JPS61282742A - Clean room - Google Patents
Clean roomInfo
- Publication number
- JPS61282742A JPS61282742A JP60123195A JP12319585A JPS61282742A JP S61282742 A JPS61282742 A JP S61282742A JP 60123195 A JP60123195 A JP 60123195A JP 12319585 A JP12319585 A JP 12319585A JP S61282742 A JPS61282742 A JP S61282742A
- Authority
- JP
- Japan
- Prior art keywords
- clean
- area
- zone
- blow
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、LSIの製造や超精密機械部品の製造、ある
いは、薬品の製造等、種々の清浄雰囲気作業に用いるク
リーンルームに関し、詳しくは、LSI等の清浄維持必
要物を位置させる室内高度清浄域に対し、その全域にわ
たって清浄気体をほぼ鉛直下方向きで層流状に吹出す第
1吹出口、及び、高度清浄域に隣り合う作業者用域とし
ての室内低度清浄域に対し清浄気体を吹出し供給する第
2吹出口を設けたクリーンルームに関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a clean room used for various clean atmosphere operations such as LSI manufacturing, ultra-precision mechanical parts manufacturing, and chemical manufacturing. A first outlet that blows out clean gas almost vertically downward in a laminar flow over the entire indoor highly clean area where items that need to be kept clean are located, and an area for workers adjacent to the highly clean area. The present invention relates to a clean room provided with a second air outlet for blowing and supplying clean gas to a low-level clean area of the room.
従来、上記の如きクリーンルームにおいては、第4図及
び第5図に示すように、低度清浄域(B)に対応位置す
る室内天井部に対して、第2吹出口(4)を局所的に、
あるいは、その複数個を分散配置し、第2吹出口(4)
から低度清浄域(B)に対して清浄気体を拡散的に吹出
し供給するように構成しており、それによって、低度清
浄域(B)に対応位置する室内天井部のほぼ全面を第2
吹出口として、その第2吹出口から低度清浄域の全域に
わたって清浄気体を層流状に吹出し供給するように構成
するに比して、低度清浄域(B)に対する清浄気体供給
設備の簡略化及びコンパクト化を図り、全体設備コスト
を低減するようにしていた。Conventionally, in the above-mentioned clean room, as shown in Figs. 4 and 5, the second air outlet (4) is locally connected to the ceiling of the room corresponding to the low-grade clean area (B). ,
Alternatively, a plurality of them can be distributed and arranged, and the second outlet (4)
The system is configured so that clean gas is blown out and supplied to the low-level clean area (B) in a diffusive manner, thereby covering almost the entire surface of the indoor ceiling corresponding to the low-level clean area (B) as a secondary gas.
The clean gas supply equipment for the low-level clean area (B) is simplified compared to a configuration in which the blow-off port is configured to blow and supply clean gas in a laminar flow over the entire area of the low-level clean area from the second blow-off port. The aim was to reduce the overall equipment cost by making the system more compact and compact.
しかし、上述の如く天井部の第2吹出口(4)から清浄
気体を単に拡散的に吹出すように構成すると、高度清浄
域(A)での層流状清浄気体流動と低度清浄域(B)で
の清浄気体流動との風向及び風速が互いに異なるために
画成(A) 、 (11)の境界部で渦流が生じ、その
渦流に起因した低度清浄域(B)から高度清浄域(A)
への塵埃侵入のために高度清浄域(A)が汚染されてし
まう。However, if the configuration is such that the clean gas is simply blown out diffusely from the second outlet (4) in the ceiling as described above, the laminar clean gas flow in the high clean area (A) and the low clean gas flow ( Because the wind direction and wind speed are different from the clean gas flow in B), a vortex is generated at the boundary between definitions (A) and (11), and the vortex causes a transition from the low-level clean area (B) to the high-level clean area. (A)
The highly clean area (A) becomes contaminated due to dust intrusion into the area.
そこで、渦流による高度清浄域(A)の汚染を防止する
ための対策として、第4図に示すように、画成(A)
、 (11)の間に垂壁(19)を設けたり、又、第5
図に示すように、画成(A) 、 (B)の境界部に高
速気流カーテン(F)を形成する第3の清浄気体吹出口
(16)を付設する等していた。Therefore, as a measure to prevent contamination of the highly clean area (A) due to vortex flow, as shown in Figure 4,
, a hanging wall (19) is installed between (11), or a fifth
As shown in the figure, a third clean gas outlet (16) was attached to form a high-speed airflow curtain (F) at the boundary between the definitions (A) and (B).
