JP2000346416A - Circulating clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To properly set a clean pace having high cleanliness and to facilitate building. SOLUTION: An upper plenum chamber 2 wherein air passing through a chemical filter 9 is fed in a clean space 1 after the passage of it through a ULPA filter 6, a lower plenum chamber 3 to suck clean air in the clean space 1, and a return haft 4 to intercouple the upper and lower plenum chambers 2 and 3 comprises respective assemblies each comprising a plurality of units. Simultaneously, a circulation passage for a clean air to the clean space 1 is composed of the upper plenum chamber 2, the lower plenum chamber 3, and the return shaft 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a circulating clean room, and more particularly to a circulating clean room in which a clean air passage can be easily constructed.

[0002]

2. Description of the Related Art In the manufacture of semiconductors and the like, a highly clean region having a higher degree of cleanliness may be formed in a clean room. Examples of the highly-clean area include a space called a mini-environment, which is a space for installing a semiconductor product manufacturing apparatus and a space for transporting semiconductor products. In the space represented by the mini environment, it is known that not only fine particles in the air (hereinafter referred to as “dust”) but also gaseous substances can be pollutants. A method of blowing air (clean air) from which the contaminants are removed to a target area by forming an evacuation air path by attaching an air purifying means such as a chemical filter to a fan filter unit or the like directly above the air filter unit. Commonly used. However, in this case, the concentration of the contaminants in the target area is not so low because the removal of the contaminants is transient.

In order to make the concentration of pollutants in the space lower than that of the above-mentioned one-time air purification method, it is necessary to arrange a chemical filter or the like in the air circulation system and perform the pollutant removal process many times. is there. As such a circulating clean room, for example, a circulating clean room disclosed in JP-A-8-89747 is known. However, in this case, since the clean air in the entire clean room is processed, the amount of air that needs to be processed increases, so that a large amount of air purifying means such as a chemical filter is required, and initial costs and running costs are incurred. There is.

In order to solve the above-mentioned drawbacks, an existing clean room is air-tightly separated from other areas, such as the ceiling and under the floor, by panels and the like, and an air circulation path is formed by using the separated ceiling and under floor. A method of using a circulating clean room structure in which clean air circulates in a separated clean room has been used.

[0005] As another method, a part of a clean space (so-called clean room) in a clean room is airtightly closed by a chamber (housing), and a circulating clean room structure is constructed in the chamber (Japanese Patent Laid-Open No. Hei 10 (1998)). JP-A-340874) is known.

[0006] In these methods, a space limited by dividing a part of a clean room into a circulating clean room structure is hermetically sealed by reducing the number of the air purifying means and the amount of the air purifying treatment by the air purifying means. It is intended to construct a circulating clean room structure with lower initial cost and running cost and higher cleanliness.

[0007]

However, in a method in which an existing clean room is air-tightly separated from other areas, such as the ceiling and under the floor, by a panel or the like, the existing clean room is shaped according to the shape of the beams behind the ceiling and the pipes installed under the floor. In some cases, the panels have to be cut off, and a hermetic seal must be provided in accordance with the shape of the panels, which makes the construction complicated.

Further, in the circulation type clean room structure disclosed in Japanese Patent Application Laid-Open No. 10-340874, the circulation type clean room structure is formed in a space hermetically closed by the chamber. However, the size of the installed chamber cannot be adapted to the expansion, contraction, and movement of the highly clean area due to a change in the production line, and there is room for improvement in flexibility. In addition, the standards for the production equipment housed therein are not uniform, and the structure of the joint with the chamber is complicated, and there is room for improvement in versatility.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a circulating clean room which can easily set a clean space having high cleanliness and can be easily constructed.

[0010]

The present invention is a circulation type clean room, and has the following structure as means for achieving the above object. That is, the circulation-type clean room of the present invention includes an air purification unit that removes contaminants in return air from the clean space, and a supply plenum chamber that supplies the air to the clean space. In a circulating clean room in which the air purification means and the supply plenum chamber constitute a circulation path of the air, the supply plenum chamber blows the air into the clean space with a supply connection duct forming the air passage. And an aggregate of a plurality of supply chamber box units having a clean air blowing port.

