EP1291586A2 - Méthode et dispositif de conditionnement de l'air d'évacuation, en particulier dans les salles blanches - Google Patents

Méthode et dispositif de conditionnement de l'air d'évacuation, en particulier dans les salles blanches Download PDF

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Publication number
EP1291586A2
EP1291586A2 EP02019612A EP02019612A EP1291586A2 EP 1291586 A2 EP1291586 A2 EP 1291586A2 EP 02019612 A EP02019612 A EP 02019612A EP 02019612 A EP02019612 A EP 02019612A EP 1291586 A2 EP1291586 A2 EP 1291586A2
Authority
EP
European Patent Office
Prior art keywords
exhaust air
filter
process device
air
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02019612A
Other languages
German (de)
English (en)
Other versions
EP1291586A3 (fr
Inventor
Martin Schottler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M+W Zander Facility Engineering GmbH and Co KG
M+W Zander Facility Engineering GmbH
Original Assignee
M+W Zander Facility Engineering GmbH and Co KG
M+W Zander Facility Engineering GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M+W Zander Facility Engineering GmbH and Co KG, M+W Zander Facility Engineering GmbH filed Critical M+W Zander Facility Engineering GmbH and Co KG
Publication of EP1291586A2 publication Critical patent/EP1291586A2/fr
Publication of EP1291586A3 publication Critical patent/EP1291586A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/15—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/90—Cleaning of purification apparatus

Definitions

  • the invention relates to a system and a method for treating exhaust air, especially in clean air systems, according to the generic term of Claims 1 and 11 respectively.
  • the invention has for its object a system and a method of the type described so that risky exhaust air flows cleaned and returned in a simple and inexpensive way can be.
  • the risky Air from the process device is cleaned and returned.
  • a large part of the exhaust air on the process device side can be reused be so that it does not have to be replaced by fresh air.
  • This allows both the amount of exhaust air and the amount of fresh air supplied can be significantly reduced, resulting in a leads to significant cost savings.
  • the system 1 according to FIG. 1 is used for the treatment of exhaust air from Process devices 2, such as devices for wet etching, for cleaning, for chemical mechanical polishing in semiconductor production as well as electroplating equipment.
  • the system 1 can only one process device 2, as shown in Fig. 1, or several process devices 2nd exhibit.
  • the process device 2 is housed in a work area 3, that of a fresh air intake device 4 via at least a supply line 5 is supplied with fresh air. Via a branch line 5 ', the process device 2 is also supplied with fresh air.
  • the Fresh air can also be supplied indirectly via the work area 3. Then the branch line 5 'is not necessary.
  • the fresh air flows through the work space 3 advantageously laminar from top to bottom.
  • the exhaust air leaving the working space 3 is at least about a line 6 is fed to a recirculation system device 7, which the exhaust air leads back into the supply air line 5 via at least one line 8.
  • a laboratory can also be found in Appendix 1 be provided.
  • the recirculated exhaust air from the work area 3 fresh air supplied from the suction device 4 is mixed to the air thus treated to the work area 3 and / or the process device 2 to be forwarded again.
  • the from the process device escaping exhaust air is risky and acidic or alkaline without relevant proportions of organic matter so that they pose health risks for people working in the work room or laboratory can.
  • Such exhaust air occurs especially when wet etching or cleaning or chemical-mechanical polishing in semiconductor production on.
  • Acid exhaust air is also generated in electroplating plants in particular.
  • risk-laden exhaust air flows can also lead to corrosion the process device or other objects in the work area and to contamination of the products to be treated, in particular Semiconductors, lead.
  • Part of the process device exhaust becomes one Exhaust air device 9 supplied and removed from the system 1.
  • the remaining part of the risk-laden exhaust air of the process device 2 is fed via a line 10 to the line 5 or 5 ', mixed there with the fresh air / supply air flowing in via the line 5 and fed again to the process device 2 via the line 5'.
  • at least one filter 11 is arranged in line 10. It is an ion exchanger that can be used, for example, to filter a flow of 5000 Nm 3 / h with 99.5% separation efficiency at a pressure loss of 100 Pa. In such process conditions, the use of activated carbon filters would not be usable because the capacity and the degree of separation of impregnated carbons are limited in technically reasonable pressure loss ranges of approx.
