JPH01273942A - Clean room device - Google Patents

Abstract

PURPOSE:To facilitate the construction work and maintain the cleanness in the main and branch passage spaces by installing a plurality of mutually connected main passage units on the floor of a building to form the main passage space, and connecting a plurality of production line units to it to form the branch passage spaces. CONSTITUTION:The clean room comprises a main passage unit 13 which is independently installed on the floor of the building 1 to cover the main passage space 15 and production line units 14 which cover branch passage spaces that are connected to and extend perpendicularly from the main passage space 15. Those units have an air cleaning means in their ceiling. The clean air delivered from the top of the production line units 14 flows downwardly in the second zone 16 and first zone 17 to be discharged from the outlet in the lower part of the second side panel 36 into the security space 18. Similarly, the clean air delivered from the top of the main passage unit 13 flows downwardly in the main passage space 15 to be discharged from the outlet in the lower part of the main passage unit 13 into the security space 18.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a clean room apparatus (clean room) for creating a clean working environment required for semiconductor products and the like.

[Behind the invention! ]

A typical example of a clean work room (full-scale downflow clean room) conventionally used in the semiconductor manufacturing process is shown in the first example.
As shown in the figure. (a) is a cutaway plan showing the layout of the production line, (b) is a side sectional view, where 1 is the building, 2 is the inside of the clean room, 3 is the general room outside, and 4 is the air shower installed at the entrance to the clean room. , 5 is equipment for each production line such as exposure, etching, diffusion, CVD, metallization, inspection, etc., 6 is piping for water, gas, etc., 7 is a high-performance filter, 8 is a lighting lamp, 9 is a ceiling perforated plate, 10 is a floor perforated plate, 11 is an air conditioning supply air duct, and 12 is an air conditioning return duct. As shown by the arrow in the figure, clean air treated with a high-performance filter 7 is flowed from the entire ceiling in a laminar flow into the clean room. By blowing air into the interior of the clean room 2 and discharging the indoor air through the floor under the floor, the clean room interior 2 in which the production line equipment 5 is installed can be kept at a high level of cleanliness (for example, class 1).
00) so that all process operations can be performed in this clean atmosphere.

This full-scale downflow clean room is considered to be the best method for improving the cleanliness of the entire room, but it has a large cleaning area and air conditioning area, and uses a large amount of expensive high-performance filters. Equipment costs are very high. Incidentally, U and S are known examples of clean rooms.

P, 3,570.385, U, S, P, 4,030°5
18, U, S, P, 3,728.86 (3, tJ, S.

P, 3,630,404, JP-A-53-82039,
There is a system described in Japanese Utility Model Publication No. 55-14990, all of which are down-flow clean rooms.

In addition, as for other related information, "Edited by Japan Air Cleaning Association Foundation" published by Ohmsha Co., Ltd. on October 20, 1980.
The Air Cleaning Handbook, pages 476 to 479, includes information on maintaining cleanliness in clean rooms, ease of maintenance work, and workability in clean rooms, and
A configuration in which clean air is supplied from above, and a configuration in which the main passage space is communicated with the maintenance area below and exhausted to the entire area of one pot under positive pressure;
The technical concept of preventing a decrease in cleanliness even in the main passage space with this configuration is not disclosed. In addition, what is disclosed in this document is one in which a main passage space and a branch passage space are provided integrally with a building (constructed type), and a main passage space and a branch passage space are provided on the floor of the building independent from the building, There is no disclosure of a configuration in which the interiors of the main passage space and the branch passage spaces are cleaned and their outer peripheries are used as a conservation area.

Furthermore, regarding ponds, "Architectural Equipment Engineers Vol. 14/No. 1" published by the Japan Association of Building Equipment Engineers on January 5, 1980.
Pages 8 to 10 are listed, and this also includes a configuration in which clean air is supplied to the main passage space from above, a configuration in which the main passage space is communicated with the maintenance area below, and exhaust is exhausted to the conservation area with positive pressure, and this configuration. Therefore, no technical idea is disclosed to prevent a decrease in cleanliness even in the main passage space. Furthermore, the structure disclosed therein is also a built-in type, with a main passage space and a branch passage space independent from the building being provided on the floor surface of the building, and the interiors of the main passage space and branch passage spaces being cleaned and cleaned. A configuration in which the outer periphery is a conservation area is not disclosed.