[0011] According to the above configuration, the assembly of the plurality of supply chamber box units makes it possible to form the air passage to the clean space compactly and easily. And, it is possible to flexibly follow the switching of the production line and the like.

[0012] The circulation type clean room of the present invention comprises:
The air is supplied to a supply connection duct of at least one of the plurality of supply chamber box units, and a supply connection duct of another supply chamber box unit connects the supply chamber box units. And

According to the above configuration, the air is supplied from at least one of the supply connection ducts to each of the plurality of supply plenum chambers. Further, it is preferable that the supply plenum chamber be located above the clean space in order to set an airflow shape in the clean space.

[0014] The cleanliness in the clean space is also affected by the air flow system formed in the clean space. The airflow method includes a conventional turbulent flow method, a horizontal laminar flow method, a vertical laminar flow method, and the like. The circulation type clean room of the present invention is provided with a clean air suction port so as to return clean air in the clean space to the air purification means, and depending on its position, any of the air flow methods can be adopted. The clean air suction port may be provided on a side of the clean space.

However, in the air flow method, laminar flow is more preferable than turbulent flow in providing a clean space having higher cleanliness. Therefore, it is preferable that the clean air suction port is provided at a position facing the clean air blow port.

Therefore, the circulation-type clean room of the present invention has a return plenum chamber for returning clean air in the clean space to the air purification means, and the return plenum chamber cleans clean air in the clean space. An assembly of a plurality of return chamber box units having a clean air suction port for suctioning and a return connection duct forming a passage for the sucked clean air, wherein at least one of the plurality of return chamber box units is provided. The return connection duct of the return chamber box unit is connected to the air purification means, and the return connection ducts of the other return chamber box units connect the return chamber box units.

According to the above configuration, the assembly of the plurality of return chamber box units makes it possible to compactly and easily form a passage for clean air from the clean space. The clean air in the clean space is sucked into each return chamber box unit, and is returned to the air purifying means through at least one of the return connection ducts.

Further, the connection of the supply chamber box unit or the connection of the return chamber box unit in the circulation type clean room of the present invention is performed by a clip that integrally clamps ends of connection ducts of adjacent chamber box units. It is characterized by being connected.

According to the above configuration, the connection of the chamber box unit can be performed in a narrow place where a tool cannot be used, and the connection of the supply or return chamber box unit is easier.

Further, the circulation type clean room of the present invention comprises:
It is preferable that the supply chamber box unit be provided with a blower because it is possible to individually control the supply of clean air according to the use and conditions of the clean space.

Further, the circulating clean room of the present invention comprises:
At least one of the supply chamber box units includes a fan filter unit including the air purification unit and the blower, and the outside air is introduced into the clean space by introducing outside air into a supply chamber box unit including the fan filter unit. It is possible to do. Further, the outside air introduction means described above may be an introduction of outside air into the return plenum chamber.

Further, the circulation type clean room according to the present invention is provided with an exhaust means for exhausting clean air from the return plenum chamber. When the contaminants are generated in the clean space, the contaminants in the clean space are removed. It is suitable for lowering the concentration. The exhaust means may be a forced exhaust means provided with a blower or the like, or may be a natural exhaust means utilizing a pressure difference between the clean space and the outside or a blowing direction of the clean space.

The air purifying means in the circulating clean room of the present invention is a means for removing contaminants from the air supplied into the clean space to make clean air, and the arrangement position thereof is upstream of the clean space. Any position may be used, for example, it is disposed at the outside air inlet, the return air passage from the clean space, or the clean air blowing port. Further, as the air purifying means, one having a purifying ability and purifying characteristics capable of achieving a cleanness required for a clean space is used.

