JPS61243236A - Clean working chamber - Google Patents

Abstract

PURPOSE:To permit to install a clean air supplying means in a building having low ceiling height and simplify duct work for air conditioning by a method wherein the distributing means of air, supplied from the outside of the clean working chamber, is accommodated in the clean air supplying means. CONSTITUTION:The air-conditioning duct 16 or the distributing means of air- conditioning air supplied from the outside of the clean working chamber, a partitioning plate 17, partitioning contaminated-air side and clean-air side, and illuminating lamps 18 for paths are provided between the blow-off port 9 of clean air for the paths and a ceiling plate 3 while a lattice type light diffusing plate 19 for the paths is provided below the lamps 18. The air-conditioning duct 16 is connected to a main air-conditioning duct, provided in the outside of the clean working chamber, at the end surface in the lengthwise direction of the same chamber. The air-conditioning duct 16 is provided with an opening 16a at the side surface thereof and distributes the air-conditioning air to respective fans 10 accommodated in the ceiling of the clean working chamber. Thus, an interval between the ceiling 22 of the building and the ceiling plate 3 can be set at the minimum dimension necessary for the assembling work while the space may be utilized effectively in such manner.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a clean work room, and particularly to a clean work room that can simplify air conditioning duct work and is suitable for installation in a building with a low ceiling height. .

[Background of the invention]

The clean work room conventionally used for manufacturing semiconductors was developed in 1973.
As an example is shown in Publication No. 8-127088,
Since the structure was such that the air conditioning duct was connected to the outside of the ceiling of the clean work room, there was a space between the ceiling of the clean work room and the ceiling of the building where the air conditioning duct was installed (usually 2 to 1 m).
This makes it difficult to install in buildings with low ceiling heights.

[Purpose of the invention]

An object of the present invention is to provide a clean work room in which pressure can be installed in a building with a low ceiling height and in which air conditioning duct work can be simplified.

[Summary of the invention]

The present invention provides a clean air supply system in which a clean air supply means is installed in the ceiling and has a built-in blower and a filter and supplies clean air to a work area where work equipment is installed in a clean work room and a passageway through which workers pass. In the work room, the clean air supply means is characterized in that it incorporates a distribution means for air supplied from outside the clean work room.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to FIGS. 1 to 6.

1 and 2 are a cross-sectional view of a surface perpendicular to the longitudinal direction and a side cross-sectional view of the ceiling portion of a clean working room according to a first embodiment of the present invention, respectively.

In this example, a gate-shaped frame is constructed with a support 1 and a crossbeam 2.
A top plate 8 and side plates 4 on both sides are attached to this to form a tunnel-like structure, and a clean work chamber 7 is constructed between this tunnel-like cover and the floor surface 5. A working section 7a in which manufacturing line equipment 6 is installed and a passage section 7b through which workers pass are provided continuously over the longitudinal direction. Between the clean air outlet 8 for the work area and the top plate 8, there is an air purifier 22) 80, which is a clean air supply means and consists of a blower lO1, a high-performance filter 11°, and a blow chamber 12, and work area lighting. Light 13 is stored, and lighting light 1
A lattice-shaped work section diffuser plate 14 is installed below the light source 3 . 1
5 is a decorative plate for partitioning between the clean air outlet 8 for the work section and the clean air outlet 9 for the passage section. 16. Between the clean air outlet 9 for the passage and the top plate 8, there is an air conditioning duct which is a means of distributing the conditioned air supplied from outside the clean work room.
A partition plate 17 that partitions the contaminated air side and the clean air side and a passage section lighting lamp 18 are provided, and a grid-shaped passage section □ diffusion plate 19 is installed below them. The clean air outlet 9 for the passage section may be configured to receive air resistance and adjust the amount of air in the passage section by installing a rectifying plate 20 made of a perforated plate on the light diffusion plate 14 for the working section. The air conditioning duct) 16 is connected at the end face in the longitudinal direction of the cleaning work room to a main air conditioning duct 21 that communicates with an air conditioner (not shown) installed outside the clean work room.

