EP1291586A2 - Process and device for the conditioning of exhaust air, in particular of clean rooms - Google Patents

Process and device for the conditioning of exhaust air, in particular of clean rooms Download PDF

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Publication number
EP1291586A2
EP1291586A2 EP02019612A EP02019612A EP1291586A2 EP 1291586 A2 EP1291586 A2 EP 1291586A2 EP 02019612 A EP02019612 A EP 02019612A EP 02019612 A EP02019612 A EP 02019612A EP 1291586 A2 EP1291586 A2 EP 1291586A2
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EP
European Patent Office
Prior art keywords
exhaust air
filter
process device
air
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP02019612A
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German (de)
French (fr)
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EP1291586A3 (en
Inventor
Martin Schottler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M+W Zander Facility Engineering GmbH and Co KG
M+W Zander Facility Engineering GmbH
Original Assignee
M+W Zander Facility Engineering GmbH and Co KG
M+W Zander Facility Engineering GmbH
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Publication of EP1291586A2 publication Critical patent/EP1291586A2/en
Publication of EP1291586A3 publication Critical patent/EP1291586A3/en
Withdrawn legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/15—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/90—Cleaning of purification apparatus

Definitions

  • the invention relates to a system and a method for treating exhaust air, especially in clean air systems, according to the generic term of Claims 1 and 11 respectively.
  • the invention has for its object a system and a method of the type described so that risky exhaust air flows cleaned and returned in a simple and inexpensive way can be.
  • the risky Air from the process device is cleaned and returned.
  • a large part of the exhaust air on the process device side can be reused be so that it does not have to be replaced by fresh air.
  • This allows both the amount of exhaust air and the amount of fresh air supplied can be significantly reduced, resulting in a leads to significant cost savings.
  • the system 1 according to FIG. 1 is used for the treatment of exhaust air from Process devices 2, such as devices for wet etching, for cleaning, for chemical mechanical polishing in semiconductor production as well as electroplating equipment.
  • the system 1 can only one process device 2, as shown in Fig. 1, or several process devices 2nd exhibit.
  • the process device 2 is housed in a work area 3, that of a fresh air intake device 4 via at least a supply line 5 is supplied with fresh air. Via a branch line 5 ', the process device 2 is also supplied with fresh air.
  • the Fresh air can also be supplied indirectly via the work area 3. Then the branch line 5 'is not necessary.
  • the fresh air flows through the work space 3 advantageously laminar from top to bottom.
  • the exhaust air leaving the working space 3 is at least about a line 6 is fed to a recirculation system device 7, which the exhaust air leads back into the supply air line 5 via at least one line 8.
  • a laboratory can also be found in Appendix 1 be provided.
  • the recirculated exhaust air from the work area 3 fresh air supplied from the suction device 4 is mixed to the air thus treated to the work area 3 and / or the process device 2 to be forwarded again.
  • the from the process device escaping exhaust air is risky and acidic or alkaline without relevant proportions of organic matter so that they pose health risks for people working in the work room or laboratory can.
  • Such exhaust air occurs especially when wet etching or cleaning or chemical-mechanical polishing in semiconductor production on.
  • Acid exhaust air is also generated in electroplating plants in particular.
  • risk-laden exhaust air flows can also lead to corrosion the process device or other objects in the work area and to contamination of the products to be treated, in particular Semiconductors, lead.
  • Part of the process device exhaust becomes one Exhaust air device 9 supplied and removed from the system 1.
  • the remaining part of the risk-laden exhaust air of the process device 2 is fed via a line 10 to the line 5 or 5 ', mixed there with the fresh air / supply air flowing in via the line 5 and fed again to the process device 2 via the line 5'.
  • at least one filter 11 is arranged in line 10. It is an ion exchanger that can be used, for example, to filter a flow of 5000 Nm 3 / h with 99.5% separation efficiency at a pressure loss of 100 Pa. In such process conditions, the use of activated carbon filters would not be usable because the capacity and the degree of separation of impregnated carbons are limited in technically reasonable pressure loss ranges of approx.
  • the ion exchanger filter 11 keeps the acidic, depending on the training or alkaline components of the exhaust air, which are described in the Way after filtration the same process device 2 supplied becomes. The waste air on the process device side is thus circulated.
  • the cleaning of the filter 11 can be done easily and quickly without any special Effort. Exhaust air cleaned with the filter 11 is so effectively cleaned that neither health nor corrosion or Contamination risks occur when the fresh air flow is returned to process device 2.
  • Fig. 3 shows the Case that the two filters 11, 12 are parallel to each other and alternately can be switched into a regeneration circuit.
  • the filter 11 is in the regeneration circuit 13 in which at least one storage tank 14 for the regeneration medium is located. It flows via a line 16 from the storage tank 14 to the one to be regenerated Filter 11.
  • the medium flows through the filter 11, regenerates the filter medium and is via a line 17 to the storage tank fed.
  • A ensures the circulation of the regeneration medium Pump (not shown).
  • Supply air to the process device exhaust air to filter 11 via a valve 15 locked.
  • the exhaust air flow is then through the parallel filter 12 passed, cleaned there in the manner described and the line 10 supplied, via which the cleaned exhaust air into line 5 (Fig. 1) arrives.
  • valve 15 is opened and a valve 18 closed in the feed line 19 to the filter 12.
  • valve 20 in the regeneration line 16 is closed and on Valve 21 in a regeneration line connected to the storage tank 14 22 open.
  • the exhaust air on the process device side now flows via a line 23 from the process device 2 to the regenerated filter 11, is cleaned there and reaches the line via line 10 5 (Fig. 1) back.
  • the filter 12 becomes parallel to this cleaning circuit of the exhaust air regenerated.
  • the regeneration medium is transferred from the storage tank 14 the line 22 is conveyed to the filter 12, whose medium regenerates becomes.
  • the regeneration medium then flows through a line 24 back to the storage tank 14.
  • the filters 11, 12 can alternate be regenerated so that during regeneration the operation the system 1 or the cleaning of the process air exhaust does not have to be interrupted.
  • the filters 11, 12 designed so that each filter 11, 12 are regenerated individually can while the other filter is switched into the process circuit and cleans the exhaust air on the process device side.
  • the filter 11 is regenerated.
  • the regeneration medium flows via line 16 from the storage tank 14 into this Filter, it flows through and regenerates the filter medium in it.
  • the regeneration medium flows via line 17 back to the storage tank 14. Parallel to this regeneration phase If the exhaust air on the process device side flows through filter'12, it is filtered as described and via line 10 to line 5 (Fig. 1) returned.
  • the regeneration circuit can be switched so that the regenerated filter 11 in the process circuit and the other filter 12 is switched into the regeneration circuit.
  • the switchover takes place as in the embodiment of FIG. 3 by appropriate Valves (not shown) with which the filters 11, 12 alternate be switched in the regeneration and in the process cycle can.
  • the system must therefore operate during regeneration or the cleaning of the exhaust air on the process device side is not interrupted become.
  • the cleaned exhaust air of the process device 2 can also be returned to the work room 3.
  • it is Filter 11 via a line 25 to the air recirculation device 7 leading line 6 connected.
  • a sensor 26 which may be filtered Exhaust air flow indicates existing pollutants.
  • the filtered exhaust air flow is the exhaust air flowing in line 6 of the work area 3 supplied in front of the circulating air device 7. Arrived via line 8 the circulating air flow back into lines 5 and 5 ', which the gas flow lead to the work area 3 or the process device 2.
  • Furthermore 3 is of the same design as the system according to Fig. 1.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ventilation (AREA)