As the air purifying means, a plurality of types of air purifying means having different purifying characteristics may be used. In this case, the plurality of types of air purifying means having different purifying characteristics may be provided on the upstream side of the clean space. It may be arranged at the same position,
They may be arranged at different positions. As air purification means,
An air purifying means for removing dust-type pollutants, an air purifying means for removing gaseous pollutants, and an air purifying means for removing both of them can be exemplified.

Air purification means for removing dust-type contaminants include HEPA (High Efficiency Particulate Ai).
r) Filters and ULPA (Ultra Low Penetration Air)
Use a filter. Further, as the air purifying means for removing gaseous pollutants, it is preferable to use a chemical filter which collects or decomposes gaseous pollutants by a chemical reaction on the collecting surface. Since a chemical filter is used properly depending on the target gaseous pollutant, it is preferable to select or use an appropriate chemical filter.

An air washer device that removes contaminants in the air by spraying water on the air may be used as the air purifying means having both the removal of dust and the inorganic gaseous contaminants. The air washer device may be used not only as the above-mentioned air purifying means but also as a humidifying means for adjusting the humidity in the clean space.

Further, the circulation type clean room of the present invention comprises:
Control means for controlling the condition of the clean space may be provided. Examples of the control means include a temperature control means such as a cooling coil and a heating coil for controlling the temperature of the clean space, a humidity control means for suppressing an increase in moisture by the air washer device, and the like.

In order to minimize the influence of gaseous contaminants slightly generated from the surface to be treated, it is preferable that the circulation type clean room of the present invention does not use painted members or plastics. Examples thereof include aluminum, iron, and stainless steel.

[0029]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a circulation type clean room according to the present invention. First, a first embodiment of the present invention will be described with reference to FIGS.

<First Embodiment> FIG. 1 shows a vertical section of a circulation type clean room according to the present embodiment. The circulating clean room according to the present embodiment is provided in a part of an existing clean room 20 having an air passage in the space above the ceiling and below the floor.

In the existing clean room 20, the air above the ceiling is supplied to the room by a fan filter unit 22 having a blower that takes in air behind the ceiling and blows air into the room and a HEPA filter 21 that is a dust purifying air purifying means. Clean room. The floor surface of the existing clean room 20 is partially blank panel 23.
, The other being formed by a grating floor, such that the airflow in the chamber is not a downward unidirectional flow. In the existing clean room 20, an aluminum frame is provided on the ceiling and floor so as to extend vertically and horizontally, and the fan filter unit 22 is mounted on one section of the ceiling frame to fit in one section of the floor frame. A grating floor (an air-permeable floor plate having a plurality of holes) or the blank panel 23 is laid on such an area to form a room.

The circulating clean room according to the present embodiment includes a clean space 1 formed by airtightly partitioning a part of an existing clean room 20 by a panel, and a clean space 1 disposed behind a ceiling of the clean space 1. An upper plenum chamber (supply plenum chamber) 2 for supplying air, a lower plenum chamber (return plenum chamber) 3 disposed below the floor of the clean space 1 and sucking clean air in the clean space 1, an upper plenum chamber 2, and a lower plenum chamber. 3 is mainly constituted by a return shaft 4 connecting the first and second shafts 3. Production equipment (not shown) for semiconductor production is installed in the clean space 1.

The upper plenum chamber 2 is formed by an aggregate of a plurality of supply chamber box units 5. The supply chamber box unit 5 includes a housing 5a having a clean air blowing port 5c opening toward the clean space 1 and having a supply connection duct 5b forming an air passage. Then, as shown in FIG. 2, the supply chamber box unit 5 is configured such that one of the supply connection ducts 5b is connected to the return shaft 4 and the other supply connection duct 5b connects the housings 5a to each other to form the upper plenum chamber. 2 are formed. A clean air blowing port 5c is provided with a ULP which is a dust purifying air purifying means suitable for the section of the ceiling frame.
The A filters 6 are respectively attached, and form the ceiling surface of the clean space 1. The supply chamber box unit 5 is also sized to be divided by the section of the ceiling frame.