尚、第4図及び第5図において、(2) 、 (5)及
び(17)は第1、第2、及び第3吹出口(1) 、
(4) 。In addition, in FIG. 4 and FIG. 5, (2), (5), and (17) are the first, second, and third outlet (1),
(4).
(16)に装備した高性能フィルター、(7)は各吹出
口(1) 、 (4) 、 (16)に対する空調器か
らの給気ダクト、(9)は高度清浄域(A)に接する室
壁(B)の下端部に設けた第1排気口、(10)は低度
清浄域(B)に対応位置する床部に設けた第2排気口、
(13)は第1排気口(9)からの排気気体を第1吹出
口(1)に循環供給するファン、(14)は第2排気口
(10)からの排気気体を空調器に還気ないし系外に排
出する運気・排気ダクト、又、(15)は高度清浄域(
A)に設置した作業台である(文献を示すことができな
い)。(16) is equipped with a high-performance filter, (7) is the air supply duct from the air conditioner to each outlet (1), (4), and (16), and (9) is the room adjacent to the highly clean area (A). A first exhaust port provided at the lower end of the wall (B), (10) a second exhaust port provided on the floor corresponding to the low-grade clean area (B),
(13) is a fan that circulates and supplies exhaust gas from the first exhaust port (9) to the first outlet (1), and (14) is a fan that returns exhaust gas from the second exhaust port (10) to the air conditioner. (15) is a highly clean area (
This is the workbench installed in A) (I cannot show the literature).
しかし、単に垂壁を設けるだけでは高度清浄域と低度清
浄域との境界部での渦流発生を十分に抑制できず、渦流
に起因した高度清浄域への塵埃侵入を十分に回避できな
いのが実情であり、殊に、低度清浄域に位置する作業者
が高度清浄域に近接すると、その作業者の存在により高
度清浄域と低度清浄域との境界部で激しい渦流が生じ、
又、作業者から多量の塵埃が発生するために、高度清浄
域の清浄度が大幅に低下してしまう。However, simply installing a hanging wall cannot sufficiently suppress the generation of vortices at the boundary between the highly clean area and the low clean area, and cannot sufficiently prevent dust from entering the highly clean area due to the vortex. In particular, when a worker located in a low-level clean area approaches a high-level clean area, a strong vortex is generated at the boundary between the high-level clean area and the low-level clean area due to the worker's presence.
Furthermore, since a large amount of dust is generated by the workers, the cleanliness of the highly clean area is significantly reduced.
一方、高度清浄域と低度清浄域との境界部に゛□高速気
流をカーテンを形成するものにあっては、その気流カー
テンを形成する高速気体流動により、高度清浄域のうち
気流カーテンに臨む側の部分における清浄気体層流流動
状態が乱されるために、清浄気体層流状流動による域内
塵埃排除機能が損なわれて高度清浄域の清浄度が低下し
たり、高度清浄域のうち層流流動状態が安定した有効ス
ペースが狭くなってしまう問題が発生し、又、作業者が
高度清浄域に近接した場合には、気流カーテンを形成す
る高速気体と近接作業者との衝突により極めて激しい渦
流が生じるために、近接作業者に起因した高度清浄域の
清浄度低下が、前述の垂壁付設の場合よりも一層ひどく
なることもあった。On the other hand, if a high-speed airflow forms a curtain at the boundary between a highly clean area and a low-level clean area, the high-speed gas flow forming the airflow curtain will cause Because the clean gas laminar flow state in the side part is disturbed, the dust removal function within the area due to the clean gas laminar flow is impaired, and the cleanliness of the highly clean area decreases, and the laminar flow in the highly clean area The problem arises that the effective space where the flow condition is stable becomes narrow, and when workers are close to the highly clean area, extremely violent vortices can occur due to the collision between the high-speed gas that forms the airflow curtain and the workers in the vicinity. As a result, the deterioration in cleanliness in the highly clean area caused by nearby workers could be even worse than in the case of the above-mentioned hanging wall installation.
しかも、第4図及び第5図に示す如き構成の場合、低度
清浄域(B)において、室内天井と垂壁(19) (な
いし、第3吹出口(16)を形成する垂壁状構成)との
コーナ部(D)で、第2吹出口(4)からの拡散的吹出
しに起因した大きな渦流が発生し、それに起因して、低
度清浄域(B)の清浄度も低下し、そのことが高度清浄
域(A)の汚染を促進することにもなっていた。Moreover, in the case of the configuration shown in FIG. 4 and FIG. ), a large vortex occurs due to the diffusive blowout from the second outlet (4), and as a result, the cleanliness of the low-grade clean area (B) also decreases, This also promoted contamination of the highly clean area (A).