Abstract

A ventilation unit, especially for clean room technology, has a fresh air inlet (5), an air outlet, a processing unit (2) with a filter (11) at its exit. The outlet (10) from the filter is connected with the fresh inlet and/or the work room (3) which can also be a machine- or store-room or laboratory. An Independent claim is also included for a ventilation process using the above unit.

Description

Die Erfindung betrifft eine Anlage und ein Verfahren zur Abluftaufbereitung, insbesondere in Reinluftanlagen, nach dem Oberbegriff des Anspruches 1 bzw. 11.The invention relates to a system and a method for treating exhaust air, especially in clean air systems, according to the generic term of Claims 1 and 11 respectively.

In der Reinraumtechnik, insbesondere bei der Halbleiterfertigung, bei der die zu bearbeitenden Halbleiterfabrikate naß geätzt, naß gereinigt und/oder chemisch und mechanisch poliert werden, sind die entsprechenden Prozeßgeräte in einem Maschinenraum oder Labor aufgestellt. Aus derartigen Räumen muß in der Regel, insbesondere bei Anwesenheit von Beschäftigten, eine Mindest-Abluftmenge abgesaugt werden, die zur Entfernung einer Wärmelast, zur Reduktion der Konzentration von Risikostoffen oder zur Erfüllung behördlicher Vorschriften dient. Risiko in diesem Zusammenhang bedeutet, die Summe aus Korrosion-, Kontamination- und Gesundheitsrisiken, wobei Korrosion sich auf Schäden an den Materialien der Installation bezieht, Kontamination auf eine Verunreinigung eines ggf. gehandhabten Produktes und Gesundheitsrisiken auf etwaige Beschäftigte. Viele Installationen, insbesondere im Bereich der Reinraumtechnik, werden jedoch mit Absaugvolumina ausgestattet, die oberhalb der zitierten Grenzen liegen. Dies ist vor allen Dingen deswegen kostspielig, weil die abgesaugte Luft durch frisch aufbereitete Außenluft ersetzt werden muß. In clean room technology, especially in semiconductor manufacturing, at who wet-etched, cleaned the semiconductor products to be processed and / or chemically and mechanically polished are the corresponding ones Process equipment set up in a machine room or laboratory. As a rule, such rooms must, in particular Presence of employees, a minimum amount of exhaust air is extracted be used to remove a heat load, to reduce the Concentration of risk substances or to comply with official regulations serves. Risk in this context means the sum from corrosion, contamination and health risks, whereby Corrosion refers to damage to the materials of the installation, Contamination due to contamination of a possibly handled Product and health risks to any employees. Lots Installations, especially in the area of clean room technology however, equipped with suction volumes above those quoted There are limits. Above all, this is expensive because the extracted air can be replaced by freshly prepared outside air got to.