To connect the supply chamber box units 5, as shown in FIG. 4, a clip 13 having a U-shaped cross section for integrally holding the ends of the supply connection ducts 5b of the adjacent supply chamber box units 5 is provided. used. The clip 13 is urged in the closing direction and provided so as to reduce air leakage from the supply connection duct 5b. The distance between the clips 13 is, for example, less than 500 mm, and a connection duct is provided in each box in consideration of workability, and an operator's hand enters between the boxes.

The lower plenum chamber 3 is formed by an aggregate of a plurality of return chamber box units 7 and a return chamber box unit 17 capable of introducing air below the existing clean room 20 floor. The return chamber box unit 7 includes a housing 7a having a clean air suction port 7c opening toward the clean space 1 and having a return connection duct 7b forming a clean air passage. The return chamber box unit 17 removes, in addition to the housing 7a, the return connection duct 7b, and the clean air inlet 7c, an outside air inlet 14b into which air under the floor (outside air) is introduced, and gaseous pollutants in the outside air. It is composed of a chemical filter 19b which is an air purifying means. As shown in FIG. 3, the return chamber box units 7 and 17 are configured such that one of the return connection ducts 7b is connected to the return shaft 4 and the other return connection duct 7b is
The lower plenum chamber 3 is formed by connecting a with each other. Grating floors 8 corresponding to the sections of the floor frame are respectively attached to the clean air inlets 7c, and form the floor surface of the clean space 1. The return chamber box units 7 and 17 are also sized to be separated by the floor frame sections.

The return chamber box units 7 and 17 are also connected by the clip 13 similarly to the connection of the supply chamber box unit 5.

The return shaft 4 is also composed of an aggregate of a plurality of units. The return shaft 4 includes an air purifying unit 4 a having a chemical filter 9, a fan unit 4 b having a fan 11 for blowing outside air introduced from a return chamber box unit 17 to the air purifying unit 4 a, and a return space from the clean space 1. A temperature control unit 4c having a cooling coil 12 for controlling the temperature of the clean air, an upper connection unit 4d for connecting the upper plenum chamber 2 and the air purification unit 4a, and a lower plenum chamber 3 and a temperature control unit 4c. And a lower connection unit 4e for connection. Reference numeral 10 denotes an inverter, which is provided for the purpose of controlling the amount of circulating air in the clean space 1. Inverter 10
Is a measure against an increase in pressure loss when, for example, a production device larger than expected is accommodated in the entire clean space 1.

The air purifying unit 4a may be provided with an air washer device for removing dust and gaseous pollutants in the air by spraying water, instead of the chemical filter 9. However, in this case, since the air washer device is not only an air purifying device but also a clean air humidifying device, a humidity control device is separately provided, or the temperature control unit 4c and the air washer device are controlled in conjunction with each other. Instrumentation equipment must be provided.

Next, an operation state of the circulation type clean room in the present embodiment will be described. First, outside air is introduced into the fan unit 4b from the outside air inlet 14b through the lower plenum chamber 3. As described above, this outside air is air under the existing clean room 20 floor,
This is air in which contaminants have been removed to a certain standard in advance by the external conditioner and the temperature and humidity have been adjusted.

The air introduced into the fan unit 4b (mixed air of the outside air from the outside air inlet 14b and the clean air returning from the clean space 1) is sent by the fan 11 to the air purification unit 4a, where the air is purified. Filter 9
Pass through. At this time, if gaseous contaminants (organic substances, acids, alkalis) generated in the clean space 1 are present in the air, they are removed by the chemical filter 9.

The air that has passed through the chemical filter 9 passes through the upper connection unit 4d, and passes through the supply connection duct 5b connected to the upper connection unit 4d. And
The supply chamber box units 5 are supplied to the respective supply chamber box units 5 through supply connection ducts 5b connecting the supply chamber box units 5 to each other.

The air supplied to each supply chamber box unit 5 is blown as clean air into the clean space 1 through the ULPA filter 6 from the clean air blowing port 5c provided in the housing 5a. At this time, if dust is present in the air, ULPA
The dust in the air is removed by the filter 6.

