JPH0225065Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an air cleaning unit for an air curtain in a clean room.

[Conventional technology]

As a conventional clean room apparatus, there is one described, for example, in Japanese Patent Application Laid-Open No. 110938/1983. This consists of a large number of air purifying units attached to a lattice-shaped frame suspended from the ceiling.

[Problem that the invention attempts to solve]

However, in such conventional clean room equipment, when a large number of air purifying units are installed to send clean air to a predetermined location that is a part of the room, the clean air must be kept clean at the predetermined location. There is an inconvenience in that air containing dust or the like escapes from the area or enters the designated area that should be kept clean, and to prevent this, it is required to provide a separate air curtain device. However, in the past, clean air was only blown out from a wide surface with a predetermined length and width, as in the air purifying unit of the above-mentioned publication.
There was no unit that formed an air curtain in the clean room. Therefore, there has been a problem in the past that it has not been possible to meet the above requirements.

This invention was made by paying attention to the problems of the conventional example, and is aimed at providing an air curtain mechanism in a clean room.

[Means for solving problems]

The air purifying unit for an air curtain according to this invention includes a frame surrounding the periphery and an upper surface, a blower that blows air into the frame, an air filter placed downstream of the air outlet of the blower within the frame, and a frame placed below the air filter. , a narrow air curtain outlet; a laminar flow outlet arranged below the air filter and formed in a honeycomb shape that blows out air at a uniform speed from a portion other than the outlet;
The structure includes an illumination lamp installed between the laminar flow outlet and the air filter, and an air resistance body disposed on the upper surface of the laminar flow outlet.

[Effect]

A blower provided within a frame surrounding the circumferential surface and the top surface sends air to an air filter, and the air that has passed through the air filter is filtered to become clean air. This clean air is supplied to an air curtain outlet and a laminar flow outlet that blows out air at a uniform speed. Since the air curtain outlet is narrow, the air passing through it is squeezed and blown out at high speed to form an air curtain, and this air curtain is an area where air is uniformly blown out from the laminar flow outlet. Separate the area from the other side.

Furthermore, in the present invention, since the air resistance element is disposed on the upper surface of the laminar flow outlet, air is blown out from the air curtain outlet at a higher speed than that from the laminar flow outlet. Therefore, the ability to form an air curtain is improved.

〔Example〕

Figures 1a and 1b are views of the ceiling of the clean room looking up from the clean room, and Figure 1a shows the laminar flow area A where the air purifying unit 1 is arranged on one side, and the laminar flow area A where air is blown out. A turbulent flow area B has an air purifying unit 1 spaced between the blind units 2, and air is blown out like an air curtain from an elongated opening formed in a part between both areas A and B. In addition, this is an example in which an air cleaning unit 3 for an air curtain is arranged to blow out air evenly from substantially in front of other parts.

In this way, one or more blower units selected from among the air purifier units 1, blind unit 2, and air curtain air purifier unit 3 are arranged in a predetermined arrangement according to the purpose of the clean room. It is placed with As shown in FIG. 1b, by installing only one row of air-curtain air-purifying units 3 among a large number of air-purifying units 1, the clean room can be divided into two by the air curtain. It is also possible to make the cleanliness levels of both laminar flow regions A, A different.

Next, each blower unit will be explained.

FIGS. 2a to 2c are diagrams showing an example of the air cleaning unit 1. FIG. That is, holes 11a are formed in the four corners of the upper surface of the frame 11, which is surrounded by the periphery and the upper surface, to which hanging bolts for hanging the frame 11 are engaged. Blower 1
2 will be installed. In the upper position of the blower 12, frame 1
1 is opened, and a prefilter 13 is disposed therein so that air from the ceiling room is supplied to the blower 12 from the prefilter 13.

Inside the frame 11 on the downstream side of the blower 12, the blower 1 is installed.
A pressurized chamber 14 is formed at the same height as 2.
The pressurized chamber 14 increases the pressure by the air blown out from the blower 12, and applies this air pressure to the air filter 15 below it based on Pascal's principle.
It supplies air at an even pressure over the entire surface.

