JPS61168735A - Clean room - Google Patents

Abstract

PURPOSE:To remove dust from a working part rapidly without retention thereof by a method wherein a ventilating hole is provided on the side wall of a ceiling vicinity accommodating air cleaning elements. CONSTITUTION:The ventilating hole is provided on the side plate 4 located under the commutating plate 15 of the workin part 7a. An air retaining portion generating at the clean air blow-off part of the clean room is removed by utilizing higher pressure of the room than the preserving area 22 and the flowing of the clean air in the clean room is improved so as not to generate the disorder thereof. That is, the flowing of the clean air blown from the commutating plate does not generate any eddy in the air current, accordingly, the dust generated in the room is removed together with the air current from the working apparatus and the products without the stagnation of the dust. The air- stagnating part does not exist in the room, therefore, the stationary air current condition may be returned rapidly even in case the air current is disturbed by the movement of the workers in the room.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a clean room for creating a clean working environment required in the manufacture of semiconductors, etc., and in particular to a clean room in which particulates generated in the clean room also accumulate inside the room. It is suitable for use in lean rooms and is suitable for rapid removal outside the room.

[Background of the invention]

As a method of keeping dust generated in a clean room away from products, for example, as shown in Japanese Patent Application Laid-Open No. 58-129125, the average velocity of clean air in one working section is kept higher than the average velocity of clean air in the passage. It is known that the airflow is distributed so that dust generated in the work area does not spread to the work area. but.

In this method, no consideration was given to means for removing dust generated in the working area from the working area.

First, Figure 1 shows a cross-sectional view perpendicular to the longitudinal direction of a clean room that is generally called a clean tunnel type clean room conventionally used in semiconductor manufacturing processes. A frame is assembled, and a top plate 3 and side plates 4 on both sides are attached to it to form a tunnel-shaped cover, and exposure, etching, diffusion, and metallization are carried out in a clean room surrounded by this tunnel-shaped cover and the floor 5 on which it is installed. A working section 7a in which working equipment 6 for a semiconductor manufacturing line such as the like is installed and a passage section 7b through which workers pass are provided continuously in the longitudinal direction of the tunnel-shaped cover. On the ceiling of the working section 7a, there are blowers 8, 9, . Blow chambers 10, 11. A high-performance filter 12, 13 and a work section illumination lamp 14 are housed, and a grid-shaped rectifier plate 15 is installed at the clean air outlet at the bottom thereof. Further, a passage section light lamp 16 is housed in the ceiling space of the passage section 7b, and a grid-shaped rectifying plate 17 is installed at the clean air outlet at the bottom thereof.

18 is a partition plate between the work section ceiling and the passage section ceiling.

By operating the blowers 8 and 9, external air is passed through the prefilter 1.
Air is sucked in from the air suction port 20 through the air intake port 20 through the working area blower 8 and sent to the ventilation chamber 10. After being purified by the high performance filter 12 for the working area, the air is passed from the ceiling of the working area to the working area 7a in the room. The air sent out from the blower 9 for the first passage section to the blowing chamber 11 is purified by the high performance filter 13 for the passage section, and then blown out from the ceiling of the passage section to the indoor passage section 7b. ．．
Reference numeral 17 is provided for rectifying clean airflow and scattering illumination.

The clean airflow blown from the ceiling flows through the room as shown by the arrows in the figure, and is passed through the side exhaust ports 2 provided at the bottom of the side panels 4 on both sides.
1 to an external conservation area 22. Since the indoor pressure is maintained higher than the pressure in the protection area 22, contaminated air from the protection area 22 does not flow into the room.

Figure 2 shows the appearance of a clean room with a large number of modular clean tunnels connected together.

However, a drawback of the clean room according to this method is that there is a portion between the side plate 4 and the rectifying plate 15 that blows clean air to the working section 7a, where clean air is not blown out. Air remains in this part, and if the operator were to
When dust is generated in the air, the dust enters the area where the air is stagnant, and after a certain period of time, due to gravity settling or disturbance, the dust flows into the working area 7a and adheres to the product 4, causing defective products. Become. Therefore, it is necessary to create an airflow that is unlikely to cause turbulence in the flow of clean air, which is a means of keeping a clean room clean, and that will quickly return to a steady state even if turbulence occurs due to external disturbances. be. In order to obtain such an airflow, it is necessary to remove the portions of the conventional clean room where air stagnates.

[Purpose of the invention]

Therefore, the purpose of the present invention is to quickly return the clean air flow in the clean room to its steady state even if a worker disturbs the airflow in the work area and generates a single dust, so that the dust is quickly removed from the work area without being accumulated. The goal is to provide a clean room that achieves the same airflow as possible.

[Summary of the invention]

The present invention is applied to a room surrounded by a side wall, a ceiling containing air purifying elements, and a floor surface on which these elements are installed.

