JPS58127034A - Clean working room - Google Patents

Abstract

PURPOSE:To prevent an entrance of contaminated air and to make easy a repairing of piping or equipments, with regard to a clean working room adapted to provide a clean working environment for the production of semi-conductors and the like. CONSTITUTION:A working section 29a adapted to install working equipments therein and a passage section 29b are continuously arranged along a stretching direction of tunnel-like wrappings in a room surrounded by the tunnel-like wrappings and their installation floor. A clean air outlet 102 for the passage section is defined at a height such that workers may not be disturbed their walkings, while a clean air outlet 101 for the working section is defined as low as working convenience may permit. After blown out from a fan 32 for the working section and made clean by a high quality filter 36 for the working section through a blowing chamber 34, the air is downwardly diffused to the working section 29a inside the room through the clean air outlet 101 for the working section, whereas the air blown out from a fan for the passage section passes through a blowing chamber 35 and is made clean by a high quality filter 37 for the passage section, then enters into the air passage 42 and is diffused downwardly to the passage section 29b inside the room through a clean air outlet 102 for the passage section.

Description

[Detailed description of the invention] The present invention is designed to improve the cleanliness required for semiconductor manufacturing and the like. .

Regarding clean work rooms (clean rooms) to create a safe work environment.

A typical example of a clean room conventionally used in the semiconductor manufacturing process (full-scale down-flow clean room).

(room) is shown in Figure 1. In Figure 1, 1 is a building;
2 is a clean room interior, 3 is a high-performance filter, 4 is a lighting lamp, 5 is a perforated plate on the ceiling, 6 is a perforated plate on the floor, 7 is an air supply duct from an air conditioner, and 8 is the sky.

Return duct to the control device, 9 for exposure and etching.

This is work equipment 10 for each manufacturing line for diffusion, metallization, etc. As shown by the arrows in Figure 1, clean air treated with a high-performance filter 3 is blown into the room 2 in a laminar flow form from the entire ceiling, and then passed through the floor and into the room. By exhausting air 6, the entire room is kept at an almost uniform level of cleanliness.

(for example, class 100) and all process work +5
can be carried out in this clean atmosphere. .

This complete down-flow clean room is equipped throughout the room.

It is considered to be the best method for increasing the purity of the body.

There is a drawback that ita is first-order.

(1) The area to be cleaned and air conditioned is large and expensive.

Equipment costs are extremely high because many high-performance filters are used.

(2) Lining costs such as air conditioning maintenance costs and filter replacement costs are high.

(3) Since the entire room is air-conditioned, it is not possible to control the air-conditioning temperature for each production line (each process).

(4) Clean room for repair of work equipment and piping.

Since the process is carried out indoors, the dust generated by this process is transmitted to other manufacturing lines (
process).

Therefore, the present inventors investigated a method of cleaning each production line. The plan is shown in Figures 2 and 3 as a reference example. To explain its structure with reference to FIG. 2, an inverted main body case 10 consisting of a side wall and a ceiling.
Air blower 11. High performance filter.

Built-in 12.1% bright light 13, pre-filter 14 15
It cleans the outside air drawn in through the ceiling surface.

The unit 1-A, which blows clean air from the outlet 15 and has an exhaust outlet 17 at the bottom of the side plate 16°, accommodates two people.

The ceiling of Building 1 was spaced so that people could pass through.

They are hung from the hanger 18 and installed facing each other.

A box-shaped unit (B) with a built-in blower 19 and a high-performance filter 20 and a clean air outlet 21 on the bottom is built at a height that allows people to pass underneath. It is suspended and supported from the ceiling of the house 1 by a hanger 18', and unit A and unit 1-B are connected by a partition plate 22 to form a tunnel-like cover.

A work section 23 where the work equipment 9 is installed in a room surrounded by this tunnel-like cover and the floor surface on which it is installed.
a and the central passage section 23b, respectively.

The air conditioning air supply duct 7, which is provided continuously in the longitudinal direction of the flannel-shaped cover, is used to suck in Unisol I-B air.

By connecting to the opening, as shown by the arrow in Figure 1.

Unit) A's clean air outlet 15 and unit.

Temperature-controlled clean air is supplied from the clean air outlet 21 of B.

