JPS6036838A - Cleaned room device - Google Patents

Abstract

PURPOSE:To keep a sufficient degree of cleanness, reduce an installation cost and a maintenance cost and facilitate modification of layout and increase the facility by a method wherein a size of a height of a second region where a manufacturing equipment etc. is installed is made lower than that of the first region and at the same time the unit is made into a dividable unit. CONSTITUTION:A cleaned room 11 is formed by several longitudinal connected units composed of a modulated side plate 20, ceiling plate 19 and a cleaned air supplying means etc. Within the space 12 enclosed by the ceiling plate 19, both side plates 20 and a floor plate are arranged a second region 12a where the manufacturing line equipment 8 and a first region 12b where an worker passes. The height of air blowing port in the first region 12a is made such a height as enabling the worker to pass in his upright attitude. The height of the air blowing port 101 in the second region 12a is made lower so far as the worker may not be hindered, thereby a disturbance in the air flow in the space at the working place is decreased, resulting in that a characteristic of holding a cleanness can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a clean room apparatus MK for creating a clean working environment necessary for semiconductor manufacturing and the like.

[Background of the invention]

A typical example of the Y11 clean room (full-scale down flow clean room) conventionally used in the semiconductor manufacturing process is shown in the first example.
As shown in the figure. (a) is a cutaway plan view, (bl is a side sectional view,
1 is a building, 2 is a clean room interior, 3 is a high-performance filter, 4 is a lighting lamp, 5 is a ceiling perforated plate, 6 is a floor perforated plate,
Reference numeral 7 indicates an air supply duct for air conditioning, 8 indicates a duct for air conditioning, 9 indicates equipment for the production line, such as exposure, etching, diffusion, metal oxide, etc., and 10 indicates piping for supplying water, gas, etc. to the production line. As shown by the arrow in the figure, clean air processed by the high-performance filter 3 is blown out from the entire ceiling into the seedling 2, and the indoor air is discharged through the floor. This allows the entire room to be maintained at an almost uniformly high level of cleanliness, allowing all processes to be carried out in this clean environment. This full-scale down-flow clean room was considered the best method for increasing the cleanliness of the entire room, but it was
All parts had the same dimensions, and the dimensions had to be large enough for workers to stand and pass anywhere, which meant that the space that had to be cleaned was large, making it difficult to use inexpensive high-performance filters. I had to use the entire amount. As a result, equipment costs are extremely high.

This high-performance filter does not just need to be installed once; it gradually wears out as it is used, so it must be replaced with a new one.

The larger the space that must be cleaned, the more light from the air that must be filtered through the high-performance filter, and the sooner the high-performance filter must be replaced.

In addition, since most of the work is done while sitting on a chair, it is necessary to use a clean air outlet. The height dimension of the surface where work is performed from the ceiling becomes large, and even if clean air is sent from the clean air outlet, dust may get mixed in as the clean air goes to the work surface. Conceivable.

A system described in Japanese Utility Model Publication No. 52-37175 is known as a system in which the central part of the ceiling of a cleaning workshop is made brighter than the surrounding area, and a tall machine is placed here to reduce the space that must be cleaned. It is. However, in this known example, the dimension from the floor to the ceiling is made smaller in the work space than in the aisle space, so that the smaller space can be cleaned to make it easier for workers to pass through, and the work space can obtain sufficient air cleanliness. Nothing has been disclosed about what will happen.

[Purpose of the invention]

The present invention has been developed in view of these points, and its purpose is to be able to maintain sufficient cleanliness on the working surface, and to reduce equipment and maintenance costs.
Another object of the present invention is to configure a clean room device whose layout can be easily changed and expanded.

[Summary of the invention]

That is, in the present invention, a first zone used as a passage and a second zone in which manufacturing equipment, inspection equipment, etc. are installed are provided in a space filled with both side walls and a top plate. The height dimension of the second band is also smaller than that of the first band.

A high performance filter is provided above the second zone with the clean air outlet facing downward, and a chamber is provided upstream of the daytime performance filter. A blowing means is provided to make the air pressure in the chamber higher than the air pressure in the second zone, and the air in the chamber is purified by a high-performance filter and sent into the space.

On the other hand, an outlet is provided below the space through which the air in the first and second zones flows out. Furthermore, the double-sided chamber, the high-performance filter are formed into a unit that can be divided by a cross section perpendicular to the direction in which the first band extends.