The clean air supplied from above (the ceiling) of the clean space 1 traverses the clean space 1 in the vertical direction, and the clean air suction provided in the return chamber box units 7 and 17 constituting the lower plenum chamber 3. Mouth 7
c is sucked into the return chamber box units 7 and 17.

Return chamber box units 7, 1
The clean air sucked into 7 is supplied to the lower connection unit 4e through the return connection duct 7b, and further supplied to the temperature control unit 4c.

In the temperature control unit 4c, the clean air (return air) is supplied to the cooling coil 12 so that the temperature of the clean space 1 is compensated for by the heat generated by the production equipment installed in the clean space 1 to be within an appropriate range. Cooled by. The return air whose temperature is controlled by the temperature control unit 4c is returned to the fan unit 4c.
b, and circulates repeatedly in the above-described circulation path.

In the circulating clean room according to the present embodiment, the circulation path through which the air circulates is constituted by an aggregate of a plurality of units. Since a circulation route can be formed, construction is easy and construction can be performed in a short period of time. Further, the supply chamber box unit 5 and the return chamber box units 7 and 17 may be arranged according to the area and shape of the clean space 1, and the clean space 1 is freely set according to the arrangement shape or the number of the chamber box units. This makes it possible to flexibly respond to the use and conditions of the clean space 1.

Further, since the circulation duct of the present embodiment is connected to the connection duct of the chamber box unit by the clip 13 having a U-shaped cross section, it is connected even in a narrow place where a tool such as a screwdriver cannot be used. Is possible.

Further, the circulation type clean room in the present embodiment is provided with the chemical filter 9 and the ULPA filter 6 in the air circulation path, so that the number of installed chemical filters 9 and the ULPA filter 6 is smaller than that of the one-time system. Can be reduced, and the initial cost of the air purification means can be reduced.

Then, the chemical filter 9 and the ULPA
Since the filter 6 repeatedly purifies the circulating air, it can supply clean air having a high degree of cleanliness to the clean space 1. Therefore, the chemical filter 9 and the ULP
Since the load of the A filter 6 at the time of air purification is gradually reduced and the frequency of replacing the chemical filter 9 and the ULPA filter 6 can be reduced, the running cost of the air purification means can be reduced.

Further, in the circulating clean room according to the present embodiment, since the ceiling of the existing clean room 20 is formed with the fan filter unit 22 placed thereon, the air behind the ceiling is removed by the fan filter unit 2.
Since the air flows into the air intake port of No. 2, the atmosphere behind the ceiling becomes negative pressure. Therefore, since the air behind the ceiling does not flow into the clean space 1, the ULPA filter 6 need only be mounted on the frame, and no airtightness measures such as a silicon seal are required.

Further, in the circulation type clean room according to the present embodiment, the air under the floor of the existing clean room 20 can be introduced from the return chamber box unit 17, so that it is difficult to install a dedicated external air conditioner in the clean space 1. Even if it is difficult to introduce air (outside air) from the outside air conditioner, it can be easily constructed.

<Second Embodiment> A circulating clean room according to a second embodiment of the present invention will be described with reference to FIGS. In addition, about the structure similar to 1st Embodiment mentioned above, the same code | symbol is used and description is abbreviate | omitted.

The circulating clean room according to the present embodiment is different from the first embodiment in that the outside air can be introduced from above the ceiling and the clean air in the clean space 1 can be exhausted below the floor. Is different.

More specifically, as shown in FIGS. 5 and 6, one of the plurality of supply chamber box units 5 constituting the upper plenum chamber 2 is capable of taking in the air above the ceiling.
It is 5. As shown in FIG. 7, the lower plenum chamber 3 has a configuration in which one return chamber box unit 7 is missing (hatched portion surrounded by a broken line in FIG. 7). Utilizing the fact that the clean space 1 has a slightly pressurized atmosphere with respect to the peripheral portion (behind the ceiling and under the floor), the clean air in the clean space 1 is exhausted under the floor. The missing part is
It corresponds to the exhaust means in the present invention.

