JPS61202028A - Wall member containing dust removing device being bult-in - Google Patents

Wall member containing dust removing device being bult-in

Info

Publication number
JPS61202028A
JPS61202028A JP60045369A JP4536985A JPS61202028A JP S61202028 A JPS61202028 A JP S61202028A JP 60045369 A JP60045369 A JP 60045369A JP 4536985 A JP4536985 A JP 4536985A JP S61202028 A JPS61202028 A JP S61202028A
Authority
JP
Japan
Prior art keywords
filter
wall member
loaded
exhaust port
dust removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60045369A
Other languages
Japanese (ja)
Inventor
Toshihiro Ibata
井畑 稔弘
Kazuyoshi Yamamoto
山本 一善
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KIYOHIRO ENG KK
Original Assignee
KIYOHIRO ENG KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KIYOHIRO ENG KK filed Critical KIYOHIRO ENG KK
Priority to JP60045369A priority Critical patent/JPS61202028A/en
Publication of JPS61202028A publication Critical patent/JPS61202028A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To provide a wall member capable of rapidly manufacturing a clean room having a high dust removing efficiency by opening a suction port in a strip-shaped plate loaded in the vicinity of one side end of a panel, opening an exhaust port, providing a filter for removing dusts and dirts at the upstream side and a blower between the filter and the suction port. CONSTITUTION:A strip-shaped plate 3 is formed by a single plate, and is loaded so that it is wound around the peripheries of panels 1 and 2 or separately loaded one by one at respective side ends of the panels 1 and 2, in the vicinity of the upper side edge of the indoor panel 1, an exhaust port 4 is opened, and in the vicinity of the lower side edge a suction port 6 is opened. On the upstream side along the direction of the air stream a HEPA-filter 8 having a dust removing efficiency of 99.97% is loaded in a freely attachable manner and a pre-filter 9 having a dust removing efficiency of approximately 20% is loaded at the downstream side along the airstream side in the same manner. Between the HEPA-filter 8 and the pre-filter 9, a sirocco fan 10 press-delivering air toward the exhaust port 4 from the suction port 6 is provided.

Description

【発明の詳細な説明】 (イ)産業上の利用分骨 本発明は、クリーンルームやエアシャワールームを構成
するに際して使用され得る壁部材であって、その内部に
除塵装置が収納されているものである。
Detailed Description of the Invention (a) Industrial Application The present invention relates to a wall member that can be used when configuring a clean room or an air shower room, and a dust removal device is housed inside the wall member. be.

(ロ) 従来の技術 従来のクリーンルームに使用されている壁部材は、例え
ば特開昭58−182046号公報に示きれるように、
その内部にファンとフィルが収納されているに過ぎなか
った。
(b) Prior art The wall members used in conventional clean rooms are as shown in Japanese Patent Application Laid-open No. 182046/1983, for example.
The fan and fill were simply housed inside it.

従って、この壁部材を使用してクリーンルーム−を構成
するには、先ずこの壁部材を床上に立設した後、二重天
井を形成し、上部天井と下部天井との間に除塵用のフィ
ルタを装着していた。
Therefore, in order to construct a clean room using this wall member, first install this wall member on the floor, form a double ceiling, and install a filter for dust removal between the upper ceiling and the lower ceiling. I was wearing it.

従って、壁部材自体は工場等にて量産できても、二重天
井の製作およびフィルタの装着については、現場で施工
しなければならなかった。
Therefore, even if the wall members themselves could be mass-produced in a factory or the like, the production of the double ceiling and the installation of the filter had to be carried out on site.

一方、近年の半導体の需要は急激な伸張を見せ、それに
伴い半導体製造装置、特にクリーンルームの需給関係は
逼迫しており、短期間で高能率のクリーンルームを製造
することが望まれている。
On the other hand, the demand for semiconductors has increased rapidly in recent years, and as a result, the supply and demand relationship for semiconductor manufacturing equipment, especially clean rooms, has become tight, and it is desired to manufacture highly efficient clean rooms in a short period of time.