本発明の目的は、清浄気体吹出構成を合理的に改良する
ことにより、低度清浄域に対する清浄気体吹出し設備を
極力簡略かつコンパクトにしながら、高度清浄域の清浄
度を高く維持できるようにし、しかも、高度清浄域にお
いて清浄気体層流流動状態が安定した有効スペースを広
く確保できるように、更には、低度清浄域の清浄度も合
わせて向上できるようにする点にある。The purpose of the present invention is to rationally improve the clean gas blowing configuration, thereby making it possible to maintain a high level of cleanliness in the highly clean area while making the clean gas blowing equipment for the low clean area as simple and compact as possible. The object of the present invention is to secure a wide effective space in which the clean gas laminar flow state is stable in the highly clean area, and also to improve the cleanliness of the low clean area.
本発明によるクリーンルームの特徴構成は、第1吹出口
からほぼ鉛直下方向きで層流状に清浄気体の吹出供給を
受ける高度清浄域と、第2吹出口から清浄気体の吹出供
給を受ける低度清変域との境界域に対して、その境界域
での気流状態を前記高度清浄域での気流状態とほぼ同速
かつほぼ同流れ方向の気流状態とするように、清浄気体
を下方向きに吹出す第3吹出口を設置1、前記第2吹出
口を、前記第3吹出口の近くで、かつ、清浄気体吹出流
線が下方側ほど前記境界域から離れる斜め下方向きとな
るように配置してあることにあり、その作用・効果は次
の通りである。The clean room according to the present invention is characterized by a high-level clean area that receives clean gas in a laminar flow almost vertically downward from the first outlet, and a low-level clean area that receives clean gas from the second outlet. Clean gas is blown downward to the boundary area with the variable area so that the airflow condition in the boundary area is approximately the same speed and direction as the airflow condition in the highly clean area. Installing a third blowout port 1, the second blowout port is arranged near the third blowout port and in such a way that the clean gas blowout streamline is oriented diagonally downward, further away from the boundary area as it goes downward. The functions and effects are as follows.
つまり、第2図に示すように、第3吹出口(16)から
の清浄気体吹出しにより生じる境界域(C)での清浄気
体流動が、高度清浄域(A)と低度清浄域(B)とに対
して隔壁作用するから、作業者が位置する低度清浄域(
B)から高度清浄域(A)への塵埃侵入は極めて効果的
に回避される。In other words, as shown in Fig. 2, the flow of clean gas in the boundary area (C) caused by the clean gas blowing out from the third outlet (16) is between the highly clean area (A) and the low clean area (B). Because it acts as a partition wall against
Dust intrusion from B) into the highly clean area (A) is very effectively avoided.
又、境界域(C)での清浄気体流動を画情変域(A)
、 (B)に対して単に隔壁作用させるだけであれば、
第5図に示した如く高速気流カーテン(F)を形成する
従来構成と機能的に何ら変わりが無いが、境界域(C)
での気流状態を、高度清浄域(A)での気流状態とほぼ
同速かつほぼ同流れ方向の気流状態とするから、高度清
浄域(A)のうち境界域(C)に臨む側の部分における
清浄気体層流流動が境界域(C)での清浄気体流動によ
って乱されるといったことも無く、それによって、高度
清浄域(A)での清浄気体層流流動による域内塵埃排除
機能は良好に維持され、また、層流流動状態が安定した
有効スペースを高度清浄域(A)のほぼ全域にわたって
広く確保できる。In addition, the flow of clean gas in the boundary area (C) is expressed as the image change area (A).
, If the barrier wall is simply applied to (B),
As shown in Figure 5, there is no difference in function from the conventional configuration that forms a high-speed airflow curtain (F), but the boundary area (C)
Since the airflow condition in the highly clean area (A) is almost the same speed and direction as the airflow condition in the highly clean area (A), the part of the highly clean area (A) facing the boundary area (C) The clean gas laminar flow in the boundary zone (C) is not disturbed by the clean gas flow in the boundary zone (C), and as a result, the dust removal function in the area by the clean gas laminar flow in the highly clean zone (A) is improved. In addition, a wide effective space in which the laminar flow state is maintained and stabilized can be secured over almost the entire area of the highly clean area (A).