Es ist bekannt, die unbelastete Raumluft in die Umluft zurückzuführen, während schadstoffbeladene oder risikobehaftete Luft aus Prozeßgeräten in die Abluft gegeben wird.It is known to return the unpolluted indoor air to the circulating air, while polluted or risky air from process equipment is placed in the exhaust air.

Es ist auch bekannt, risikofreie Luftströme wieder in die Raumluft zurückzuführen sowie in Labors die Abluft von Abzügen - typischerweise 500 Nm3/h oder weniger über Filter auf Aktivkohlebasis zu reinigen und in die Raumluft zurückzuführen.It is also known to return risk-free air flows back into the room air and to purify the exhaust air from fume cupboards in laboratories - typically 500 Nm 3 / h or less via filters based on activated carbon and to return them to the room air.

Der Erfindung liegt die Aufgabe zugrunde, eine Anlage und ein Verfahren der beschriebenen Art so auszubilden, daß risikobehaftete Abluftströme auf einfache und kostengünstige Weise gereinigt und zurückgeführt werden können.The invention has for its object a system and a method of the type described so that risky exhaust air flows cleaned and returned in a simple and inexpensive way can be.

Diese Aufgabe wird bei der Anlage und dem Verfahren der gattungsbildenden Art erfindungsgemäß mit den kennzeichnenden Merkmalen des Anspruches 1 bzw. 11 gelöst.This task is carried out in the establishment and the procedure of the generic Art according to the invention with the characteristic features of claim 1 and 11 solved.

Infolge der erfindungsgemäßen Ausbildung wird die risikobehaftete Luft des Prozeßgerätes gereinigt und zurückgeleitet. Auf diese Weise kann ein großer Teil der prozeßgeräteseitigen Abluft wiederverwendet werden, so daß dieser nicht durch Frischluft ersetzt werden muß. Dadurch können sowohl die Menge an Abluft als auch die Menge an zugeführter Frischluft erheblich reduziert werden, was zu einer erheblichen Einsparung an Kosten führt.As a result of the training according to the invention, the risky Air from the process device is cleaned and returned. In this way a large part of the exhaust air on the process device side can be reused be so that it does not have to be replaced by fresh air. This allows both the amount of exhaust air and the amount of fresh air supplied can be significantly reduced, resulting in a leads to significant cost savings.

Weitere Merkmale der Erfindung ergeben sich aus den weiteren Ansprüchen, der Beschreibung und den Zeichnungen.Further features of the invention result from the further claims, the description and the drawings.

Die Erfindung wird nachstehend anhand mehrerer in den Zeichnungen dargestellter Ausführungsbeispiele näher beschrieben. Es zeigt:

Fig. 1
eine erfindungsgemäße Anlage zur Aufbereitung von Abluft in schematischer Darstellung,
Fig. 2
eine zweite Ausführungsform einer erfindungsgemäßen Anlage in schematischer Darstellung,
Fig. 3 und 4
in schematischer Darstellung jeweils eine Vorrichtung zur Regenerierung der Filterstufe der Anlage gemäß Fig. 2.
The invention is described below with reference to several exemplary embodiments shown in the drawings. It shows:
Fig. 1
a plant according to the invention for the treatment of exhaust air in a schematic representation,
Fig. 2
a second embodiment of a system according to the invention in a schematic representation,
3 and 4
A schematic representation of a device for regeneration of the filter stage of the system according to FIG. 2.

Die Anlage 1 gemäß Fig. 1 dient zur Aufbereitung von Abluft von Prozeßgeräten 2, wie beispielsweise Geräte zum Naßätzen, zur Reinigung, zum chemisch-mechanischen Polieren bei der Halbleiterfertigung sowie Galvanisiergeräte. Die Anlage 1 kann nur ein Prozeßgerät 2, wie in Fig. 1 dargestellt, oder auch mehrere Prozeßgeräte 2 aufweisen. Das Prozeßgerät 2 ist in einem Arbeitsraum 3 untergebracht, der von einer Frischluftansaugvorrichtung 4 über wenigstens eine Zuleitung 5 mit Frischluft versorgt wird. Über eine Abzweigleitung 5' wird auch das Prozeßgerät 2 mit Frischluft versorgt. Die Frischluftversorgung kann auch indirekt über den Arbeitsraum 3 erfolgen. Dann ist die Abzweigleitung 5' nicht notwendig. Die Frischluft durchströmt den Arbeitsraum 3 vorteilhaft laminar von oben nach unten. Die den Arbeitsraum 3 verlassende Abluft wird über wenigstens eine Leitung 6 einer Umluftanlageeinrichtung 7 zugeführt, die die Abluft über wenigstens eine Leitung 8 in die Zuluftleitung 5 zurückführt. Anstelle des Arbeitsraumes 3 kann in der Anlage 1 auch ein Labor vorgesehen sein.The system 1 according to FIG. 1 is used for the treatment of exhaust air from Process devices 2, such as devices for wet etching, for cleaning, for chemical mechanical polishing in semiconductor production as well as electroplating equipment. The system 1 can only one process device 2, as shown in Fig. 1, or several process devices 2nd exhibit. The process device 2 is housed in a work area 3, that of a fresh air intake device 4 via at least a supply line 5 is supplied with fresh air. Via a branch line 5 ', the process device 2 is also supplied with fresh air. The Fresh air can also be supplied indirectly via the work area 3. Then the branch line 5 'is not necessary. The fresh air flows through the work space 3 advantageously laminar from top to bottom. The exhaust air leaving the working space 3 is at least about a line 6 is fed to a recirculation system device 7, which the exhaust air leads back into the supply air line 5 via at least one line 8. Instead of the work room 3, a laboratory can also be found in Appendix 1 be provided.