(ハ) 発明が解決しようとする問題点前述のように、
ファンとフィルのみが収納されている壁部材は工場にて
迅速に大量生産され得るが、フィルタ等については現場
で施工しなければならず、従来の技術では短期間に高性
能のクリーンルームを製造することは困難で、半導体業
界等の需要に充分対応することができなかった。
(c) Problems to be solved by the invention As mentioned above,
Wall components containing only fans and filters can be quickly mass-produced in factories, but filters and other components must be installed on-site, making it difficult to manufacture a high-performance clean room in a short period of time with conventional technology. This made it difficult to meet the demands of the semiconductor industry and other industries.

また、壁部材の排気口と二重天井との接合部には隙間が
生じやすく、ここに隙間が生じると、その部分から、フ
ィルタを1通過していない塵埃を含む空気がクリーンル
ーム内に漏出して、除塵効率を低下させる虞もあった。
In addition, gaps are likely to form at the joint between the exhaust port of the wall component and the double ceiling, and if a gap occurs here, air containing dust that has not passed through the filter will leak into the clean room. Therefore, there was a risk that the dust removal efficiency would be reduced.

本発明は、斯る従来の技術の問題点に鑑みてなされたも
ので、除塵効率の高いクリーンルームを迅速に製造し得
ると共に、半導体業界等の需要に充分対応し得る壁部材
を実現せんとするものである。
The present invention has been made in view of the problems of the conventional technology, and aims to realize a wall member that can rapidly manufacture a clean room with high dust removal efficiency and that can fully meet the demands of the semiconductor industry, etc. It is something.

(ニ)問題点を解決するための手段 本発明は、パネルの一側端縁近傍、若しくは当該端縁に
装着されている帯状板に、吸気口が開設され、他側端縁
近傍、若しくは当該端縁に装着されている帯状板に、排
気口が開設され、この排気口の気流方向に沿って上流側
に塵埃を除去するフィルタが設けられ、このフィルタと
前記吸気口との間に送風装置が備えられている除塵装置
内蔵の壁部材である。
(D) Means for Solving the Problems The present invention provides an air inlet in the vicinity of one edge of the panel or in the strip plate attached to the edge, and in the vicinity of the edge of the other side or in the strip plate attached to the edge of the panel. An exhaust port is provided in the strip plate attached to the edge, and a filter for removing dust is provided on the upstream side of the exhaust port along the air flow direction, and an air blower is installed between the filter and the intake port. This is a wall member with a built-in dust removal device.

(ホ)作用 本発明に斯る壁部材を複数枚立設して空間を形成し、上
部に一重の天井、下部に床部材を装着するだけでクリー
ンルームを、実現することができる。
(E) Function A clean room can be realized by simply erecting a plurality of wall members according to the present invention to form a space, installing a single ceiling above and a floor member below.

而して、この壁部材内の除塵装置を動作させると、クリ
ーンルーム内の空気が除塵きれる。
When the dust removal device inside the wall member is operated, the air in the clean room can be completely cleaned of dust.

(へ) 実施例 図面はいずれも本発明の実施例を示すもので、第1図は
第1の実施例を示す一部断面斜視図、第2図は第2の実
施例を示す縦断面図、第3図は第3の実施例を示す縦断
面図、そして第4図は第4の実施例を示す縦断面図であ
る。また、第5図は、前記第1の実施例ないし第3の実
施例を組み合わせることにより構成されるクリーンルー
ムを示す斜視図である。なお、各図に共通する部分には
共通の符号を付し、各間係の説明は省略する。
(f) Example The drawings all show examples of the present invention, and FIG. 1 is a partially sectional perspective view showing the first embodiment, and FIG. 2 is a longitudinal sectional view showing the second embodiment. , FIG. 3 is a longitudinal sectional view showing the third embodiment, and FIG. 4 is a longitudinal sectional view showing the fourth embodiment. Furthermore, FIG. 5 is a perspective view showing a clean room constructed by combining the first to third embodiments. Note that the parts common to each figure are given the same reference numerals, and the explanation of each relationship will be omitted.