しかも、低度清浄域(B)に対して清浄気体を吹出し供
給する第2吹出口(4)を、第3吹出口(16)の近く
で、かつ、清浄気体吹出し流線が下方側ほど境界域(C
)から離れる斜め下方向きとなるように配置するから、
第2吹出口(4)からの吹出し清浄気体が境界域(C)
での清浄気体流動を乱すようなことが無く、それによっ
て、境界域(C)での清浄気体流動による前述隔壁作用
、並びに、境界域(C)において第3吹出口(16)か
らの清浄気体が高度清浄域(A)での気流状態とほぼ同
速かつほぼ同流れ方向で流動する状態の夫々を継続して
良好に維持でき、又、高度清浄域と低度清浄域との間に
垂壁構成が存在する場合でも、低度清浄域側室内天井部
と垂壁構成とのコーナ部で渦流が発生することが無く、
それによって、低度清浄域における塵埃排除機能をも合
わせ向上でき、ひいては、そのことが高度清浄域の清浄
度維持に寄与する。In addition, the second outlet (4) for blowing and supplying clean gas to the low-grade clean area (B) is located near the third outlet (16), and the clean gas outlet streamline is located closer to the boundary toward the lower side. Area (C
), so it is placed diagonally downward, away from
The clean gas blown out from the second outlet (4) is in the boundary area (C)
Thereby, the above-mentioned partition effect due to the clean gas flow in the boundary area (C) and the clean gas flow from the third outlet (16) in the boundary area (C) are not disturbed. It is possible to continuously maintain a good condition in which the airflow flows at approximately the same speed and in approximately the same flow direction as in the highly clean area (A), and there is no vertical air flow between the highly clean area and the low clean area. Even if there is a wall structure, no vortex is generated at the corner between the indoor ceiling on the low-grade clean area side and the hanging wall structure.
As a result, the dust removal function in the low cleanliness area can also be improved, which in turn contributes to maintaining the cleanliness of the high cleanliness area.
その上、作業者が高度清浄域(A)に対して近接したと
しても、境界域(C)における気故速度が従前の高速気
流カーテンの気流速度に比してかなり小さいことから、
高速気流カーテンを形成する高速気体と近接作業者との
衝突によって起こるような極めて激しい渦流の発生は無
く、又、たとえ近接作業者の存在によって多少の湯煮が
生じたとしても、下方側ほど境界域(C)から離れるよ
うな低度清浄域(B)での清浄気体流動作用により、高
度清浄域(A)への塵埃侵入は効果的に防止される。Furthermore, even if the worker approaches the highly clean area (A), the air velocity in the boundary area (C) is considerably smaller than the air velocity of the conventional high-speed air curtain.
There is no generation of extremely violent eddy currents, such as those caused by the collision of high-speed gas forming a high-speed airflow curtain with nearby workers, and even if some boiling occurs due to the presence of nearby workers, the lower the boundary Due to the flow of clean gas in the low clean area (B) away from the clean area (C), dust intrusion into the high clean area (A) is effectively prevented.
更には、上述の如く第2吹出口(4)を第3吹出口(1
6)近くに局所配置するから、低度清浄域(B)に対す
る清浄気体供給設備を、第4図及び第5図に示した従来
構成とほぼ同等程度に簡略化及びコンパクト化できて、
全体設備費を、高速気流カーテン形成用吹出口を設けた
第5図に示す従来構成のものとほぼ同等に維持できる。Furthermore, as described above, the second outlet (4) is connected to the third outlet (1).
6) Because it is locally arranged nearby, the clean gas supply equipment for the low-grade clean area (B) can be simplified and compacted to almost the same degree as the conventional configuration shown in FIGS. 4 and 5,
The overall equipment cost can be maintained at approximately the same level as that of the conventional configuration shown in FIG. 5, which is provided with an outlet for forming a high-speed airflow curtain.
上述の結果、高度清浄域の清浄度を極めて高く維持でき
ることから、LSIや超精密機械部品等の製品品質を向
上できると共に、不良製造品の発生を大幅に軽減でき、
更には、清浄維持必要物を位置させる高度清浄域の有効
スペースを広く確保できることから、作業性を向上でき
ると共に、クリーンルーム全体構成のコンパクト化が可
能となってクリーンルームの設置性を向上でき、しかも
、設備費面でも従来構成とほぼ同等程度ですむ、全体と
して、実用上極めて有利なりリーンルームにできた。As a result of the above, the cleanliness of the highly clean area can be maintained at an extremely high level, which not only improves the quality of products such as LSIs and ultra-precision mechanical parts, but also greatly reduces the occurrence of defective products.
Furthermore, since it is possible to secure a wide effective space in the highly clean area where items required for cleanliness maintenance are located, work efficiency can be improved, and the overall configuration of the clean room can be made more compact, improving the ease of installation of the clean room. The equipment cost is almost the same as the conventional configuration, and as a whole, it is a lean room that is extremely advantageous in practical terms.
