DE202012100630U1 - Clean air device for the microelectronic and optical sector - Google Patents

Abstract

Clean air device (100) for the microelectronic and optical area, with at least one fan (10), which is followed by a heat exchanger (11) and at least one filter (12) connected downstream of the heat exchanger (11), wherein the fan (10) Heat exchanger (11) and the filter (12) in a common housing (14) are arranged.

Description

Technical area

The invention relates to a clean air device according to claim 1.

In many technical fields, for example in semiconductor manufacturing, it is necessary to filter the incoming and / or exhausted air to ensure dust-free working.

State of the art

The DE 295 03 373 U is based on an air filter ballast with a fan, which is in the clean room technology, for example in the production of wafers, usable. It is envisaged that the fan is integrated in a substantially box-shaped fan holder which has air passage slots on opposite side surfaces. The fan holder is inserted into a recess of an air guide body with air passage openings, which are opposite to the air passage slots of the fan holder. The air duct body has at the air passage openings subsequent air ducts, the arcuate and edge-free lead to other, the bottom of the air duct body through-breaking air passage openings through which the conveyed air is fed to an air filter.

In the EP 1 085 270 B1 is shown and described a clean air device for the pharmaceutical, food and biotechnology sector. This has a fan, which is followed by a filter. A cooler is upstream, the fan, the filter and the heat exchanger are housed in a common housing. The housing is designed as a module. The fan and the heat exchanger are housed in housing spaces, which are separated by at least one partition. This has a passage through which return air flows to the fan. The housing chambers accommodating the fan and the heat exchanger are located side by side. The return air when entering the housing and the supply air when exiting the housing have approximately parallel flow direction.

DESCRIPTION OF THE INVENTION: Problem, Solution, Advantages

The invention has for its object to provide a clean air device that is very suitable for manufacturing processes in microelectronics and optics and is compact, with an air inlet and outlet on the same housing bottom should be present.

This object is achieved by a device having the features of claim 1.

Application examples of the invention are microelectronics, semiconductor technology, the production of printed circuit boards, storage media and wafers.

The device according to the invention provides a circulating-air filter-fan unit and is suitable for clean rooms with turbulent flow. The invention takes into account installation situations in which a return air duct for the circulating air is not possible on site. Also, the invention is suitable by the construction according to the invention and because of their low height for a low Deckenplenum. The return air is removed from the cleanroom ceiling directly on the device and can be cooled down by an internal cooler. Optional nozzles on the housing allow the addition of fresh air.

With the invention, the purity classes D, C and B after EU GMP Guide and the purity classes 6 to 8 after DIN EN ISO 14644-1 be achieved.

The device according to the invention offers a whole series of further advantages. It allows systems that are ready for connection and that can be easily installed in all compatible ceiling systems, for example in a so-called ROM clean room ceiling. The possible modular design makes a use very flexible and also allows subsequent conversion or extension measures. In addition, solutions based on the invention require about 30 percent less energy than conventional systems and are thus particularly economical.

The device according to the invention can be designed as a self-contained unit with an internal cooler. The housing can be used in all common materials such. B. sheet steel painted, aluminum or stainless steel are supplied. To reduce the sound emission values, the clean air device may be provided with a sound-insulating and air-conducting lining. Via a slit cassette, the return air can be sucked in from the center in the middle of the unit and blown in laterally via the suspended matter filter. Slots arranged on a bottom of the housing ensure turbulent air flow. Through an internal cooler, the return air can be cooled down. Fresh air can be supplied via laterally opposite openings or nozzles. The clean air device can be used in all common ceiling systems.

The clean air device according to the invention can with high-performance Schwebstofffilter (class H13 to U17) with fluid-filled gutter, which dips into a revolving sword, be provided. A Einrastsystem for the Schwebstofffilter allows a simple cleanroom filter replacement, without having to change the clean air device in its existing position. Both silicone-containing and silicone-free two-component gels can be used as sealants. A pre-filter can be easily integrated.

For circulating air cooling, an internal round cooler can be integrated, which allows a uniform flow of the recirculating air flow due to its design. By a limited flow operation of the cold water to 14 ° C a condensate-free dry cooling is guaranteed.

In a clean room, several facilities can be mounted on the clean room ceiling, so that a filter or cooling capacity can be changed to changing requirements. High performance particulate filters can be easily replaced. Through the use of support frame, flush-mounted installation in all common cleanroom ceiling systems is possible.

A fan drive can be done with an electronically controlled and brushless external rotor motor (EC motor). Also, the creation of a simple power supply is possible. On a top EC motor with sockets for z. B. a mains voltage of 230 volts and BUS lines may be appropriate. By means of a unique addressing, it is also possible to control each individual module or also defined module group or module zones.