In particular, in a pay-type clean room, it is necessary to have a leap partition between the main passage space, branch passage space, and conservation area. In this case, there is a problem in that the number of parts that interact with the building increases, the construction time becomes more labor-intensive, and the equipment cost increases. However, the methods disclosed in the above two related publications do not give any consideration to simplifying construction by reducing the number of connecting parts with the building.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a clean S room device that is easy to construct and that can maintain the cleanliness of both the main passage space and the branch passage space.

C. Summary of the Invention] The present invention provides a clean room apparatus including a main passage space 15 provided on the floor of a building 1 independently from the building 1, and a main passage space 15 extending laterally from the main passage space 15 in a direction substantially perpendicular to the main passage space 15. A plurality of branch passage spaces 73 that are branched, a work space 16 and a passage space 17 that are provided to extend in parallel to each other inside the branch passage space 73, and a side surface of the main passage space 15 of the branch passage space 73. The branch passage space 73 is provided with a normally open communication part 80 formed so as to communicate with the main passage space 15, and the main passage space 15 is disposed on the ceiling and connected to the main passage space. The first air purifying means 15a configured to supply clean air from above to the
In addition, the branch passage space 73 is provided with a second air purifying means 73a disposed on the ceiling and configured to supply clean air to the work space 16 and the passage space 17 from above, respectively. Furthermore, an area defined by the outer surface of the main passage space 15 and the branch passage space 73 in the building 1 is defined as a conservation area 18, and the main passage space 15 and the branch passage space 73 are included in the conservation area 18. On the other hand, each of them is characterized in that the lower part thereof communicates with the maintenance area 18 so as to provide a positive pressure.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 2 is a cutaway plan view of an embodiment in which the present invention is applied to a semiconductor manufacturing process, and FIGS. 3(a) and 3(b) are sides taken along line A-A and line B-B in FIG. 2, respectively. It is a cross-sectional opening, and the first
The same reference numerals as in the figures indicate corresponding parts. In FIGS. 2 and 3, 13 is a main passage unit installed in the building 1 so as to cover the main passage space 15, and 14 is a manufacturing line unit as a branch passage unit, which is a side surface of the main passage unit 13. The branch passage space 73 is connected to the main passage space 150 and is provided so as to branch approximately at right angles on both sides of the main passage space 150. The main passage unit 13 forms a main space 15 used as a main passage space, which consists of a top plate 25, the first side plate 24, a plan 1 end plate 71,
The main space 15 is covered in a tunnel shape with a door 72 as an opening/closing opening and an air shower device 4.

As will be described in detail later, the main passage unit 13 has a built-in first air purifying means 15a in its ceiling and has a function of blowing clean air into the main space 15 from the ceiling surface. The manufacturing line unit 14 is provided for each manufacturing line, and includes a second zone 16 as a work space in which the manufacturing line equipment 5 is installed, and a first zone 17 as a passage space extending parallel to this. It is provided so as to cover the branch space 73 forming the branch passage space. The connecting portion of the branch passage space to the main passage space is communicated by a communication part 80 which is always open, and the main passage space and the branch passage space are configured to be able to freely go in and out through this communication part 80. The branch space 73 is constructed by covering the branch space 73 in a tunnel shape with the top plate 37, both second side plates 3G, and the second end plate 19, as shown in FIG. As will be described in detail later, the production line unit 14 has a second air θ converting means 73 on its ceiling.
A has a built-in function to blow clean air into the second zone 16 and first zone 17 from the ceiling surface of each zone, and has a function to purify the second zone 16 and the first zone 17. By connecting the air supply duct 11, it is possible to control the air conditioning temperature for each production line. A maintenance space 18 is provided between adjacent production line units 14 and between the production line units 14 and the wall of the building 1. Although not shown, it has a door so that it is possible to go back and forth between the room covered by the unit 14 and the maintenance space 18.

In addition, both ends of the main passage unit 13 are partitioned by the walls of the building 1, and an air shower device 4 is provided from the cabin 3 to the main space 15.
to enter and exit through.