次に本発明の実施例を図面に基づいて説明する。 Next, embodiments of the present invention will be described based on the drawings.
第1図及び第2図は、LSIや超精密機械部品等の製造
ラインを形成する所謂クリーントンネルを示し、トンネ
ル形状の室内において、製造品を位置させる高度清浄域
(A)をトンネル111方向の両端側に、かつ、作業者
用通路域としての低度清浄域(B)をトンネル中方向の
中央部に夫々配置し、それら画成(A) 、 (B)を
トンネル長手方向に延設してある。Figures 1 and 2 show a so-called clean tunnel that forms a manufacturing line for LSIs, ultra-precision mechanical parts, etc. In a tunnel-shaped room, a highly clean area (A) where manufactured products are located is located in the direction of the tunnel 111. A low-grade clean area (B), which serves as a passage area for workers, is placed at both ends and in the center of the tunnel, and these areas (A) and (B) are extended in the longitudinal direction of the tunnel. There is.
高度清浄域(A)の全域にわたって清浄空気をほぼ鉛直
下方向きで層流状に吹出す第1吹出口(1)を高性能フ
ィルター(2)の吐出側開口をもって構成し、その第1
吹出口(1)、及び、それに対する第1給気チヤンバー
(3)を、トンネル状室内において高度清浄域(A)の
上方でトンネル長手方向に延設すると共に、低度清浄域
(B)に対して清浄空気を拡散的に吹出す第2吹出口(
4)、及び、第2吹出口(4)に対する高性能フィルタ
ー(5)内装型の第2給気チヤンバー(6)を、トンネ
ル状室内天井部において同じくトンネル長手方向に延設
し、第1及び第2給気チヤンバー (3) 、 (6)
の夫々に対して空調器からの給気ダクト(7)を接続し
てある。A first outlet (1) that blows out clean air in a laminar flow almost vertically downward over the entire area of the highly clean area (A) is configured with a discharge side opening of a high-performance filter (2), and the first
An air outlet (1) and a first air supply chamber (3) for it are installed in the tunnel-shaped room above the highly clean area (A) and extend in the longitudinal direction of the tunnel, and in the low clean area (B). A second outlet that blows out clean air in a diffusive manner (
4), and a high-performance filter (5) for the second air outlet (4); an internal second air supply chamber (6) extending in the longitudinal direction of the tunnel in the ceiling of the tunnel-shaped room; Second air supply chamber (3), (6)
An air supply duct (7) from an air conditioner is connected to each of the air conditioners.
そして、高度清浄域(A)と接する両室壁(B)の下端
部に第1排気口(9)を、かつ、低度清浄域(B)に対
応位置する室内床部に格子状の第2排気口(10)を、
夫々トンネル長手方向に延設する状態に設け、第1排気
口(9)からの排気空気、及び、第2排気口(10)か
ら床部排気チャンバー(11)に回収された排気空気の
一部を二重壁構成の循環風路(12)を介して第1給気
チヤンバー(3)に循環供給するファン(13)を設け
ると共に、床部排気チャンバー(11)に回収された排
気空気の残部を空調器に運気、ないし、系外に排出する
還気・排気ダク) (14)を床部排気チャンバー(1
1)に接続してある。A first exhaust port (9) is provided at the lower end of both chamber walls (B) in contact with the highly clean area (A), and a lattice-shaped exhaust port (9) is provided on the indoor floor corresponding to the low clean area (B). 2 exhaust port (10),
Each of them is provided to extend in the longitudinal direction of the tunnel, and part of the exhaust air from the first exhaust port (9) and the exhaust air collected from the second exhaust port (10) into the floor exhaust chamber (11). A fan (13) is provided to circulate and supply air to the first air supply chamber (3) through a double-walled circulation air passage (12), and the remainder of the exhaust air collected in the floor exhaust chamber (11) is provided. The return air/exhaust duct (14) that carries the air to the air conditioner or exhausts it outside the system is connected to the floor exhaust chamber (14).
1) is connected.
つまり、高度清浄域(A)の全域にわたって第1吹出口
(1)から清浄空気を鉛直下方向き層流状に吹出し供給
することにより高度清浄域(A)の清浄度を高く維持し
、その第1吹出口(1)からの供給清浄空気の一部を第
1排気口(9)から、かつ、残部を低度清浄域(B)へ
の供給清浄空気と共に第2排気口(10)から排気する
ように構成してある。In other words, the cleanliness of the highly clean area (A) is maintained at a high level by blowing and supplying clean air in a vertically downward laminar flow from the first outlet (1) over the entire area of the highly clean area (A). Part of the clean air supplied from the first outlet (1) is exhausted from the first exhaust port (9), and the remaining part is exhausted from the second exhaust port (10) together with the clean air supplied to the low-grade clean area (B). It is configured to do so.