In der Leitung 5 wird die rückgeführte Abluft des Arbeitsraumes 3 mit aus der Ansaugvorrichtung 4 zugeführter Frischluft vermengt, um die so aufbereitete Luft dem Arbeitsraum 3 und/oder dem Prozeßgerät 2 erneut zuzuleiten. In the line 5, the recirculated exhaust air from the work area 3 fresh air supplied from the suction device 4 is mixed to the air thus treated to the work area 3 and / or the process device 2 to be forwarded again.

Die über die Leitung 5' getrennt zugeführte Frischluft durchströmt das Prozeßgerät 2 von oben nach unten und nimmt dabei im Einsatz des Prozeßgerätes 2 entstehende Gase mit. Die aus dem Prozeßgerät austretende Abluft ist risikobehaftet und sauer oder alkalisch ohne relevante Anteile organischer Stoffe, so daß sie zu Gesundheitsrisiken für die im Arbeitsraum bzw. Labor arbeitenden Personen führen kann. Eine solche Abluft tritt vor allem beim Naßätzen oder ―reinigen oder beim chemisch-mechanischen Polieren in der Halbleiterfertigung auf. Saure Abluft entsteht insbesondere auch in Galvanikbetrieben. Solche risikobeladenen Abluftströme können auch zu Korrosionen des Prozeßgerätes oder anderer Gegenstände im Arbeitsraum sowie zu einer Kontamination der zu behandelnden Produkte, insbesondere Halbleiterfabrikate, führen. Ein Teil der Prozeßgeräteabluft wird einer Abluftvorrichtung 9 zugeführt und aus der Anlage 1 abgeführt.The fresh air supplied separately via line 5 'flows through it Process device 2 from top to bottom and takes in the use of Process device 2 resulting gases with. The from the process device escaping exhaust air is risky and acidic or alkaline without relevant proportions of organic matter so that they pose health risks for people working in the work room or laboratory can. Such exhaust air occurs especially when wet etching or cleaning or chemical-mechanical polishing in semiconductor production on. Acid exhaust air is also generated in electroplating plants in particular. Such risk-laden exhaust air flows can also lead to corrosion the process device or other objects in the work area and to contamination of the products to be treated, in particular Semiconductors, lead. Part of the process device exhaust becomes one Exhaust air device 9 supplied and removed from the system 1.