By configuring it in this way, the space that must be cleaned can be narrowed by reducing the height dimension of the second zone. 'Amount of work from the e-filter's clean air outlet'
Because the distance between the air flow and the air flow can be shortened, the amount of clean air that needs to be supplied can be reduced. I can do at least one thing.

Also, since the unit structure is tight, expansion and layout changes are easy.

Other objects of the present invention other than the above-mentioned structures and effects obtained thereby will be clearly explained in the embodiments described below.

FIG. 2 is a diagram showing an example of construction of a clean room device according to the present invention.
(a) is a cut-away plan view, and (b) is a cut-away ifn diagram, showing corresponding parts in the same manner as in FIG. 1.

In a building 1 in which an air conditioning supply air duct 7 and a return duct 8 are installed, production line equipment 9 is installed facing each other 6, and the 2 lines are set as 1414 and horizontally mounted with both side plates 2o and a top plate 19. Although the details will be described later, a clean air supply means is built into the ceiling of the second zone that sucks blood from the manufacturing line equipment 9 such as manufacturing equipment and inspection equipment, and as shown by the arrow in the figure, Clean air is blown out into the zone 12 shown by 12a and 12b to clean the entire area 1. The air in the space 12 is discharged from the side outlet 14 provided below the side plate 20 to the surrounding preservation area 16, and although the preservation area 16 is also purified to some extent by this, the degree of cleanliness is lower than that in the space 12.

End panels lla with doors 80 are added at both ends of the space 12 to partition the inside of the space 12 and the conservation area 16. Piping 10 for water, gas, etc., electric wires, etc. (used in the production line) are installed in the conservation area 16 and drawn into the production line equipment 9 through the side outlet 14. By doing this,
Maintenance of piping 10, electric wires, etc. can be performed in maintenance area 16.

By making the side plate 20 partially removable, as will be described later, most repairs to the production line equipment 9 can be performed from the maintenance area 16. Even when repairing a set of manufacturing equipment for a certain process, the space 12 of that process
Since it can only be processed inside the factory, dust generated by maintenance work is reduced to other I+8! There are very few cases in which a Saikan is used on the manufacturing line (process).

Furthermore, by connecting the air inlet 15 of the air chamber 90 to the air conditioning supply air duct 7, the temperature, humidity, etc. inside the zone 12a112b can be controlled, and air conditioning temperature control for each manufacturing line (each process) is also possible. . Even in this case, in order to improve the indoor cleanliness, a part of the air that has flowed out from the space 12 following the side outlet 14 may be taken in from another air inlet 13 for recirculation.

In this way, the clean room device according to the present invention separates and cleans only the production line section that requires fj4j7n cleanliness from the surrounding preservation area, so compared to the conventional system shown in Fig. In addition to greatly reducing the area subject to air conditioning, it has many advantages.

FIG. 3 shows one example of the configuration of the clean room 11. This diagram is if
t This is a cross-sectional view perpendicular to the longitudinal direction of the cleansing room 11, showing a gate-shaped frame 11 made up of pillars 17 and cross beams 18, and covering this with a top plate 19 and side plates 20 on both sides. A second zone 12a in which production line equipment 9 is installed is located within an empty space 1h112 surrounded by a floor and a first zone 12 through which workers pass.
b is provided continuously in the longitudinal direction of the space 12 and parallel to the side plate 20.

101 and 102 are a clean air outlet for the second zone and a clean air outlet for the first zone, respectively. I'i between the clean air outlet 1()1 for the second zone and the top plate 19
The first blower 23, the second blower 96, and the second and first high-performance filters 24 and 25 that constitute the clean air supply means
The first chamber 26 for T, the second chamber 95, and the work section illumination light 27 are housed, and a lattice-shaped work section light diffusion plate 28 is installed at -F of the illumination light 27. These machines are supported by hanging from the cross beams 18 by a method described later. 30
is a carved plate that acts as a partition means between the clean air outlet 101 for the second zone and the clean air outlet 102 for the P1 zone.