又、第1排気口(9)からの排気空気、及び、第2排気
口(10)からの排気空気の一部を第1吹出口(1)か
ら高度清浄域(Δ)に循環供給するようにしたことで、
空調器側における処理風量を極力軽減して設備構成のコ
ンパクト化を図りながら、高度清浄域(A)の清浄度維
持のために大風量の清浄空気を高度清浄域(A)に供給
できるように構成してある。Further, the exhaust air from the first exhaust port (9) and a part of the exhaust air from the second exhaust port (10) are circulated and supplied from the first outlet (1) to the highly clean area (Δ). By making it
While reducing the amount of air processed on the air conditioner side as much as possible to make the equipment configuration more compact, it is possible to supply a large amount of clean air to the highly clean area (A) in order to maintain the cleanliness of the highly clean area (A). It is configured.
図中(15)は、LSIや超精密機械部品の製造のため
に高度清浄域(A)に設置した作業台である。In the figure, (15) is a workbench installed in the highly clean area (A) for manufacturing LSI and ultra-precision mechanical parts.
高度清浄域(A)と低度清浄域(B)との境界域<C)
に対して清浄空気を鉛直下方向き吹出す第3吹出口(1
6)を、それに対する給気チャンバーとして前記の第2
給気チヤンバー(6)を兼用利用してトンネル長手方向
に延設すると共に、その第3吹出口(16)から鉛直下
方向きに吹出した清浄空気の境界域(C)での流速が、
高度清浄域(A)のうち境界域(C)側に位置する部分
での清浄空気流速とほぼ同等となるように、第3吹出口
(16)からの吹出し流速をダンパー(18)調整等に
より設定しておき、もって、第3吹出口(16)から下
方向きに吐出されて境界域(C)を流動する清浄空気の
隔壁作用により、作業者が位置する低度清浄域(B)か
ら高度清浄域(A)への塵埃侵入を防止するようにして
ある。Boundary area between highly clean area (A) and low clean area (B) <C)
A third outlet (1) that blows clean air vertically downward
6) as the air supply chamber for the second
The air supply chamber (6) is also used to extend in the longitudinal direction of the tunnel, and the flow velocity in the boundary area (C) of clean air blown vertically downward from the third outlet (16) is as follows:
The blowout flow rate from the third outlet (16) is adjusted by adjusting the damper (18) so that the clean air flow rate is almost equal to the clean air flow rate in the part of the highly clean area (A) located on the boundary area (C) side. With this setting, the altitude is increased from the low-level clean area (B) where the worker is located due to the partition effect of the clean air discharged downward from the third outlet (16) and flowing through the boundary area (C). It is designed to prevent dust from entering the clean area (A).
又、第3吹出口(16)からの鉛直下方向き吹出し、及
び、その吹出し流速を上述の如く設定することで、境界
域(C)での清浄空気流動状態を、高度清浄域(A)で
の清浄空気流動状態、特に、高度清浄域(A)のうち境
界域(C)側に位置する部分での清浄空気流動状態と風
向及び風速の夫々がほぼ同等な流動状態とし、それによ
って、高度清浄域(A)での清浄空気流動状態を、第3
吹出口(16)からの清浄空気吹出しによって乱すこと
無く安定的な層流状流動状態に維持して、清浄空気層流
状流動による高度清浄域(A)での域内塵埃排除機能を
高く維持すると共に、清浄空気層流状流動状態が安定し
た有効スペースを高度清浄域(A)の全域にわたって広
く確保できるようにしてある。In addition, by setting the vertically downward blow from the third air outlet (16) and the blowing flow velocity as described above, the flow state of clean air in the boundary area (C) can be changed to that in the highly clean area (A). In particular, the flow state of clean air in the area located on the boundary area (C) side of the highly clean area (A) is set to be a flow state in which the wind direction and wind speed are approximately the same. The clean air flow state in the clean area (A) is
A stable laminar flow state is maintained without disturbance by blowing clean air from the air outlet (16), and the dust removal function in the highly clean area (A) is maintained at a high level due to the laminar flow of clean air. At the same time, an effective space in which the clean air laminar flow state is stable can be widely secured throughout the highly clean area (A).
図中(17)は第3吹出口(16)に対する高性能フィ
ルターである。In the figure, (17) is a high-performance filter for the third outlet (16).