Der restliche Teil der risikobeladenen Abluft des Prozeßgerätes 2 wird über eine Leitung 10 der Leitung 5 bzw. 5' zugeleitet, dort mit der über die Leitung 5 zuströmenden Frischluft/Zuluft vermengt und über die Leitung 5' erneut dem Prozeßgerät 2 zugeführt. Um den Säure- bzw. Basisgehalt in der Prozeßgeräteabluft zu verringern bzw. zu neutralisieren, ist in der Leitung 10 wenigstens ein Filter 11 angeordnet. Es ist ein lonenaustauscher, mit dem zum Beispiel bei 100 Pa Druckverlust ein Strom von 5000 Nm3/h mit 99,5 % Abscheidegrad filtriert werden kann. Bei solchen Prozeßbedingungen wäre der Einsatz von Aktivkohlefiltern nicht sinnvoll anwendbar, weil die Kapazität und der Abscheidegrad auch imprägnierter Kohlen in technisch sinnvollen Druckverlustbereichen von ca. 100 Pa begrenzt bzw. der typische Luftstrom von 5000 Nm3/h für die Anwendung zu hoch ist, und das Filtermedium nicht regeneriert werden kann. Darüber hinaus ist in den genannten typischen Abluftströmen auch mit einer erhöhten Luftfeuchte aufgrund der Anwendung offener wäßriger Bäder in der Prozeßmaschine zu rechnen, was die Anwendung von Kohlefiltern erschwert, die von lonenaustauscherfiltern dagegen begünstigt. Geht man beispielsweise von 20 µg/m3 HF aus, die erreicht bzw. unterschritten werden muß, damit Korrosion in den betroffenen Luftkanälen nicht auftritt und Gesundheitsschäden ausgeschlossen sind, so sind Luftströme mit Konzentrationen bis kleiner gleich 4 mg/m3 HF dieser Art von Recycling zugänglich. Im genannten Luftstrom von 5000 m3/h werden dann 20 g/h abgesaugt, und die Filterstandzeit dieses typischen lonentauscherfilters mit 10 kg Filtermasse ist dann 12 Stunden. Bei ununterbrochenem Betrieb (24 h) ist beispielsweise zweimal täglich eine Regeneration vorzusehen, die vorzugsweise ohne Ausbau realisiert werden muß. Ist die Belastung der Filter niedriger, kann ggf. auf eine Regeneration mit Ausbau des Filters übergegangen werden. Das verbrauchte Filtermedium kann, wie noch anhand der Fig. 3 und 4 beschrieben wird, regeneriert werden. Es kann eine interne Regeneration vorgesehen sein, bei der das Filtermedium nicht ausgebaut werden muß. Es ist aber auch eine externe Regeneration möglich, bei der das Filtermedium aus dem Filter 11 ausgebaut wird. Dies kann durch Parallel- (Fig. 3) oder Hintereinanderschaltung (Fig. 4) des Filters 11 mit wenigstens einem weiteren Filter 12 erreicht werden, ohne daß eine Unterbrechung des Betriebs erforderlich ist.The remaining part of the risk-laden exhaust air of the process device 2 is fed via a line 10 to the line 5 or 5 ', mixed there with the fresh air / supply air flowing in via the line 5 and fed again to the process device 2 via the line 5'. In order to reduce or neutralize the acid or base content in the process device exhaust air, at least one filter 11 is arranged in line 10. It is an ion exchanger that can be used, for example, to filter a flow of 5000 Nm 3 / h with 99.5% separation efficiency at a pressure loss of 100 Pa. In such process conditions, the use of activated carbon filters would not be usable because the capacity and the degree of separation of impregnated carbons are limited in technically reasonable pressure loss ranges of approx. 100 Pa or the typical air flow of 5000 Nm 3 / h is too high for the application, and the filter medium cannot be regenerated. In addition, in the typical exhaust air streams mentioned, an increased air humidity due to the use of open aqueous baths in the process machine is to be expected, which complicates the use of carbon filters, which, on the other hand, favors ion exchange filters. Assuming, for example, 20 µg / m 3 HF, which must be reached or undercut so that corrosion does not occur in the air ducts concerned and health damage is excluded, air flows with concentrations of less than or equal to 4 mg / m 3 HF are of this type Recyclable. 20 g / h are then suctioned off in the air flow of 5000 m 3 / h mentioned, and the filter service life of this typical ion exchanger filter with 10 kg filter mass is then 12 hours. In the case of uninterrupted operation (24 hours), regeneration must be provided twice a day, for example, which must preferably be carried out without removal. If the load on the filter is lower, a regeneration with removal of the filter can be started if necessary. The used filter medium can be regenerated, as will be described with reference to FIGS. 3 and 4. An internal regeneration can be provided in which the filter medium does not have to be removed. However, external regeneration is also possible, in which the filter medium is removed from the filter 11. This can be achieved by connecting the filter 11 in parallel (FIG. 3) or in series (FIG. 4) with at least one further filter 12 without the need to interrupt the operation.

Der lonenaustauscherfilter 11 hält je nach Ausbildung die sauren oder alkalischen Bestandteile der Abluft zurück, die in der beschriebenen Weise nach der Filtrierung demselben Prozeßgerät 2 zugeführt wird. Die prozeßgeräteseitige Abluft wird somit im Kreislauf geführt.The ion exchanger filter 11 keeps the acidic, depending on the training or alkaline components of the exhaust air, which are described in the Way after filtration the same process device 2 supplied becomes. The waste air on the process device side is thus circulated.

Die Reinigung des Filters 11 kann einfach und schnell ohne besonderen Aufwand durchgeführt werden. Mit dem Filter 11 gereinigte Abluft ist so wirksam gereinigt, daß weder Gesundheits- noch Korrosionsoder Kontaminationsrisiken auftreten, wenn sie dem Frischluftstrom zum Prozeßgerät 2 zurückgeführt wird. The cleaning of the filter 11 can be done easily and quickly without any special Effort. Exhaust air cleaned with the filter 11 is so effectively cleaned that neither health nor corrosion or Contamination risks occur when the fresh air flow is returned to process device 2.