An Ifi 20 is provided between the swimming space 18 and the cabin 3, so that the maintenance space 18 can be accessed from the cabin 3 without passing through the clean room. The clean air blown from the ceiling of the production line unit 14 flows downward through the second zone 16 and the first zone 17, and is discharged from the outlet 21 provided at the bottom of the second side plate 36 of the production line unit 14. be done. Similarly, clean air blown from the ceiling of the main passage unit 13 also flows downward in the main space 15 and is discharged from the outlet 33 provided at the bottom of the first side plate 24 of the main passage unit 13. . Therefore, although the maintenance space 18 is cleaned to some extent by the clean air discharged from the main passage unit 13 and the production line unit 14, its cleanliness is lower than that of the room covered by the units 13 and 14. Power transmission means 6 such as piping for water, gas, etc. and electric wires used in the production line are installed in the maintenance space 18 and drawn into the production line equipment 5 through the outlet 21 of the production line unit 14. By doing so, maintenance of piping, electric wires, etc. can be performed in the maintenance space 18. Further, by partially removing the second side plate 36 of the production line unit 14, most of the repairs to the production line equipment 5 can be performed from the one-unit space 18. Moreover, as mentioned above, the maintenance space 18 has ti? Since it is possible to enter and exit from one cabin 3 without passing through the entry chamber, dust generated by maintenance work hardly affects other production lines. Further, even when repairing manufacturing equipment in a certain process, the repair can be performed only in the clean room of that process, thereby preventing any influence on other manufacturing lines.

In the manufacturing process of semiconductors, ICs, etc., various processes such as diffusion, exposure, etching, CVD, and metallization are randomly repeated, as shown in FIG. Therefore, as shown in FIG. 2, by arranging the manufacturing line units 14 in a branch shape on both sides of the main space 15 and arranging the layout for each process, products can be transferred to the next process through the main space 15 in the shortest distance. Yes, it is very convenient. However, even if the manufacturing line unit can only be placed on one side of the main space 15 due to constraints on the building 1, the effects of the present invention described later can be sufficiently achieved.

Next, the main passage unit 13 and the product line unit 1
The specific configuration of No. 4 will be explained.

FIG. 5 shows a cross section of the main passage unit 13 perpendicular to the longitudinal direction. As shown in this figure, the pillars 22 and the cross beams 23 form a gate-shaped frame, and the first side plates 24 and top plate 25 on both sides are attached to this frame to form a cover that covers the main space 15 and provides clean air for the main passage. Between the outlet 100 and the top plate 25, a blower 812G, a blower chamber 27, a high-performance filter 28, and a main passage illumination light 29, which constitute the first air purifying means 15a, are housed. 30 is a lattice-shaped light scattering plate installed under the illumination light 29. The height of the air outlet in [Main Space] 5 shall be high enough for a worker to stand and pass through (for example, 2200 mm).

By operating the blower 26, air outside the main passage unit 13 is sucked in from the air suction port 31 through the pre-filter 32. The air sent out from the blower 8126 passes through the blower chamber 27 and is purified by the high-performance filter 28, and then is sent from the clean air outlet 100 on the ceiling surface.
The arrow in Figure 0, which blows downward into the main space 15 at a wind speed of about 2 m/s, indicates this flow of air. The light scattering plate 30 is provided for scattering illumination and rectifying clean air. The clean airflow blown into the main space 15 flows as shown by the arrow in the figure and is discharged to the outside from the outlet 33 provided at the bottom of the first side plate 24, and the amount of pressure loss at the outlet 33 is reduced by the amount of pressure lost in the main space. ! Inside δ, there is a positive pressure with respect to the maintenance space 18. As a result, the interior of the main space 15 is maintained at a level of cleanliness necessary to prevent contamination during the transfer of products between production lines and during the passage of workers. Furthermore, since the airflow in the main space 15 flows from the clean air outlet 100 to the outflow port 33 as shown by the arrow in the figure, the circulation path of the airflow in the main space 15 is shortened regardless of the length of the main space 15. Therefore, contaminants generated within the main passage space 15 can be immediately discharged. This main passage unit 13 is opened by removing the first side plate 24 only at the portion corresponding to the connection port with the manufacturing line unit 14 and the air shower device 4.

Figures 6 to 8 are diagrams showing an example of a unit for a production line,
6 is a cross-sectional view perpendicular to the longitudinal direction, FIG. 7 is an enlarged view of the main part, and FIG. 8 is a perspective view showing the external appearance.