Further advantageous embodiments of the invention are characterized in the subclaims.

In an advantageous embodiment of the device according to the invention it is provided that the housing is designed as a module which can be fastened to a ceiling. This allows a modular expansion to module groups or module zones.

In a further advantageous embodiment of the invention, a first housing space accommodating the fan and a second housing space accommodating the heat exchanger are present, the housing spaces accommodating the fan and the heat exchanger being adjacent to one another. A flat embodiment is thus possible. It is advantageously provided that the fan upstream of the heat exchanger and thus the air is first passed through the fan, and only then through the radiator. In devices according to the prior art, the fan is connected downstream of the radiator. In the direction of air, the air first passes through the radiator before passing through the fan.

So that both small particles can be filtered and the service life of the filter is increased, it is provided in a preferred development of the invention that the filter is designed as a HEPA filter or as a suspended matter filter, in particular of the class H13 to U17.

Another very important preferred measure involves that a central air inlet is provided on one lower side of the housing and at least one air outlet on the same lower side of the housing. An installation is also possible in places where a return air duct for the circulating air is not possible on site.

A particularly preferred development of the invention is characterized in that a swirl plate with suction openings, in particular suction slots, and a swirl outlet with lamellae is present on a housing underside, so that the exiting air is blown in four directions. This creates a turbulent flow.

An optimal suction pressure is created when the fan is designed as a centrifugal fan.

Another very significant improvement in terms of a compact design results when the heat exchanger is an annular heat exchanger, in particular designed as a ring cooler.

It is also advantageous if at least one horizontal filter cell with a filter cover and a filter holder is arranged in the housing, near a housing bottom, wherein on the housing bottom an air duct is arranged, which leads to a fan room. This construction makes a simpler filter change possible. Conveniently, the filter is then arranged in a filter holder which bears against at least one housing wall, wherein at least one seal is arranged between the housing wall and the filter holder.

Brief description of the drawings

An embodiment will be explained in more detail with reference to the drawings, wherein further advantageous developments of the invention and advantages thereof are described.

Show it:

1 a sectional view of a clean air device according to the invention 3 (AA)

2 an enlarged view of a section D from 1 .

3 an illustration of the clean air device according to 1 seen from above,

4 a sectional view (BB) of the clean air device according to 3 .

5 a perspective view of the clean air device according to the invention,

6 an enlarged sectional view of the clean air device according to the invention,

7 an enlarged view of a section from 6 .

8th an illustration of the clean air device according to the invention with illustrated air circulation,

9 an illustration of the inventive clean air device seen from below,

10 an enlarged view of a section E from 9 .

11 a further illustration of a clean air device according to the invention seen from below,

12 a perspective view of the internal structure of the clean air device according to the invention,

13 a partially sectioned representation of the clean air device according to the invention,

14 an enlarged view of the detail F in 13 .

15 a sectional view of another embodiment of the inventive clean air device 17 (AA)

16 an enlarged view of a section D from 15 .

17 a representation of the other embodiment of the clean air device according to 15 seen from above,

18 a further illustration of the second embodiment of the clean air device according to 15 .

19 a further perspective view of the second embodiment of the clean air device according to 15 .

20 an enlarged sectional view of the second embodiment of the inventive clean air device according to 15 .

21 an enlarged view of a section from 20 .

22 an illustration of the second embodiment of the inventive clean air device seen from below,

23 an enlarged view of a section E from 22 .

24 a further perspective view of the second embodiment of the clean air device,

25 a partially sectioned view of the inventive clean air device according to 15 .

26 an enlarged view of the detail F in 25 .

27 a further schematic representation of a clean air device according to the invention,

28 a representation of the air movement in the housing,

29 another illustration of the air movement in the housing,

30 a representation of a cover plate, and

31 a perspective view of the cover plate.

Best way to carry out the invention

In the figures, like parts are given the same reference numerals.

1 shows a clean air device 100 for the microelectronic and optical field. This one has a fan 10 to which a heat exchanger 11 downstream. This is a ring cooler. The heat exchanger 11 or cooler is a filter 12 downstream. The ventilator 10 , the heat exchanger 11 and the filter 12 are in a common housing 14 arranged. Between heat exchanger 11 and the filter 12 is an annular prefilter 16 arranged.

2 shows a locking element for a filter cartridge, the filter 12 includes. On top of the case 14 there is an electronic control system 15 ( 5 ).

4 shows that a first, the fan 10 receiving housing space 17 and a second housing space 18 is present, and that both housing spaces 17 . 18 lie next to each other. In the second housing space no heat exchanger must be used.