Clean air is blown into the room, and the 1° indoor air discharged from the exhaust port 17 passes through the surrounding conservation area 24 for air conditioning.

The water returns to the return duct 8, achieving indoor air conditioning and purification.

will be accomplished.

Figure 3 shows the appearance of a clean work room constructed using the above method, which is constructed by connecting a large number of modular tunnel-like covers.

°61 In the figure, the piping necessary for water, gas, etc. work is installed in the external conservation area 24 (see Figure 2), and the exhaust hole 1 to the unit is installed.
It is connected to internal work equipment 9 through 7. Uniso)
The side plate 16 of A can be partially removed when piping or repairing the work equipment 9 is performed.

The method shown in Figures 2 and 3 is a production line in which only the working parts and passages of the production line are covered in a tunnel shape.

However, it achieved separate cleaning and air conditioning.

This also has the following drawbacks.　　　　　　　　′.

(1 unit) A and unit) B need to be suspended and supported from the ceiling of the building, which is the amount of construction work required.

It takes a lot of work.

(Since it is a hanging support, its earthquake resistance is weak.)

(3) The central unit B protrudes in a convex shape and the total height of this part 15 increases, so there is no air conditioner between it and the building's well.

It will get in the way of construction work when installing pipes etc. .

(4) When controlling air conditioning temperature for each production line,

Air intake ports for unit) A and unit) B.

It is necessary to connect the air conditioning air supply duct to the
4. Costs will increase.

The purpose of the present invention is to solve the above-mentioned drawbacks (1) to (4) of the prior art.
) In addition to the drawbacks (1) to (4) of the above-mentioned reference examples, the object of the present invention is to provide a clean working room that is further improved.

In order to achieve the above object, the present invention provides a production line.

A tunnel-shaped cover that covers the working section and passage section of the engine.

This tunnel has a self-supporting structure with side panels and a top plate on both sides attached to a gate-shaped frame that combines columns and cross beams.

The position of the clean air outlet for the working part of the room 10 surrounded by the loop-shaped cover and the floor surface on which it is installed is set lower than the position of the clean air outlet for the passage part.

Air purification is required between the clean air outlet and the top plate.

The air is purified by storing the element and treating it with this air purification element.

Air is directed downward from the clean air outlet for work area 1 and the clean air outlet 15 for passage area to the indoor work area and passage area.

I tried to make it burst out.

Two embodiments of the present invention will be described below with reference to the drawings.

Ru.

Figures 4 to 6 are views of an embodiment in which the production line is located on both sides of the passage, in some cases 2 degrees. Figure 4 is a sectional view perpendicular to the longitudinal direction of the tunnel-shaped cover, and Figure 5 is an enlarged view of the main part. Department.

FIG. 6 is a perspective view showing the external appearance. In FIG. 4, the work equipment 9 of one production line is arranged facing each other, and two lines constitute one set. A gate-shaped frame is assembled with the pillars 25 and cross beams 26, and side plates 27 and a top plate 28 on both sides are attached to this to form a tunnel-shaped cover that covers the production line, and this tunnel-shaped cover and that are installed. A work section 29a in which work equipment 9° is installed in a room surrounded by a floor surface and a passage section 29
b are provided continuously in the longitudinal direction of the tunnel-shaped 10 covers.

101 and 102 are a clean air outlet for the indoor working section and a clean air outlet for the passage section, respectively. Cleaner for working parts.

Air purification is provided between the air outlet 101 and the top plate 28.

Blower which is an element 32.33. Blow chamber 34. 1
535, high performance filters 36.37 and work area lighting.

The light 38 is stored and a grid-like work is done under the lighting light 68.

A diffuser plate 60 for the section is installed. These equipments are suspended and supported from the cross beam 26 via support members (not shown). 39 is an air intake port, 40 is a pre.

A filter 41 is a decorative plate for partitioning between the working part clean air outlet 101 and the passage part clean air outlet 102. An air passage 42 is provided between the clean air outlet 102 for the passage part and the top plate 28, and a one passage part illumination lamp 46 is housed in the air passage 42, and a lattice-shaped passage part light diffusion plate 61 is installed below the air passage 42.

The position of the clean air outlet 102 for the passage section is high enough for workers to stand and pass through.

should be kept low as long as it does not interfere with work (for example,

Passage air outlet height 2200mm, working area air blower 1
0 exit height 1800m). Working part air outlet height/
It is better to keep the air flow in the work area as low as possible.

