JP5850788B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus that divides a plate-like workpiece such as a wafer into individual chips.

  In semiconductor device manufacturing processes and various electronic component manufacturing processes, a cutting apparatus called a dicing saw that rotates an ultrathin blade at high speed to divide a workpiece into individual products and chips is indispensable.

  In the cutting apparatus, a cutting blade having a blade tip thickness of 20 to 300 μm, which is formed by solidifying abrasive grains such as diamond and CBN (Cubic Boron Nitride) with a bonding agent such as metal, resin or glass, is rotated at high speed. A workpiece such as a semiconductor wafer, glass, or ceramic is cut along a planned division line, and the planned division line is pulverized and removed at a micron level to be divided into individual products or chips.

  When cutting a workpiece, cooling and cleaning are performed using a processing fluid such as pure water, but mist caused by the supplied processing fluid is simultaneously applied to various drive units, electrical components, and microscope components mounted on the device. It is necessary to prevent adhesion.

  Therefore, the processing area is covered by the cover member and the exhaust pipe is connected, and an atmosphere containing liquid or cutting waste that is always in the form of mist (mist) is provided in equipment such as a factory where the cutting device is installed. The exhaust pipe on the apparatus side is connected to the connection port of the suction / exhaust pipe on the equipment side and is exhausted.

JP 2007-130730 A

  Of course, facilities such as factories in which the cutting apparatus is installed are different from each other, and the height of the exhaust port communicating with the suction source installed for the cutting apparatus is various because there is no unified standard. Therefore, the height of the through hole of the exhaust pipe on the apparatus side penetrating the exterior cover of the cutting apparatus may be higher than the height of the exhaust port on the equipment side.

  In such a case, it is necessary to bend the exhaust pipe outside the apparatus in order to connect to the exhaust port on the equipment side, so smooth exhaust is not realized, and the atomized atmosphere in the cutting area leaks from the cutting area, It may adhere to each shaft or microscope and cause corrosion or failure, or cause abnormal noise from the exhaust pipe.

  Therefore, when the exhaust port on the facility side is low, it is necessary to change the position of the through hole formed in the exterior cover of the cutting device according to the height of the exhaust port, and special consideration is required.

  The present invention has been made in view of these points, and the object of the present invention is to easily connect the exhaust pipe on the apparatus side even if the height of the exhaust port on the equipment side where the cutting apparatus is installed is different. It is to provide a possible cutting device.

  According to the present invention, a chuck table for holding a workpiece, a processing means for processing the workpiece held on the chuck table, and a processing liquid for supplying a processing fluid to the processing means and the workpiece A cutting device comprising a supply means and an exhaust pipe for discharging an atmosphere containing the machining liquid in the machining area, wherein the exhaust pipe is provided on an exterior cover that covers the machining area and the cutting apparatus The connecting means is constituted by a flexible pipe, and the connecting means has a longitudinal elongated hole provided in the exterior cover, and a through hole to which an end of the exhaust pipe is connected. An inner plate slidably mounted on the outer cover in an overlapping range, and the height position of the through hole of the inner plate is a connection port of a suction / exhaust piping on the facility side where the cutting device is installed Can be adjusted to the height of Cutting device is provided, wherein Rukoto.

  According to the cutting apparatus of the present invention, the inner plate having a through hole to which the exhaust pipe on the apparatus side is connected is slidably attached to the long hole formed in the exterior cover, and the height of the exhaust pipe can be adjusted. Therefore, even if the height of the exhaust port on the equipment side where the cutting device is installed is different, the mist-like atmosphere in the cutting area can be smoothly exhausted by sliding the inner plate with respect to the long hole of the outer cover. it can.

  In addition, since the atmosphere of the area partitioned by the exterior cover is basically dry, there is no need to pay particular attention to waterproofing, and it is only necessary to use a simple structure position adjustment mechanism. It is possible to achieve a sufficient effect.

