EP1291586A3 - Process and device for the conditioning of exhaust air, in particular of clean rooms - Google Patents

Process and device for the conditioning of exhaust air, in particular of clean rooms Download PDF

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Publication number
EP1291586A3
EP1291586A3 EP02019612A EP02019612A EP1291586A3 EP 1291586 A3 EP1291586 A3 EP 1291586A3 EP 02019612 A EP02019612 A EP 02019612A EP 02019612 A EP02019612 A EP 02019612A EP 1291586 A3 EP1291586 A3 EP 1291586A3
Authority
EP
European Patent Office
Prior art keywords
exhaust air
conditioning
clean room
process device
clean rooms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02019612A
Other languages
German (de)
French (fr)
Other versions
EP1291586A2 (en
Inventor
Martin Schottler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M+W Zander Facility Engineering GmbH and Co KG
M+W Zander Facility Engineering GmbH
Original Assignee
M+W Zander Facility Engineering GmbH and Co KG
M+W Zander Facility Engineering GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M+W Zander Facility Engineering GmbH and Co KG, M+W Zander Facility Engineering GmbH filed Critical M+W Zander Facility Engineering GmbH and Co KG
Publication of EP1291586A2 publication Critical patent/EP1291586A2/en
Publication of EP1291586A3 publication Critical patent/EP1291586A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/15—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/90—Cleaning of purification apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ventilation (AREA)

Abstract

In der Reinraumtechnik werden Prozeßgeräte in einem Arbeitsraum aufgestellt, aus dem eine Mindestabluftmenge abgesaugt werden muß. Viele Installationen, insbesondere im Bereich der Reinraumtechnik, werden mit zu hohen Absaugvolumina ausgestattet. Um schadstoffbelastete Abluftströme einfach und kostengünstig zu reinigen und zurückzuführen, ist in der Abluftleitung (10) des Prozeßgerätes (2) mindestens ein Filter (11) angeordnet. Die Abluftleitung (10) ist mit einer Zuluftleitung (5, 5') des Prozeßgerätes (2) und/oder des Arbeitsraumes (3) verbunden. Die Abluft wird im Filter (11) gereinigt und kann zum Prozeßgerät (2) zurückgeleitet werden. Die Anlage wird im Bereich der Reinraumtechnik eingesetzt.

Figure 00000001
In clean room technology, process devices are set up in a work area from which a minimum amount of exhaust air has to be extracted. Many installations, especially in the area of clean room technology, are equipped with suction volumes that are too high. In order to clean and recycle polluted air streams easily and inexpensively, at least one filter (11) is arranged in the exhaust air line (10) of the process device (2). The exhaust air line (10) is connected to a supply air line (5, 5 ') of the process device (2) and / or the work area (3). The exhaust air is cleaned in the filter (11) and can be returned to the process device (2). The system is used in the area of clean room technology.
Figure 00000001
EP02019612A 2001-09-06 2002-09-03 Process and device for the conditioning of exhaust air, in particular of clean rooms Withdrawn EP1291586A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10143628A DE10143628A1 (en) 2001-09-06 2001-09-06 Plant and method for treating exhaust air, especially in clean room systems
DE10143628 2001-09-06

Publications (2)

Publication Number Publication Date
EP1291586A2 EP1291586A2 (en) 2003-03-12
EP1291586A3 true EP1291586A3 (en) 2004-12-15

Family

ID=7697882

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02019612A Withdrawn EP1291586A3 (en) 2001-09-06 2002-09-03 Process and device for the conditioning of exhaust air, in particular of clean rooms

Country Status (6)