第1図において、1はクリーンルームを製造した際に室
内側の壁面となるパネルで、2は室外側の壁面となるパ
ネルである0両パネル1.2は、20国ないし39cm
程度離間して、平面が対向するように平行並設されてお
り、3は前記両パネル1.2間の空間を閉室すべく、パ
ネル1.2の周囲に装着されている帯状板である。この
帯状板3は1枚のもので形成され、パネル1.2の周囲
に巻回するように装着されるものでも、また、パネル1
.2の各側縁に、1枚ずつ別個に装着されるものでもよ
い。
In Figure 1, 1 is the panel that will be the indoor wall when a clean room is manufactured, and 2 is the panel that will be the outdoor wall.
They are arranged parallel to each other with a certain distance apart so that their planes face each other, and reference numeral 3 designates a band-shaped plate attached around the panel 1.2 to close off the space between the two panels 1.2. This strip plate 3 may be formed of one piece and may be attached so as to be wrapped around the panel 1.2.
.. It is also possible to separately attach one sheet to each side edge of 2.

室内側のパネル1の上側端縁近傍には、排気口4が開設
され、この排気口4にはパンチングメタルにて形成され
ている蓋体5が装着されている。また、前記パネル1の
下側端縁近傍には、吸気口6が開設され、ここにもパン
チングメタルにて形成されている蓋体7が装着されてい
る。
An exhaust port 4 is provided near the upper edge of the panel 1 on the indoor side, and a lid 5 made of punched metal is attached to the exhaust port 4. Further, an air intake port 6 is provided near the lower edge of the panel 1, and a lid body 7 made of punched metal is also attached thereto.

前記排気口4の気流方向に沿って上流側には、除塵効率
が99.97X(0,3It粒子DOPyス))c7)
、ヘパフィルタと称される高性能フィルタ8が、着脱可
能に装着されている。
On the upstream side of the exhaust port 4 along the airflow direction, there is a dust removal efficiency of 99.97X (0.3It particles DOPys)) c7)
A high-performance filter 8 called a Hepafilter is removably attached.

また、前記吸気口6の気流方向に沿って下流側には、除
塵効率が20%(0,3μ粒子DOPテスト)程度の、
粗塵を除去するためのプレフィルタ9が、着脱可能に装
着されている。
In addition, on the downstream side of the air intake port 6 along the airflow direction, there is a
A pre-filter 9 for removing coarse dust is removably attached.

そして、ヘパフィルタ8とプレフィルタ9の間には、空
気を吸気口6から排気口4に向けて圧送するための、送
風装置としてのシロッコファン10が設けられている。
A sirocco fan 10 is provided between the HEPA filter 8 and the pre-filter 9 as a blowing device for forcefully feeding air from the intake port 6 toward the exhaust port 4.

従ってこのシロッコファン10を動作させると、空気は
矢印で示すように、吸気口6から吸気されて、プレフィ
ルタ9とへパフィルタ8によって除塵され、排気口4か
ら排気されることになる。シロッコファン10は、必ず
もプレフィルタ9とへパフィルタ8との間に位置させる
必要はなくプレフィルタ9と吸気口6との間に設けられ
ていてもよい、しかし、シロッコファン10が動作する
と、それ自体が発塵するので、ヘパフィルタ8と排気口
4との間にそれが設けられていると、シロッコファン1
0によって発生した塵埃が排気口4から排出されること
になり、好ましくない。
Therefore, when the sirocco fan 10 is operated, air is taken in through the intake port 6, removed by the pre-filter 9 and Hepa filter 8, and exhausted from the exhaust port 4, as shown by the arrow. The sirocco fan 10 does not necessarily need to be located between the pre-filter 9 and the Hepa filter 8, and may be provided between the pre-filter 9 and the intake port 6. However, when the sirocco fan 10 operates, Since the hepa filter itself generates dust, if it is installed between the hepa filter 8 and the exhaust port 4, the sirocco fan 1
This is not preferable since the dust generated by the exhaust gas is discharged from the exhaust port 4.

次に、第2の実施例につき、第2図に従い説明する。こ
の実施例は、前記第1の実施例と近似する構造を呈して
おり、相違点は、吸気口6が室外側のパネル2に開設さ
れている点のみである。このように、吸気口6が室外側
のパネル2に形成されていると、クリーンルーム内を室
外に対して正圧にすることができる。
Next, a second embodiment will be described with reference to FIG. This embodiment has a structure similar to that of the first embodiment, and the only difference is that the air intake port 6 is provided in the panel 2 on the outdoor side. In this way, when the air intake port 6 is formed in the panel 2 on the outdoor side, the inside of the clean room can be made to have a positive pressure with respect to the outside.