The space between the clean air outlet 102 for the first zone and the top plate 19 is used as an air passage, and also houses the illumination light 22 for the first @ zone.
A grid-like diffused light &29 is installed below it. 1st band 12
1) The height of the air outlet in the split passage should be columnar so that workers can stand and walk through it, and the straightness of the air outlet in the 2nd zone + 2b work area should be low as long as it does not interfere with work.
- For example, the first zone NEW purified air outlet 102
The crystallinity of the filter is 2200n1m, and the height of the clean air outlet 101 for the second zone is 1800mm). It is better to keep the height of the second zone air outlet 101 as low as possible.
Second? This is because if the airflow in the j+ area 12a, that is, the working space is slightly disturbed, the cleanliness maintenance performance will be improved. In this case, since a C-performance filter and a blower are not housed in the second zone of the suspended purified air outlet 0102 for the first zone, even if the height of the first zone purified air outlet 102 is
The overall height can be reduced by making the entire structure almost the same height.

Due to the operation of the blower 23, external air is passed through the blur filter 21.
Air is drawn in from suction 1''13 through the air. Blower 2
A part of the air sent out from 3 is passed through the first high performance filter 2.
5, the air is blown downward from the second zone/I1 clean air outlet 101 to the second zone 2a, and the remaining air sent out from the first After the air is purified by @2 high performance filter 24,
Band river mutually purified air [blown out downward from the outlet 102 to the first zone 12b.

The arrows in the figure indicate this air flow. i'Ht
Jj: The plates 28 and 29 are provided for scattering the illumination and rectifying the clean air flow.

The wind speed of the clean air current is, for example,
The cleaning speed is set according to the required cleanliness of each part, such as 0.4 m/s for a and 0.2 MS for the first belt 12b, which is the passage section. By doing this, 7 of 2nd Imperial Area 12a
The purity level can be made higher than that of the first imperial area 12b.

The clean airflow blown into the zones 12a' and 12b flows as shown by the arrows in the figure, and flows out to the outside (maintenance area) from the side flow outlet 14 provided at the lower part of the side plate 2o. Since the zone pressure becomes positive with respect to the outside air by the amount of pressure loss at the side outlet 14, it is possible to prevent contaminated air from flowing into the parts 1) and 2. The 1111-plane outlet 14 is also used for drawing in water, gas, etc. piping, electric wires, etc. of the production line'\. Side plate 2
o should be made so that it can be partially removed using screws or hooks for repairs to piping or equipment.

In addition, a part of the upper side plate 20, which is necessary for resurfacing the area of the construction area within the zone and for heavy burial work from the outside, may be made of a transparent plate.

Figure 4 shows the side plate 20, top plate 19 and m
1 shows the external appearance of a purifier according to the present invention, which is constructed by connecting a large number of units including purified air supply means and the like.

FIG. 5 shows a cross section perpendicular to the longitudinal direction of an example of the structure in which the manufacturing line is on one side of the passage. In FIG. 5, the same number as in FIG. 3 indicates the corresponding part, and the difference is that of FIG. There is no substantial difference from the configuration example.

FIG. 6 shows a completely rounded structure with a different structure that further improves the retention of quenching degree 11 and requires separate work. 71\1+11 has a grating 84 as a urine outlet in the central passage body in the work chamber, and together with the side outlet 14 provided at the lower part of both side plates 20, 811^1/Jl[ Karasei, ki, especially the 24th lrj 12
W of a; It is possible to prevent dust from flowing into the second @ area 12b where the indoor utility device 9 is installed, and it is possible to improve the cleanliness retention property Hμ. It is desirable to maintain the relationship of average wind speed in the first zone ≦ average wind speed in the second zone.In fact, if it is necessary to increase the opening size of the side outlet 14 in order to draw in various piping, it is necessary to In order to prevent the air from decreasing at the outlet 34, a soft 11 partition cover 36 can be placed over the side outlet 14 to direct the exhaust gas 4 to J1+'4'l. If it is made of soft AA book 1 with a rubber plate back, the opening size of the side outlet 14 can be partially enlarged to improve the layout.

Conventional clean rooms with a full-surface D1F floor are made of perforated plates on the entire floor, making them vulnerable to vibrations, but as shown in Figure 6, only the floor of the first zone 12b is made of gray tint, making it possible to reduce the impact of manufacturing. Since the first part of the second zone where the utility equipment 9 is installed is flat, the specific strength can be improved.
It is also excellent in preventing photography of the semi-dedicated manufacturing equipment for finely processed strings.

