EP1291586A3 - Anlage und Verfahren zur Abluftaufbereitung, insbesondere bei Reinraumanlagen - Google Patents

Anlage und Verfahren zur Abluftaufbereitung, insbesondere bei Reinraumanlagen Download PDF

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Publication number
EP1291586A3
EP1291586A3 EP02019612A EP02019612A EP1291586A3 EP 1291586 A3 EP1291586 A3 EP 1291586A3 EP 02019612 A EP02019612 A EP 02019612A EP 02019612 A EP02019612 A EP 02019612A EP 1291586 A3 EP1291586 A3 EP 1291586A3
Authority
EP
European Patent Office
Prior art keywords
exhaust air
conditioning
clean room
process device
clean rooms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02019612A
Other languages
English (en)
French (fr)
Other versions
EP1291586A2 (de
Inventor
Martin Schottler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M+W Zander Facility Engineering GmbH and Co KG
M+W Zander Facility Engineering GmbH
Original Assignee
M+W Zander Facility Engineering GmbH and Co KG
M+W Zander Facility Engineering GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M+W Zander Facility Engineering GmbH and Co KG, M+W Zander Facility Engineering GmbH filed Critical M+W Zander Facility Engineering GmbH and Co KG
Publication of EP1291586A2 publication Critical patent/EP1291586A2/de
Publication of EP1291586A3 publication Critical patent/EP1291586A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/15—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/90—Cleaning of purification apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ventilation (AREA)

Abstract

In der Reinraumtechnik werden Prozeßgeräte in einem Arbeitsraum aufgestellt, aus dem eine Mindestabluftmenge abgesaugt werden muß. Viele Installationen, insbesondere im Bereich der Reinraumtechnik, werden mit zu hohen Absaugvolumina ausgestattet. Um schadstoffbelastete Abluftströme einfach und kostengünstig zu reinigen und zurückzuführen, ist in der Abluftleitung (10) des Prozeßgerätes (2) mindestens ein Filter (11) angeordnet. Die Abluftleitung (10) ist mit einer Zuluftleitung (5, 5') des Prozeßgerätes (2) und/oder des Arbeitsraumes (3) verbunden. Die Abluft wird im Filter (11) gereinigt und kann zum Prozeßgerät (2) zurückgeleitet werden. Die Anlage wird im Bereich der Reinraumtechnik eingesetzt.
EP02019612A 2001-09-06 2002-09-03 Anlage und Verfahren zur Abluftaufbereitung, insbesondere bei Reinraumanlagen Withdrawn EP1291586A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10143628A DE10143628A1 (de) 2001-09-06 2001-09-06 Anlage und Verfahren zur Abluftaufbereitung, insbesondere bei Reinraumanlagen
DE10143628 2001-09-06

Publications (2)

Publication Number Publication Date
EP1291586A2 EP1291586A2 (de) 2003-03-12
EP1291586A3 true EP1291586A3 (de) 2004-12-15

Family

ID=7697882

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02019612A Withdrawn EP1291586A3 (de) 2001-09-06 2002-09-03 Anlage und Verfahren zur Abluftaufbereitung, insbesondere bei Reinraumanlagen

Country Status (6)

Country Link
US (1) US6808546B2 (de)
EP (1) EP1291586A3 (de)
CN (1) CN100491848C (de)
DE (1) DE10143628A1 (de)
SG (1) SG122765A1 (de)
TW (1) TW564186B (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070068391A1 (en) * 2004-12-01 2007-03-29 Stanley Wiener Biological home defense system
US7833305B1 (en) * 2005-04-19 2010-11-16 Studer Ronald M Filter device
US20060240764A1 (en) * 2005-04-22 2006-10-26 Pierce Christopher J Air vent inserts
DE202005009505U1 (de) * 2005-06-10 2006-10-19 M + W Zander Facility Engineering Gmbh Schwebstofffilter, insbesondere für den Einsatz in Reinräumen
CN102091497A (zh) * 2011-01-13 2011-06-15 孔黄宽 一种可连续运行的实验室排放废气处理方法
US9631825B2 (en) 2012-12-18 2017-04-25 Nortek Air Solutions, Llc Air filter assembly
CN105561688A (zh) * 2015-12-21 2016-05-11 天津孚音生物科技发展有限公司 一种工厂用空气净化组件
JP7471329B2 (ja) * 2019-07-22 2024-04-19 エス．ワイ． テクノロジー， エンジニアリング アンド コンストラクション カンパニー リミテッド プロセス排気を利用する省エネ換気システム
DE102021101403A1 (de) 2021-01-22 2022-07-28 Syntegon Technology Gmbh Eine pharmazeutische Anlage und ein Verfahren zum Betreiben einer pharmazeutischen Anlage
IT202100023105A1 (it) * 2021-09-07 2023-03-07 Ciana S R L Sistema di filtraggio dell’aria a manutenzione automatica alternata e controllo remoto