次に、第3の実施例につき、第3図に従い説明する。こ
の実施例では、プレフィルタ9が吸気口6の背面に近接
して設けられ、シロッコファン10とへバフィルタ8と
の間に、冷媒が導入される熱交換器11と加湿器12と
ヒータ13が設けられている。
Next, a third embodiment will be described with reference to FIG. In this embodiment, a pre-filter 9 is provided close to the back of the intake port 6, and a heat exchanger 11 into which refrigerant is introduced, a humidifier 12, and a heater 13 are installed between the sirocco fan 10 and the Heba filter 8. It is provided.

湿度調節をも行なうことが可能となる。14は、ヒータ
13等を作動させるためのスイッチが備えられている操
作パネルである。
It also becomes possible to control humidity. 14 is an operation panel provided with switches for operating the heater 13 and the like.

なお、熱交換器11や加湿器12等は、必ずしも全部必
要なものではなく、適宜組み合わせることにより、所望
の機能、仕様のものとすることができる。 次に、第4
の実施例につき、′第4図に従い説明する。この実施例
では、吸気口6が、パネル1.2の下端縁に装着されて
いる帯状板3aに開設諮れ、排気口4は、パネル1.2
の上端縁に装着されている帯状板3bに開設されている
。なお、17は中性能の第3のフィルタである。このよ
うに、吸気口6や排気口4が帯状板3a、 3bに開設
され、クリーンルームの天井と床の夫々にバンデングメ
タル15.16が装着されていると、除塵された空気は
、室内を上部から下部に向けて鉛直方向に流れる。
Note that not all of the heat exchanger 11, humidifier 12, etc. are necessary, and by appropriately combining them, desired functions and specifications can be achieved. Next, the fourth
The embodiment will be explained with reference to FIG. 4. In this embodiment, the intake port 6 is opened in a strip plate 3a attached to the lower edge of the panel 1.2, and the exhaust port 4 is opened in the strip plate 3a attached to the lower edge of the panel 1.2.
It is opened in the strip plate 3b attached to the upper edge of the. Note that 17 is a third filter of medium performance. In this way, if the intake ports 6 and the exhaust ports 4 are opened in the band plates 3a and 3b, and the banding metals 15 and 16 are attached to the ceiling and floor of the clean room, the removed air will flow through the room. It flows vertically from the top to the bottom.

なお、吸気口6と排気口4のいずれか一方を、前記実施
例のようにパネル1.2に開設してもよい。
Note that either the intake port 6 or the exhaust port 4 may be provided in the panel 1.2 as in the above embodiment.

次に、前記第1の実施例ないし第3の実施例を利用して
構成きれるクリーンルームについて、第5図に従い説明
する。
Next, a clean room that can be configured using the first to third embodiments will be described with reference to FIG. 5.

この図において、天井および本発明に係る壁部材と直交
する方向に立設されている一対の側壁は、周知のものと
同一のものであるので、図示を省略しである。
In this figure, a pair of side walls standing in a direction orthogonal to the ceiling and the wall member according to the present invention are the same as well-known ones, and therefore are not shown.

Aは第1の実施例に係る壁部材で、クリーンルーム内の
除塵のみを行なうものである。また、Bは第2の実施例
に係る壁部材で、室外の空気を清浄化して室内へ導入す
ることにより、クリーンルーム内を室外に対して正圧(
1,25aug)にするものである、更に、Cは第3の
実施例に係る壁部材で、クリーンルーム内の除塵のみな
らず、温度調節および湿度調節をも行なうものである。
Reference numeral A denotes a wall member according to the first embodiment, which is used only to remove dust from inside a clean room. In addition, B is a wall member according to the second embodiment, which cleans the outdoor air and introduces it into the room, so that the inside of the clean room is under positive pressure (
Furthermore, C is a wall member according to the third embodiment, which not only removes dust in the clean room but also controls temperature and humidity.

このクリーンルームを製造するには、床18の上面に前
記AないしCの各種の壁部材を適宜立設して、それ等の
間をボルト等にて連結すればよい。
To manufacture this clean room, the various wall members A to C described above may be appropriately erected on the upper surface of the floor 18, and the walls may be connected with bolts or the like.