Country Link
US (1) US6808546B2 (en)
EP (1) EP1291586A3 (en)
CN (1) CN100491848C (en)
DE (1) DE10143628A1 (en)
SG (1) SG122765A1 (en)
TW (1) TW564186B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070068391A1 (en) * 2004-12-01 2007-03-29 Stanley Wiener Biological home defense system
US7833305B1 (en) * 2005-04-19 2010-11-16 Studer Ronald M Filter device
US20060240764A1 (en) * 2005-04-22 2006-10-26 Pierce Christopher J Air vent inserts
DE202005009505U1 (en) * 2005-06-10 2006-10-19 M + W Zander Facility Engineering Gmbh Schwebstofffilter, especially for use in clean rooms
CN102091497A (en) * 2011-01-13 2011-06-15 孔黄宽 Method for treating waste gas discharged from continuously running laboratory
US9631825B2 (en) 2012-12-18 2017-04-25 Nortek Air Solutions, Llc Air filter assembly
CN105561688A (en) * 2015-12-21 2016-05-11 天津孚音生物科技发展有限公司 Air purifying component for factory
WO2021013048A1 (en) * 2019-07-22 2021-01-28 世源科技工程有限公司 Energy-saving ventilation system using process exhaust air
DE102021101403A1 (en) 2021-01-22 2022-07-28 Syntegon Technology Gmbh A pharmaceutical plant and a method of operating a pharmaceutical plant
IT202100023105A1 (en) * 2021-09-07 2023-03-07 Ciana S R L AUTOMATIC ALTERNATING MAINTENANCE AIR FILTER SYSTEM AND REMOTE CONTROL

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3728866A (en) * 1971-07-08 1973-04-24 Interlab Inc Exhaustless clean room work stations
JPS61282742A (en) * 1985-06-06 1986-12-12 Taikisha Ltd Clean room
US5326316A (en) * 1991-04-17 1994-07-05 Matsushita Electric Industrial Co., Ltd. Coupling type clean space apparatus
EP0736403A2 (en) * 1995-04-06 1996-10-09 Behr GmbH & Co. Method and device for treating an airstream delivered to an interior
EP0827186A2 (en) * 1996-08-29 1998-03-04 Tokyo Electron Limited Substrate treatment system
JP2001093790A (en) * 1999-09-24 2001-04-06 Nec Corp Clean room and method of air conditioning the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625031A (en) * 1985-06-28 1987-01-12 Kajima Corp Clean room partially having different cleaning degrees
JP2736662B2 (en) * 1988-11-04 1998-04-02 東芝セラミックス株式会社 Semiconductor wafer fogging prevention device
JP2561749B2 (en) * 1990-10-11 1996-12-11 株式会社朝日工業社 Clean room air circulation method
US5350336A (en) * 1993-04-23 1994-09-27 Industrial Technology Research Institute Building and method for manufacture of integrated semiconductor circuit devices
JPH0926176A (en) * 1995-07-07 1997-01-28 Canon Inc Treating system and device-production method using the same
JPH10106908A (en) * 1996-10-01 1998-04-24 Mitsubishi Electric Corp Generating device for chemical free dry air
JP3090088B2 (en) * 1997-02-07 2000-09-18 富士電機株式会社 Clean room fan filter unit
JP3911904B2 (en) * 1999-04-21 2007-05-09 株式会社日立プラントテクノロジー Clean room structure
DE19835538A1 (en) * 1998-08-06 2000-02-10 Meissner & Wurst Clean room
DE29916321U1 (en) * 1999-09-16 1999-12-23 M + W Zander Facility Engineering GmbH + Co. KG, 70499 Stuttgart Pure air equipment for the pharmaceutical, food and biotechnical sectors

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3728866A (en) * 1971-07-08 1973-04-24 Interlab Inc Exhaustless clean room work stations
JPS61282742A (en) * 1985-06-06 1986-12-12 Taikisha Ltd Clean room
US5326316A (en) * 1991-04-17 1994-07-05 Matsushita Electric Industrial Co., Ltd. Coupling type clean space apparatus
EP0736403A2 (en) * 1995-04-06 1996-10-09 Behr GmbH & Co. Method and device for treating an airstream delivered to an interior
EP0827186A2 (en) * 1996-08-29 1998-03-04 Tokyo Electron Limited Substrate treatment system
JP2001093790A (en) * 1999-09-24 2001-04-06 Nec Corp Clean room and method of air conditioning the same
US6368208B1 (en) * 1999-09-24 2002-04-09 Nec Corporation Cleanroom and cleanroom ventilation method

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 0111, no. 49 (M - 588) 15 May 1987 (1987-05-15) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 21 3 August 2001 (2001-08-03) *

Also Published As

Publication number Publication date
DE10143628A1 (en) 2003-03-27
CN100491848C (en) 2009-05-27
US20030050004A1 (en) 2003-03-13
TW564186B (en) 2003-12-01
CN1409062A (en) 2003-04-09
US6808546B2 (en) 2004-10-26
EP1291586A2 (en) 2003-03-12
SG122765A1 (en) 2006-06-29

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