An air filter 15 is installed below the pressurized chamber 14 over an area close to the planar cross-sectional area of the frame 11. A diffuser plate 16 is attached to the lower side of the air filter 15 over the entire lower opening of the frame 11.
An illumination light 17 is installed between the air filter 15 and the air filter 15 . The diffuser plate 16 has a honeycomb shape,
The light beam of the illumination lamp 17 on the upper side is dispersed to illuminate the clean room, and the air that has passed through the air filter 15 is thereby guided downward.

After the air in the ceiling chamber is filtered by the pre-filter 13 by operating the blower 12, the air in the pressurized chamber 14 is
Send to. The air pressure in the pressurized chamber 14 increases due to the operation of the blower 12, but the increased air pressure acts equally on the air filter 15 according to Pascal's principle, and this air passes through the air filter 15 evenly in each part and is filtered. be done. The filtered air is blown out evenly to the lower surface of the air filter 15, passes through the diffuser plate 16, and is blown out into the clean room as it is.

32 controls the rotational speed of the blower using a speed governor, and adjusts it to eliminate the difference in air volume between each unit due to the difference in air resistance in the ceiling plenum, and also uses it to change the cleanliness depending on the work content. .

3a to 3c are views showing the air cleaning unit 3 for an air curtain of this invention. This air cleaning unit 3 for an air curtain is the same as the air cleaning unit 1 shown in FIGS. 2a to 2c, except that a long and narrow air outlet 20 is formed in a part of the diffuser plate 16 along one side of the frame 11. are the same. Here, diffuser plate 1
Since a mesh air resistance element is installed on the upper surface of the honeycomb-shaped lattice 6 and the opening of the elongated air outlet 20 is large, when the air that has passed through the air filter 15 is blown into the clean room, the upper resistance of the diffuser plate 16 is reduced. Since the flow resistance of the body is large and the flow resistance of the air outlet 20 is small, air is blown out from the air outlet 20 at a higher speed than that from the diffuser plate 16.

Therefore, the air blown out from the diffuser plate 16 into the clean room becomes a uniform flow (laminar flow), and the air blows out from the air outlet 2.
The air blown out from zero forms an air curtain.

Although the blind unit 2 is not shown in detail, a blind plate is attached to the bottom surface of the frame 11 of the air purifying unit 1 in place of the diffuser plate 16, and special equipment is installed inside the frame 11. does not exist.
An illumination light 17 may be arranged below the blind plate.

Each of the air blowing units is suspended from above by a hanging bolt, and adjacent air blowing units are connected to each other with a sealing material interposed between them if necessary. Structures for this connection are omitted in the drawings.

Note that each of the blowers 12 described above is configured to be able to adjust the air blowing speed in stages. Further, by attaching the illumination light 17 in advance as described above, there is an effect that the work of attaching the illumination equipment is simplified.

FIG. 4 shows a large number of ventilation units U of one or more types selected from the air purification unit 1, the blind unit 2, and the air purification unit 3 for air curtains, the ceiling chamber 21 above them, and the ventilation unit U. FIG. 2 is an explanatory diagram showing the relationship between a clean room 22 below the unit U, a floor 23 of the clean room 22, and an underfloor room 24 below it. The floor 23 has a lattice shape, and the holes in the lattice serve as air inlets for the clean room 22.

The underfloor chamber 24 and the ceiling chamber 21 are connected by two paths. That is, one of them is a circulation path 26a equipped with an air conditioner 25 and a blower 26, and this circulation path 26a supplies air from the clean room 22 to the underfloor room 24.
The temperature and humidity are adjusted by an air conditioner 25, and the air is circulated into the ceiling room 21 by a blower 26. The air conditioner 25 has a structure that mixes fresh air as appropriate.

The other one is equipped with a blower 27 and an air filter 28, and the clean room 22 is
The air in the clean room 22 is sucked from below into the circulation unit 29 through the underfloor chamber 24, filtered by the air filter 28 inside the air filter, and then passed through the ceiling chamber 21 by the blower 27.
This is to circulate the water. A height adjustment panel 30 is located between the circulation unit 29 and the floor 23, and the height adjustment panel 30 can be adjusted according to the height of the clean room 22.
By adjusting the upper and lower lengths of the circulation unit 29, the circulation unit 29 can be adapted to clean rooms 22 of various heights. 31 is a suspension bolt of the circulation unit 29.