  • the ion exchanger filter 11 keeps the acidic, depending on the training or alkaline components of the exhaust air, which are described in the Way after filtration the same process device 2 supplied becomes. The waste air on the process device side is thus circulated.
  • the cleaning of the filter 11 can be done easily and quickly without any special Effort. Exhaust air cleaned with the filter 11 is so effectively cleaned that neither health nor corrosion or Contamination risks occur when the fresh air flow is returned to process device 2.
  • Fig. 3 shows the Case that the two filters 11, 12 are parallel to each other and alternately can be switched into a regeneration circuit.
  • the filter 11 is in the regeneration circuit 13 in which at least one storage tank 14 for the regeneration medium is located. It flows via a line 16 from the storage tank 14 to the one to be regenerated Filter 11.
  • the medium flows through the filter 11, regenerates the filter medium and is via a line 17 to the storage tank fed.
  • A ensures the circulation of the regeneration medium Pump (not shown).
  • Supply air to the process device exhaust air to filter 11 via a valve 15 locked.
  • the exhaust air flow is then through the parallel filter 12 passed, cleaned there in the manner described and the line 10 supplied, via which the cleaned exhaust air into line 5 (Fig. 1) arrives.
  • valve 15 is opened and a valve 18 closed in the feed line 19 to the filter 12.
  • valve 20 in the regeneration line 16 is closed and on Valve 21 in a regeneration line connected to the storage tank 14 22 open.
  • the exhaust air on the process device side now flows via a line 23 from the process device 2 to the regenerated filter 11, is cleaned there and reaches the line via line 10 5 (Fig. 1) back.
  • the filter 12 becomes parallel to this cleaning circuit of the exhaust air regenerated.
  • the regeneration medium is transferred from the storage tank 14 the line 22 is conveyed to the filter 12, whose medium regenerates becomes.
  • the regeneration medium then flows through a line 24 back to the storage tank 14.
  • the filters 11, 12 can alternate be regenerated so that during regeneration the operation the system 1 or the cleaning of the process air exhaust does not have to be interrupted.
  • the filters 11, 12 designed so that each filter 11, 12 are regenerated individually can while the other filter is switched into the process circuit and cleans the exhaust air on the process device side.
  • the filter 11 is regenerated.
  • the regeneration medium flows via line 16 from the storage tank 14 into this Filter, it flows through and regenerates the filter medium in it.
  • the regeneration medium flows via line 17 back to the storage tank 14. Parallel to this regeneration phase If the exhaust air on the process device side flows through filter'12, it is filtered as described and via line 10 to line 5 (Fig. 1) returned.
  • the regeneration circuit can be switched so that the regenerated filter 11 in the process circuit and the other filter 12 is switched into the regeneration circuit.
  • the switchover takes place as in the embodiment of FIG. 3 by appropriate Valves (not shown) with which the filters 11, 12 alternate be switched in the regeneration and in the process cycle can.
  • the system must therefore operate during regeneration or the cleaning of the exhaust air on the process device side is not interrupted become.
  • the cleaned exhaust air of the process device 2 can also be returned to the work room 3.
  • it is Filter 11 via a line 25 to the air recirculation device 7 leading line 6 connected.
  • a sensor 26 which may be filtered Exhaust air flow indicates existing pollutants.
  • the filtered exhaust air flow is the exhaust air flowing in line 6 of the work area 3 supplied in front of the circulating air device 7. Arrived via line 8 the circulating air flow back into lines 5 and 5 ', which the gas flow lead to the work area 3 or the process device 2.
  • Furthermore 3 is of the same design as the system according to Fig. 1.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ventilation (AREA)
EP02019612A 2001-09-06 2002-09-03 Méthode et dispositif de conditionnement de l'air d'évacuation, en particulier dans les salles blanches Withdrawn EP1291586A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10143628A DE10143628A1 (de) 2001-09-06 2001-09-06 Anlage und Verfahren zur Abluftaufbereitung, insbesondere bei Reinraumanlagen
DE10143628 2001-09-06

