JPH03271645A - Air purifying system - Google Patents

Air purifying system

Info

Publication number
JPH03271645A
JPH03271645A JP6964390A JP6964390A JPH03271645A JP H03271645 A JPH03271645 A JP H03271645A JP 6964390 A JP6964390 A JP 6964390A JP 6964390 A JP6964390 A JP 6964390A JP H03271645 A JPH03271645 A JP H03271645A
Authority
JP
Japan
Prior art keywords
blower
maintenance
purified
area
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6964390A
Other languages
Japanese (ja)
Other versions
JP2816225B2 (en
Inventor
Tatsuo Yoshitomi
Yuji Toyama
Keiichi Honma
Original Assignee
Hitachi Ltd
Hitachi Techno Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Techno Eng Co Ltd filed Critical Hitachi Ltd
Priority to JP2069643A priority Critical patent/JP2816225B2/en
Publication of JPH03271645A publication Critical patent/JPH03271645A/en
Application granted granted Critical
Publication of JP2816225B2 publication Critical patent/JP2816225B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To prevent dust which generates at the time of maintenance from entering a clean room by constituting blower of which maintenance frequency is higher than that of a filter in such a manner that maintenance of the blower can be performed outside of the passage of purified air.
CONSTITUTION: An impeller 4 of a blower 8 is contained in a fan case 8c in an air passage, and a main body 3b of a motor 3 is provided on the outside of the fan case 8c. When the motor for blower 3 is replaced, a supply air volume adjusting damper 6, return air volume adjusting damper 5 and total air volume adjusting damper 7 are totally closed, and air passages on the upstream side and downstream side of the blower 8 are shut off, and therefore, even when the blower 8 is dismounted, a purified area 30 and maintenance area 13 can be separated. For this reason, non-purified air in the maintenance area 13 can be prevented from entering the purified area 30, and at the same time, even when dust which adheres on the primary side of a HEPA filter 1 re-flies, the dust does not enter a clean room 11 and a return system part 12 of the clean room, and therefore, the purifying degree of the purified area 30 does not decrease.
COPYRIGHT: (C)1991,JPO&Japio
JP2069643A 1990-03-22 1990-03-22 Air purification system Expired - Fee Related JP2816225B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2069643A JP2816225B2 (en) 1990-03-22 1990-03-22 Air purification system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2069643A JP2816225B2 (en) 1990-03-22 1990-03-22 Air purification system

Publications (2)

Publication Number Publication Date
JPH03271645A true JPH03271645A (en) 1991-12-03
JP2816225B2 JP2816225B2 (en) 1998-10-27

Family

ID=13408741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2069643A Expired - Fee Related JP2816225B2 (en) 1990-03-22 1990-03-22 Air purification system

Country Status (1)

Country Link
JP (1) JP2816225B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6033301A (en) * 1997-02-07 2000-03-07 Fuji Electric Co., Ltd. Fan filter unit and a clean room for using the same
JP2000182949A (en) * 1998-12-17 2000-06-30 Tokyo Electron Ltd Processing device and clean air supply method therefor
US6132309A (en) * 1999-03-10 2000-10-17 Panelli; Paul Giulo Modular clean room plenum
JP2006328687A (en) * 2005-05-24 2006-12-07 Toyo Netsu Kogyo Kk Clean room and method of designing and constructing the same
WO2019207841A1 (en) * 2018-04-24 2019-10-31 株式会社日立産機システム Safety cabinet, and vibration damping mechanism for fan filter unit

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127033A (en) * 1982-01-25 1983-07-28 Hitachi Ltd Clean working room
JPS6061857A (en) * 1983-09-16 1985-04-09 Fuji Facom Corp Input and output data control system
JPH01179840A (en) * 1987-12-29 1989-07-17 Matsushita Electric Ind Co Ltd Air conditioner
JPH0229581A (en) * 1988-07-19 1990-01-31 Sanyo Electric Co Ltd Refrigerator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127033A (en) * 1982-01-25 1983-07-28 Hitachi Ltd Clean working room
JPS6061857A (en) * 1983-09-16 1985-04-09 Fuji Facom Corp Input and output data control system
JPH01179840A (en) * 1987-12-29 1989-07-17 Matsushita Electric Ind Co Ltd Air conditioner
JPH0229581A (en) * 1988-07-19 1990-01-31 Sanyo Electric Co Ltd Refrigerator

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6033301A (en) * 1997-02-07 2000-03-07 Fuji Electric Co., Ltd. Fan filter unit and a clean room for using the same
JP2000182949A (en) * 1998-12-17 2000-06-30 Tokyo Electron Ltd Processing device and clean air supply method therefor
US6132309A (en) * 1999-03-10 2000-10-17 Panelli; Paul Giulo Modular clean room plenum
US6514137B1 (en) * 1999-03-10 2003-02-04 Paul Giulo Panelli Modular clean room plenum
JP2006328687A (en) * 2005-05-24 2006-12-07 Toyo Netsu Kogyo Kk Clean room and method of designing and constructing the same
JP4597769B2 (en) * 2005-05-24 2010-12-15 東洋熱工業株式会社 Clean room and its design and construction method
WO2019207841A1 (en) * 2018-04-24 2019-10-31 株式会社日立産機システム Safety cabinet, and vibration damping mechanism for fan filter unit
CN110785234A (en) * 2018-04-24 2020-02-11 株式会社日立产机系统 Biological safety cabinet and vibration isolation mechanism of fan filter unit

Also Published As

Publication number Publication date
JP2816225B2 (en) 1998-10-27

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