This is because there is less turbulence and the cleanliness retention performance is improved.

be.

In this case, a high-performance filter, blower, etc. are not housed 1° above the clean air outlet 102 for the two-passage section.

Because of this, even if you raise the height of the air outlet in the first passage, it will not work.

The entire plate 28 is made approximately the same height to reduce the overall height.

can be done.

By operating the blower 32.33, the external air is pre-.

The air is sucked in from the air suction port 39 through the filter 40. The air sent out from the working section blower 32 passes through the ventilation chamber 34 and is purified by the working section high-performance filter 3B, and then is blown out in the direction F from the working section clean air outlet 101 to the indoor working section 29a. On the other hand, the air sent out from the blower 33 for the first passage section passes through the blow chamber 65 and is purified by the high performance filter 67 for the passage section.
airway.

The clean air outlet 102 for the second passage enters the passage 42.

It blows out downward into the passage section 29b inside the room. Arrow 10 in the diagram
Marks indicate this air flow. The light scattering plates 30 and 31 are provided for scattering the illumination and rectifying the clean air current. 44 in FIG. 5 represents the wind speed distribution in the passage section 29b.

This is a punching board for adjustment.

The wind speed of the clean air flow is, for example, 0.4.5 in the working section 29a.
m/s, 0.2 m/s at the passage section 29b, and so on.

Set according to the required cleanliness. To do this.

Therefore, the cleanliness of the second working section 29a is the same as the cleanliness of the passage section 29b.

It can be higher than the degree.

The clean airflow blown into the room is indicated by the arrow in the figure.

・ 8 ・ The flow 1 is discharged to the outside from the exhaust ports 45 provided at the bottom of the side plates 27 on both sides. Since the indoor pressure becomes positive with respect to the outside air by the pressure loss at the exhaust port 45, it is possible to prevent contaminated air from flowing in from the outside.

The exhaust port 45 is also used for drawing in piping for water, gas, etc. and electric wires to the work equipment 9. The side plate 27 is screwed for repairing piping or equipment.

Alternatively, make it so that it can be partially removed using a hook, etc. Further, in order to improve the indoor work environment and to manage work from the outside, a part of the side plate 27 may be made of a 10 transparent plate.

Figure 5 shows a modular tunnel-shaped cover.

Exterior view of a clean work room using this method, which is made up of multiple interconnected units.

shows.

FIG. 7 is a 1° view of another embodiment in which the production line is located on one side of the passageway, and is directly in the longitudinal direction of the tunnel-like cover.

It shows an angular cross section. In FIG.

The same reference numerals as in FIG. 4 indicate corresponding parts.

One side of the passage portion 29b is blocked by the side plate 27.

Other than that, this embodiment is substantially different from the embodiment shown in FIGS. 4 to 6.

do not have.

FIG. 8 is a diagram showing an example of construction of a clean work room using this method. In this example, two sets of double-sided line-shaped cleaning work rooms shown in FIGS. 4 to 6 are installed in a building 1 to which an air conditioning supply duct 7 and a return duct 8 are connected.

End panels 46 with doors are attached to both ends of the tunnel-shaped cover constituting the clean work room to partition the interior 29 covered by the tunnel-shaped cover from an external conservation area 47. The maintenance area 47 inside the building is purified to some extent by the clean air discharged from the room 29, but its cleanliness is lower than that of the room 29.Water, gas, etc. used in manufacturing facilities Since the piping 48 is installed in the maintenance area 47, maintenance of these piping 48 can be performed in the maintenance area 47.In addition, by partially removing the side plate 27, Most of the repairs to equipment 9 can be done from the maintenance area 47°.Moreover, the maintenance area 47 is inside a clean room.

Because you can enter and exit from the external general room without passing through.

Dust generated by maintenance work rarely affects other production lines. 2゜If air conditioning temperature control is required for each production line, please refer to Figure 8 (
As shown in b), an air supply duct connection port 49 may be provided on two sides of the tunnel-shaped cover, and this may be connected to the air conditioning air supply duct 50 in the rate-limiting ceiling.