Supply chamber box unit 15
Is provided with an outside air inlet 14a on the top surface of the housing 5a, and the outside air inlet 14a is provided with a chemical filter 19a. Further, the supply chamber box unit 15 is provided with a blower (not shown), and is configured to be able to introduce air (outside air) behind the ceiling.

With the above-described configuration, outside air from which gaseous pollutants have been removed is introduced into the circulation type clean room in the present embodiment from above and below the ceiling. That is,
The outside air is introduced into the air circulation system after the temperature and humidity are adjusted by an external air conditioner provided for the air circulation system of the existing clean room 20. The mixed air of the outside air and the return air in the existing clean room 20 is supplied under the ceiling and under the floor of the clean room 20, and is sucked from the outside air inlets 14a and 14b by the suction force of the blower and the fan 11. Then, with the circulation of the air, the clean air in the clean space 1 is exhausted from the missing portion of the return chamber box unit by utilizing the pressure difference between the inside and the outside of the clean space 1. Other configurations and operation states are the same as those in the first embodiment, and thus description thereof is omitted.

The circulating clean room according to the present embodiment has a structure in which one of the return chamber box units 7 is omitted in addition to the effects of the first embodiment described above. Air can be exhausted from the missing portion. Therefore, even if a large amount of contaminants are generated in the clean space 1, all of them are removed by the chemical filter 9 or the ULPA filter 6.
In this case, the running cost of the chemical filter 9 and the ULPA filter 6 can be reduced. In this case, it is preferable to extend the outside air duct to the vicinity of the outside air inlet 14b, or to connect the two, or to extend the exhaust duct to the missing portion.

<Third Embodiment> A circulation type clean room according to a third embodiment of the present invention will be described with reference to FIG. In addition, about the structure similar to the above-mentioned 1st Embodiment and 2nd Embodiment, the same code | symbol is used and description is abbreviate | omitted.

The circulating clean room according to the present embodiment is different from the second embodiment in that all supply chamber box units constituting the upper plenum chamber 2 are of a fan filter unit type having a blower, and an outside air inlet is provided. Is provided in the fan filter unit as needed, and is different in that the return shaft 4 does not include a blower.

More specifically, the supply chamber unit 25 in the present embodiment has a configuration in which the blower F and the ULPA filter 6 are provided in the direction in which the clean air blowing port 5c in the housing 5a is blown. The housing 5a is provided with an outside air inlet as needed. In addition, the second
Similarly to the embodiment, a chemical filter may be arranged at the outside air inlet. Note that T is a terminal block such as an inverter for controlling the operation of the blower F.

With the configuration described above, the circulation type clean room in the present embodiment can introduce outside air from above the ceiling and individually controls the supply of clean air to the clean space 1. Other configurations and operation states are the same as those of the above-described second embodiment, and thus description thereof is omitted.

The circulating clean room according to the present embodiment is different from the first embodiment and the second embodiment in the amount of supply of clean air from the upper plenum chamber 2 to the clean space 1 in addition to the effects of the first and second embodiments.・ The wind speed can be controlled. That is, by providing an inverter in each of the blowers F, the supply of clean air is made uniform irrespective of the clogged state of the ULPA filter 6, and the turbulence of the air flow in the clean space 1 is made less likely to occur. Therefore, a decrease in cleanliness of the clean space 1 due to the above can be suppressed. In addition, for example, the air flow velocity in the clean space 1 is controlled by an inverter that controls the production equipment and its surroundings at a high speed, and a part away from the production equipment at a low speed. Can be individually controlled to save energy.

<Fourth Embodiment> FIGS. 9 and 10 show a circulation type clean room according to a fourth embodiment of the present invention.
It will be described based on. In addition, about the structure similar to 1st-3rd Embodiment mentioned above, the same code | symbol is used and description is abbreviate | omitted.

The circulating clean room according to the present embodiment is different from the first embodiment in that the air purifying unit 4a is provided with the ULPA filter 16 in addition to the chemical filter 9 and the supply chamber box unit is connected to the upper connecting unit. 4d in that they are directly connected to 4d.