Zur Regeneration des Filtermediums kommt beispielsweise Natronlauge, Salzsäure oder Schwefelsäure in Betracht. Fig. 3 zeigt den Fall, daß die beiden Filter 11, 12 parallel zueinander liegen und abwechselnd in einen Regenerationskreislauf geschaltet werden können. Das Filter 11 liegt im Regenerationskreislauf 13, in dem sich mindestens ein Vorratstank 14 für das Regenerationsmedium befindet. Es strömt über eine Leitung 16 vom Vorratstank 14 zum zu regenerierenden Filter 11. Das Medium durchströmt das Filter 11, regeneriert das Filtermedium und wird über eine Leitung 17 dem Vorratstank zugeführt. Für den Umlauf des Regenerationsmediums sorgt eine (nicht dargestellte) Pumpe. Während der Regenerationsphase ist die Zuluft der prozeßgeräteseitigen Abluft zum Filter 11 über ein Ventil 15 gesperrt. Der Abluftstrom wird dann durch das parallele Filter 12 geleitet, dort in der beschriebenen Weise gereinigt und der Leitung 10 zugeführt, über die die gereinigte Abluft in die Leitung 5 (Fig. 1) gelangt.For example, sodium hydroxide is used to regenerate the filter medium, Hydrochloric acid or sulfuric acid. Fig. 3 shows the Case that the two filters 11, 12 are parallel to each other and alternately can be switched into a regeneration circuit. The filter 11 is in the regeneration circuit 13 in which at least one storage tank 14 for the regeneration medium is located. It flows via a line 16 from the storage tank 14 to the one to be regenerated Filter 11. The medium flows through the filter 11, regenerates the filter medium and is via a line 17 to the storage tank fed. A ensures the circulation of the regeneration medium Pump (not shown). During the regeneration phase Supply air to the process device exhaust air to filter 11 via a valve 15 locked. The exhaust air flow is then through the parallel filter 12 passed, cleaned there in the manner described and the line 10 supplied, via which the cleaned exhaust air into line 5 (Fig. 1) arrives.

Ist das Filter 11 regeneriert, wird das Ventil 15 geöffnet und ein Ventil 18 in der Zuleitung 19 zum Filter 12 geschlossen. Außerdem wird ein Ventil 20 in der Regenerationsleitung 16 geschlossen und ein Ventil 21 in einer an den Vorratstank 14 angeschlossenen Regenerationsleitung 22 geöffnet. Die prozeßgeräteseitige Abluft strömt nunmehr über eine Leitung 23 vom Prozeßgerät 2 zum regenerierten Filter 11, wird dort gereinigt und gelangt über die Leitung 10 zur Leitung 5 (Fig. 1) zurück.If the filter 11 is regenerated, the valve 15 is opened and a valve 18 closed in the feed line 19 to the filter 12. Besides, will a valve 20 in the regeneration line 16 is closed and on Valve 21 in a regeneration line connected to the storage tank 14 22 open. The exhaust air on the process device side now flows via a line 23 from the process device 2 to the regenerated filter 11, is cleaned there and reaches the line via line 10 5 (Fig. 1) back.

Parallel zu diesem Reinigungskreislauf der Abluft wird das Filter 12 regeneriert. Das Regenerationsmedium wird vom Vorratstank 14 über die Leitung 22 zum Filter 12 gefördert, dessen Medium regeneriert wird. Anschließend strömt das Regenerationsmedium über eine Leitung 24 zurück zum Vorratstank 14. The filter 12 becomes parallel to this cleaning circuit of the exhaust air regenerated. The regeneration medium is transferred from the storage tank 14 the line 22 is conveyed to the filter 12, whose medium regenerates becomes. The regeneration medium then flows through a line 24 back to the storage tank 14.

Auf die beschriebene Weise können die Filter 11, 12 abwechselnd regeneriert werden, so daß während der Regeneration der Betrieb der Anlage 1 bzw. die Reinigung der prozeßgeräteseitigen Abluft nicht unterbrochen werden muß.In the manner described, the filters 11, 12 can alternate be regenerated so that during regeneration the operation the system 1 or the cleaning of the process air exhaust does not have to be interrupted.

Bei der Hintereinanderschaltung gemäß Fig. 4 sind die Filter 11, 12 so ausgebildet, daß jedes Filter 11, 12 einzeln regeneriert werden kann, während das jeweils andere Filter in den Prozeßkreislauf geschaltet ist und die prozeßgeräteseitige Abluft reinigt. Im dargestellten Ausführungsbeispiel wird das Filter 11 regeneriert. Das Regenerationsmedium strömt über die Leitung 16 vom Vorratstank 14 in dieses Filter, durchströmt es und regeneriert das in ihm befindliche Filtermedium. Das Regenerationsmedium strömt über die Leitung 17 zurück zum Vorratstank 14. Parallel zu dieser Regenerationsphase strömt die prozeßgerätseitige Abluft durch das Filter'12, wird dort in der beschriebenen Weise gefiltert und über die Leitung 10 zur Leitung 5 (Fig. 1) zurückgeführt.4 are the filters 11, 12 designed so that each filter 11, 12 are regenerated individually can while the other filter is switched into the process circuit and cleans the exhaust air on the process device side. In the illustrated In the exemplary embodiment, the filter 11 is regenerated. The regeneration medium flows via line 16 from the storage tank 14 into this Filter, it flows through and regenerates the filter medium in it. The regeneration medium flows via line 17 back to the storage tank 14. Parallel to this regeneration phase If the exhaust air on the process device side flows through filter'12, it is filtered as described and via line 10 to line 5 (Fig. 1) returned.