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3728866A (en) * 1971-07-08 1973-04-24 Interlab Inc Exhaustless clean room work stations
JPS61282742A (ja) * 1985-06-06 1986-12-12 Taikisha Ltd クリ−ンル−ム
US5326316A (en) * 1991-04-17 1994-07-05 Matsushita Electric Industrial Co., Ltd. Coupling type clean space apparatus
EP0736403A2 (de) * 1995-04-06 1996-10-09 Behr GmbH & Co. Vorrichtung und Verfahren zur Behandlung eines einem Innenraum zugeführten Luftstromes
EP0827186A2 (de) * 1996-08-29 1998-03-04 Tokyo Electron Limited Substratbehandlungssystem
JP2001093790A (ja) * 1999-09-24 2001-04-06 Nec Corp クリーンルーム及びクリーンルームの空調方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625031A (ja) * 1985-06-28 1987-01-12 Kajima Corp 部分的に清浄度の異なるクリ−ンル−ム
JP2736662B2 (ja) * 1988-11-04 1998-04-02 東芝セラミックス株式会社 半導体ウェーハの曇防止装置
JP2561749B2 (ja) * 1990-10-11 1996-12-11 株式会社朝日工業社 クリ−ンル−ムの空気循環方法
US5350336A (en) * 1993-04-23 1994-09-27 Industrial Technology Research Institute Building and method for manufacture of integrated semiconductor circuit devices
JPH0926176A (ja) * 1995-07-07 1997-01-28 Canon Inc 処理システムとこれを用いたデバイス生産方法
JPH10106908A (ja) * 1996-10-01 1998-04-24 Mitsubishi Electric Corp ケミカルフリー乾燥空気の発生装置
JP3090088B2 (ja) * 1997-02-07 2000-09-18 富士電機株式会社 クリーンルームのファンフィルタユニット
JP3911904B2 (ja) * 1999-04-21 2007-05-09 株式会社日立プラントテクノロジー クリーンルーム構造
DE19835538A1 (de) * 1998-08-06 2000-02-10 Meissner & Wurst Reinraum
DE29916321U1 (de) * 1999-09-16 1999-12-23 M & W Zander Facility Eng Gmbh Reinstlufteinrichtung für den Pharmazie-, Lebensmittel- und biotechnischen Bereich

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3728866A (en) * 1971-07-08 1973-04-24 Interlab Inc Exhaustless clean room work stations
JPS61282742A (ja) * 1985-06-06 1986-12-12 Taikisha Ltd クリ−ンル−ム
US5326316A (en) * 1991-04-17 1994-07-05 Matsushita Electric Industrial Co., Ltd. Coupling type clean space apparatus
EP0736403A2 (de) * 1995-04-06 1996-10-09 Behr GmbH & Co. Vorrichtung und Verfahren zur Behandlung eines einem Innenraum zugeführten Luftstromes
EP0827186A2 (de) * 1996-08-29 1998-03-04 Tokyo Electron Limited Substratbehandlungssystem
JP2001093790A (ja) * 1999-09-24 2001-04-06 Nec Corp クリーンルーム及びクリーンルームの空調方法
US6368208B1 (en) * 1999-09-24 2002-04-09 Nec Corporation Cleanroom and cleanroom ventilation method

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 0111, no. 49 (M - 588) 15 May 1987 (1987-05-15) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 21 3 August 2001 (2001-08-03) *

Also Published As

Publication number Publication date
CN1409062A (zh) 2003-04-09
CN100491848C (zh) 2009-05-27
DE10143628A1 (de) 2003-03-27
SG122765A1 (en) 2006-06-29
US20030050004A1 (en) 2003-03-13
EP1291586A2 (de) 2003-03-12
US6808546B2 (en) 2004-10-26
TW564186B (en) 2003-12-01

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