In the clean work room according to this method, the entire top plate 28 is formed at the same height, so a ceiling partition plate 5 is placed above the conservation area 47.
1, the air supply duct 50 can be easily provided between the air supply duct 50 and the rate-limiting ceiling.

Also, Figures 4 to 8 show the indoor air in the clean work room.

An example is shown in which the exhaust is discharged from the exhaust ports 45 on both sides.
Similar to the conventional method shown in Figure f11, a perforated plate is installed on the floor of the work room.
If a structure is adopted in which part or all of the indoor air is discharged from under the floor, the indoor clean airflow will be completely downward and countercurrent, further increasing the cleanliness of the indoor work area.

be able to. 1
According to the present invention, as is clear from the above description.

It was previously considered the best method for manufacturing semiconductors.

Manufactured compared to a complete down-flow clean room.

The following effects can be achieved while ensuring sufficient cleanliness in the line section.

You can get results. 2゜(1) Since the areas to be cleaned and the areas subject to air conditioning will be significantly reduced, equipment costs will be reduced by about half.

(2) Running costs can be reduced by about half, resulting in energy savings.

(3) Air conditioning temperature control for each production line (each process) is now possible, which was difficult with a one-sided downflow system. ”(4
) Since maintenance of the production line can be performed from an external maintenance area, dust generation due to maintenance work is eliminated.

This can prevent the production line from being affected. ``There are still the following 10 advantages compared to the method shown in Figure 2.3.

(5) Since the tunnel-like structure is self-supporting, it is easy to build.

There is no need to hang it from the ceiling of the house and it is a speed limiter.

things become much easier.

(6) Because it has an independent structure with a gate-shaped frame,
1. Earthquake resistance is significantly improved compared to ceiling suspended structures. .

(7) Install an air purification unit in a part of the indoor passageway as shown in Figure 2.3.

There are no protruding parts like Knit B, and the top plate is made of metal.

can be made almost the same height, so it is rate-limiting.

The floor height can be lowered, and the air conditioning duct between the ceiling and the -1 rate-limiting ceiling.

・　12・ It will also be easier to carry out construction work such as

[Brief explanation of drawings]

Figure 1 is a vertical cross-sectional view of a prior art full-scale down-flow complete clean room, Figure 2 is a vertical cross-sectional view of a tunnel-shaped clean room with ceiling hanging structure shown as a reference example, and Figure 3 is a perspective view showing its external appearance. , Fig. 4 is a vertical cross-sectional view of one embodiment of the clean work room according to the present invention (when the production line is on both sides of the aisle), Fig. 5 is an enlarged view of its main parts, and Fig. 6 shows its external appearance. A perspective view, FIG. 7 is a vertical cross-sectional view of ten other examples of the clean work room according to the present invention (in the case where the production line is on one side of the aisle), and FIG. 8 is a construction example of the clean work room according to the present invention.・
In the drawings, (a) is a cutaway plan view, and (b) is a side sectional view. 25: Post, 26: Cross beam, 27: Side plate, 152
8: Top plate, 29a: Indoor work section, 29b:
Indoors. Passage part, 101: Clean air outlet for working part,
. 102: Clean air outlet for passage, 32: Work. section blower, 33: passage section blower, 34.
. 35: Blow chamber; 36; High performance fan for working section. Filter, 37: High performance filter for passage. 39. : Air intake port, 4o: Pre-filter. 42: Air passage on the ceiling of the passage section, 45: Exhaust port. 9: Work equipment agent, patent attorney Junnosuke Nakamura. 0 5 0 ・ 15 ・ '1fl-4Figure 1F5

Claims (1)

[Scope of Claims] A self-supporting tunnel-like cover is constructed by attaching side plates and a top plate on both sides to a gate-shaped frame made up of a combination of columns and cross beams, and this tunnel-like cover and the floor surface on which it is installed. A work area where work equipment is installed and a passageway for workers to pass through are provided in a continuous manner in the longitudinal direction of the tunnel 10-shaped cover, and clean air is blown out for the indoor work areas and areas. The position of the opening is lower than the position of the clean air outlet for the passage section, and the air purifying element is housed between the clean air and air outlet for the working section and the top plate. The clean air that is stored and treated with this air purification element is +5
Clean air outlet for working areas and clean air outlet for passage areas. Air blows downward from the outlet into the indoor work area and passageways. A clean work room designed to