JPH09206527A - Fan filter unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fan filter unit by which energy is saved due to a decrease in the transporting power of an air conditioner. SOLUTION: Plural fan filter units 2 are set on a ceiling frame 1, each fan filter unit 2 consists of two filter units 4 and one fan unit 5. The two filter units 4 are set side by side in the deiling part, and the one fan unit 5 is placed on the two filter units 4. The casing of the fan unit 5 has a size enough to cover the upper part of the two filter units 4. A presser member 8 is horizontally laid between the centers of the lower ends of the inner faces of a couple of the opposed side plates among the side plates of the casing. A packing is fixed to the lower face of the presser member 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air conditioning system for a clean room or the like provided in a semiconductor factory or the like, in which a plurality of fan filter units each including a fan unit and a filter unit are installed on a ceiling to control the air conditioning in the room. The present invention relates to an air conditioning system to be performed, and is particularly characterized by the structure of a fan filter unit.

[0002]

2. Description of the Related Art A fan filter unit (FF) is used in the air conditioning of a clean room provided in a semiconductor factory or the like.
The U) method is often adopted. Among the fan filter unit methods, in the case of a method in which a fan filter unit is installed on the ceiling to perform air conditioning, when a high cleanliness air conditioning is required for an indoor space such as a clean room, as shown in FIG. , A large number of fan filter units 5 with respect to the system ceiling frame 50 that constitutes the ceiling part
1 are arranged side by side.

In the conventional structure of the fan filter unit 51, one filter unit 52 is provided in each opening 50a for installing equipment in the system ceiling frame 50, and one filter unit 52 is provided on each filter unit 52. Each fan unit 53 is installed and configured. Then, by driving the blower of each fan unit 53, clean conditioned air is supplied to each filter unit 5
2 to the target indoor space.

[0004]

However, in the air-conditioning system having the above-described structure, a large number of fan filter units 51 are installed in the system ceiling frame 50 when high-cleanness air-conditioning such as air conditioning in a clean room is required. It is necessary to perform the above-mentioned conventional fan filter units 5
Since 1 is composed of a set of one fan unit 53 and one filter unit 52, the fan units 53 are installed on the ceiling by the number of the fan filter units 51 to be installed.

As a result, in order to supply a sufficient amount of clean air, conventionally, it is necessary to drive the blower of the fan unit 53 for each fan filter unit 51, so that the carrying power increases and the energy consumption for air conditioning is increased. There is a problem that becomes large. Further, as many fan units 53 as the fan filter units 51 installed as described above are provided.
Therefore, there is also a problem that noise due to the blowers is large depending on the number of fan filter units 51.

Further, there is also a problem that a large load for air conditioning is applied to the system ceiling frame 50 constituting the ceiling portion and the upper floor slab (not shown) which supports the system ceiling frame 50 through the hanging metal fittings. is there. Further, when individually controlling the drive of the fan units 53 of the fan filter units 51 as described above, there is a problem that the control of the air conditioning becomes complicated.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a fan filter unit capable of saving energy by reducing the transportation power of air conditioning.

[0008]

In order to solve the above-mentioned problems, a fan filter unit of the present invention is a fan filter unit installed on a ceiling, wherein a plurality of filter units are arranged side by side in a ceiling frame. And a closing member that closes a gap between adjacent filter units of the plurality of filter units, and one unit installed on the plurality of filter units so as to cover the upper portions of the plurality of filter units. And a fan unit.

In the present invention, conditioned air is supplied to the room through a plurality of filter units by driving the blower of one fan unit. At this time, the airtightness between the filter units cannot be ensured simply by installing the fan units on the two filter units, but in the present embodiment, the gap between the adjacent filter units is blocked by the blocking member. It That is, the airtightness between the filter units is ensured by the closing member.

