EP0962720A3 - Ventilation structure of planarization chamber - Google Patents

Ventilation structure of planarization chamber Download PDF

Info

Publication number
EP0962720A3
EP0962720A3 EP99107384A EP99107384A EP0962720A3 EP 0962720 A3 EP0962720 A3 EP 0962720A3 EP 99107384 A EP99107384 A EP 99107384A EP 99107384 A EP99107384 A EP 99107384A EP 0962720 A3 EP0962720 A3 EP 0962720A3
Authority
EP
European Patent Office
Prior art keywords
chamber
planarization
air
particles
planarization chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99107384A
Other languages
German (de)
French (fr)
Other versions
EP0962720A2 (en
Inventor
Kazuhiko Hirata
Hisato Matsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Original Assignee
SpeedFam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd
Publication of EP0962720A2 publication Critical patent/EP0962720A2/en
Publication of EP0962720A3 publication Critical patent/EP0962720A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/06—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser
    • F24F13/068—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser formed as perforated walls, ceilings or floors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
    • F24F13/082—Grilles, registers or guards
    • F24F2013/088—Air-flow straightener

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A ventilation structure of a planarization chamber for ventilating the inside of a planarization chamber (1) housing a planarization apparatus(100)which prevents scratching of the workpiece by making the flow of air in the planarization chamber substantially laminar and thereby eliminating the rising of the particles or turbulence. The structure includes intake ducts(2-1, 2-2)provided at a ceiling section (10) and having filter units (4-1, 4-2)attached, an exhaust blower (3) attached to a side section (12), and a perforated chamber(5) defined below the ceiling section(10) and having a large number of perforations (52). By making the outside air be ejected from the perforations (52) of the perforated chamber(5) to the inside of the planarization chamber (1), a laminar flow of the air descending to a lower platen (101) side is formed. This laminar flow pushes the particles in the air around the platen(101) down to the floor section (11) side. An exhaust blower (3) exhausts the particles to the outside of the planarization chamber (1).
EP99107384A 1998-06-05 1999-04-23 Ventilation structure of planarization chamber Withdrawn EP0962720A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10174106A JPH11347937A (en) 1998-06-05 1998-06-05 Ventilating structure of polishing chamber
JP17410698 1998-06-05

Publications (2)

Publication Number Publication Date
EP0962720A2 EP0962720A2 (en) 1999-12-08
EP0962720A3 true EP0962720A3 (en) 2000-07-12

Family

ID=15972762

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99107384A Withdrawn EP0962720A3 (en) 1998-06-05 1999-04-23 Ventilation structure of planarization chamber

Country Status (3)

Country Link
EP (1) EP0962720A3 (en)
JP (1) JPH11347937A (en)
KR (1) KR20000005667A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4448297B2 (en) 2002-12-27 2010-04-07 株式会社荏原製作所 Substrate polishing apparatus and substrate polishing method
CH695326A5 (en) * 2004-11-26 2006-03-31 Lk Luftqualitaet Ag Flaechenelement for thermal adjustment of indoor air.
JP4708966B2 (en) * 2005-11-11 2011-06-22 株式会社ディスコ Cutting equipment
NL2004886C2 (en) * 2010-06-14 2011-12-15 Jong Air B V AIR DISTRIBUTION SYSTEM AND METHOD.
CN102155771B (en) * 2011-03-30 2013-02-27 四川电力设计咨询有限责任公司 Cooling and ventilating system and cooling and ventilating method for steam engine room
JP5850788B2 (en) * 2012-04-10 2016-02-03 株式会社ディスコ Cutting equipment
JP6927814B2 (en) * 2017-09-08 2021-09-01 株式会社ディスコ Dry polishing equipment
CN107457705A (en) * 2017-09-22 2017-12-12 彭欣莉 One kind automation multi-angle polished device
CN108581846A (en) * 2018-04-25 2018-09-28 安徽天顺环保设备股份有限公司 A kind of workshop polishing dust removal workbench

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1318364A (en) * 1969-09-15 1973-05-31 Nesher Ag Apparatus for controlling delivery of clean gas to a clean environment
FR2485698A1 (en) * 1980-06-24 1981-12-31 Aurore Sa Laminar air flow laboratory work post - has air filters and vertical division plates with extractor fan
GB2106240A (en) * 1981-09-22 1983-04-07 Howorth Air Eng Ltd Air-conditioned workstation
EP0710803A1 (en) * 1994-10-22 1996-05-08 Howorth Airtech Limited Clean air system
US5679059A (en) * 1994-11-29 1997-10-21 Ebara Corporation Polishing aparatus and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1318364A (en) * 1969-09-15 1973-05-31 Nesher Ag Apparatus for controlling delivery of clean gas to a clean environment
FR2485698A1 (en) * 1980-06-24 1981-12-31 Aurore Sa Laminar air flow laboratory work post - has air filters and vertical division plates with extractor fan
GB2106240A (en) * 1981-09-22 1983-04-07 Howorth Air Eng Ltd Air-conditioned workstation
EP0710803A1 (en) * 1994-10-22 1996-05-08 Howorth Airtech Limited Clean air system
US5679059A (en) * 1994-11-29 1997-10-21 Ebara Corporation Polishing aparatus and method

Also Published As

Publication number Publication date
KR20000005667A (en) 2000-01-25
JPH11347937A (en) 1999-12-21
EP0962720A2 (en) 1999-12-08

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