In addition, the air conditioning duct 16 is provided with an opening 16a on its side, and each blower 10 is housed in the ceiling of the cleaning work room.
distributes conditioned air to. According to this embodiment, the building ceiling 2
The distance between 2 and the top plate 3 can be set to the minimum dimension necessary for assembly work, and space can be used effectively.

FIG. 3 shows a second embodiment of the invention. In this example, the top plate 3
The ceiling 22 of the building is used as it is.

According to this embodiment, assembly work can be shortened and equipment costs can be reduced.

FIG. 4 shows a third embodiment of the invention. In this embodiment, the building ceiling 22 is used as it is instead of the top plate 8, and
A high-performance filter 11 is installed horizontally. In addition, in this embodiment, one working section lighting lamp 13 and one partition plate 1 are provided.
A baffle plate 20 is provided between the airflow plate 7 and the airflow distribution plate 20 to improve the airflow distribution.

FIG. 5 shows a fourth embodiment of the invention. In this embodiment, air is sucked through both the pre-filter 26 and the air conditioning duct 160, and an air volume adjustment damper 24 is provided at the opening 16alC of the air conditioning duct 16 to control the air volume. In this embodiment, the air volume adjusting damper 24 can be opened and closed using a damper operating handle 25. In this embodiment, the part of the blower 10 that communicates with the suction port has a negative pressure corresponding to the pressure loss of the prefilter 26, so even if the shaft of the damper operation handle 25 passes through the partition plate 17, contaminated air will not flow. There is no leakage into the clean room.

Also, since the air volume for cleaning and the air volume required for air conditioning are different, the air volume required for cleaning is mainly drawn from the pre-filter 26, and the air volume required for air conditioning is drawn from the air conditioning duct 16. Often, the air volume of the air conditioning duct decreases, so the dimensions of the air conditioning duct can be made smaller.

Suitable for compactness. Note that the damper 24 may be an electric damper and the opening/closing operation may be performed by an electric motor.

The air conditioning duct 16 is not limited to being installed above the passage of the clean work room.

FIG. 6 shows a fifth embodiment of the invention. In this embodiment, the duct 16 is provided above the working section at a position communicating with the suction port of the blower 10. According to this embodiment, since the distance for the air that has passed through the high-performance filter 11 to reach the clean air outlet 8.9 is short, it is possible to obtain a clean working chamber with high cleanliness in one working section and passage section. can.

In the above embodiments, the cross section of the air conditioning duct is rectangular, but the cross section is not limited to this, and may be circular or triangular.

〔Effect of the invention〕

According to the present invention, since a duct for distributing conditioned air is built-in, it can be installed even in a building with a low ceiling height, and the air conditioning duct construction can be simplified without installing a branch duct, reducing equipment costs. It is possible to obtain a clean working room that can be reduced.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a surface perpendicular to the longitudinal direction of the clean work chamber in the first embodiment of the present invention, FIG. 2 is a side cross-sectional view of the ceiling portion of the clean work chamber in the first embodiment of the present invention, 3 is a sectional view taken in a plane perpendicular to the longitudinal direction of the ceiling of a clean working room in the second embodiment of the present invention, and FIG. 4 is a sectional view taken in the longitudinal direction of the ceiling of the clean working room in the eighth embodiment of the invention. FIG. 5 is a sectional view taken along a plane perpendicular to the longitudinal direction of the clean working chamber in the fourth embodiment of the present invention. FIG. 6 is a cross-sectional view of a ceiling portion of a clean working room in a plane perpendicular to the longitudinal direction in a fifth embodiment of the present invention. 7... Clean work room, 7a... Working section, 7b... Passage section. 10...Blower, 11...Filter% 16...
means of distribution. 80...Clean air supply means. 1st 42m Fig. 3 Fig. 5

Claims (1)

[Claims] In a clean work room, the ceiling is equipped with a clean air supply means that includes a built-in blower and a filter and supplies clean air to a work section where work equipment in the clean work room is installed and a passageway through which workers pass. A clean work room characterized in that the clean air supply means includes a built-in means for distributing air supplied from outside the clean work room.