EP0768498A3 - Device for producing a clean and poor in turbulences air current, for supplying local clean-rooms - Google Patents

Device for producing a clean and poor in turbulences air current, for supplying local clean-rooms Download PDF

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Publication number
EP0768498A3
EP0768498A3 EP96107219A EP96107219A EP0768498A3 EP 0768498 A3 EP0768498 A3 EP 0768498A3 EP 96107219 A EP96107219 A EP 96107219A EP 96107219 A EP96107219 A EP 96107219A EP 0768498 A3 EP0768498 A3 EP 0768498A3
Authority
EP
European Patent Office
Prior art keywords
clean
plenum chamber
rooms
turbulences
poor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96107219A
Other languages
German (de)
French (fr)
Other versions
EP0768498A2 (en
Inventor
Heinz Schneider
Klaus Schultz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Jenoptik Jena GmbH
Jenoptik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena GmbH, Jenoptik AG filed Critical Jenoptik Jena GmbH
Publication of EP0768498A2 publication Critical patent/EP0768498A2/en
Publication of EP0768498A3 publication Critical patent/EP0768498A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/007—Ventilation with forced flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/20—Casings or covers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

Bei einer Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume besteht die Aufgabe, die Bautiefe einer Luftaufbereitungsanlage zu verringern und außerdem in einfacher Weise eine Schwingungsübertragung von luftstromerzeugenden Mitteln auf eine zu versorgende Geräteeinheit weitgehend zu vermeiden.
Gemäß der Erfindung ist einem, in einer Plenumkammer untergebrachten Filter an der Seite des Eintrittes ungereinigter Luft die Plenumkammerwand benachbart, die einer Auslaßöffnung in der Plenumkammer gegenüberliegt. Zwischen der Wand und dem Filter bleibt ein Raum frei, der mit dem übrigen Raum der Plenumkammer in Verbindung steht und der vorwiegend zur Ausbildung des Plenums dient.In the case of a device for generating a cleaned, low-turbulence air stream for supplying local clean rooms, the task is to reduce the overall depth of an air treatment system and, in addition, to largely avoid the transmission of vibrations from air flow-generating means to a device unit to be supplied.
According to the invention, a filter, which is accommodated in a plenum chamber on the side of the inlet of unpurified air, is adjacent to the plenum chamber wall, which is opposite an outlet opening in the plenum chamber. A space remains between the wall and the filter, which is in communication with the rest of the plenum chamber and is mainly used to form the plenum.

Die Erfindung ist bei der Herstellung integrierter Schaltkreise anwendbar.

Figure 00000001
The invention is applicable in the manufacture of integrated circuits.
Figure 00000001
EP96107219A 1995-10-13 1996-05-07 Device for producing a clean and poor in turbulences air current, for supplying local clean-rooms Withdrawn EP0768498A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19538040A DE19538040C2 (en) 1995-10-13 1995-10-13 Device for generating a cleaned, low-turbulence air stream to supply local clean rooms
DE19538040 1995-10-13

Publications (2)

Publication Number Publication Date
EP0768498A2 EP0768498A2 (en) 1997-04-16
EP0768498A3 true EP0768498A3 (en) 1999-11-24

Family

ID=7774679

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96107219A Withdrawn EP0768498A3 (en) 1995-10-13 1996-05-07 Device for producing a clean and poor in turbulences air current, for supplying local clean-rooms

Country Status (6)

Country Link
US (1) US5814116A (en)
EP (1) EP0768498A3 (en)
JP (1) JP3091412B2 (en)
KR (1) KR0173766B1 (en)
DE (1) DE19538040C2 (en)
SG (1) SG88724A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010113901A (en) 1999-04-28 2001-12-28 스트라토테크 코포레이션 Adjustable clean-air flow environment
US20020071954A1 (en) * 2000-12-08 2002-06-13 Nelson Christopher R. Cellulose gypsum based substrate with increased water resistance and strength by surface application of polymeric diphenylmethane diisocyanate
DE10351848A1 (en) 2003-11-06 2005-06-09 Leica Microsystems Semiconductor Gmbh System for the detection of macro defects
DE102004062592B3 (en) * 2004-12-24 2006-06-08 Leica Microsystems Jena Gmbh Disk-shaped substrate testing system, has suction unit arranged at side of housing and spaced from mounting plate, and opening provided in suction unit, where opening has width that corresponds to distance of plate to wall of housing
JP5427833B2 (en) * 2011-05-18 2014-02-26 パナソニック株式会社 Clean room backflow prevention device
CN107883508A (en) * 2016-09-29 2018-04-06 殷晓冬 Assembled and the weak turbulent flow consentrated air supply device of assembly type
CN111271870A (en) * 2020-02-24 2020-06-12 东莞市利人净化科技有限公司 Fan filter unit with static pressure box