[0010]

Next, a first embodiment of the present invention will be described with reference to the drawings. First, the configuration will be described. As shown in FIG. 1, a plurality of fan filter units 2 are installed on a ceiling frame 1. Here, the ceiling frame 1 is made of a steel material 1 as shown in FIG. 2 which is a plan view.
By arranging a in a grid pattern, rectangular openings 1b for installing equipment are formed continuously in all directions. Note that reference numeral 3 indicates a hanging metal fitting for supporting the ceiling frame 1.

In the present embodiment, each fan filter unit 2 is composed of two filter units 4 and one fan unit 5. As shown in FIG. 1 and FIG. 3, the filter unit 4 has a casing having a box shape, and the suction port 4a is formed on the upper surface thereof.
Is formed, and an outlet is formed on the lower surface. The two filter units 4 are connected to the ceiling frame 1 described above.
The two filter units 4 are arranged side by side in the ceiling by being installed in the openings 1b formed side by side. Furthermore, the two filter units 4
One fan unit 5 is placed on the above.

The casing 6 of the fan unit 5 is
As shown in FIG. 3, it has a box shape having a size enough to cover the upper portions of the two filter units 4, and its bottom surface is open to form an outlet. Inside the casing 6, one blower 7 is installed. here,
The entire lower end portion of the casing 6 projects laterally to form a rectangular frame portion 6a that can come into contact with the outer periphery of the upper end portion of the filter unit 4.

Further, among the side plates of the casing 6, a pressing member 8 constituting a closing member is horizontally extended between the centers of the lower end portions of a pair of facing inner faces of the side plates. As shown in FIG. 4, the pressing member 8 has a rod-shaped steel material having a substantially rectangular cross section as a main body, and a protruding portion 8a extending in the longitudinal direction is provided at the center of the lower surface of the main body, and the protruding portion 8a is provided. 8
A packing material 9 is fixed to the lower surface of the main body excluding a along the longitudinal direction.

The packing material 10 is also fixed to a portion of the inner peripheral surface of the frame portion 6a of the casing 6 of the fan unit 5 which vertically faces the upper end surface of the casing of the filter unit 4 (see FIG. 4). reference). Then, when the fan unit 5 having the above-described configuration is placed on the two filter units 4 arranged side by side, the casing 6 of the fan unit 5 is caused by the weight of the fan unit 5.
The frame portion 6a of is pressed against the outer peripheral portion of the upper end surface of the casing of the filter unit 4 via the packing material 10 to secure desired airtightness between the outer peripheral portion of the fan unit 5 and the outer peripheral portion of the filter unit 4. It

At the same time, the casing 6 of the fan unit 5
The pressing member 8 fixed inside is also pressed by the load from the fan unit 5 against the adjacent frame upper end surfaces 4b of the casings of the two filter units 4 via the packing material 9. As a result, the gap between the two fan units 5 is closed by the pressing member 8 and a desired airtightness is secured between the two fan units 5.

As a result, the chamber of the fan unit 5 and the chambers of the two filter units 6 are connected in a desired airtight manner. Therefore, in the fan filter unit 2 of the present embodiment, the airtightness between the two filter units 4 can be reliably ensured only by mounting the fan unit 5 on the two filter units 4.
Even if the fan filter unit 2 is composed of the two filter units 4 and one fan unit 5 as described above, the fan filter unit 2 can be assembled with the same construction efficiency as the conventional one.

Next, the operation and effects of the air conditioner including the fan filter unit 2 having the above structure will be described. When the blowers 7 of the fan units 5 are driven to air-condition the indoor S space, air of a predetermined pressure is supplied from the blowers 7 of the fan units 5 to the two filter units 4, respectively. The conditioned air is supplied to the room S via 4. The air supplied to the room S passes through the filter of the filter unit 4 to become conditioned air with high cleanliness.

As described above, in the fan filter unit 2 of the present embodiment, by driving the blower 7 in one fan unit 5, it is possible to supply air of a predetermined pressure to the two filter units 4. It will be possible. That is, the amount of clean air supplied to the room S can be covered by one blower 7 for two conventional blowers. As a result, the number of fan units 5 required for air conditioning, that is, the number of blowers 7 is reduced to half the conventional number.