More specifically, as shown in FIGS. 9 and 10, the supply chamber box 35 according to the present embodiment is provided with a punching plate 18 at a clean air blowing port 5c of a housing 5a, and is connected to the housing 5a by an upper portion. Unit 4
and d are individually connected by a supply connection duct 35b. The supply connection duct 35b is formed of a flexible pipe.

With the configuration described above, in the circulating clean room according to the present embodiment, clean air that has passed through the air purification unit 4a is supplied to the clean space 1 as it is through the upper connection unit 4d and the supply connection duct 35b. Other configurations and operation states are the same as those of the above-described first embodiment, and a description thereof will be omitted.

The circulating clean room according to the present embodiment is different from the first embodiment in that
Since the ULPA filter is not provided in c, the supply chamber box unit 35 that supplies clean air to the clean space 1 can be installed even when the ULPA filter cannot be installed in the air outlet because the height above the ceiling is not sufficient. is there.

Since the ULPA filter is not provided in the clean air blow port 5c, the number of ULPA filters to be used can be reduced as compared with the first embodiment. Therefore, it is possible to reduce the generation of chemical pollutants (gaseous pollutants) caused by the ULPA filters 6 installed by the number of the supply chamber box units, and to provide the air purification means such as the ULPA filters in one place. Because it is concentrated, maintenance is easy.

As can be seen from the above description of the first to fourth embodiments of the present invention as a clean room apparatus for locally cleaning, these embodiments are not intended for the purification and circulation of harmful air. -Applicable when efficiently processing air with properties different from air in other areas in the clean room, such as reuse. Further, as the supply chamber box unit in each of the above-described embodiments, a modified version of an existing fan filter unit in which a connection duct is attached to a casing portion can be used. In addition,
The circulation type clean room in the above-described embodiment is
The present invention can be applied not only to the remodeling of an existing clean room but also to a new clean room requiring high cleanliness.

[0070]

According to the circulation type clean room of the present invention, when supplying clean air purified by the air purifying means to the clean space, a supply connection duct forming an air passage, and blowing the air into the clean space. A supply plenum chamber for supplying clean air to the clean space by the air purification means by an aggregate of a plurality of supply chamber box units having And can easily follow a change in the production line of the semiconductor product in the clean space.

Similarly, the circulation-type clean room of the present invention comprises a plurality of return chamber boxes having a clean air suction port for sucking clean air in a clean space, and a return connection duct forming a passage for the sucked clean air. Since the return plenum chamber for returning the clean air to the air purifying means is configured by the assembly of the units, the return plenum chamber can be easily constructed, and the clean space is an airflow system with a higher degree of cleanliness. It is suitable for a vertical laminar flow system.

The circulating clean room of the present invention comprises:
By using a clip that integrally clamps the ends of the connection duct at the connection portion of the supply connection duct or the return connection duct, it is possible to more easily construct, and it is difficult to use a tool or the like, or to use a tool. Construction is possible even in narrow places where the use of is impossible.

Further, the circulation type clean room of the present invention comprises:
The clean space can be appropriately set depending on the number and arrangement of the supply chamber box units.

Further, the circulation type clean room of the present invention comprises:
By equipping the supply chamber box unit or the return chamber box unit with the air purifying means and the blower, it is possible to take in air outside the system, and furthermore, the amount of clean air blown into the clean space.
Easy to control wind speed individually. Further, if the outside air can be introduced from the chamber box unit, it is possible to share and take in the outside air outside the system without requiring a dedicated outside conditioner.

Further, the circulation type clean room of the present invention
When the clean air can be exhausted from the return plenum chamber, when a contaminant is generated in the clean space, the concentration of the contaminant in the clean space can be promptly reduced.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a first embodiment of a circulation type clean room of the present invention.

FIG. 2 is a top view of the upper plenum chamber 2 of the first embodiment in the circulation type clean room of the present invention.