A side wall near the ceiling that contains an air purification element in a clean room that has a work area where work equipment is installed and a passageway for workers to pass through, and purifies the room by blowing clean air from the ceiling through an air purification element. It is equipped with ventilation holes, which makes the flow of clean air in a conventional clean room less likely to cause turbulence, and allows dust generated in the working area to be quickly removed from the working area. This is designed to create a clean room that maintains a high degree of cleanliness.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be described with reference to FIG.
A ventilation hole 23 is provided in the. Figure 4 shows the ventilation hole 2 of the present invention.
FIG. 3 is a detailed view of the clean air blowing section including the clean air blowing section. The present invention utilizes the fact that the pressure inside the room is higher than the pressure in the conservation area 22,
By eliminating the air stagnation that occurs in the clean air blowing section of conventional clean rooms, and improving the flow of clean air in the clean room to make it less likely to cause turbulence, dust generated in the working section 7a can be quickly removed from the working section 7a. removed from 7a,
A clean room can be kept at a high level of cleanliness. That is, the flow of clean air blown out from the rectifying plate is as shown by the arrows in FIGS. 3 and 4, and no thin air is generated in the air flow.

Dust generated indoors will not stay indoors.

Dust can be quickly moved away from the work equipment 6 or the product along with the airflow. Furthermore, since there is no part of the room where air stagnates, even if the airflow is disturbed due to the movement of one worker, a steady state of airflow can be quickly restored.

FIG. 5 is one of the modules shown in FIG. 2, and is a diagram in which the ventilation holes 23 of the present invention are provided. However, in FIG. 5, a slit-shaped ventilation hole 23a is shown. Although the ventilation hole 23 is located below the rectifying plate of the working part 7a, its shape is not specified. However, in the module shown in FIG. 5, in order to maintain the two-dimensionality of the flow within the room in the longitudinal direction, it is desirable that the ventilation holes 23 are uniformly distributed in the longitudinal direction. Further, in order to prevent the interior of the room from being contaminated from the conservation area 22, the ventilation hole 23 is designed to have a size that does not allow airflow from the conservation area 22 into the interior of the room.

Figure 6 shows an example in which the shape of the ventilation hole 23 is changed.

This hole-shaped ventilation hole 23b shows a module provided with a hole-shaped ventilation hole 23b, which can also suck out a part of the indoor clean air to the conservation area 22 and improve the indoor airflow condition.

FIG. 7 shows another embodiment. In this embodiment, a side plate 24 is further provided on the outside of both side plates 4, and a side return air duct 25 is connected to an underfloor return duct 26 and a side exhaust port 21 between the side plates 24. The side exhaust port 21 and the floor perforated plate 2 are connected to the side return air duct 25 and the underfloor return air duct 26.
The exhaust gases from 7 are combined and passed through a pre-filter 19 and returned to an air intake port 20. In this case, of the clean air blown into the room, an amount commensurate with the amount of air supplied from the air conditioning supply air duct connection port 28 is discharged to the conservation area 22 from the exhaust port 29 provided at the bottom of the side plate 24. However, most of the other air is returned to the air purification element in the ceiling, purified again, and then supplied into the room. In this case as well, the pressure inside the room is higher than the pressure inside the side return air duct 25, and by providing the ventilation holes 23 of the present invention in the side plate 4 located below the rectifying plate 15, airflow without stagnation in the room is obtained. be able to.

〔Effect of the invention〕

According to the present invention, the air that has been stagnant between the current rectifier plate and the side plate in a conventional clean room can be sucked out of the side plate through the ventilation hole, so it is possible to obtain airflow without stagnation in the clean room. This has the effect of quickly removing dust generated in the working area from the working area and maintaining a high level of cleanliness in the room.

Furthermore, the present invention is particularly effective in cleaning ultra-clean environments such as clean rooms for manufacturing ultra-LSIs, where ultrafine particles such as 0.1 μm particles that cannot be expected to settle due to gravity are removed.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view of an example of a conventional clean room. FIG. 2 is an external perspective view of a modularized clean tunnel, FIG. 3 is a longitudinal cross-sectional view showing an embodiment of the clean room of the present invention, and FIG. 4 is a detailed view of the air outlet in FIG. 3.
FIG. 5 is an external perspective view of FIG. 3. FIG. 6 is an external perspective view of another embodiment of the clean room of the present invention, and FIG. 7 is a longitudinal sectional view of another embodiment of the clean room of the present invention. 3... Top plate, 4... Side plate, 5... Floor, 6... Work equipment. 7a...Working part, 7b...Passway part, 8.9...Blower, 10.11...Blower chamber, 12.13...
・High performance filter, 15... Rectifier plate, 17... Rectifier plate, 18... Partition plate, 19... Pre-filter, 2
1...Side exhaust port, 23...Vent hole, 23a...
Slit-shaped ventilation hole. 23b... Hole-shaped ventilation hole, 24... Side plate, 25...
Side return air duct, 26...Underfloor return air duct, 29...
·exhaust port.

Claims (1)

[Claims] 1. A room surrounded by a side wall, a ceiling containing an air purification element, and a floor surface on which these elements are installed is provided with a work section where work equipment is installed and a passage section through which workers pass; A clean room configured to purify the room by blowing clean air from the ceiling through an element, characterized in that a ventilation hole is provided in a side wall near the ceiling in which the air purification element is built-in.