Further, when the size of each filter unit 4 is set to the same size as the conventional one, the casing 6 of the fan unit 5 is larger than the conventional one, so that the blower 7 mounted on the fan unit 5 is used. Can be upsized,
The one with high operation efficiency can be used. As a result, the number of blowers 7 to be driven per predetermined area is reduced and the operation efficiency is also improved, so the fan power is reduced and the load applied for air conditioning to the ceiling member and the upper floor slab (not shown) is reduced. Decrease. Further, since the number of fan units 5 to be driven, that is, to be controlled is reduced, the control of the air conditioning is simplified by that amount as compared with the conventional case. Furthermore, when the blower 7 becomes larger, the rotation speed of the blower 7 for supplying the required air volume can be made lower than in the conventional case. From this point as well, noise reduction by the blower 7 can be achieved. Planned.

In the above-mentioned embodiment, the pressing member 8 is constituted by a bar body having a substantially rectangular cross section which is horizontally installed at the center of the lower part of the casing of the fan unit 5, but the present invention is not limited to this. Absent. For example, as shown in FIG. 5, a rod body 13 having a circular cross section may be horizontally mounted as a pressing member, and a packing material 14 may be fixed to the entire outer peripheral surface of the circular rod body 13 to form a closing member. The point is that the lower part of the closing member fixed to the casing 6 can be brought into contact with the upper end faces of two adjacent filter units 4 to close the gap between the two filter units 4.

In the above embodiment, the fan filter unit 2 is composed of two filter units 4 and one fan unit 5, but the present invention is not limited to this. For example, the fan filter unit 2 may be configured by three filter units 4 and one fan unit 5. In this case, inside the casing 6 of the fan unit 5, the above-mentioned closing member is provided in each of the two portions located above the gap between the adjacent filter units 4.

Further, it is desirable that the member constituting the fan filter unit is made of, for example, a casing material which hardly generates outgas so as to contribute to the suppression of outgas in the target indoor environment. Next, a second embodiment will be described based on the drawings. The same members as those in the first embodiment are denoted by the same reference numerals and described.

Fan filter unit 2 of the present embodiment
The basic configuration is the same as that of the first embodiment, except that the casing 6 of the fan unit 5 and the closing member 15 are separately configured as shown in FIG. In FIG. 6, 6b is an opening for incorporating a blower in the casing 6 of the fan unit 5. The closing member 15 of the present embodiment has a rectangular plate member as a main body, and the main body has such a size that it can be fitted into the rectangular frame portion 6a of the casing 6 of the fan unit 5, and Portions of the two filter units 4 facing the suction ports 4a are opened to form openings 15a. A packing material 16 is fixed to the lower surface of the main body (see FIG. 8).

Further, as shown in FIG. 7, the plate portion 15b (hereinafter referred to as the closing portion main body) located between the two openings 15a of the closing member 15 has bolt holes at two positions in the longitudinal direction. Has been established. A nut member 17 is coaxially fixed to the upper end surface of each bolt hole.
A screw rod 18 is screwed into the. The threaded rod 18 is in a state of protruding downward from the closed portion main body 15b.

In assembling the fan filter unit 2 having the blocking member 15 having the above structure, for example, the blocking member 15 is placed on the two filter units 4. At this time, the packing material 16 provided on the lower surface of the closing member 15 comes into contact with the outer peripheral portions of the upper ends of the casings of the two filter units 4. Next, the fan unit 5
The two filter units 4 through the blocking member 15.
When placed on top, the outer peripheral portion of the closing member 15 is pressed by the load of the fan unit 5,
A desired airtightness is secured by the packing material 16 fixed to the lower surface of the closing member 15 and the packing material 10 fixed to the frame portion 6a of the casing 6.