Der Regenerationskreislauf kann umgeschaltet werden, so daß das regenerierte Filter 11 in den Prozeßkreislauf und das andere Filter 12 in den Regenerationskreislauf geschaltet wird. Die Umschaltung erfolgt wie bei der Ausführungsform nach Fig. 3 durch entsprechende (nicht dargestellte) Ventile, mit denen die Filter 11, 12 abwechselnd in den Regenerations- und in den Prozeßkreislauf geschaltet werden können. Während der Regenerierung muß somit der Betrieb der Anlage bzw. die Reinigung der prozeßgeräteseitigen Abluft nicht unterbrochen werden.The regeneration circuit can be switched so that the regenerated filter 11 in the process circuit and the other filter 12 is switched into the regeneration circuit. The switchover takes place as in the embodiment of FIG. 3 by appropriate Valves (not shown) with which the filters 11, 12 alternate be switched in the regeneration and in the process cycle can. The system must therefore operate during regeneration or the cleaning of the exhaust air on the process device side is not interrupted become.

Wie Fig. 2 zeigt, kann die gereinigte Abluft des Prozeßgerätes 2 auch in den Arbeitsraum 3 zurückgeführt werden. In diesem Fall ist das Filter 11 über eine Leitung 25 an die zur Umluftanlageeinrichtung 7 führende Leitung 6 angeschlossen. In Strömungsrichtung hinter dem Filter 11 sitzt in der Leitung 25 ein Sensor 26, der eventuell im filtrierten Abluftstrom vorhandene Schadstoffe anzeigt. Der filtrierte Abluftstrom wird der in der Leitung 6 strömenden Abluft des Arbeitsraumes 3 vor der Umluftvorrichtung 7 zugeführt. Über die Leitung 8 gelangt der Umluftstrom wieder in die Leitungen 5 und 5', welche den Gasstrom dem Arbeitsraum 3 bzw. dem Prozeßgerät 2 zuführen. Im übrigen ist die Anlage gemäß Fig. 3 gleich ausgebildet wie die Anlage nach Fig. 1.As shown in FIG. 2, the cleaned exhaust air of the process device 2 can also be returned to the work room 3. In this case it is Filter 11 via a line 25 to the air recirculation device 7 leading line 6 connected. In the direction of flow behind the Filter 11 sits in line 25, a sensor 26, which may be filtered Exhaust air flow indicates existing pollutants. The filtered exhaust air flow is the exhaust air flowing in line 6 of the work area 3 supplied in front of the circulating air device 7. Arrived via line 8 the circulating air flow back into lines 5 and 5 ', which the gas flow lead to the work area 3 or the process device 2. Furthermore 3 is of the same design as the system according to Fig. 1.

Mit den beschriebenen Anlagen kann auf einfache, kostengünstige Weise eine erhebliche Reduktion der Gesamtabluft erreicht werden. Dadurch ist auch die über die Frischluftzuführvorrichtung 4 zuzuführende Zuluftmenge wesentlich geringer, wodurch wiederum Kosten eingespart werden können.With the systems described can be simple, inexpensive A significant reduction in the total exhaust air can be achieved. This also means that the fresh air supply device 4 is to be supplied Supply air volume significantly lower, which in turn leads to costs can be saved.

Claims (14)