In addition, in FIG. 6, an outer side plate 31 is further provided on the outer t)1 of the inner side plate 20, and the 1111 J return air duct 32 connected to the 0111 surface outlet 14 and the underfloor return air duct 85 is connected to the inner side plate. 20 and the outer side plate 31, and one end of this is connected to the air chamber where the air outlet of the blower 22 is located, so that most of the air flowing out from the zones 12a and 12b is transferred from this side return air duct 32 to the prefilter 21. The air is then returned to the air inlet 13, and a portion complementary to the air phase supplied from the air conditioning supply air duct to the air inlet 15 is supplied to the outside from the outlet 33 provided at the lower part of the side plate 31. This method circulates most of the air locally, so it is
First, the effect of ultra-cocoon purification of indoor air and energy saving of air conditioning is significant.

FIG. 7 is a perspective view showing the appearance of the working room shown in FIG. 6. Although the structure shown in Fig. 6.7 is the most expensive among the existing examples, it still uses the 6-performance filter (1'A + 1 song) only inside the space 12, so it can be used all over the area. Compared to the downflow one-way type, it is a woman's price.

The structure shown in Fig. 8 can be called a lever-shaped example of the structure shown in Fig. 6.7.
The space is kept small and this space is used as a return passage for clean air. 37 is a floor return air port of the maintenance area 16 connected to the underfloor return air duct 35.

According to the configuration shown in FIGS. 3 to 7, the top plate 19 can be made almost flat, so by installing the ceiling partition plate 38 between the clean rooms 11 that are in instant contact with each other, the distance between υ and the building ceiling can be increased. The air conditioning air supply duct 7 can be easily formed, and the duct construction cost can be significantly reduced.

The overall configuration of the clean room and the system using the same has been described above.

Next, detailed examples of improvement will be explained.

Section 9.10 shows the mounting structure of a high-performance filter that was first conceived by the inventor. Since air conditioning ducts and the like are often installed above the clean room 11, it is preferable that maintenance such as replacement of high-performance filters can be performed from $111 inside the clean room. In FIG. 9, the second high performance filter 24,
Attach the first high-performance filter 25 to the filter case 42 with the metal fitting 39, and when replacing the filter, the second band i2a
If so, remove the second band diffuser plate 28 and the second band illumination lamp 27, remove the mounting bracket 39, and take out the second band high performance filter 25 downward. This is a specific example, but it has the following problems.

(1) If the number of high-performance filters is incorrect, contaminated air leaks 40 and the cleanliness of the room decreases.

(2) Air stagnation 41 occurs around the high-performance filter, and the cleanliness does not improve, and over a long period of time, the dust stagnant in this area comes out to the clean room side ('6, impairing the cleanliness).

(3) Control performance The outer frame of the filter is usually made of wood, and the wood grows in the clean room (11i+), which is not desirable as it becomes a source of dust.

A mounting structure for a high-performance filter that has improved these problems is shown in Figures 11 and 12. In this example, a second high-performance filter 24 for the first band, a second high-performance filter 25 for the second If band, a first chamber 26, a second chamber 95,
, first air blow a! l! 28, the second blower 96 is integrally constructed, in particular, the second high-performance filter 24il-i, with its clean air outlet facing the side where the first band is located.
Installed above the high-performance filter. .

In this way, the height of the first band can be made sufficiently high.

The first high-performance filter 25 and the second high-performance filter 24 are each attached to the chamber 26 using a cross-sectional presser frame 44 and a mounting bracket 39. The upstream side 1 and the downstream side (/ff Western room side) of the high performance filters 24 and 25 are partitioned by a partition plate 46 acting as the d1 partition membrane 4 and a partition decorative board 30. However, when replacing the filter, the partition & 46
Also, it is essential that there is a certain gap between the decorative board 30 for cutting and the presser frame 44. This gap is filled with a sealing banking 45 to prevent contaminated air from leaking through the gap. With this structure, high-performance filter 2
Even if the presser frame 44 is displaced due to the tightness of the seals 4 and 25, the seal backing 45 can provide an effective seal. With this improvement, maintenance of high-performance filters can be performed from the clean side, and the following effects are expected.

(1) Even if the high-performance filter is improperly installed and contaminated air leaks from between it and the chamber 26, the high-performance filter α peripheral side is under negative pressure, so the contaminated air will leak to the clean room side. There is no need to worry (■ in Figure 11 indicates the positive pressure section, and θ indicates the negative pressure section.) (2) Air will not stagnate in the /H clean area on the peripheral side of the performance filter.

(3) What is the wooden frame of the C-performance filter? +T clean M lii K
& There is no need to worry about it becoming a source of pollution.