FIG. 3 is a bottom view of the lower plenum chamber 3 of the first embodiment in the circulation type clean room of the present invention.

FIG. 4 is an enlarged view of a main part showing a connection portion of a supply connection duct 5b according to the first embodiment in the circulation type clean room of the present invention.

FIG. 5 is a longitudinal sectional view showing a second embodiment of the circulation type clean room of the present invention.

FIG. 6 is a top view of the upper plenum chamber 2 of the second embodiment in the circulation type clean room of the present invention.

FIG. 7 is a bottom view of the lower plenum chamber 3 of the second embodiment in the circulation type clean room of the present invention.

FIG. 8 is a vertical sectional view of a main part of a circulation type clean room according to a third embodiment of the present invention.

FIG. 9 is a vertical sectional view of a main part of a circulation type clean room according to a fourth embodiment of the present invention.

FIG. 10 is a fourth view of the circulation type clean room of the present invention.
FIG. 4 is a top view of the upper plenum chamber 2 of the embodiment.

[Explanation of symbols]

Reference Signs List 1 clean space 2 upper plenum chamber (supply plenum chamber) 3 lower plenum chamber (return plenum chamber) 4 return shaft 4a air purification unit 4b fan unit 4c temperature control unit 4d upper connection unit 4e lower connection unit 5, 15, 25, 35 Supply chamber box unit 5a, 7a Housing 5b, 35b Supply connection duct 5c Clean air vent 6, 16 ULPA filter 7, 17 Return chamber box unit 7b Return connection duct 7c Clean air suction port 8 Grating floor 9, 19a, 19b Chemical Filter 10 Inverter 11 Fan 12 Cooling coil 13 Clip 14a, 14b Outside air inlet 18 Punching plate 20 Existing clean room 21 HEPA Filter 22 fan filter unit 23 blank panel F blower T terminal block

Claims (11)

[Claims] 1. An air purifying means for removing contaminants in return air from a clean space, and a supply plenum chamber for supplying the air to the clean space, wherein the clean space, the air purifying means, In the circulating clean room in which the supply plenum chamber forms the circulation path of the air, the supply plenum chamber includes a supply connection duct forming the passage of the air, and a clean air blowing port that blows the air into the clean space. And a plurality of supply chamber box units having the following. 2. The air is supplied to a supply connection duct of at least one supply chamber box unit among the plurality of supply chamber box units, and a supply connection duct of another supply chamber box unit connects the supply chamber box units to each other. The circulation-type clean room according to claim 1, wherein the circulation-type clean room is connected. 3. The circulation type clean room according to claim 1, wherein the supply plenum chamber is located above the cleaning space. 4. A return plenum chamber for returning clean air in the clean space to the air purification means, wherein the return plenum chamber sucks clean air in the clean space, and a suction port. A return connection duct that forms a passage for the clean air, wherein the return connection duct of at least one return chamber box unit among the plurality of return chamber box units is 2. The circulation type clean room according to claim 1, wherein the return connection duct of the other return chamber box unit is connected to the air purification means and connects the return chamber box units to each other. 5. The circulation type according to claim 2, wherein the supply chamber box units are connected by clips that integrally hold ends of the supply connection ducts of adjacent supply chamber box units. Clean room. 6. The circulation type according to claim 4, wherein the return chamber box units are connected by clips that integrally hold ends of the return connection ducts of adjacent return chamber box units. Clean room. 7. The circulation type clean room according to claim 1, wherein a blower is provided in the supply chamber box unit. 8. The supply chamber box unit, wherein at least one of the supply chamber box units includes a fan filter unit including the air purification unit and a blower, and outside air can be introduced into the supply chamber box unit including the fan filter unit. Circulating clean room as described. 9. The circulation type clean room according to claim 4, wherein outside air can be introduced into said return plenum chamber. 10. The circulation type clean room according to claim 4, further comprising exhaust means for exhausting clean air from said return plenum chamber. 11. The circulation type clean room according to claim 1, wherein said air purifying means includes a chemical filter for removing gaseous pollutants.