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3513902A1 (en) * 1984-04-17 1985-10-24 Environmental Air Control, Inc., Hagerstown, Md. SPACE-SAVING FAN AND FILTER ARRANGEMENT FOR USE IN CLEAN AIR AREAS
EP0340433A2 (en) * 1988-04-30 1989-11-08 BABCOCK-BSH AKTIENGESELLSCHAFT vormals Büttner-Schilde-Haas AG Tunnel module for creating a clean space by the laminar flow technique
DE4122582A1 (en) * 1991-07-08 1993-01-14 Babcock Bsh Ag MODULE FOR BUILDING A CLEANROOM CEILING
US5413524A (en) * 1993-02-09 1995-05-09 Kabushiki Kaisha Nikko Method of taking out viscera of fish and apparatus thereof

Family Cites Families (25)

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Publication number Priority date Publication date Assignee Title
US3251177A (en) * 1963-05-15 1966-05-17 Arthur K Baker Dust-free bench
US3301167A (en) * 1964-05-04 1967-01-31 Ray Products Company Inc Anticontaminant work bench
US3290866A (en) * 1964-08-26 1966-12-13 Schonrock Verlie Evaporative cooler
US3284148A (en) * 1965-02-24 1966-11-08 Ramniceanu Tiberiu Justinian Blower-contained vibration-free work bench
DE2138985A1 (en) * 1971-08-04 1973-02-15 Buettner Schilde Haas Ag VENTILATION DEVICE
US3828530A (en) * 1971-09-01 1974-08-13 M Peters Filter system
US3935803A (en) * 1972-10-12 1976-02-03 Flanders Filters, Inc. Air filtration apparatus
CA988357A (en) * 1973-01-26 1976-05-04 Her Majesty The Queen, In Right Of Canada, As Represented By The Minister Of National Defence Back table clean station
US3838556A (en) * 1973-04-06 1974-10-01 Med Assists Inc Air filtration device with oriented output
JPS5520886B2 (en) * 1974-04-26 1980-06-05
JPS51136570A (en) * 1975-05-22 1976-11-26 Mitsubishi Heavy Ind Ltd Coarse packed bed
JPS52142851A (en) * 1976-05-22 1977-11-29 Hosokawa Kankiyou Enjiniaringu Distribution controlled air feeder assembled in interior building structure
US4412849A (en) * 1981-04-09 1983-11-01 Klenzaids Engineers Private Limited Method and apparatus for control of gas-borne particulates
DE3484603D1 (en) * 1983-12-16 1991-06-20 Nitta Co AIR CLEANER.
JPS6171829A (en) * 1984-09-14 1986-04-12 Fuji Electric Co Ltd Moving magnetic field type treatment apparatus
JPS61175834A (en) * 1985-01-31 1986-08-07 Toshiba Corp Data processor provided with microprogram debug function
JPS61175834U (en) * 1985-04-22 1986-11-01
JPS62183832A (en) * 1985-10-23 1987-08-12 Hitachi Ltd Apparatus for preparing semiconductor
US5053065A (en) * 1988-05-16 1991-10-01 Garay Charles J Low-profile blower and filter apparatus for supplying clean air
JPH02183832A (en) * 1989-01-11 1990-07-18 Nec Corp Inference processor
DE4303805A1 (en) * 1992-02-12 1993-09-09 Helios Klima Kaelte Supporting frame for air conditioning plant - comprises inner frame attached to outer frame by continuous rubber bead or by six rocker bolts
JP3309416B2 (en) * 1992-02-13 2002-07-29 松下電器産業株式会社 Connected clean space device
KR970006728B1 (en) * 1992-08-31 1997-04-29 마쯔시다 덴기 산교 가부시끼가이샤 Environmental control apparatus
DE4236031C2 (en) * 1992-10-24 1996-07-11 Jenoptik Jena Gmbh Device for generating a clean air stream
DE4238895C1 (en) * 1992-11-19 1993-12-16 Howatherm Klimatech Gmbh Electric ventilation fan for air-conditioning duct - has peripheral seal for suction plate and vibration damping of fan motor mounting, to reduce noise

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3513902A1 (en) * 1984-04-17 1985-10-24 Environmental Air Control, Inc., Hagerstown, Md. SPACE-SAVING FAN AND FILTER ARRANGEMENT FOR USE IN CLEAN AIR AREAS
EP0340433A2 (en) * 1988-04-30 1989-11-08 BABCOCK-BSH AKTIENGESELLSCHAFT vormals Büttner-Schilde-Haas AG Tunnel module for creating a clean space by the laminar flow technique
DE4122582A1 (en) * 1991-07-08 1993-01-14 Babcock Bsh Ag MODULE FOR BUILDING A CLEANROOM CEILING
US5413524A (en) * 1993-02-09 1995-05-09 Kabushiki Kaisha Nikko Method of taking out viscera of fish and apparatus thereof

Also Published As

Publication number Publication date
SG88724A1 (en) 2002-05-21
EP0768498A2 (en) 1997-04-16
KR970022014A (en) 1997-05-28
DE19538040A1 (en) 1997-04-17
DE19538040C2 (en) 1998-08-13
JPH09126511A (en) 1997-05-16
JP3091412B2 (en) 2000-09-25
KR0173766B1 (en) 1999-03-20
US5814116A (en) 1998-09-29

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