In FIG. 6, the production line equipment 5 is arranged facing each other, and two lines form one set. Pillar 34 and crossbeam 35
A gate-shaped frame is tied together, and a second side plate 36 and a top plate 37 on both sides are attached to this to form a cover that covers the production line section, and a clean room surrounded by this cover and the floor on which it is installed is constructed. A second zone 16 where manufacturing line equipment 5 is installed and a first zone 17 through which workers pass are provided parallel to the second side plate 3G. 1
01 and 102 are a working clean air outlet and a passage part clean air outlet, respectively. Between the clean air outlet 101 for the work section and the top plate 37, air blowers 140, 41. Blow chamber 42
43, a high-performance filter 44, 45 and a work section illumination light 46 are housed, and a grid-shaped work section light diffusion plate 38 is installed under the illumination light 46. These equipments are suspended and supported from the cross beam 35 via support members (not shown). 47 is an air intake port, 48 is a pre-filter, and 49 is a clean air outlet 101 for the working section and a clean air outlet 10 for the passage section.
This is a decorative board for partitioning between 2 and 2. An air passage 50 is provided between the clean air outlet 102 for the passage and the top plate 37, and a passage illumination lamp 51 is housed therein, and a lattice-shaped passage diffusion plate 39 is installed below it. The height of the air outlet of the passage section 17 is set high enough for a worker to stand and pass through the working section 1.
The height of the air outlet in step 6 should be as low as possible as long as it does not interfere with work (for example, the height of the air outlet in the passage is 2200 mm).
, working area air outlet height 1800mm). This is because the lower the height of the working part air outlet, the less turbulence in the airflow in the working part space and the better the cleanliness maintenance performance.

By operating the blower 40, 41, external air is drawn through the pre-filter 4 through the air inlet 47. The air sent out from the working part ventilation n40 is sent to the ventilation chamber 4.
2 and cleaned by the high-performance filter 44 for the working area, the air is blown downward from the working area clean air outlet 101 to the second zone 16 in the room, while the air is sent out from the passage blower 41. After passing through the ventilation chamber 43 and being purified by the high-performance passage filter 45, the air enters the air passage 50 and is blown downward from the passage clean air outlet 102 into the 1″fI area 17 in the room. The arrows in the figure indicate the flow of this air.The diffuser plates 38 and 39 are provided for scattering illumination and rectifying the clean air flow, similar to the diffuser plate 30 in Figure 5. 52 is a punching plate for adjusting the wind speed distribution in the first zone 17.

The wind speed of the clean Jjc flow is, for example, 0.4 in the second zone 16.
m/s, and 0.2 m/s in the first zone 17, depending on the required cleanliness of each part. By doing so, the cleanliness of the second zone 16 can be made higher than the cleanliness of the first zone 17.

The clean airflow blown into the room flows as shown by the arrow in the figure, and is discharged to the outside from the outlet 21 provided at the lower part of the second side plate 36. Since the indoor pressure becomes positive with respect to the conservation space 18 by the amount of pressure loss at the outlet 21, it is possible to prevent contaminated air from entering the room.

Further, in this embodiment, since the maintenance space 18 is provided so as to surround the outer peripheral surface of the technique space 73, it is possible to prevent contaminated air from outside from entering the branch space 73.

In this embodiment, the connecting portion between the main passage space and the branch passage space is opened by removing the first side plate 24 of the main passage unit 13 to form a communication portion 80 that is open at all times. As a result, even if the process involves frequent entry and exit into each branch passageway space as shown in Figure 4, there is no need to open and close the door each time entry and exit is made, improving work efficiency and improving work efficiency. It is possible to maintain the cleanliness of the room by preventing airflow turbulence and pressure fluctuations caused by opening and closing.

In this embodiment, as shown in FIGS. 5 and 6, the main passage space 15 and the branch passage space 73 are provided inside the building and are independent from the building, thereby almost eliminating the interface with the building. In addition, since the main passage space 15 and the branch passage space 73 are connected to the deep area 18 under positive pressure, the main passage space 15 and the branch passage space 73 are connected to each other (the first There is no need to seal the side plate 24 and the second side plate 36, and construction is greatly simplified compared to the built-in type.

The outlet 21 is also used to lead in piping for water, gas, etc. and electric wires to the production line equipment 5. The second side plate 36 is made partially removable using screws or hooks to keep the pipes and equipment dim. Furthermore, in order to improve the indoor working environment and to control work from the outside, a portion of the second side plate 36 may be made of a transparent plate.

FIG. 8 shows the appearance of a manufacturing line unit according to this embodiment, which is constructed by connecting a large number of modular covers.

In Figures 6 to 8, indoor air is shown in 1. Although we have shown an example in which the air flows out from the outlet provided at the bottom of the second side plate, similar to the conventional method shown in Figure 1, a perforated plate is used on the floor of the clean room to direct some or all of the indoor air from under the floor. If it is allowed to flow out, the clean airflow inside the room becomes a complete downward flow, and the second working part
The cleanliness of zone 16 can be further improved.