低度清浄域(B)に対する第2吹出口(4)を配設する
に、トンネル長手方向視において低度清浄域(B)に対
応位置する室内天井部のうち[ンネル巾方向における両
端部、すなわち、第3吹出口(16)に近接する位置に
第2吹出口(4)を局所配置すると共に、その配置位置
から清浄空気を低度清浄域(B)のトンネル11方向中
央部側に向けて斜め下方向きで拡散的に吹出すように第
2吹出口(4)を構成してある。When arranging the second air outlet (4) for the low-level clean area (B), it is necessary to install the second air outlet (4) for the low-level clean area (B) in the indoor ceiling part located corresponding to the low-level clean area (B) when viewed in the tunnel longitudinal direction [both ends in the tunnel width direction, That is, the second air outlet (4) is locally arranged in a position close to the third air outlet (16), and the clean air is directed from the arrangement position toward the central part of the low-level clean area (B) in the direction of the tunnel 11. The second air outlet (4) is configured to blow out diagonally downward in a diffusive manner.
つまり、第2吹出口(4)を上述の如く局所配置するこ
とにより、低度清浄域(B)に対する清浄空気供給設備
の簡略化を図ると共に作業者通路域としての低度清浄域
(B)の天井高さを高く1 へ
確保できるように、又、第2吹出口(4)からの清浄空
気吹出しを拡散的に行わせることにより、第2吹出口(
4)を局所配置しながらも低度清浄域(B)の全域に清
浄空気を均等供給できるようにしてある。In other words, by arranging the second outlet (4) locally as described above, it is possible to simplify the clean air supply equipment for the low-level clean area (B), and also to simplify the clean air supply equipment for the low-level clean area (B) as a worker passage area. In order to ensure a high ceiling height of 1, and by blowing out clean air from the second outlet (4) in a diffusive manner, the second outlet (4)
4) is arranged locally, yet clean air can be uniformly supplied throughout the low-grade clean area (B).
更に、第2吹出口(4)からの清浄空気吹出し向きを低
度清浄域(B)のトンネル中方向中央部側に向う斜め下
方向きとしたことにより、境界域(C)での清浄空気流
動状態が第2吹出口(4)からの清浄空気吹出しによっ
て乱されないようにして、境界域(C)での清浄空気流
動による前述の如き隔壁作用、並びに、高度清浄域(A
)での層流状態維持作用を良好に維持できるように、又
、低度清浄域(B)に位置する作業者が高度清浄域(A
)に近接したとしても、下方側ほど境界域(C)から離
れるような低度清浄域(B)での清浄空気流動作用によ
り、近接作業者に起因した高度清浄域(A)への塵埃侵
入を効果的に防止できるようにしてある。Furthermore, by directing the clean air from the second outlet (4) diagonally downward toward the center of the tunnel in the low-level clean area (B), the flow of clean air in the boundary area (C) is improved. The condition is not disturbed by the clean air blowing out from the second outlet (4), and the above-mentioned partition effect due to the clean air flow in the boundary area (C) and the highly clean area (A
), so that workers located in the low clean area (B) can maintain the laminar flow state well in the high clean area (A).
), dust may enter the highly clean area (A) caused by nearby workers due to the flow of clean air in the low clean area (B), which moves further away from the boundary area (C) toward the bottom. It is designed to effectively prevent
次に本発明の別実施例を説明する。 Next, another embodiment of the present invention will be described.
第1ないし第3吹出口(1)、 (4) 、 (16)
の具体的構造は種々の改良が可能であり、例えば第3図
に示すように、第2吹出口(4)と第3吹出口(16)
とを、それらの吹出面が連続し、かつ、兼用のフィルタ
ー(5)を備えた1つの吹出ユニットで構成しても良い
。1st to 3rd outlet (1), (4), (16)
The specific structure of can be improved in various ways, for example, as shown in FIG.
These may be configured as one blow-off unit whose blow-off surfaces are continuous and equipped with a filter (5) that also serves as a filter (5).
本発明は高度清浄域(A)の周部のうち二側方以上が低
度清浄域(B)と隣り合う場合にも適用でき、又、クリ
ーンルームの全体形状、並びに、クリーンルームの具体
的用途は不問である。The present invention can also be applied when two or more sides of the circumference of the highly clean area (A) are adjacent to the low clean area (B), and the overall shape of the clean room and the specific use of the clean room are No questions asked.