(4) Even if a defect occurs in the sealing banking 45, clean air simply flows into the negative pressure section around the high-performance filter, and there is no risk of contaminated air leaking into the clean room.

Next, an example of improving the flow of clean air with one air outlet will be described.

In the structure first conceived by the inventor, the filter cases 42 are sequentially butted against each other in the longitudinal direction of the 7U filter 11 and connected, as shown in FIG. In this case, the periphery of the air outlet of the filter case 42 is slightly bent in the horizontal direction in order to increase the volume of Diffusion & 28 and to reinforce the filter case itself. However, with this structure, as shown in the figure, a thin flow 43 is generated near the connection part of the filter case 42, and there is a concern that this thin flow may involve dust generated by the operator and cause a reduction in cleanliness. be.

In the improved example shown in FIG. 12(a), there is no bent part on the air outlet edge of the presser frame 44 that becomes a hindrance to the airflow, so there is no thin flow. ## Improved air flow.

However, in FIG. 12(a), there is still a tendency for the wind speed to become slower near the connecting portion of the adjacent presser frame 44, so an example of improvement is shown in FIG. 12(b) and (C).

In the improvement example (b), a diffusion punching plate 47 is partially installed at the lower part of the outlet of the high-performance filter 25, and a large amount of airflow is caused to flow toward the end of the outlet where the punching plate 47 is not present. This is the average wind speed. The diffusion punching plate 47 is provided below the illuminating lamp 27 to prevent turbulence caused by the illuminating lamp 27, and the old material is preferably one that transmits light.

In the improved example (C), a wind direction plate 48 is installed at the lower part of the outlet of the Akane performance filter 25 to flow more airflow to the end of the outlet and average the wind speed.

By these improvements, it is possible to prevent the occurrence of a thin air flow near the end of the outlet, and further to make the clean air flow more uniform, thereby improving the air flow rate.

Next, an example of improvement of the air purification unit by J&+J SEIZO will be explained with reference to FIGS. 9 to 12. As shown in Figure 9.1o, Fuhatsu Kaiki first came up with a structure in which the ceiling section including the filter case 42 is constructed of a sheet metal case and connected in the longitudinal direction. In this case, the floor of the building is quite uneven, so if the floor is constructed using pillars,
The ceiling glue 1 becomes uneven in line with the floor surface, and especially when viewed from inside the room, the first imperial diffuser plate 29 and the 11J surface of the filter case 42 become wavy, which impairs the quality of the parts. There's a problem. Therefore, No. 11.12
In the improved example shown in the figure, the rear part of the chamber 26 is placed on the beam 41C of the ceiling and fixed with a mounting bracket 5o, and the front part on the first band side is fixed to the top plate 1 with a turnbuckle 51.
From 9 onwards, the bottom part has a supporting structure. The reason why one end of the chamber 26 is fixed to the cross beam 49 is that if the lower part is supported only, the seismic resistance is insufficient, and there is a risk that the lower part will move and be damaged during an earthquake. According to this structure, even if the top plate 19 follows the unevenness of the floor and becomes wavy, the length adjustment fitting 51 allows the first firefly area to be adjusted. l] Decorative board 3 for partition 9
0 can be adjusted horizontally, and the first band light plate 29 can also be adjusted horizontally, so it is possible to eliminate incorrect installation of parts.

Next, an example of improvement of the diffuser plate will be explained with reference to FIG. 13. For the second band diffuser plate 28 and the first band diffuser plate 29, a grid-shaped resin molded product is usually used. In this case, if the diffuser plate is used alone, it will sag due to its own weight as shown in Figure 13(a), so if it is reinforced by surrounding it with a U-shaped reinforcing bag 52 as shown in Figure 13(b). good. However, this structure causes the following problems. As shown in FIG. 5(C), the reinforcing airflow 52 obstructs the airflow, and there is a concern that a thin airflow 43 will occur downstream of it, impairing cleanliness. Therefore, examples of improvement are shown in (d) to (g) of the same figure. That is, as shown in (d) and (e), a reinforcing plate 53 having an L-shape only partially is attached to the upper surface of the light scattering plate 28.

Details of the attachment portion of the reinforcing plate 53 are as shown in (f) and (g), and the L-shaped portion of the reinforcing plate 53 is fixed 164 on the upper surface of the diffuser plate 28 by the attachment part 54 or 55. According to this structure, the only part of the reinforcing plate 53 that obstructs the airflow is
Compared to the structures (b) and (C), the thin flow is significantly reduced.