Publications (2)

Publication Number Publication Date
EP1291586A2 true EP1291586A2 (fr) 2003-03-12
EP1291586A3 EP1291586A3 (fr) 2004-12-15

Family

ID=7697882

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02019612A Withdrawn EP1291586A3 (fr) 2001-09-06 2002-09-03 Méthode et dispositif de conditionnement de l'air d'évacuation, en particulier dans les salles blanches

Country Status (6)

Country Link
US (1) US6808546B2 (fr)
EP (1) EP1291586A3 (fr)
CN (1) CN100491848C (fr)
DE (1) DE10143628A1 (fr)
SG (1) SG122765A1 (fr)
TW (1) TW564186B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT202100023105A1 (it) * 2021-09-07 2023-03-07 Ciana S R L Sistema di filtraggio dell’aria a manutenzione automatica alternata e controllo remoto

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070068391A1 (en) * 2004-12-01 2007-03-29 Stanley Wiener Biological home defense system
US7833305B1 (en) * 2005-04-19 2010-11-16 Studer Ronald M Filter device
US20060240764A1 (en) * 2005-04-22 2006-10-26 Pierce Christopher J Air vent inserts
DE202005009505U1 (de) * 2005-06-10 2006-10-19 M + W Zander Facility Engineering Gmbh Schwebstofffilter, insbesondere für den Einsatz in Reinräumen
CN102091497A (zh) * 2011-01-13 2011-06-15 孔黄宽 一种可连续运行的实验室排放废气处理方法
US9631825B2 (en) 2012-12-18 2017-04-25 Nortek Air Solutions, Llc Air filter assembly
CN105561688A (zh) * 2015-12-21 2016-05-11 天津孚音生物科技发展有限公司 一种工厂用空气净化组件
WO2021013048A1 (fr) * 2019-07-22 2021-01-28 世源科技工程有限公司 Système de ventilation à économie d'énergie utilisant de l'air d'échappement de processus
DE102021101403A1 (de) 2021-01-22 2022-07-28 Syntegon Technology Gmbh Eine pharmazeutische Anlage und ein Verfahren zum Betreiben einer pharmazeutischen Anlage

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3728866A (en) * 1971-07-08 1973-04-24 Interlab Inc Exhaustless clean room work stations
JPS61282742A (ja) * 1985-06-06 1986-12-12 Taikisha Ltd クリ−ンル−ム
US5326316A (en) * 1991-04-17 1994-07-05 Matsushita Electric Industrial Co., Ltd. Coupling type clean space apparatus
EP0736403A2 (fr) * 1995-04-06 1996-10-09 Behr GmbH & Co. Dispositif et procédé de traitement d'air délivré dans un intérieur
EP0827186A2 (fr) * 1996-08-29 1998-03-04 Tokyo Electron Limited Système de traitement de substrat
JP2001093790A (ja) * 1999-09-24 2001-04-06 Nec Corp クリーンルーム及びクリーンルームの空調方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625031A (ja) * 1985-06-28 1987-01-12 Kajima Corp 部分的に清浄度の異なるクリ−ンル−ム
JP2736662B2 (ja) * 1988-11-04 1998-04-02 東芝セラミックス株式会社 半導体ウェーハの曇防止装置
JP2561749B2 (ja) * 1990-10-11 1996-12-11 株式会社朝日工業社 クリ−ンル−ムの空気循環方法
US5350336A (en) * 1993-04-23 1994-09-27 Industrial Technology Research Institute Building and method for manufacture of integrated semiconductor circuit devices
JPH0926176A (ja) * 1995-07-07 1997-01-28 Canon Inc 処理システムとこれを用いたデバイス生産方法
JPH10106908A (ja) * 1996-10-01 1998-04-24 Mitsubishi Electric Corp ケミカルフリー乾燥空気の発生装置
JP3090088B2 (ja) * 1997-02-07 2000-09-18 富士電機株式会社 クリーンルームのファンフィルタユニット
JP3911904B2 (ja) * 1999-04-21 2007-05-09 株式会社日立プラントテクノロジー クリーンルーム構造
DE19835538A1 (de) * 1998-08-06 2000-02-10 Meissner & Wurst Reinraum
DE29916321U1 (de) * 1999-09-16 1999-12-23 M & W Zander Facility Eng Gmbh Reinstlufteinrichtung für den Pharmazie-, Lebensmittel- und biotechnischen Bereich

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3728866A (en) * 1971-07-08 1973-04-24 Interlab Inc Exhaustless clean room work stations
JPS61282742A (ja) * 1985-06-06 1986-12-12 Taikisha Ltd クリ−ンル−ム
US5326316A (en) * 1991-04-17 1994-07-05 Matsushita Electric Industrial Co., Ltd. Coupling type clean space apparatus
EP0736403A2 (fr) * 1995-04-06 1996-10-09 Behr GmbH & Co. Dispositif et procédé de traitement d'air délivré dans un intérieur
EP0827186A2 (fr) * 1996-08-29 1998-03-04 Tokyo Electron Limited Système de traitement de substrat
JP2001093790A (ja) * 1999-09-24 2001-04-06 Nec Corp クリーンルーム及びクリーンルームの空調方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN Bd. 0111, Nr. 49 (M-588), 15. Mai 1987 (1987-05-15) -& JP 61 282742 A (TAIKISHA LTD), 12. Dezember 1986 (1986-12-12) *
PATENT ABSTRACTS OF JAPAN Bd. 2000, Nr. 21, 3. August 2001 (2001-08-03) -& JP 2001 093790 A (NEC CORP), 6. April 2001 (2001-04-06) & US 6 368 208 B1 (MINOSHIMA MASAHIKO) 9. April 2002 (2002-04-09) *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT202100023105A1 (it) * 2021-09-07 2023-03-07 Ciana S R L Sistema di filtraggio dell’aria a manutenzione automatica alternata e controllo remoto

Also Published As

Publication number Publication date
SG122765A1 (en) 2006-06-29
TW564186B (en) 2003-12-01
US20030050004A1 (en) 2003-03-13
EP1291586A3 (fr) 2004-12-15
CN100491848C (zh) 2009-05-27
DE10143628A1 (de) 2003-03-27
CN1409062A (zh) 2003-04-09
US6808546B2 (en) 2004-10-26

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