At this time, the closing portion main body 15 of the closing member 15
Since the load of the fan unit 5 is not directly applied to b, the desired airtightness may not be ensured between the filter units 4, but in the present embodiment, as shown in FIG.
By fixing the lower end portion of the screw rod 18 attached to the closing portion main body 15b to the ceiling frame 1 via the nut member 19 and tightening the nut member 19, the closing portion main body 15
Both sides in the width direction of b are pressed against the upper end surface of the filter unit 4 to ensure airtightness. As a matter of course, a rod body is laterally laid across the casing 6 of the fan unit 5 at a position vertically opposed to the closed body 15b.
The body weight of the closing member 15 of the closing member 15
5b is configured so that the screw rod 18
Fastening parts such as may be omitted.

Other functions, effects, etc. are the same as those in the first embodiment. Here, in the first and second embodiments described above, the opening 1b provided in the ceiling frame 1 is set to the same size as the conventional size, and the opening 1b for installing each equipment is set to 1 respectively. Although an example in which the base filter unit 4 is provided has been described, the present invention is not limited to this. For example, the opening 1 provided in the ceiling frame 1
For example, b may be set to be about twice as wide as the conventional one, and two filter units 4 may be installed in one opening 1b (see FIG. 10).

In this case, in order to increase the supporting rigidity of the fan filter unit 2 by the ceiling frame 1,
As shown in FIG. 9, a steel material 20 having a rectangular cross section is attached so as to traverse the inside of the opening 1b of the ceiling frame 1. Further, in this case, since the opening 1b formed in the ceiling frame 1 becomes large, it becomes possible to carry the fan unit 5 and the filter unit 4 from the lower side (inside the room S side) to the ceiling side in a vertical state. Then, as described above, the fan unit 5
After the filter unit 4 is installed, the stiffening steel material 20 is attached. The lower part of the steel material 20 is
It can also be used as a mounting part for lighting equipment and partitions.

[0029]

As described above, when the fan filter unit of the present invention is adopted, the number of blowers to be driven can be reduced as compared with the conventional case even when high cleanliness air conditioning is required in a clean room or the like. Therefore, the load applied to the ceiling for air conditioning is reduced, and the weight of the ceiling member can be reduced correspondingly.

Further, the fact that the number of blowers to be driven is reduced and the operating efficiency of each blower is increased means that the energy consumption for air conditioning is reduced and the control of air conditioning is simplified accordingly. is there. Furthermore, noise can be reduced, and the number of fan units to be installed is reduced, so that the facility cost is also reduced.

[Brief description of drawings]

FIG. 1 is a side view showing a fan filter unit according to a first embodiment of the present invention.

FIG. 2 is a plan view showing a ceiling frame according to the first embodiment of the present invention.

FIG. 3 is a perspective view showing a relationship between a filter unit and a fan unit according to the first embodiment of the present invention.

FIG. 4 is a view showing a closing member according to the first embodiment of the present invention.

FIG. 5 is a view showing another closing member according to the first embodiment of the present invention.

FIG. 6 is a perspective view showing a relationship between a filter unit, a closing member, and a fan unit according to a second embodiment of the present invention.

FIG. 7 is a partially enlarged view of the closing member according to the second embodiment of the present invention.

FIG. 8 is a side view showing a fan filter unit according to a second embodiment of the present invention.

FIG. 9 is a side view showing another example of a fan filter unit according to the embodiment of the present invention.

FIG. 10 is a plan view showing another example of a ceiling frame according to the embodiment of the present invention.

FIG. 11 is a side view showing a conventional fan filter unit.

[Explanation of Codes] S Indoors 1 System ceiling frame 2 Fan filter unit 4 Filter unit 5 Fan unit 6 Casing 7 Blower 8 Holding member 9 Packing material 15 Closing member 15b Closing part body 17, 19 Nut member 18 Screw rod

Claims (1)

[Claims] 1. A fan filter unit installed on a ceiling portion, which closes a plurality of filter units arranged side by side on a ceiling frame and a gap between adjacent filter units of the plurality of filter units. A fan filter unit comprising: a member; and a fan unit installed on the plurality of filter units so as to cover the tops of the plurality of filter units.