FIG. 14 shows an example of an improved structure for attaching a diffuser plate.

As shown in FIG.
``I'll make it into a partition.'' - Write a few words on board 30. The mounting hole of the receiving fitting 56 is an elongated hole, and the receiving fitting 56 can be slid to the left or right by one or more positions of the grid of the diffuser plate 28. The lattice of the diffuser plate 28 is hung on the claw 57 provided on the receiving metal fitting 56, and as shown in FIG.
Install as shown in (b). The diffuser plate is shown in Figure 13(d).
If you use the one shown in the figure below, there is no need to obstruct the airflow. 1st
The advantage of this improved example compared to the normal diffuser plate mounting structure shown in Fig. 0 is that, as shown in Fig. 12 (a) K, regardless of the dimensions of the high-performance filter, a standard length diffuser plate can be used. Ren ftl
It is to be installed as follows. In this case, if the receiving fitting 56 is made to be able to slide beyond one position of the diffuser plate, it is possible to deal with any position of the diffuser plate.

FIG. 15 shows an example of improving the mounting force of the first band diffuser plate. In the assembly assembly of the clean room shown in the embodiment, a gate-shaped frame is assembled and the air purification unit is attached to the ceiling of the second band, so that the assembly error is reduced to the size of the first band in the center. In this case, place the partition makeup & 30 diffuser plate receiver on the first
5. Make the shape shown in Fig. 5 (a) or (b), and determine the relationship between the dimensions of each part, , L, , L, the width t of the first band light-absorbing plate 29, and the first dimension t2 as follows. .

(1) L+ > 11 (21L2 )4 t3)
t, 2+Ls <zt By doing this, if the error in the dimension of the first band becomes large and the original diffuser plate cannot be inserted, one cut of the grid can be made. If the diffuser plate is cut in the middle of the grating 11), it will become stronger, so it is essential to be able to make one cut.

Next, we will discuss an example of improvement in the construction of Teru"J4 KJ' Icy and I1 ri* construction.

The number structure of the illumination lamp that Fuda Kaiki first thought of is 2 in Figure 3.
The structures were as shown in 2 and 27. Both of these are high-performance filter air outlets (for cleaning equipment that requires ultra-cleanliness, they do not obstruct airflow or light bulbs, etc.). In the improved example shown in Fig. 16, it is inconvenient that the shade is
27 is placed in the groove-shaped lighting case 61, and the decorative board 8 for partition P is installed.
0 and the side plate 20, and a transparent cover 5 on the top
9 to open the air outlet of the quotient 1"li filter 25, and the high-performance filter 25 is installed at the position where the high-performance filter 25 is located. The lighting case 61 is used to improve illumination through internal reflection, and this case is provided with pores and O. This completely prevents temperature rise, and since the inside of the case becomes negative pressure, there is no need to worry about contaminated air leaking into the cleaning area. A punching plate 62 can also be included for protection and improved air flow.

Fig. 17 shows an example of improvement in controlling the air flow rate and preventing backflow of the blower. In principle, a clean room should be operated continuously to maintain cleanliness, but since it is uneconomical to run all the fans during non-work hours such as at night, some of the blowers are stopped and the air volume is reduced. It is desirable to make adjustments.

In this case, the structure shown in Fig. 11 may be maintained, but some blowers may be
If the machine stalls, air will flow backwards from the machine to the stopped blower, resulting in a large loss.If the motor that drives the blower is a single-phase motor, the motor will rotate in the opposite direction due to the backflow, so the next step is to run the full-air blower. If you do this, there is a serious possibility that the motor will not return to normal rotation.
There are drawbacks. In the modified example shown in FIG.
We have created Danhalo 3 to do this. During air blowing, the damper 63 is brought into the open state shown in FIG.
1) It becomes the open state shown in (1)) to prevent backflow of air.

1. If the opening angle of the tamper 63 is made smaller than the button 90° as shown in the same figure (a) K, the air blower (4, J
Even if the damper 63 is installed off-center, the damper 63
serves as a wind direction plate and can equalize the wind distribution within the chamber 26.

