EP0962720A3 - Belüftungssystem für einen Raum zur Planarisierung - Google Patents

Belüftungssystem für einen Raum zur Planarisierung Download PDF

Info

Publication number
EP0962720A3
EP0962720A3 EP99107384A EP99107384A EP0962720A3 EP 0962720 A3 EP0962720 A3 EP 0962720A3 EP 99107384 A EP99107384 A EP 99107384A EP 99107384 A EP99107384 A EP 99107384A EP 0962720 A3 EP0962720 A3 EP 0962720A3
Authority
EP
European Patent Office
Prior art keywords
chamber
planarization
air
particles
planarization chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99107384A
Other languages
English (en)
French (fr)
Other versions
EP0962720A2 (de
Inventor
Kazuhiko Hirata
Hisato Matsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Original Assignee
SpeedFam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd
Publication of EP0962720A2 publication Critical patent/EP0962720A2/de
Publication of EP0962720A3 publication Critical patent/EP0962720A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/06—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser
    • F24F13/068—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser formed as perforated walls, ceilings or floors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
    • F24F13/082—Grilles, registers or guards
    • F24F2013/088—Air-flow straightener

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP99107384A 1998-06-05 1999-04-23 Belüftungssystem für einen Raum zur Planarisierung Withdrawn EP0962720A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP17410698 1998-06-05
JP10174106A JPH11347937A (ja) 1998-06-05 1998-06-05 研磨加工室の換気構造

Publications (2)

Publication Number Publication Date
EP0962720A2 EP0962720A2 (de) 1999-12-08
EP0962720A3 true EP0962720A3 (de) 2000-07-12

Family

ID=15972762

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99107384A Withdrawn EP0962720A3 (de) 1998-06-05 1999-04-23 Belüftungssystem für einen Raum zur Planarisierung

Country Status (3)

Country Link
EP (1) EP0962720A3 (de)
JP (1) JPH11347937A (de)
KR (1) KR20000005667A (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4448297B2 (ja) 2002-12-27 2010-04-07 株式会社荏原製作所 基板研磨装置及び基板研磨方法
CH695326A5 (de) * 2004-11-26 2006-03-31 Lk Luftqualitaet Ag Flaechenelement zur Temperierung von Raumluft.
JP4708966B2 (ja) * 2005-11-11 2011-06-22 株式会社ディスコ 切削装置
NL2004886C2 (nl) * 2010-06-14 2011-12-15 Jong Air B V Luchtverversingsysteem en werkwijze.
CN102155771B (zh) * 2011-03-30 2013-02-27 四川电力设计咨询有限责任公司 汽机房降温通风系统及方法
JP5850788B2 (ja) * 2012-04-10 2016-02-03 株式会社ディスコ 切削装置
JP6927814B2 (ja) * 2017-09-08 2021-09-01 株式会社ディスコ ドライ研磨装置
CN107457705A (zh) * 2017-09-22 2017-12-12 彭欣莉 一种自动化多角度打磨装置
CN108581846A (zh) * 2018-04-25 2018-09-28 安徽天顺环保设备股份有限公司 一种车间用打磨除尘工作台
JP2022056167A (ja) * 2020-09-29 2022-04-08 芝浦メカトロニクス株式会社 送風器及び電子部品の実装装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1318364A (en) * 1969-09-15 1973-05-31 Nesher Ag Apparatus for controlling delivery of clean gas to a clean environment
FR2485698A1 (fr) * 1980-06-24 1981-12-31 Aurore Sa Poste de travail a ecoulements laminaires
GB2106240A (en) * 1981-09-22 1983-04-07 Howorth Air Eng Ltd Air-conditioned workstation
EP0710803A1 (de) * 1994-10-22 1996-05-08 Howorth Airtech Limited System für saubere Luft
US5679059A (en) * 1994-11-29 1997-10-21 Ebara Corporation Polishing aparatus and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1318364A (en) * 1969-09-15 1973-05-31 Nesher Ag Apparatus for controlling delivery of clean gas to a clean environment
FR2485698A1 (fr) * 1980-06-24 1981-12-31 Aurore Sa Poste de travail a ecoulements laminaires
GB2106240A (en) * 1981-09-22 1983-04-07 Howorth Air Eng Ltd Air-conditioned workstation
EP0710803A1 (de) * 1994-10-22 1996-05-08 Howorth Airtech Limited System für saubere Luft
US5679059A (en) * 1994-11-29 1997-10-21 Ebara Corporation Polishing aparatus and method

Also Published As

Publication number Publication date
EP0962720A2 (de) 1999-12-08
JPH11347937A (ja) 1999-12-21
KR20000005667A (ko) 2000-01-25

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