It is an appearance perspective view of a cutting device concerning an embodiment of the present invention. FIG. 2A is an exploded perspective view of the connection means of the first embodiment as viewed from the inside of the apparatus, and FIG. 2B is a perspective view thereof. It is a disassembled perspective view of the connection means of 2nd Embodiment. It is a side view of a cutting device. It is a rear view of a cutting device.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, an external perspective view of a cutting device 2 according to an embodiment of the present invention is shown. The cutting device 2 includes a processing region (cutting region) 4 disposed on the left side toward the cutting device 2 and a carry-in / out region 6 disposed on the right side. A display monitor 8 having a touch panel function is disposed above the processing area 4.

  The processing area 4 and the carry-in / out area 6 are partitioned by a plate-shaped partition wall 10. A gate 12 is formed below the partition wall 10 to connect the processing region 4 and the carry-in / out region 6, and the chuck table (not shown) is moved through the gate 12 to be held on the chuck table. The workpiece such as the semiconductor wafer thus moved is moved between the processing region 4 and the loading / unloading region 6.

  In the machining area 4, a cutting unit 14 having a cutting blade 16 attached to the tip of a spindle that is rotationally driven is disposed. The processing region 4 includes a partition wall 10 disposed on the right side thereof, a plate-shaped partition wall 18 disposed on the rear side of the cutting unit 14 toward the cutting device 2, an upper surface partition wall portion 20a, and a left side. By being surrounded by the protective cover 20 having the partition wall portion 20b and the front partition wall portion 20c, it is partitioned as a closed space.

  Preferably, the protective cover 20 is formed of a transparent body such as an acrylic resin whose inside can be visually confirmed. The outer periphery of the cutting device 2 is covered with an exterior cover 22, and an air gun 24 that ejects high-pressure air is detachably disposed on the front side of the exterior cover 22.

  Reference numeral 26 denotes a suction / exhaust pipe disposed in a facility such as a factory, which is connected to a suction source (not shown). A flexible pipe 28 connected to an exhaust pipe in the apparatus is connected to the connection port 26 a of the suction / exhaust pipe 26.

  Next, with reference to FIG. 2, the connection means (connection unit) of 1st Embodiment of this invention which connects the piping 28 outside an apparatus and the exhaust pipe 32 in an apparatus is demonstrated. 2A is an exploded perspective view of the connecting means 35 as viewed from the inside of the exterior cover 22 of the cutting apparatus 2, and FIG. 2B is a perspective view thereof.

  A long hole 30 extending in the vertical direction (vertical direction) is formed on the back side of the exterior cover 22. The exhaust pipe 32 in the apparatus is constituted by a flexible pipe formed from, for example, resin.

  Reference numeral 34 denotes an inner plate in which a through hole 34 a to which the exhaust pipe 32 is connected is formed, and a pipe 36 is inserted into the through hole 34 a and fixed to the inner plate 34. The exhaust pipe 32 is inserted into the pipe 36 as indicated by an arrow A. A U-shaped support fitting 38 as an exhaust pipe fixing means is attached to the pipe 36, and a locking portion 38 a is formed at the tip of the support fitting 38.

  A support member 40 in which a slide groove 42 is formed is fixed to the inner surface of the exterior cover 22 orthogonal to the exterior cover 22 in which the long hole 30 is formed. The upper end portion 42a of the slide groove 42 is enlarged so that the locking portion 38a of the support fitting 38 can be inserted.

  In order to assemble the connection means (connection unit) 35, the exhaust pipe 32 on the apparatus side is inserted in one end of the pipe 36 of the inner plate 34 in the direction of arrow A, and the inner plate 34 is moved in the direction of arrow B to move the pipe 36. The other end is inserted into the end 28a of the pipe 28 outside the apparatus.

  Then, the engaging portion 38a of the support fitting 38 is inserted into the upper end enlarged portion 42a of the slide groove 42 formed in the support member 40, and the engaging portion 38a is slid to a predetermined position in the slide groove 42. The connection unit 35 is assembled as shown in FIG.