Next, an example of improving the connection end of the air conditioning air supply duct will be described. Q'r # What to say about Nonai's altitude control, as shown in Figure 18 VC, an air-conditioning air duct is installed at the fresh air inlet 15 provided separately from the return air intake 13 of the Hakujoya 11. 7 and connect all the pieces of equipment 66 to the blower 23.
It is best to perform carp air blowing into the open air 90. 67 is the air supply canopy i1+jl fIII damper, 68i is a fully-equipped cap air ventilation fan, and 69.70 is a ventilation fan door. However, in this monk's fJ structure, by opening and closing the air supply 1 city I;
At the same time as the 46 air volume changes to, the air volume 90 air I
(Because the return air from Ko13 also changes).

The pressure in the refilter 21 changes, and the pressure in the 11th and 2nd zones], 2b and 12a is constantly changing.
>There is a distribution.

Fluctuations in the inner force of the band 12a and 112b in this way will have a major negative impact on maintaining the band width at high 7 me + fi', so in the improvement example shown in No. 19,201, The air inlet 15 shown in FIG. 18 is removed, and the air conditioning air supply duct 7 is installed with the tip of the air conditioning air supply duct 7 slightly inserted into the inside of the flange 71j provided surrounding the return air inlet 18. In this way, as shown by the arrow in the figure, the air supply from the air conditioner 66 and the return air from the maintenance area 16 are sucked into the air inlet 13 through the blur filter 21 pipe. Even if the air pressure changes, the amount of air flowing through the pre-filter 21, including the amount of return air, remains constant. In this case, since the suction air hI of the pre-filter 21 is larger than that of the air conditioning supply cylinder, the entire amount of introduced air from the air conditioning system is sucked. With this improvement, it is possible to reduce pressure fluctuations in the 11te area 12a112b,
In addition, compared to the +14 structure shown in Fig. 18, since the air conditioning supply duct and the air chamber 90 are not rigidly connected, the duct (
Problems such as unbalanced dimensions of the i-connected parts are also reduced.

FIG. 21 shows a modified example of the Fushimei clean room. This hieroglyph 1
In +11, the internal wall of the τr4 cleaning room 11 does not have a built-in blower, but a main duct 73 is installed in the ceiling, and a small high-performance filter 24.25 is attached to the outlet of the main duct 73. A main blower 74 is installed outside and air is blown through the main duct 73. 1) If a suction duct 75 from the ceiling is installed and the main air blower 74 is connected to the main air blower 74, the surrounding area of the high-performance filters 24 and 25 can be It depends on keeping the pressure negative.This (1
According to the fourth generation, the main blower can be installed away from the Western-style room, so the noise 1: eL in the band 12a112b can be reduced. It is more efficient and saves energy than using multiple units. Also, there is no need to install an air supply duct for rough view 1 on the 1.1 side of the clean room.

FIG. 22 also shows another modification of the Kiyodai Shisho drink. In this modification, the clean room apparatus is unitized into one module, which allows connection and disconnection.

The casters 76 and 77 are meant to make it easier to move the car, but if it is not something that will be moved once in a while, the r
Only 4tn4 may be AKMed using another method. When unitizing in this way, the module size of the clean room equipment is also the same as that of the semiconductor manufacturing equipment, because the semiconductor manufacturing equipment in the chamber is often designed with the basic dimensions and the second dimension of the basic dimensions. If the dimensions are adjusted to the basic dimensions, the clean room can be connected and disconnected within λ1 when changing the layout of the production line, expanding, blocking, etc., which is convenient. In addition, by matching these dimensions, during maintenance of the 10-8 body production equipment,
Problems such as not being able to perform maintenance work from the conservation area due to pillars becoming obstacles are eliminated. Reference numeral 78 in the figure represents a unit connection hole as a coupling means. Insert a bolt into this hole)+
h to connect both unit songs.

As is clear from the above explanation, the unexploded "p" clean room equipment has a slight crack in the fff purification area and air conditioning target [main area] compared to the full down flow complete clean room, which has been considered the best method for semiconductor manufacturing. This has the effect of significantly reducing equipment costs. Also, since it has a unit configuration, it is easy to change the layout and add more units.

