (en) * 1992-11-16 1994-05-26 Kessler + Luch Gmbh Modular ventilating unit with integrated fan and connected filter casing, especially for clean rooms
FR2700203A1 (en) * 1993-01-04 1994-07-08 Cherrier Gerard Laminar flow air diffusor
DE4320162A1 (en) * 1993-06-18 1994-12-22 Krantz Tkt Gmbh Module for a clean-room ceiling
EP0768498A3 (en) * 1995-10-13 1999-11-24 JENOPTIK Aktiengesellschaft Device for producing a clean and poor in turbulences air current, for supplying local clean-rooms
EP0768498A2 (en) * 1995-10-13 1997-04-16 JENOPTIK Aktiengesellschaft Device for producing a clean and poor in turbulences air current, for supplying local clean-rooms
WO2011085726A2 (en) 2010-01-13 2011-07-21 Hürner-Funken GmbH Ventilator filter unit
DE102010001319A1 (en) * 2010-01-28 2011-08-18 YIT Germany GmbH, 80992 Air outlet with a housing and a ceiling sail with air passage
WO2018011462A1 (en) * 2016-07-13 2018-01-18 Framery Oy Ventilation system and method
TWI665413B (en) * 2016-07-13 2019-07-11 弗拉瑪琍有限公司 Ventilation system,soundproof space and method of ventilating a soundproof space
US11549703B2 (en) 2016-07-13 2023-01-10 Framery Oy Ventilation system and method
CN110594884A (en) * 2018-05-24 2019-12-20 湖南匡为科技有限公司 Mute air purification device
WO2019234303A1 (en) * 2018-06-07 2019-12-12 Framery Oy Ventilation system and method

Also Published As

Publication number Publication date
EP0340433B1 (en) 1992-12-09
DE58902933D1 (en) 1993-01-21
ATE83307T1 (en) 1992-12-15
ES2036732T3 (en) 1993-06-01
EP0340433A3 (en) 1991-11-21
JPH0229529A (en) 1990-01-31
DE8805774U1 (en) 1988-06-23
JPH0449018B2 (en) 1992-08-10

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