第1図及び第2図は本発明の実施例を示し、第1図は破
断斜視図、第2図は要部の拡大断面図である。第3図は
本発明の別実施例を示す拡大断面図である。第4図及び
第5図は夫々従来例を示す拡大断面図である。
(A)・・・・・・高度清浄域、(B)・・・・・・低
度清浄域、(C)・・・・・・境界域、(1)・・・・
・・第1吹出口、(4)・・・・・・第2吹出口、(1
6)・・・・・・第3吹出口。1 and 2 show an embodiment of the present invention, with FIG. 1 being a broken perspective view and FIG. 2 being an enlarged sectional view of the main part. FIG. 3 is an enlarged sectional view showing another embodiment of the present invention. FIGS. 4 and 5 are enlarged sectional views showing conventional examples, respectively. (A)...Highly clean area, (B)...Low clean area, (C)...Boundary area, (1)...
...First air outlet, (4)...Second air outlet, (1
6)...Third air outlet.
Claims (1)
って清浄気体をほぼ鉛直下方向きで層流状に吹出す第1
吹出口(1)、及び、前記高度清浄域(A)に隣り合う
室内低度清浄域(B)に対し清浄気体を吹出し供給する
第2吹出口(4)を設けたクリーンルームであって、前
記高度清浄域(A)と前記低度清浄域(B)との境界域
(C)に対して、その境界域(C)での気流状態を前記
高度清浄域(A)での気流状態とほぼ同速かつほぼ同流
れ方向の気流状態とするように、清浄気体を下方向きに
吹出す第3吹出口(16)を設け、前記第2吹出口(4
)を、前記第3吹出口(16)の近くで、かつ、清浄気
体吹出し流線が下方側ほど前記境界域(C)から離れる
斜め下方向きとなるように配置してあるクリーンルーム
。A first system that blows out clean gas almost vertically downward in a laminar flow over the entire highly clean area (A) in the room.
A clean room provided with an air outlet (1) and a second air outlet (4) for blowing and supplying clean gas to an indoor low level clean area (B) adjacent to the high level clean area (A), Regarding the boundary area (C) between the highly clean area (A) and the low clean area (B), the airflow condition in the boundary area (C) is approximately the same as the airflow condition in the highly clean area (A). A third outlet (16) is provided to blow out clean gas in a downward direction so as to create an airflow state at the same speed and in approximately the same flow direction.
) is arranged near the third blow-off port (16) and such that the clean gas blow-out streamline is oriented diagonally downward and farther from the boundary area (C) as it goes lower.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60123195A JPS61282742A (en) | 1985-06-06 | 1985-06-06 | Clean room |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60123195A JPS61282742A (en) | 1985-06-06 | 1985-06-06 | Clean room |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61282742A true JPS61282742A (en) | 1986-12-12 |
JPH0373786B2 JPH0373786B2 (en) | 1991-11-22 |
Family
ID=14854543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60123195A Granted JPS61282742A (en) | 1985-06-06 | 1985-06-06 | Clean room |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61282742A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5086692A (en) * | 1990-04-12 | 1992-02-11 | Welch Henry W | Air handling system and method for an operating room |
US5700190A (en) * | 1996-08-28 | 1997-12-23 | Seh America, Inc. | Flowhood work station |
EP1291586A2 (en) * | 2001-09-06 | 2003-03-12 | M+W Zander Facility Engineering GmbH | Process and device for the conditioning of exhaust air, in particular of clean rooms |
EP1323988A1 (en) * | 2001-12-27 | 2003-07-02 | Fläkt Woods AB | Ventilation system and method |
EP2589891A1 (en) * | 2010-06-30 | 2013-05-08 | Koken Ltd. | Air blowing device |
-
1985
- 1985-06-06 JP JP60123195A patent/JPS61282742A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5086692A (en) * | 1990-04-12 | 1992-02-11 | Welch Henry W | Air handling system and method for an operating room |
US5700190A (en) * | 1996-08-28 | 1997-12-23 | Seh America, Inc. | Flowhood work station |
EP1291586A2 (en) * | 2001-09-06 | 2003-03-12 | M+W Zander Facility Engineering GmbH | Process and device for the conditioning of exhaust air, in particular of clean rooms |
EP1291586A3 (en) * | 2001-09-06 | 2004-12-15 | M+W Zander Facility Engineering GmbH | Process and device for the conditioning of exhaust air, in particular of clean rooms |
EP1323988A1 (en) * | 2001-12-27 | 2003-07-02 | Fläkt Woods AB | Ventilation system and method |
EP2589891A1 (en) * | 2010-06-30 | 2013-05-08 | Koken Ltd. | Air blowing device |
EP2589891A4 (en) * | 2010-06-30 | 2014-07-09 | Koken Kk | Air blowing device |
Also Published As
Publication number | Publication date |
---|---|
JPH0373786B2 (en) | 1991-11-22 |
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