[Brief explanation of the drawing]

1 is a diagram showing a full-scale down flow complete clean room created by the prior art, (a) is a cutaway plan view, (L) is a side sectional view, and Figure 2 is a construction of a Western-style room equipment according to the present invention. 3 is a cross-sectional view perpendicular to the longitudinal direction showing an example of the configuration of the clean room apparatus of the present invention, and FIG. ji') showing evening view
The visual view, Figure 5, is incorrect! (Fig. 6, hJt plane view perpendicular to the longitudinal direction, showing an example of the structure of the purification device.
+'r # IJt 1 US + 1 Another configuration example with further improved performance, Nagatsuki-Ka 1' (1 Self-angular sectional view, Fig. 7 shows its external appearance; This is the invention of a kimono]
-Example 4 is a cross-sectional side view of a scrap, Figure 9 is a partial cutaway top 1ffli view showing a general example of a high-performance filter mounting structure, Figure 1O is a side view of the same cut, and Figure 11 is a 1% performance filter special edition. Fig. 12(a) is a partially cutaway front view showing improvement 1/1].
, (b), (c) are 1 iti cut U "side view, Fig. 13 (
(a) is a diagram without showing a general example of a diffuser plate and "Revised 1 highta 1".
(b) is a small diagram of the diffuser plate installed, (b) is the main diagram of the diffuser plate and reinforcing sash, (c) is the same diagram, (c) is the same diagram,
Diagonal light diagram of the diffuser plate of dl & Yo Kaiheki Shin 1 and the Ura-go plate, (e)
1 side] Figure 1, (f) and (g) are reinforcement plate installation 1
Details of 11$ 11() 1 side view and Figure 14 are diagrams showing an example of an improved diffuser plate mounting structure, (a) fd partially cut hemostasis diagram, (
b) is a partial diagram, (C) is a perspective view of the special edition of the bracket, and Figures 15 (a) and (b) are partially cut front views showing an example of an improved structure for the first fluorescent light diffused provisional inspection structure. Figure 16 shows the illumination lamp η
J 'f'J' +Iq structure A partial cutaway front view showing an example of improvement of the construction, FIG. (
b) l-j air blower ten? 131S cutaway front view on the hour, (
C) shows partial cut 11Vi (11i 1st view, 1st
Figure 8 is a cutaway front view of the air conditioning duct connection structure, Figure 19
The figure shows an example of improved air-conditioning duct connection structure.
FIG. 20 is a detailed view of the air conditioning duct connection part of the improved example shown in FIG.
b) and ((j) is a side view, Figure 21 is a diagram showing a modification of Sei H [chamber fitting brass, (a) is a cut hemostatic diagram, (bll
d is a partially cutaway side view, and FIG. 22 is a perspective view showing a modification of the second part of the Western-style room device 6. 1: Building, 9: Production line equipment, 10 piping, 1]
°7^ Cleaning value according to the present invention, 12 °seedlings' inside the cleaning room, 12
12b: The first section is the indoor passageway 1; 13: IJ turn air inlet; 14: Side Xi outlet; 15: Air supply for pregnancy control. Tact. Air inlet connected to J, 16: Conservation area, 17° pillar,
18゛柘東, 19: large plate, 20゛ side slope, 23: feeder, 24: first high performance filter, 25 second cylinder performance filter, 30.46: for partition 9 forming partition means Decorative board and partition board, 101: Clean air outlet for second zone,
102: First zone air outlet, 34 two-bed outlet, 262 first chamber, 95 second chamber, 27;
Straight tube illumination lamp, s9: A light cover, 78: Unit connection hole as coupling means, 61: Medical condition illumination case, 90 Air chamber, 96: Second chamber. ,;;) U, + [21 (a) 2nd [21 ('s qth figure to concave figure 11 figure $12 figure (θ) bud /3 [2+ (σl 3 <d+ (f+ boiling j4 mouth (θ ) Ne /77 (, θn rise 18 1ffi Fig. /9, $ 20 Fig. (o,) <b+ (c, (c11 阜 21 11)) (Z+ (l

Claims (1)

[Claims] 1. In a space covered by both side walls and a top plate, a first zone parallel to the both side walls, and a second zone smaller in height than the first zone. A high-performance filter is provided above the second zone with the clean air outlet facing downward, and a chamber is provided upstream of the high-performance filter. A blower is provided to make the pressure in the chamber higher than the pressure in the second zone, an outlet is provided below the space through which air in the zone flows out, and the both side walls, the chamber, The bacteria performance filter can be divided into units on the multi-machine side in a cross section perpendicular to the direction in which the first band extends, and further, the adjacent units are connected by a connecting means. room equipment. 2. The clean room apparatus according to claim 1, wherein each of the units is configured to be self-supporting.