6 shows that on a housing bottom, a central air inlet 21 and at least one air outlet on the same underside of the housing 22 is available. There is also a side fresh air or exhaust connection 23 and in the area of the inlet 21 a pre-filter 24 available. In front of the fan 10 there is a return air shaft 25 , 7 shows a filter cover 20 ,

As 8th illustrated, meets air in the middle of the bottom through the shaft 25 one. This rises to the top, reaches the fan 10 and exits sideways out of the fan 10 out. Inside the case 14 it is cooled and is moved down so that it comes down again. 11 shows the particulate filter, the fan 10 and the return air shaft 25 ,

The filter 12 is arranged in a filter holder which bears against at least one housing wall, wherein between the housing wall and the filter holder at least one seal 30 (Fluid seal) is arranged.

In 12 are the inner construction and the filter cover 20 to see. The filter 12 can be latched from below, like the 13 and 14 demonstrate.

The housing 14 can have an approximately square footprint. As the 15 to 26 show, the base can not be square. It can be rectangular with different sides.

The 27 to 29 illustrate the air flow in the housing 14 ,

The 30 to 31 show that on a housing bottom a swirl plate 31 with suction openings, in particular suction slots 32 , and a swirl diffuser with fins 33 is present, so that the exiting air in four directions (arrows in 30 ) is blown.

What is essential is that it is not a device specially designed for the pharmaceutical, food and biotechnological sector, but rather a device for the microelectronic and optical sector. This results in the essential differences in the structure:

• - The fan is connected upstream of the heat exchanger.
• - A separation between the spaces of the fan and the heat exchanger is required.
• - The fan, the heat exchanger and the filter are housed in a common housing space.
• - A partition with a passage is not required.
• - A side passage, in which return air flows to the fan, is not necessary because the return air flows out through a suction shaft from below.

LIST OF REFERENCE NUMBERS

100

Clean air device

10

fan

11

Heat exchanger

12

filter

13

14

casing

15

control electronics

16

prefilter

17

First case space

18

second housing space

19

20

filter cover

21

air intake

22

air outlet

23

Exhaust port

24

prefilter

25

Return air shaft

26-29

30

poetry

31

swirl vane

32

suction slots

33

lamella

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 29503373 U [0003]
• EP 1085270 B1 [0004]

Cited non-patent literature

• DIN EN ISO 14644-1 [0009]

Claims (10)

Clean air device ( 100 ) for the microelectronic and optical area, with at least one fan ( 10 ), to which a heat exchanger ( 11 ) and at least one heat exchanger ( 11 ) downstream filter ( 12 ), whereby the fan ( 10 ), the heat exchanger ( 11 ) and the filter ( 12 ) in a common housing ( 14 ) are arranged. Clean air device according to claim 1, characterized in that the housing ( 14 ) is designed as a module attachable to a ceiling. Clean air device according to claim 1 or 2, characterized in that a first, the fan ( 10 ) receiving housing space ( 17 ) and a second heat exchanger ( 11 ) receiving housing space ( 18 ) is present, and that the fan ( 10 ) and the heat exchanger ( 11 ) receiving housing spaces ( 17 . 18 ) are next to each other. Clean air device according to one of the preceding claims, characterized in that the filter ( 12 ) is designed as a HEPA filter or as a suspended matter filter, in particular of the class H13 to U17, wherein immediately behind the heat exchanger ( 11 ) and / or before the HEPA filter a prefilter ( 24 ) is arranged. Clean air device according to one of the preceding claims, characterized in that on a housing underside a central air inlet ( 21 ) and at the same housing bottom at least one air outlet ( 22 ) is available. Clean air device according to one of the preceding claims, characterized in that on a housing underside a swirl plate ( 31 ) with suction openings, in particular suction slots ( 32 ), and a swirl diffuser with fins ( 33 ) so that the exiting air is blown in four directions. Clean air device according to one of the preceding claims, characterized in that the fan ( 10 ) is designed as a centrifugal fan. Clean air device according to one of the preceding claims, characterized in that the heat exchanger ( 11 ) Is an annular heat exchanger, in particular designed as a ring cooler. Clean air device according to one of the preceding claims, characterized in that in the housing ( 14 ), near a housing bottom at least one horizontal filter cell with a filter cover ( 20 ) and a filter holder is arranged, wherein at the bottom of the housing an air shaft ( 25 ) is arranged, which leads to a fan room. Clean air device according to one of the preceding claims, characterized in that the filter ( 12 ) is arranged in a filter holder, which rests against at least one housing wall, wherein between the housing wall and the filter holder at least one seal ( 30 ) is arranged.

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