(ト)発明の効果 本発明では、除塵装置が壁部材に内蔵されているので、
この単一の壁部材を複数個組み立てるだけで、短期間に
高性能のクリーンルームを製造することができる。
(g) Effects of the invention In the present invention, since the dust removal device is built into the wall member,
By simply assembling a plurality of these single wall members, a high-performance clean room can be manufactured in a short period of time.

また、従来の技術のように、フィルタを別途装着する必
要がないので、フィルタの上流側の塵埃が浮遊する空気
が、クリーンルーム内に漏出せず、除塵効゛率が低下す
ることはない。
Further, unlike the conventional technology, there is no need to separately install a filter, so the air containing floating dust on the upstream side of the filter does not leak into the clean room, and the dust removal efficiency does not decrease.

更に、除塵装置がクリーンルームの内部に突出すること
がないので、このクリーンルームを有効に活用すること
ができる。
Furthermore, since the dust removal device does not protrude into the clean room, the clean room can be effectively utilized.

更にまた、壁部材は、工場にて量産できるので、短時間
かつ安価に製造することができる。
Furthermore, since the wall member can be mass-produced in a factory, it can be manufactured in a short time and at low cost.

また、壁部材を移設するだけで、クリーンルームの広さ
および形状を容易に変更でき、クリーン度のクラスが異
なる複数種のクリーンルームを、容易に並設することも
できる。
Further, the size and shape of the clean room can be easily changed by simply relocating wall members, and multiple types of clean rooms with different cleanliness classes can be easily arranged side by side.

【図面の簡単な説明】[Brief explanation of the drawing]

図面はいずれも本発明の実施例を示し、第1図は第1の
実施例を示す一部断面斜視図、第2図は第2の実施例を
示す縦断面図、第3図は第3の実施例を示す縦断面図、
第4図は第4の実施例を示す縦断面図、第5図は第1な
いし第3の実施例を組み立てることにより構成されるク
リーンルームを示す斜視図である。 1.2・・・パネル、3・・・帯状板、4・・・排気口
、6・・・吸気口、8・・・ヘパフィルタ、9・・・プ
レフィルタ、10・・・シロラフファン(送風装置)、
11・・・熱交換器、12・・・加湿器、13・・・ヒ
ータ。
The drawings all show embodiments of the present invention; FIG. 1 is a partially sectional perspective view showing the first embodiment, FIG. 2 is a longitudinal sectional view showing the second embodiment, and FIG. 3 is a third embodiment. A vertical cross-sectional view showing an example of
FIG. 4 is a longitudinal sectional view showing the fourth embodiment, and FIG. 5 is a perspective view showing a clean room constructed by assembling the first to third embodiments. 1.2... Panel, 3... Strip plate, 4... Exhaust port, 6... Inlet port, 8... Hepa filter, 9... Pre-filter, 10... White rough fan ( air blower),
11... Heat exchanger, 12... Humidifier, 13... Heater.

Claims (1)