Anlage zur Abluftaufbereitung, insbesondere für die Reinraumtechnik, mit mindestens einer Frischluftzuführung und mindestens einer Ablufteinrichtung, die mit einem Arbeitsraum, insbesondere einem Maschinen-, Lager- oder Laborraum, verbunden sind, in dem mindestens ein Prozeßgerät angeordnet ist, an das wenigstens eine Zuführleitung und wenigstens eine Abluftleitung angeschlossen sind,
dadurch gekennzeichnet, daß in der Abluftleitung (10) des Prozeßgerätes (2) mindestens ein Filter (11, 12) angeordnet ist, und daß die Abluftleitung (10) mit der Zuluftleitung (5, 5') des Prozeßgerätes (2) und/oder des Arbeitsraumes (3) verbunden ist.Plant for exhaust air treatment, in particular for clean room technology, with at least one fresh air supply and at least one exhaust air device, which are connected to a work space, in particular a machine, storage or laboratory room, in which at least one process device is arranged, to which at least one supply line and at least one exhaust air duct is connected,
characterized in that at least one filter (11, 12) is arranged in the exhaust air line (10) of the process device (2), and in that the exhaust air line (10) with the supply air line (5, 5 ') of the process device (2) and / or the work area (3) is connected. Anlage nach Anspruch 1,
dadurch gekennzeichnet, daß die Abluftleitung (10) des Prozeßgerätes (2) in eine Abluftleitung (6) des Arbeitsraumes (3) mündet.System according to claim 1,
characterized in that the exhaust air line (10) of the process device (2) opens into an exhaust air line (6) of the work space (3). Anlage nach Anspruch 1 oder 2,
dadurch gekennzeichnet, daß der, vorteilhaft regenerierbare Filter (11, 12) ein lonenaustauscher ist.System according to claim 1 or 2,
characterized in that the advantageously regenerable filter (11, 12) is an ion exchanger. Anlage nach einem der Ansprüche 1 bis 3,
dadurch gekennzeichnet, daß der Arbeitsraum (3) ein Lagerraum ist, und daß die erfaßte Abluft Behälteratemluft oder Lekkageluft aus einem Chemiebehälter ist.System according to one of claims 1 to 3,
characterized in that the working space (3) is a storage space and that the exhaust air detected is container breathing air or leak air from a chemical container. Anlage nach einem der Ansprüche 1 bis 4,
dadurch gekennzeichnet, daß in der Abluftleitung (10) des Prozeßgerätes (2) wenigstens ein Sensor (26) zur Risikodetektion angeordnet ist, der vorteilhaft in Strömungsrichtung der in der Abluftleitung (10) strömenden Abluft des Prozeßgerätes (2) hinter dem Filter (11) angeordnet ist.System according to one of claims 1 to 4,
characterized in that in the exhaust air line (10) of the process device (2) at least one sensor (26) for risk detection is arranged, which advantageously in the flow direction of the exhaust air flowing in the exhaust air line (10) of the process device (2) behind the filter (11) is arranged. Anlage nach einem der Ansprüche 1 bis 5,
dadurch gekennzeichnet, daß dem Filter (11) mindestens ein zweites Filter (12) zugeordnet ist, das parallel und/oder in Reihe zum ersten Filter (11) liegt.System according to one of claims 1 to 5,
characterized in that the filter (11) is assigned at least one second filter (12) which is parallel and / or in series with the first filter (11). Anlage nach einem der Ansprüche 1 bis 6,
dadurch gekennzeichnet, daß das Filter (11, 12) in einen Regenerationskreislauf schaltbar ist, in dem vorteilhaft wenigstens ein Vorratstank (14) für Regenerationsmedium liegt.System according to one of claims 1 to 6,
characterized in that the filter (11, 12) can be switched into a regeneration circuit in which there is advantageously at least one storage tank (14) for regeneration medium. Anlage nach Anspruch 6 oder 7
dadurch gekennzeichnet, daß die parallel liegenden Filter (11, 12) abwechselnd in den Regenerationskreislauf schaltbar sind.System according to claim 6 or 7
characterized in that the filters (11, 12) lying in parallel can be switched alternately into the regeneration circuit. Anlage nach einem der Ansprüche 6 bis 8,
dadurch gekennzeichnet, daß das zweite Filter (12) gleich ausgebildet ist wie das erste Filter (11).System according to one of claims 6 to 8,
characterized in that the second filter (12) is of the same design as the first filter (11). Anlage nach einem der Ansprüche 3 bis 9,
dadurch gekennzeichnet, daß das Regenerationsmedium Säure, wie Salzsäure, Schwefelsäure, oder Lauge, wie Natronlauge, ist. System according to one of claims 3 to 9,
characterized in that the regeneration medium is acid, such as hydrochloric acid, sulfuric acid, or alkali, such as sodium hydroxide solution. Verfahren zur Abluftaufbereitung in einer Anlage gemäß den Ansprüchen 1 bis 10, bei dem Zuluft einem Arbeitsraum und/oder mindestens einem Prozeßgerät zugeführt wird, und bei dem aus dem Prozeßgerät ein schadstoffbeladener Abluftstrom austritt, der dem Zuluftstrom zugeführt wird,
dadurch gekennzeichnet, daß der prozeßseitige Abluftstrom vor dem Zurückführen in den Zuluftstrom von risikoreichen Schadstoffen gereinigt wird.Process for exhaust air treatment in a system according to claims 1 to 10, in which supply air is supplied to a work space and / or at least one process device, and in which a pollutant-laden exhaust air flow emerges from the process device and is supplied to the supply air flow,
characterized in that the process-side exhaust air stream is cleaned of high-risk pollutants before being returned to the supply air stream. Verfahren nach Anspruch 11,
dadurch gekennzeichnet, daß während der Reinigung der prozeßgeräteseitigen Abluft eine Regenerierung des Filtermediums vorgenommen wird.A method according to claim 11,
characterized in that a regeneration of the filter medium is carried out during the cleaning of the exhaust air on the process device side. Verfahren nach Anspruch 12,
dadurch gekennzeichnet, daß während der Regeneration des Filters (11) die Abluft des Prozeßgerätes (2) durch wenigstens ein zweites Filter (12) geleitet wird.Method according to claim 12,
characterized in that during the regeneration of the filter (11) the exhaust air of the process device (2) is passed through at least one second filter (12). Verfahren nach Anspruch 12,
dadurch gekennzeichnet, daß ein Filter (11, 12) regeneriert wird, während ein anderer Filter zur Reinigung der prozeßgeräteseitigen Abluft herangezogen wird.Method according to claim 12,
characterized in that one filter (11, 12) is regenerated, while another filter is used for cleaning the exhaust air on the process device side.
EP02019612A 2001-09-06 2002-09-03 Process and device for the conditioning of exhaust air, in particular of clean rooms Withdrawn EP1291586A3 (en)

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DE10143628A DE10143628A1 (en) 2001-09-06 2001-09-06 Plant and method for treating exhaust air, especially in clean room systems
DE10143628 2001-09-06

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US6808546B2 (en) 2004-10-26
TW564186B (en) 2003-12-01
EP1291586A3 (en) 2004-12-15
DE10143628A1 (en) 2003-03-27
US20030050004A1 (en) 2003-03-13
SG122765A1 (en) 2006-06-29
CN100491848C (en) 2009-05-27

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