  As another assembling method of the connecting unit 35, first, the inner plate 34 is moved in the direction of arrow B, and the engaging portion 38a of the support fitting 38 is inserted into the upper enlarged portion 42a of the slide groove 42 formed in the support member 40. Then, the inner plate 34 is mounted first by sliding the engaging portion 38a to a predetermined position in the slide groove 42.

  Next, the exhaust pipe 32 on the apparatus side is inserted into one end of the pipe 36 of the inner plate 34, and the end 28 a of the pipe 28 outside the apparatus is inserted into the other end of the pipe 36. Thereby, the connection unit 35 is assembled as shown in FIG.

  By sliding the support fitting 38 in the arrow Z direction, the position of the through hole 34a of the inner plate 34 moves in the height direction, and the end portion 28a of the pipe 28 outside the apparatus is moved in the height direction accordingly. The

  Therefore, the position of the through hole 34a formed in the inner plate 34 can be adjusted in accordance with the height of the connection port 26a of the suction / exhaust pipe 26 arranged on the equipment side of the factory or the like, and the pipe 28 outside the apparatus can be adjusted. There is no need to bend it forcibly.

  In the present embodiment, the connection means (connection unit) 35 is formed in the outer cover 22 within a range in which a long hole 30 provided in the outer cover 22 and a through hole 34 a to which the exhaust pipe 32 is connected are formed. The inner plate 34 is slidably overlapped and fixed. Since the inner plate 34 is slidably disposed inside the outer cover 22, the long hole 30 formed in the outer cover 22 can be shielded so as not to be noticeable.

  Referring to FIG. 3, a perspective view of another embodiment of the exhaust pipe fixing means is shown. In this embodiment, the exhaust pipe 32 is inserted into the pipe 48 and the connection portion is fastened by the fastening band 50. Then, the other end portion of the pipe 48 is inserted into a fixing fitting 52 as an exhaust pipe fixing means, and the pipe 36 fixed to the inner plate 34 is inserted into the other end portion of the pipe 48.

  By fixing the fixing bracket 52 along the long groove 46 of the apparatus frame 44 with a screw 54, the fixing bracket 52, that is, the through hole 34a formed in the inner plate 34 is fixed to the apparatus frame 44 so that the position thereof can be adjusted in the Z direction. The The other end of the pipe 36 attached to the inner plate 34 is connected to the end 28a of the pipe 28 outside the apparatus through a long hole 30 formed in the exterior cover 22.

  Referring to FIG. 4, a schematic side view of the cutting device 2 according to the embodiment of the present invention is shown. The state shown by the solid line is the exhaust pipe connection state when the equipment side connection port is high, and the state shown by the two-dot chain line shows the exhaust pipe connection state when the connection port is low. FIG. 5 shows a rear view of the cutting apparatus 2 and shows a state in which the pipe 36 fixed to the inner plate 34 moves in the vertical direction in the long hole 30 formed in the exterior cover 22.

4 Machining area (cutting area)
6 carry-in / out area 14 cutting unit 16 cutting blade 20 protective cover 22 exterior cover 26 suction / exhaust piping 26a connection port 28 piping 30 long hole 32 exhaust pipe 34 inner plate 34a through hole 35 connection means (connection unit)
36 Pipe 38 Support bracket 44 Device frame 48 Pipe 52 Fixing bracket

Claims (1)

A chuck table for holding a workpiece, a processing means for processing the workpiece held on the chuck table, a processing fluid supply means for supplying a processing fluid to the processing means and the workpiece, and processing An exhaust pipe for discharging the atmosphere containing the machining fluid in the region,
The exhaust pipe is constituted by a flexible pipe that connects the processing region and a connecting means provided on an exterior cover that covers the cutting device,
The connecting means has a longitudinal elongated hole provided in the exterior cover and a through hole to which an end of the exhaust pipe is connected, and is slidably mounted on the exterior cover in a range overlapping the elongated hole. An inner plate, and
The cutting device characterized in that the height position of the through hole of the inner plate can be adjusted according to the height of the connection port of the suction / exhaust piping on the equipment side where the cutting device is installed.

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