【特許請求の範囲】 1、所定寸法だけ離間して、平面が対向するように平行
並設された2枚のパネルと、両パネル間の空間を閉塞す
べくパネルの周囲に装着されている帯状板とからなる、
単一の壁部材であって、前記パネルの一側端縁近傍、若
しくは当該端縁に装着されている帯状板に、吸気口が開
設され、他側端縁近傍、若しくは当該端縁に装着されて
いる帯状板に、排気口が開設され、この排気口の気流方
向に沿って上流側に塵埃を除去するフィルタが設けられ
、このフィルタと前記吸気口との間に送風装置が備えら
れていることを特徴とする除塵装置内蔵の壁部材。 2、送風装置と吸気口との間に、粗塵を除去するための
プレフィルタが装着されている特許請求の範囲第1項記
載の除塵装置内蔵の壁部材。 3、フィルタと送風装置との間に、ヒータが装着されて
いる特許請求の範囲第1項若しくは第2項記載の除塵装
置内蔵の壁部材。 4、フィルタと送風装置との間に、加湿器が装着されて
いる特許請求の範囲第1項ないし第3項のいずれかに記
載の除塵装置内蔵の壁部材。 5、フィルタと送風装置との間に、冷媒が導入される熱
交換器が装着されている特許請求の範囲第1項ないし第
4項のいずれかに記載の除塵装置内蔵の壁部材。
[Claims] 1. Two panels arranged in parallel with each other so that their planes face each other with a predetermined distance apart, and a band-shaped panel attached around the panels to close the space between the two panels. consisting of a board,
A single wall member, in which an intake port is opened in a strip plate near one edge of the panel, or attached to the edge, and an intake port is provided near the edge of the other side, or attached to the edge. An exhaust port is provided in the strip plate, a filter for removing dust is provided on the upstream side of the exhaust port along the airflow direction, and a blower is provided between the filter and the intake port. A wall member with a built-in dust removal device. 2. A wall member with a built-in dust removal device according to claim 1, wherein a pre-filter for removing coarse dust is installed between the blower device and the intake port. 3. A wall member with a built-in dust removal device according to claim 1 or 2, wherein a heater is installed between the filter and the blower. 4. A wall member incorporating a dust removal device according to any one of claims 1 to 3, wherein a humidifier is installed between the filter and the blower. 5. A wall member incorporating a dust removal device according to any one of claims 1 to 4, wherein a heat exchanger into which a refrigerant is introduced is installed between the filter and the blower.
JP60045369A 1985-03-06 1985-03-06 Wall member containing dust removing device being bult-in Pending JPS61202028A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60045369A JPS61202028A (en) 1985-03-06 1985-03-06 Wall member containing dust removing device being bult-in

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60045369A JPS61202028A (en) 1985-03-06 1985-03-06 Wall member containing dust removing device being bult-in

Publications (1)

Publication Number Publication Date
JPS61202028A true JPS61202028A (en) 1986-09-06

Family

ID=12717354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60045369A Pending JPS61202028A (en) 1985-03-06 1985-03-06 Wall member containing dust removing device being bult-in

Country Status (1)

Country Link
JP (1) JPS61202028A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62135041U (en) * 1986-02-18 1987-08-25
JPS63172091U (en) * 1987-04-30 1988-11-09
JPH01150707U (en) * 1988-03-28 1989-10-18
JPH01151148U (en) * 1988-04-11 1989-10-18
JPH029612U (en) * 1988-06-27 1990-01-22
JPH05103737A (en) * 1991-10-17 1993-04-27 Techno Ryowa:Kk Automatic cleaning device
JPH0552019U (en) * 1991-12-17 1993-07-09 東陶機器株式会社 Toilet partition
WO2012114572A1 (en) * 2011-02-21 2012-08-30 パナソニック株式会社 Air circulation panel
JP2012180986A (en) * 2011-03-02 2012-09-20 Sekisui Chem Co Ltd Dust removal device
JP2013541478A (en) * 2010-07-27 2013-11-14 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード Device for storing articles in a controlled atmosphere
CN105464418A (en) * 2015-11-30 2016-04-06 洛阳市环城供电局 Isolation switch overhaul platform device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62135041U (en) * 1986-02-18 1987-08-25
JPS63172091U (en) * 1987-04-30 1988-11-09
JPH01150707U (en) * 1988-03-28 1989-10-18
JPH01151148U (en) * 1988-04-11 1989-10-18
JPH029612U (en) * 1988-06-27 1990-01-22
JPH05103737A (en) * 1991-10-17 1993-04-27 Techno Ryowa:Kk Automatic cleaning device
JPH0552019U (en) * 1991-12-17 1993-07-09 東陶機器株式会社 Toilet partition
JP2013541478A (en) * 2010-07-27 2013-11-14 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード Device for storing articles in a controlled atmosphere
US9863655B2 (en) 2010-07-27 2018-01-09 L'Air Liquide, Société Anonyme l'Etude et l'Exploitation des Procédés Georges Claude Device for storing articles in controlled atmosphere
WO2012114572A1 (en) * 2011-02-21 2012-08-30 パナソニック株式会社 Air circulation panel
JP2012172885A (en) * 2011-02-21 2012-09-10 Panasonic Corp Air circulation panel
JP2012180986A (en) * 2011-03-02 2012-09-20 Sekisui Chem Co Ltd Dust removal device
CN105464418A (en) * 2015-11-30 2016-04-06 洛阳市环城供电局 Isolation switch overhaul platform device

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