Further, an exhaust port 32 is formed on the side surface of the clean room 22, and an exhaust duct 3 equipped with an exhaust fan 33 is connected to the exhaust port 32.
4 in a row.

By the way, the amount of circulating air necessary to control the temperature and humidity of the clean room 22 is sufficient if it is 20 to 50% of the total circulating air amount. From this, the air conditioner 25
Therefore, the amount to be air-conditioned only needs to be 20 to 50%, and the rest can be circulated via the circulation unit 29. Therefore, in this embodiment, the underfloor compartment 24 and the ceiling compartment 21 are connected by two routes, one passing through the air conditioner 25 and the other passing through the circulation unit 29. For this reason, the amount of air passing through the air conditioner 25 is smaller than the total circulating air amount, so the scale of the air conditioner 25 and the blower 26 can be reduced.

Although the embodiments have been described above, the air purifier for air curtains according to this invention can have an air outlet having a shape of right angles along adjacent sides of the frame, in addition to the shape of the outlet as described above. ,
Of course, it is also possible to use it at the corner of an air curtain.

[Effect of idea]

As explained above, according to this invention, it is possible to form an air curtain even in a clean room, and by combining it with an air purifying unit, a blind unit, etc., it is possible to simplify the on-site installation work of the air curtain device. It is possible to aim for In addition, because the outlet is narrow, it is possible to obtain the desired wind speed even if the same blower is used as other blowers, making it possible to unify the electrical power with various blower units and making it easier to assemble. effective.

Furthermore, since the air curtain outlet and the laminar flow outlet are adjacent to each other, there is an effect that the air curtain mechanism can be installed in a narrow place.

Furthermore, according to the present invention, since the air resistance element is placed on the upper surface of the laminar flow outlet, air can be blown out from the air curtain outlet at a higher speed than that from the laminar flow outlet. Therefore, it is possible to improve the ability to form an air curtain.

Furthermore, according to the present invention, since the lighting lamp is installed between the laminar flow outlet and the air filter, once the installation work of the air purifying unit is completed, the installation work of the indoor lighting equipment can be completed. This has the effect of improving the efficiency of clean room installation work. Since the laminar air outlet is formed in a honeycomb shape and a lighting lamp is installed on the upper surface of the air outlet, the laminar air outlet also has the effect of dispersing the light from the lighting lamp into the room.

[Brief explanation of drawings]

Figures 1a and b are bottom views of the ceiling showing examples of the types and arrangement of blower units, Figure 2a is a bottom view of the laminar flow unit, Figure b is a side view, and Figure c is a top view of the same. Figure 3a is a bottom view of the air cleaning unit for air curtains, Figure b is a side view, Figure c is a top view, Figure 4 is an explanatory diagram showing the entire clean room equipment, and Figure 5 FIG. 3 is a longitudinal cross-sectional view of the circulation unit. A...Laminar flow area, B...Turbulent flow area, U...Blower unit, 1...Air cleaning unit, 2...Blind unit, 3...Air cleaning unit for air curtain, 11...Frame, 11a... ... Hole, 12 ... Blower, 13 ... Prefilter, 14 ... Pressurized chamber, 1
5... Air filter, 16... Diffusion plate, 17...
Lighting lamp, 18...air filter, 19...blind plate,
20... Air outlet, 21... Ceiling chamber, 22...
Clean room, 23...floor, 24...underfloor room, 25...
Air conditioner, 26...Blower, 27...Blower, 28
...Air filter, 29...Circulation unit, 31
...Hanging bolt, 32... Speed governor.

Claims (1)

[Scope of utility model registration request] A frame that surrounds the periphery and the top surface, a blower that blows air into the frame, an air filter that is placed downstream of the blower's outlet within the frame, a narrow air curtain outlet that is placed below the air filter, and an air filter that blows air into the frame. a laminar air outlet formed in a honeycomb shape that blows out air at a uniform speed from a portion other than the air outlet, which is disposed lower; and an illumination lamp installed between the laminar air outlet and the air filter. An air cleaning unit for an air curtain, comprising: an air resistance element disposed on the upper surface of the laminar flow outlet.