〔Effect of the invention〕

According to the present invention, the main passage space 15 and the branch passage space 73 are provided independently from the building, and the main passage space 15
Both the inner and branch passage spaces 73 have a positive pressure with respect to the entire area 18 of the pot, preventing the inflow of contaminated air from the conservation area. A clean room that can be maintained together! Lai location can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing an example of the layout of a full-scale downflow clean room according to the prior art, in which (a) is a cutaway plan view, (b) is a side sectional view, and FIG. 2 is a layout of a clean room apparatus according to the present invention. A cutaway plan view showing an example of FIG. 3(a)
, (b) are side cross-sectional views taken along the line 8 and B-B in FIG. 2, respectively, and FIG.
FIG. 5 is a sectional view perpendicular to the longitudinal direction showing the specific configuration of the main passage unit, FIG. 6 is a sectional view perpendicular to the longitudinal direction showing the specific configuration of the manufacturing line unit, FIG. 7 is an enlarged view of the main part thereof, and FIG. 8 is a perspective view showing the appearance of the manufacturing line unit. 4: Air shower device as an example of opening/closing opening, 5: Manufacturing line equipment, 6: Power transmission means, 13: Main passage unit, 14: Branch passage unit, 15: Main passage space,
15a: first air purification means, 16 second work space, 17:
Passage space, 18: Conservation area, 19: 2nd I plate, 20: Door for access to conservation space, 21.33 + Outlet, 24
．． 36: First and second side plates, 25.37: Top plate, 26.
40.41: Blower, 28.44.45: High performance filter, 71: First end plate, 72: Door as opening/closing opening, 7
3: Branch passage space, 73a: Second air purification means, 80:
Communication part, 100: Clean air outlet for main passage, 101:
Clean air outlet for working section, 102: Clean air outlet for passage section. '% 1 Lo $ 2 Mouth $ 3 Days + Q + □ From the tongue 9゛'Saku/l-burning, show the story 6
Figure 5F7

Claims (1)

[Scope of Claims] 1. A main passage space 15 provided on the floor of the building 1 independently from the building 1, and a plurality of branches extending laterally from the main passage space 15 in a direction substantially perpendicular to the building 1. a branch passageway space 73;
A work space 16 and a passage space 17 are provided inside the branch passage space 73 and extend in parallel to each other, and the branch passage space 73 is provided at a connection portion of the branch passage space 73 to a side surface of the main passage space 15. a normally open communication section 80 formed to communicate with the main passage space 15;
The branch passageway space 73 is disposed on the ceiling and is connected to the work space 16 and the passageway space 17. It is equipped with a second air purifying means 73a configured to supply clean air from above, and further defines an area defined by the outer surface of the main passage space 15 and the branch passage space 73 in the building 1. A clean room device characterized in that the main passage space 15 and the branch passage space 73 each communicate with the maintenance area 18 at a lower side so as to have a positive pressure with respect to the maintenance area 18. 2. A main passage space is created by connecting a plurality of main passage units 13 in a predetermined direction, which are installed on the floor of the building 1 independently from the building 1 and equipped with the first air purifying means 15a on the ceiling. 1
A plurality of branch passage units 14 are connected in a predetermined direction in a predetermined direction and extend in parallel to each other inside the building. A branch passage space 73 including a work space 16 and a passage space 17 provided in this manner is connected to the main passage space 15 in a plurality of rows in a direction substantially perpendicular to the branch passage unit 14 and the main passage unit. 13 is provided with a normally open communication part 80 formed so that the branch passage space 73 communicates with the main passage space 15, and furthermore, the main passage space 15 and the branch passage space 73 in the building 1 are connected to each other. A clean room device characterized in that a conservation area 18 is an area defined by an outer surface of the clean room device. 3. The main passage space 15 communicates with the conservation area 18 from below so as to have a positive pressure with respect to the conservation area 18, and clean air is supplied from above by the first air purifying means 15a, and the branch passage space 73 communicates with the maintenance area 18 downwardly so as to create a positive pressure with respect to the maintenance area 18, and also cleans the working space 16 by the second air purifying means 73a.
3. The clean room apparatus according to claim 2, wherein clean air is supplied from above to the passage space 17 and the passage space 17, respectively. 4. The first air purifying means 15a has an air suction port 31 facing the conservation area 18, and the second air purification means 73a has an air suction port 47 facing the conservation area 18, The first air purifying means 15a and the second air purifying means 73a are configured to suck air discharged from the main passage space 15 and the branch passage space 73 through the conservation area 18. A clean room apparatus as set forth in claim 1 or 2.